National Central University

CMS Pre-Shower Statusat NCU

• Status of Silicon Production

• Bonding Stage

• Plans

A.C. Chen, Y.H. Chang, Apollo Go, W.T. Lin + 3 full time R.A.s+

5 engineers from ERSO and Miracle Tech. Co.

National Central University

Summary of IV/CV testsSummary of IV/CV tests Date batch# depth of n+ majority I@V>Vfd

6/5 cms01 14 m 50-150 nA/strip

6/5 cms02 50-150 nA/strip

6/15 cms03 5 m 100-150 nA/strip

6/18 cms04 50-100 nA/strip

6/18 cms05 3 m 250-350 nA/strip

6/15 cms06 300-400 nA/strip

• More than one strip have high leakage current that sensor can not be accepted.• 20 accepted sensors : 17 from 03 and 04, 3 from 01 and 02• 23oC, Cstrip=38 - 42 pF, Vfd= 80 - 120 V

National Central University

National Central University

Measurement of Wafers

• Thickness of wafer 325 m

• Al : 2 m, oxide 1.5 m

• p+ 4.7 m, n+ 5 m

passivationaluminum

Oxide

p+n+

10x10 m2 window

National Central University

Depth (m)4.7

National Central University

Depth (m)5

National Central University

2nd layer Thermal oxide 1 m + PECVD field oxide 0.5 m 3rd layer Aluminum 2 m4th and 5th PECVD Oxide and Nitride 0.5 and 0.7 m

National Central University

Status of Silicon Production

• 4 batches of silicon wafers were delivered.

• Starting from batch 51, size of window was changed to 10x10m2 instead of 300x400m2

Batch number 10024 10040 10051 10060

Delivered cycle

7/25

32 days

9/17

30 days

10/24

37 days

11/23

10 days

Wafers in/out 12/11 10/10 10/10 24/23

National Central University

IV measured at 25oC, 63% of humidity

National Central University

Bonding Stage• New micro-stage has been installed and tested.

National Central University

Plans

• ERSO and Miracle engineers are trying to improve the yield. If the yield is higher then 30%, then ERSO will start mass production.

• Plan to deliver all the 1,200 wafers in 6 months. We expect to start in early 2003.

• Keep the bonding stage alive.