cryopump 48 tm1200i · 2019. 9. 24. · 2111 builders place | columbus oh 43204 | t: (614) 486 4750...
TRANSCRIPT
© 2016 PHPK Technologies
2111 Builders Place | Columbus OH 43204 | t: (614) 486 4750 | f: (614) 486 4950 | [email protected]
Specifications
Cooldown Time
255 min to 20K
Pumping Speed
75,00 Liters/sec.
33,000 Liters/sec.
750,000 Liters/sec.
35,000 Liters/sec
Type
N2
H2
H2O
Xe
Capacity at 1×10-6 Torr
30 std Liters
N2 Consumption
(GPH) 7-12
More pumping power, smaller penetration.
It used to be that in order to get the pumping speed of a 48" cryopump, you had to cut a 48" mounting hole in the vacuum chamber. On smaller chambers, the external mounting of the pump on a large flange was often difficult and could present structural problems.
PHPK offers an improved configuration, a high speed cryopump that requires only a 10” penetration for the system flange. The entire cryopanel assembly installs inside the chamber, and it is connected through the small flange opening to the externally mounted refrigeration and drive unit.
The PHPK two-piece internal design is not only easier to install, but can also deliver up to 30% higher pumping speeds than standard external models. Typical performance specifications are shown below.
Cryopump 48" TM1200i
TM1200i
© 2016 PHPK Technologies
2111 Builders Place | Columbus OH 43204 | t: (614) 486 4750 | f: (614) 486 4950 | [email protected]
Model TM1200i Internal Cryopump vertically mounted on 8 ft. min. dia. cylidrical section
Cryopump 48" TM1200i
2 9/16"
22 1/2"45"
8 11/16"
6"
36 3/8"
7/8" MIN
10"
53"
20"
2 9/16"
2 9/16"
44"
CVI REFRIGERATORMODEL No. CGR511
TEMPERATURE SENSORFEED THRU (6 PIN)
LOW PRESSUREHELIUM RETURN
HIGH PRESSUREHELIUM SUPPLY
FROMCOMPRESSOR
RECTANGULARSHROUD
8'-0" IDCHAMBER
MIN
10" ANSI CL 150MOUNTING FLANGEFLAT FACE w/32RMS FIN
SUPPORTSTRUCTURE
15K CRYOPUMP ARRAY
ACCESS DOOR
LN2 INLET1/2" FNPT
LN2 OUTLET1/2" FNPT