Integrating Micro Nano Technology

James Wylde, PhD

Applications Engineer

Micro Nano Breakthrough ConferenceJuly 27, 2005

Outline

• Introduce Zyvex

• Government & University Collaborations

• Nanotechnology

• Microtechnology

• NanoKids

Corporate Overview

• Privately held company founded in 1997

• Located in Richardson, Texas (near Dallas)

• 20 Products

• 5 active government grants

• Aggressive IP strategy - 18 issued patents, 46 in process

• Headcount: 60 and increasing— 15 Ph.D.s, 7 M.S.

— 33 Engineers, scientists, technical management

• 44,000 sq. ft. facility

• Equipment: SEMs (with nano-manipulators), TEM, AFM, SPM, UHV STM, MEMS motion analyzer, MEMS probing station

Science Technology Development

Molecularly

Precise

Manufacturing

Molecular

Assembler

Molecular

Devices &

Materials

Molecular

Manipulation

Nanotube

Dispersion

Control &

Automation

Patterned

Atomic Layer

Epitaxy Nanotube

Super

Fibers

Molecularly

Precise

Tips

Mechano

Chemistry

Molecular

Binding

Sites

Potential

Products

Control &

Automation

MEMS

Devices

MEMS

Design

Tools

MEMS

Assembler

MEMS

Parallel

Assembler

Nano

Assembler

Nano

Fabrication

Process

NIST-ATP

Nano-

manipulator

Nano

Parallel

Assembler

1998 2000 2002 2004 2006 2008 20122010

Top Down

Bottom Up

Government Programs

NIST-ATP, Five-year (Oct 2001-Dec2006),

$25M research award

Title: Assemblers for Nanotechnology

Applications and Manufacturing: Enabling the

Nanotechnology Era

Zyvex and partners will develop low-cost,

computer controlled, microscale assemblers

that operate in parallel to assemble three-

dimensional, microscale components.

Team consists of Honeywell as our Joint

Venture Partner; University of Texas at

Dallas, and University of Virginia as sub-

contractors.

Nanomanipulator Systems

• 3-Dimensional control

• Illuminated keypad

• Control software runs on Windows

Nanomanipulator Systems

• Install in an Scanning Electron Microscope, Focused Ion Beam System, or Optical Microscope

• Collaboration with UTD to add life science capability

• Assembly by TSTC interns

Integrated Circuit Probing

Silicon Microgrippers

• Actuation ~ 14 μm

• In-Plane per Arm:

• Gripper Stiffness ~ 400 μN/μm

• Gripping Force ~ 5.6 mN

• Mechanical Potential~3.9e-8 J

• Allowable Deflection ~ 20 μm

• Out-of-Plane per Arm:

• Gripper Stiffness ~ 450 μN/μm

• Allowable Deflection ~ 15 μm

Assembled Systems

Examples:

• Miniature SEM

column

• Variable optical

attenuator

• Variable inductor

• Linear micromotor

• MechTiles™

TEM Coupon Lift-Out

Core Competence - Functionalizing

• Two distinct functions:

— Non-damaging binding

— Customizable

• Binding applicable to CNMs (SWNTs, MWNTs, CNFs)

• Functionality may be customized for different applications:

— Dispersion in solvents

— Adhesion to composites

— Other chemical functionalityFunctionalization

technology

CNT Manipulation

Attaching a

CNT to a

MEMS

Actuator

Nano-Wire Electrical Probing

Mechanical Resonance

Life Sciences: Collagen Fiber

Loose collagen pulled taut by the nanomanipulator using a MEMS gripper and Tungsten probe as end-effectors. The collagen is

grasped by the probe from the left and is super glued to the probe on the right. Both end effectors are free to move to apply the

tension. This fiber snapped at the kink shown in the bottom left image.

For more information:

t: 972.235.7881 ext. 226

e: jwylde@zyvex.com

www.zyvex.com