Download - NanoFocus Applications
12.04.23 · Verfasser: Rouven Lenz · Workshop 20091
Gf gf
Optical Surface-Measurement Solutions
for Micro and Nano Range
12.04.23 · Verfasser: Rouven Lenz · Workshop 2009
Roughness
(Ra, Rz, Sa, Sz)
2D-Profile, 3D-Form Flatness
Co-planarityWear
Volume
Applications
2
12.04.23 · Verfasser: Rouven Lenz · Workshop 2009
Life Science
MEMS/MOEMS Tools Electronics
Automotive Optics
Typical Applications
3
12.04.23 · Verfasser: Rouven Lenz · Workshop 2009
Design Intent of Engineered Surface: • Reduce engine wear• High Efficiency (Oil and Fuel Consuption)
AluSil® Surface after acid etchHoned Surfaceµsurf®, 320 X 320 X 1 µm µsurf®, 320 X 320 X 1 µm
Application: Engine Cylinder Surface
4
12.04.23 · Verfasser: Rouven Lenz · Workshop 2009
3D-Measurement with Extracted Profile
Resistence Paste printed on Ceramic Substrte
•Thickness, Width• Warpage• Roughness• Process Control SPC
Application: Hybrid Boards
5
12.04.23 · Verfasser: Rouven Lenz · Workshop 2009
Geometry measurement of Fresnel lens
Application: Optics
6
Glass surfaces with steep flanks
12.04.23 · Verfasser: Rouven Lenz · Workshop 2009
Application examples:
- Tool blades
- membranes, films, wires
Cutting edge of a razor blade
Motivation: Acquisition of steep slopes(because of the limitation of aperture)
7
Application: Tools
12.04.23 · Verfasser: Rouven Lenz · Workshop 2009
3D geometry and roughness on steep edges
8
Application: Tools
12.04.23 · Verfasser: Rouven Lenz · Workshop 2009
High aspect ratio Steep Edges
Pressure sensors
Modulator
9
Application: MEMS/MOEMS
12.04.23 · Verfasser: Rouven Lenz · Workshop 2009
Medical Device
Safety Print Woodworking
Building Material Solar
Application Trends
11
12.04.23 · Verfasser: Rouven Lenz · Workshop 2009
Application Trend: Building materials
ISO 25178Height ParametersSp 1.16 mm Maximum Peak Height of the SurfaceSv 2.69 mm Maximum Valley Depth of the SurfaceSz 3.85 mm Maximum Height of the SurfaceSa 0.454 mm Arithmetic Mean Height of Surface
12
Extremely rough Surfaces with high dynamic reflectivity
12.04.23 · Verfasser: Rouven Lenz · Workshop 2009
PrintMaster analysis Treshold for reference
Laser engraved surface
Application Trend: Print
13
12.04.23 · Verfasser: Rouven Lenz · Workshop 2009
Roughness measurement conform to DIN EN ISO (Stitching)
0.0 2000.0 4000.0 6000.0 8000.0 10000.0[µm]
4.00 µm
-24.00
-16.00
-8.00
0.00
8.00
16.00
[µm]
Nanofocus AG
RoughnessWavyness
ra=3.75µm
Application Trend: Print
14
12.04.23 · Verfasser: Rouven Lenz · Workshop 2009
Forensic analyses (BKA, FBI etc.)
Crime tools
Bullets
Application Trend: Safety
100% match needed for legal evidences
15
12.04.23 · Verfasser: Rouven Lenz · Workshop 2009
Application Trend: Safety
16
12.04.23 · Verfasser: Rouven Lenz · Workshop 2009
Application Trend: Medical
Laser surgery
Measurement of abrasion behavior through height and
volume measurements
17
12.04.23 · Verfasser: Rouven Lenz · Workshop 2009
Height DataMicroscopy Image
Surfaces for blood transport
Application Trend: Medical
18
12.04.23 · Verfasser: Rouven Lenz · Workshop 2009
20
10
µm
30
0
µm
Coating Thickness
Topography
0,3 mm
Simultaneous measurement of 3D roughness and layer
thickness
Application Trend: Medical
21
12.04.23 · Verfasser: Rouven Lenz · Workshop 2009
Position X
Höhe
Reflexion
Application Trend: Medical
Layer thickness measurement on a stent
22
12.04.23 · Verfasser: Rouven Lenz · Workshop 2009
Application Trend: Medical
Joint implants
Automatic detection of defects, particles and
isotropy
23
12.04.23 · Verfasser: Rouven Lenz · Workshop 2009
Dental implant
Latest 2d and 3D ISO parameters
Application Trend: Medical
25
12.04.23 · Verfasser: Rouven Lenz · Workshop 2009
Mono and multi cristalline solar cells
26
Application Trend: Solar
12.04.23 · Verfasser: Rouven Lenz · Workshop 2009
Number of grains: 36Total area occupied by the grains: 611 µm2 (0.87 %)Density of grains: 0.000513 grains / µm2.
Area = 17 µm2 +/- 14 µm2Mean diameter = 4829 nm +/- 1773 nm
Defect analysis
Automated detection of holes and particles
28
Application Trend: Solar
12.04.23 · Verfasser: Rouven Lenz · Workshop 2009
0 25 50 75 100 125 150 175 200 225 250 275 300 µm
µm
-2
-1.5
-1
-0.5
0
0.5
L R
1
Maximum height 1.31 µm
Mean height 1.21 µm
Width 43.2 µm
Extracted profi le
Laser scribes on molybdenum
Quality control of laser trenches
29
Application Trend: Solar