company introduction and history - eetmizsei/montech/semilab.pdf · hungary 63% germany 1% china...

Company Introduction and

History

Semilab Semiconductor Physics Laboratory Co. Ltd.

2/2/2016

www.semilab.com

Outline

• Basic Facts about

Semilab

• Semilab Worldwide

• History

• Company acquisitions

• Technology purchases

• Semilab Staff

• Current portfolio

Company Introduction and History

2/2/2016 2

www.semilab.com

Basic Facts about Semilab

Main activity: Development, manufacturing and marketing of metrology equipment for the semiconductor and photovoltaic industries.

• Laboratory, office and manufacturing space:

11,000 m2, about 3,000 m2 in the US

• Over 400 employees worldwide

• 51 physicists employed worldwide

• 18 employees holding a Ph. D. in physics (7 in

Hungary)

• Patents: wholly owned – 90, applications – 8,

lincensed – 41

• ~400 tools with automated wafer handling

installed in semiconductor production

• 130 tools in 300mm fabs

• 34 different product lines, 110 products with

various configurable options


2/2/2016 3

www.semilab.com

History of the Semilab Group


2/2/2016 4

1990: Founded by researchers as a spin-off from the Research Institute for Technical Physics of the Hungarian Academy of Sciences

2004-2010: Photovoltaic area

• 90 % annual growth (industry growth ~40 %)

• Dominant player in front-end electrical metrology

2004-2014: Semiconductor area

• Growth by company and technology acquisitions

• 5th biggest pure-play metrology company

• Building significant customer base in FPD industry

www.semilab.com

Japan, TokyoUSA, Boston

USA, San

Jose

USA, Tampa

China, Shanghai , Wuxi

Singapore

Korea, Seoul

Budapest

(HQ)

Denmark,

Copenhagen

Germany,

Braunschweig

France, Grenoble

Taiwan, Hsinchu

Semilab around the World


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Headquarters

R&D and product

Center

Sales & Service

www.semilab.com

Global Corporate Organization


2/2/2016 6

Semilab HQBudapest

Semilab USABillerica, MA

Semilab AMSBillerica, MA

Semilab SDITampa, FL

Semilab JapanShin-

Yokohama

Semilab KoreaSeoul

Semilab ChinaShanghai

Semilab ChinaWuxi

Semilab TaiwanHsinchu

Semilab South-East

Asia

Semilab European Customer support

Semilab Germany

Semilab Denmark

www.semilab.com

Semilab Staff


2/2/2016 7

PhD5.8%

PhDstudents

2.6%

University/College

without PhD (s)63.1%

Other28.5%

Qualifications

Hungary63%

Germany1%

China

10%

Japan6%

Singapore

1%

France1%

USA12%

Korea4%

Taiwan

2%

Semilab Worldwide

18 22 23 28 37 47 6190

170

234

392

443

381

331 350

408

1998 2000 2002 2004 2006 2008 2010 2012 2014

Semilab Employees Worldwide

www.semilab.com

History of the Semilab Group


2/2/2016 8

Established:

1990

Acquired:

2004

Acquired: 2008

Acquired:

2008

Acquired: 2008

USA,

formerly formerly

Acquired: 2015

www.semilab.com

Technology Acquisitions in the Semiconductor Sector


2/2/2016 9

Junction Photo-Voltage

measurement for ion

implant characterization

from IBM

Photo-Modulated

Reflectivity measurement

for ion implant

characterization from

Applied Materials

www.semilab.com

Technology Acquisitions in the PV Sector


2/2/2016 10

Microcrack inspection

technology from Basler AG

Visual wafer inspection

technology from Tordivel

Solar

www.semilab.com

Applications for the Semiconductor Industry: Wafer

Makers


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Ingot Resistivity

testing

Contamination monitoring W

afe

r Contamination and defect monitoring by non-destructive methods

High-sensitivity contamination analysis

Bulk microdefect characterization

Epi la

yer Contamination

monitoring

Resistivity monitoring

Resistivity profiling

www.semilab.com

Applications for the Semiconductor Industry: Device

Makers


2/2/2016 12

Inco

min

g w

afe

r Electrical quality control by carrier lifetime and carrier diffusion length

Ion

im

pla

nt Dose

monitoring before anneal

Sheet resistancemeasurementafter anneal

Junction depth measurement

Gate

die

lectr

ic Optical thickness measurement

Qualification of electrical properties (by contact and non-contact methods)

Po

rou

s d

iele

ctr

ic Optical thickness measurement

Porosity measurement

Qualification of electrical properties (by contact and non-contact methods) M

eta

l la

ye

r, 3

D s

tru

ctu

res Non-contact

thickness measurement

Non-contactdetermination of mechanicalproperties

Bonded waferinspection (forvoids and alignment)

www.semilab.com

Products for the Semiconductor Industry• Most metrologies available in different platforms

for different customer needs

• Lab-scale R&D and small-scale productioncontrol

• Automated up to 200mm for Tier 2 fabs

• Automated up to 300mm without OHT formid-range fabs

• Full 300mm automation with OHT and factory integration for Tier 1 customers

• 450mm tools already shipped: Wafer Testerfor bulk Si qualification by carrier lifetimeand diffusion length, Laser Ellipsometer

• High-end tools are meeting all advanced fabcleanliness standards, including integrated minienvironments.

