design & production of silicon sensors for phenix mpc -ex
DESCRIPTION
Design & production of silicon sensors for phenix mpc -ex. Jiman Ha (Yonsei Univ.) For PHENIX MPC-EX collaboration. MPC-EX. 참여그룹 국외 : Brookhaven Nation Laboratory, Iowa State University, University of California-Riverside, Los Alamos National Laboratory - PowerPoint PPT PresentationTRANSCRIPT
![Page 1: Design & production of silicon sensors for phenix mpc -ex](https://reader035.vdocuments.mx/reader035/viewer/2022062315/56814d9f550346895dbafa01/html5/thumbnails/1.jpg)
Jiman Ha(Yonsei Univ.)
For PHENIX MPC-EX collaboration
DESIGN & PRODUCTION OF SILICON SEN-SORS FOR PHENIX MPC-EX
![Page 2: Design & production of silicon sensors for phenix mpc -ex](https://reader035.vdocuments.mx/reader035/viewer/2022062315/56814d9f550346895dbafa01/html5/thumbnails/2.jpg)
MPC-EX • 참여그룹
• 국외 : Brookhaven Nation Laboratory, Iowa State University, University of Califor-nia-Riverside, Los Alamos National Laboratory
• 국내 : Yonsei University, ETRI, Ewha Womens University, Hanyang University, Chonbuk National University
• 발표관련 기여• Sensor design : BNL, Yonsei & ETRI
• Sensor production : Yonsei & ETRI
• Sensor test : Yonsei, Ewha Womens University
![Page 3: Design & production of silicon sensors for phenix mpc -ex](https://reader035.vdocuments.mx/reader035/viewer/2022062315/56814d9f550346895dbafa01/html5/thumbnails/3.jpg)
MPC-EX FOR PHENIX• Application as a pre-shower for EMCal (Electromagnetic calorime-
ter)
![Page 4: Design & production of silicon sensors for phenix mpc -ex](https://reader035.vdocuments.mx/reader035/viewer/2022062315/56814d9f550346895dbafa01/html5/thumbnails/4.jpg)
SEG0 SEG1 SEG2
y
z
PAD STRIP W
-RM<y<R
M
Electromagnetic Shower (A schematic view)
(EM Shower by single e)
~1X0 x 20
![Page 5: Design & production of silicon sensors for phenix mpc -ex](https://reader035.vdocuments.mx/reader035/viewer/2022062315/56814d9f550346895dbafa01/html5/thumbnails/5.jpg)
Sensor Design
![Page 6: Design & production of silicon sensors for phenix mpc -ex](https://reader035.vdocuments.mx/reader035/viewer/2022062315/56814d9f550346895dbafa01/html5/thumbnails/6.jpg)
SENSOR GEOMETRY
# of PAD column =32
# of PAD row =4
Total # of PADs = 128
6.2 cm6.
2 cm
0.18cm
1.5cm
![Page 7: Design & production of silicon sensors for phenix mpc -ex](https://reader035.vdocuments.mx/reader035/viewer/2022062315/56814d9f550346895dbafa01/html5/thumbnails/7.jpg)
SOME DESIGN DETAILS
PADs of Sensor
Bonding PADsBiased/Floating
Guardring
Floating Guardring(3 layer structure)
Edge Rounding
![Page 8: Design & production of silicon sensors for phenix mpc -ex](https://reader035.vdocuments.mx/reader035/viewer/2022062315/56814d9f550346895dbafa01/html5/thumbnails/8.jpg)
MASK DESIGN OF SILICON SENSOR
![Page 9: Design & production of silicon sensors for phenix mpc -ex](https://reader035.vdocuments.mx/reader035/viewer/2022062315/56814d9f550346895dbafa01/html5/thumbnails/9.jpg)
Production Mask
![Page 10: Design & production of silicon sensors for phenix mpc -ex](https://reader035.vdocuments.mx/reader035/viewer/2022062315/56814d9f550346895dbafa01/html5/thumbnails/10.jpg)
HOW DO WE MAKE IT? (CMOS PROCESS)
High purity Si waferOxidationIon implantOxide layer depositionEtch for contactMetal layer depositionPassivation
![Page 11: Design & production of silicon sensors for phenix mpc -ex](https://reader035.vdocuments.mx/reader035/viewer/2022062315/56814d9f550346895dbafa01/html5/thumbnails/11.jpg)
![Page 12: Design & production of silicon sensors for phenix mpc -ex](https://reader035.vdocuments.mx/reader035/viewer/2022062315/56814d9f550346895dbafa01/html5/thumbnails/12.jpg)
Simulations
![Page 13: Design & production of silicon sensors for phenix mpc -ex](https://reader035.vdocuments.mx/reader035/viewer/2022062315/56814d9f550346895dbafa01/html5/thumbnails/13.jpg)
CAPACITANCE–VOLTAGE RELATION• Wafer – Resistivity = 6, 9, 12, 18kΩ∙cm / Thickness = 405μm, Orientation = <100>
• Full Depletion Voltage = 90V(6kΩ∙cm),60V(9kΩ∙cm),45V(12kΩ∙cm),30V(18kΩ∙cm )
Full Depletion
Bias Voltage (V)
𝐴=𝜋 𝑟22/1 C
![Page 14: Design & production of silicon sensors for phenix mpc -ex](https://reader035.vdocuments.mx/reader035/viewer/2022062315/56814d9f550346895dbafa01/html5/thumbnails/14.jpg)
CURRENT-VOLTAGE RELATION (ONGOING WORK)
Leakage current abruptly rise!
No Break-down !
Leakage cur-rent flows from no bias guardring
Full Depletion
• No breakdown upto 200V but somewhat large leakage current
![Page 15: Design & production of silicon sensors for phenix mpc -ex](https://reader035.vdocuments.mx/reader035/viewer/2022062315/56814d9f550346895dbafa01/html5/thumbnails/15.jpg)
CURRENT-VOLTAGE RELATION (ONGOING WORK)
Full DepletionNo Break-down !
.
• No breakdown upto 200V and reduced leakage current
![Page 16: Design & production of silicon sensors for phenix mpc -ex](https://reader035.vdocuments.mx/reader035/viewer/2022062315/56814d9f550346895dbafa01/html5/thumbnails/16.jpg)
Fabrication Monitoring
![Page 17: Design & production of silicon sensors for phenix mpc -ex](https://reader035.vdocuments.mx/reader035/viewer/2022062315/56814d9f550346895dbafa01/html5/thumbnails/17.jpg)
ALIGNMENT
![Page 18: Design & production of silicon sensors for phenix mpc -ex](https://reader035.vdocuments.mx/reader035/viewer/2022062315/56814d9f550346895dbafa01/html5/thumbnails/18.jpg)
ALIGNMENT
![Page 19: Design & production of silicon sensors for phenix mpc -ex](https://reader035.vdocuments.mx/reader035/viewer/2022062315/56814d9f550346895dbafa01/html5/thumbnails/19.jpg)
완성된 WAFER 사진
![Page 20: Design & production of silicon sensors for phenix mpc -ex](https://reader035.vdocuments.mx/reader035/viewer/2022062315/56814d9f550346895dbafa01/html5/thumbnails/20.jpg)
SUMMARY
• MPC-EX is a pre-shower detector in Si/W sandwich structure.
• We designed and fabricated a prototype of the relevant Si sensor.