delayering copper devices with ultrapol advance
DESCRIPTION
Delayering Copper Devices with ULTRAPOL AdvanceTRANSCRIPT
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ULTRAPOLFLAT POLISHING MACHINE
Delayering of Copper IC devicesDelayering of Copper IC devices
advaadvancence
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ULTRAPOLFLAT POLISHING MACHINE
Delayering of Copper IC devicesDelayering of Copper IC devices
advaadvancence
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Flat Polishing Machine ULTRAPOLadvaadva
ncence
Front Panel Access to All Parameters
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ULTRAPOLadvaadvancence
System offers ULTRA TEC’s signature ‘Quick Release’ Sample holder Cam-lock design and precise two circle angular adjustment. Precise Pressure Control is shown
Fine Pressure Control
Coarse Pressure Control
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ULTRAPOLadvaadvancence
Fast Amplitude Setting (Think ASAP-1 Analog system!)
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ULTRAPOLadvaadvancence
Fluid can run to drain or be recirculated, dependent on the process. The drip tray is removable for fast,
effective clean-up.
Faucet (plumbed in) Recirculating Pump
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ULTRAPOLadvaadvancence
A Choice of Polishing Pads and Films are available, in stock, to achieve Best Known
Techniques for all sample types
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ULTRAPOLadvaadvancenceAngular Alignment with Angular Alignment with
ULTRACOLLIMATORULTRACOLLIMATOR
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ULTRAPOLadvaadvancence
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ULTRAPOLadvaadvancenceAngular
Alignment
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ULTRAPOLadvaadvancence
Optically-enhanced Single Die ‘Stub’ holders (JEOL shown above) allow for convenient,
rapid transfer to a wide range of SEM’s, FIB’s
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PROCESS CONDITIONS PROCESS CONDITIONS
ULTRAPOLadvaadvancence
Sample Type: Cu Technology Bare DieStage Oscillation: 1Head Rotation Speed: 1Sample Load: 100g
Polishing Pad Type: Fiberpad (black)Lap Rotation Speed: 50 rpm
Abrasive Media: Blue Colloidal Silica
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ULTRAPOLadvaadvancence
Customer images taken by JEOL tungsten SEM (JEOL 6610LV). The images were taken on a single die sample
and show Cu metal structure after delayering
Mag= 500x
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ULTRAPOLadvaadvancence
Customer images taken by JEOL tungsten SEM (JEOL 6610LV). The images were taken on a
single die sample and show Cu metal structure after delayering
Mag= 2000x
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ULTRAPOLadvaadvancence
Further Close-up of Customer images showing Cu metal structure after delayering on ULTRAPOL
Advance
Mag= ~4000x
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ULTRAPOLadvaadvancence
Each Advance System is shipped with a case containing weights, holders and useful
accessories
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ULTRAPOLadvaadvancence
For less demanding, or lower specification requirements, ULTRAPOL Advance is also available
without the ULTRACOLLIMATOR. Supplied mechanical
gauges are used to calibrate the system.
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ULTRAPOLadvaadvancence
ULTRA TEC offers the widest range of sample holders
for precision polishing
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ULTRAPOLadvaadvancence
The Hot Plate Transfer Fixture provides a safe & convenient way to work with heated sample holders
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ICisICis
Also Available for the Sample Preparation Lab Toolkit…
Materials Inspection SystemMaterials Inspection System
ULTRAPOL Advance ASAP-1® IPS
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ICisICis Materials Inspection SystemMaterials Inspection System
ICis offers 3 imaging modes – NIR (for backside prep), Visible (for planar polish / x-sections) and UV (for maximum surface definition).
Full range of specialist objective lenses available.
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ICisICis Materials Inspection SystemMaterials Inspection System
Illumination SourcesIllumination Sources
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ICisICis Materials Inspection SystemMaterials Inspection System
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ICisICis Materials Inspection SystemMaterials Inspection System
Backside (NIR) Imaging
Integrated algorithms enables stage motion positioning and direct readout of remaining Silicon Thickness. Windows 7 Version
now shipping.
Si Thickness Here
ICis Software is powered by FA Instruments
ULTRASPEC-III
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SUMMARYULTRAPOL Advance enables…
Improved Parallel Polish / De-processLive ULTRACOLLIMATOR ModeFast, convenient and /accurate angular adjustment TO THE DIEFloating Head Control for unsurpassed polishing qualityThe Widest Range of Sample Holders
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SUMMARYULTRA TEC provides…
Global Sales & Product SupportIn-stock Consumable products Application Knowledge Base In-house Design, Manufacture & TestOn-site Installation & TrainingApplications Lab for Product & process developmentMarket-leading customer portfolio
We look forward to working with you!
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ULTRAPOL forms part of ULTRA TEC’sULTRAPOL forms part of ULTRA TEC’s
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More Information More Information at:at:
www.ultratecusa.comwww.ultratecusa.com
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ULTRAPOLFLAT POLISHING MACHINE
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