• Key applications to control critical parameters inproduction:

• Contamination and damage monitoring

• Monitoring key steps: implants, dielectriclayers, metallization layers, etchedstructures


2/2/2016 13

www.semilab.com

Products for Wafer Makers


2/2/2016 14

Semilab Metrologies

Destructive

BMD Characterization

LST productline (2)

ContaminationAnalysis

DLS productline (2)

Epi Profiling

SRP productline (2)

Non-destructive

Nanotopology

AFM productline (5)

Bulk stressmeasurement

PSI productline (4)

ContaminationMonitoring

WT productline (5)

FAaSTproduct line

(4)

PLS productline (4)

Epi thicknessmeasurement

EIR productline (4)

ResistivityMonitoring

Bulk

WT productline (5)

Epi

MCV productline (5)

ACV productline (3)

QC productline (3)

Available from manually

loaded lab platform to

300mm automated platform

Available from ≤200mm

automated to 300mm

automated platform

For wafer makers, we offer 12

product lines, 43 products.

www.semilab.com

Products for Semiconductor Device Manufacturing


2/2/2016 15

Semilab Metrologies

Contaminationmonitoring

WT productline (5)

FAaSTproduct line

(4)

PLS productline (4)

Epi layers

SiGe / GaNcharacterization

SEIR product line

(3)

Ramanproduct line

(3)

SPL productline (4)

Ion implant

Photo-modulatedreflectivity

PMR productline (3)

Sheet resistance

control

JPV productline (5)

Dielectrics

Opticalthickness

SE productline (5)

Porosity

PS productline (4)

Electricalproperties

Hg CV characterizat

ion

MCV productline (5)

Non-contactCV

FAaSTproduct line

(4)

Elastic metal CV

FCV productline (3)

3D structures

True 3D structures

MBIR product line

(3)

Void and alignment

control

AIR productline (3)

Metallization

SAW product line

(3)

Available from manually

loaded lab platform to

300mm automated platform

Available from ≤200mm

automated to 300mm

automated platform

For semiconductor device makers,

we offer an additional 11 product

lines wit 44 products.

www.semilab.com

Products for the Photovoltaic Industry


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• Handheld tools for quick testing

• Table-top tools for high resolution wafer mapping

• In-line tools for integration with a fully automated product line

• Key applications to control criticalparameters:

• Contamination monitoring

• Resistivity and sheet resistancemeasurements

• Visual inspection

• Geometry

• Surface

• Microcracks

• Photoluminescence imaging

• Efficiency measurements

Contaminated

Not contaminated

www.semilab.com

Products for the Photovoltaic Industry


2/2/2016 17

Semilab Metrologies

Offline and labtools

WT product line (5)


Resistivitymeasurement

Sheet resistancemeasurement

LBIC measurement

PV-2000 (1)


Resistivitymeasurement

Sheet resistancemeasurement

LBIC measurement

ALID measurement

Dielectriccharacterization

PLI product line (4)

IRB product line (2)

Inline tools


WxL product line (5)


Thickness and resistivity

WxT product line (5)

Sheet resistance

CxS product line (5)

Wafer sorting

PVS product line

Contamination monitoring

Thickness and resistivity

Surfaceinspection

Shape inspection

Edgequalification



For the photovoltaic

industry, we offer 7 product

lines with 23 products and a

large number of metrology

options.

www.semilab.com

Incoming wafer

inspection

Chemical saw damage

etching

P diffusion, P glass

removal

Silicon nitride ARC

Back side printing,

Front side printing

Testing

Feedstock

CZ GrowingCastingRibbon pulling

Ingot, Block, Ribbon

Sawing, Etching, Polishing

Wafer

Applications for the Photovoltaic Industry


2/2/2016 18

p/n type

bulk resistivity

Off-line inspection

carrier lifetime

bulk resistivity

In-line inspection

carrier lifetime

bulk resistivity,

defect detection

Off-line inspection

carrier lifetime, thickness,

TTV, bulk resistivity,

wafer sorting

In-line inspection

carrier lifetime

thickness, TTV

bulk resistivity

Off-line inspection

carrier lifetime

thickness, TTV

bulk resistivity, visual inspection

In-line inspection

emitter

sheet resistance

carrier lifetime

Off-line inspection

LBIC+reflectance

IQE

Off-line inspection

emitter

sheet resistance

carrier lifetime

In-line inspection

carrier lifetime

Interface recomb. velocity,

coating thickness

Off-line inspection

carrier lifetime

Interface recomb. velocity,

coating thickness

In-line inspection

Comprehensive, fully in-line process control for the c-Si PV manufacturing process.

www.semilab.com

Fully Automated In-line Metrology Systems for PV

Production


2/2/2016 19

Wafer

loading

from

stack or

cassette

Wafer

unloading to

stacks

Testing and classification:

•Electrical testing (carrier

lifetime, resistivity)

•Visual inspection

(geometry, edge, surface,

microcracks)

•Photoluminescence

imaging

www.semilab.com

Products for the Flat Panel Industry

• Optical and electrical characterization of

state-of-the-art thin layers

• From table-top R&D tools to fully

automated systems capable of automatic

operation up to Gen. 8. glass panels


2/2/2016 20

www.semilab.com

Products for Flat Panel Industry

• Electrical and optical characterization can be combined

• Various options available

• Line mura detection (ELA process characterization)

• Spectral reflectometry

• Imaging spectroscopic reflectometry for halftone process monitoring

• Sheet resistance measurement

• Contact angle measurement

• Full sheet stress measurement


2/2/2016 21

FPT product line

OpticalCharacterization

SE option

IRSE option

ElectricalCharacterization

Mobilitymeasurement

www.semilab.com

Thank you!


2/2/2016 22

For All Your Metrology Needs

company introduction and history - eetmizsei/montech/semilab.pdf · hungary 63% germany 1% china...

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