dip-pen nanolithography
DESCRIPTION
Dip-pen Nanolithography. Yu Shi Dept. of Materials Science & Engineering. From microscopy to lithography. Scanning probe microscope. electron microscope. optical microscope. ?. photolithography. E-beam lithography. 10 -5 m. 10 -6 m. 10 -7 m. 10 -8 m. 10 -9 m. 10 -10 m. 10 -11 m. - PowerPoint PPT PresentationTRANSCRIPT
Yu ShiDept. of Materials Science & Engineering
10-6m 10-7m 10-8m 10-9m 10-10m10-5m 10-11m
optical microscope
electron microscope
Scanning probe microscope
photolithography
E-beam lithography
If you can see, then you should be able to write…
4,000 years ago… Invention of AFM in 1986…
1995 by Jaschke & Butt…
1999…
Butt et al. Langmuir 11, 1061 (1995).Mirkin et al. Science 283, 661 (1999).
Source: http://www.nanoink.net
Mirkin et al. Science 283, 661 (1999).
Mirkin et al. Nature Nanotechnology 2, 145 (2007).
Mirkin et al. Nature Nanotechnology 2, 145 (2007).
55,000 cantilevers and 88,000,000 gold dots!
Source: http://www.nanoink.net
Q & A…
“DPN is finding applications in certain areas that impact the semiconductor industry such as mask fabrication, inspection and repair…”
“…However, its unique attributes have positioned it on a different path aimed largely at exploiting the properties and applications of nanopatterned soft materials…”
-- C. A. Mirkin (2007)Mirkin et al. Nature Nanotechnology 2, 145 (2007).