bulk chemical management...bare die trays, horizontal wafer shippers, chip trays and film frame...
TRANSCRIPT
bulk chemical management
1ENTEGRIS , INC . « » bulk ChEmICal maNaGEmENT « »
table of contentsSection 1: About Entegris
Purify, Protect and Transport ....................................................... 2Global Presence ............................................................................. 3Enabling Innovation ...................................................................... 4Close to Our Customers ................................................................. 5Bulk Chemical Management Solution ......................................... 6
Section 2: Product/Solutions
EL GRADE* CHEMICAL MANUFACTURING
ProcessGard® NP Cartridge Filters ........................................ 8Fluorogard® FP and FP-HP Cartridge Filters ........................ 10Microgard™ Plus Cartridge Filters ........................................ 12FluoroPure® 1000 Liter Intermediate Bulk Container .................................................................... 14FluoroPure® 200 Liter Advantage Trilayer and Trilayer HDPE Drum ................................................... 16
EL GRADE CHEMICAL MANUFACTURING AND END-USER FACILITIES
Sentry™ QCIII Quick Connect System .................................. 18Sentry™ QCII Quick Connect System .................................... 20Chemlock® Housing PFA/PP .................................................... 22QuickChange® ATM and ATE Filters ...................................... 24Intercept® Filters ..................................................................... 26
END-USER FACILITIES
Tubing and Pipe ........................................................................ 28Tube and Pipe Fittings ............................................................. 30Integra® 1/2" Orifice Valve ....................................................... 32Integra® 3/4" Orifice Valve ....................................................... 34Integra® 1"˝ Orifice Valve ......................................................... 36NT® Pressure Transducers .......................................................... 38FluoroPure® Day Tanks ............................................................ 40Dymension® Valve Manifold .................................................... 42
* Electronic grade
bulk chemical managementThe backbone to the high tech
fabrication environment is the
steady supply of process materials.
Safe, accurate and timely delivery
of process chemistries throughout
the facility enables the efficient
and economically stable operation
of each process step. The diversity
of the chemistries flowing through
the lines at any one time covers a
wide range of materials ranging
from aggressive acids to DI water to
concentrated substances. In addition,
these chemistries must be controlled
to levels general industries cannot
achieve in terms of repeatability
and consistency. Entegris provides
the solutions to succeed under
these extreme conditions.
3ENTEGRIS , INC . « » bulk ChEmICal maNaGEmENT « » 2 «» bulk ChEmICal maNaGEmENT « » ENTEGRIS , INC .
Entegris provides products and services for applications across key semiconductor processes to help chip makers solve manufacturing challenges, enhance yield and gain sustainable competitive advantage.
purify, protect and transport
bulk chemicalAs wafer sizes continue to increase and line widths shrink, purity requirements become more stringent and precise chemical blending becomes more critical. Whether it’s transport or storage, mixing or dispense, Entegris has solutions to meet bulk chemical handling needs.
chemical mechanical planarizationFrom filtration, liquid and slurry handling, Entegris products enable the CMP process.
wet etch and cleanUltrapure liquids and gases are purified, protected and transported with Entegris filters, purifiers, valves, fittings and sensing and control products.
wafer handlingEntegris provides wafer handling products to protect and transport prime wafers, wafers being processed, finished wafers, bare die and packaged devices. Products include wafer carriers, wafer shippers, mask and reticle carriers, bare die trays, horizontal wafer shippers, chip trays and film frame shippers.
photolithographyEntegris’ broad product line enables lithography processing with gas filters and diffusers, wafer and reticle handling, liquid filtration, purification and control.
Entegris products offer reliable protection of quartz plate reticles and masks used in multiple process steps.
Entegris milestones1966: Founded as Fluoroware, Inc.
2000: Begins trading under the ENTG symbol on NASDAQ
2005: Merges with Mykrolis Corporation, a leading provider of liquid filtration and gas purification prod-ucts and systems
2006: Expands manufacturing facility in Kulim, Malaysia
2007: Acquires Surmet Corporation’s high-purity semiconductor coatings business
2008: Acquires Poco Graphite, an industry leader in high-performance graphite and silicon carbide
With 2,200 employees worldwide, Entegris thrives on the challenge to meet our customers’ expectations through a global network of service, technology, manufacturing and applications support teams, all built upon a tradition of product and process innovation.
global presence
lab capabilitiesAnalytical Services Product Testing Materials Science• Airborne molecular contamination • Performance testing • New material development
• Surface contamination • Particle testing • Material characterization
• Applications support • Electrostatic charge • Material selection
• Root-cause analysis • Vibration • Material incoming inspection
• Flow rate optimization • Applications support
• Applied statistics
• Safety and industry standardization
• DOT and UN regulations
• CE marking
Entegris 2010Number of Employees 2,200 worldwide
Industries Served Semiconductor and other high-technology industries
Stock listing ENTG on NASDAQ
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The technology roadmaps to produce the next generation of semiconductor devices and microelectronics are presenting unprecedented technological challenges, as well as ever increasing pressure to improve yields and productivity. As the leading provider of contamination control products and services to the global semiconductor and microelectronics industry, Entegris is using a wide array of analytical and materials science expertise to develop comprehensive solutions to contamination issues in the fab.
enabling innovation
Electronics that are smaller, faster, cheaper and more functional
Leveraging our core competencies of materials science
ITRS 2006 2008 2010 2012
DRAM 1/2 Pitch (nm) 70 59 45 36
Logic (Flash) 1/2 Pitch (nm) 78 (64) 59 (45) 45 (36) 36 (28)
Critical Defect (nm) 29 30 23 18
DRAM Wafer Handling PWP 30 20 12 7
Molecular Contaminants Wafer level Molecules Molecules Molecules
Critical Metal Ions (PPT) <0.5 <0.5 <0.5 <0.5
Industry
193 nm Immersion Lithography Double Patterning EUV
300 mm Wafer Processing 300 mm Prime 450 mm?
Entegris TechnologiesDRAM 1/2 Pitch (nm) 70 59 45 36
Liquid and Gas Filtration Continuous Improvement and Purification Filtration products: smaller pore size, higher flow, higher retention
Purification products: volatile organics, AMC, moisture, degasification
Wafer Handling 300 mm Prime product platforms 450 mm prototypes
Mask Handling Carriers to prevent reticle haze EUV mask carriers
Liquid Systems LiquidLens™ Multi scanner systems Subsystems Process monitoring
Direct sales and local support gives us the opportunity to achieve customer intimacy.
Customer intimacy helps us better understand our customers’ needs through direct feedback and roadmap sharing.
By aligning our materials science, engineering and R&D initiatives, we can develop indispensable contamination control solutions to solve our customers’ roadmap challenges.
close to our customers
Entegris Patents2005: 39 new U.S. patents
2006: 44 new U.S. patents
2007: 25 new U.S. patents
2008: 35 new U.S. patents
2009: 16 new U.S. patents
6 «» bulk ChEmICal maNaGEmENT « » ENTEGRIS , INC . 7ENTEGRIS INC . « » bulk ChEmICal maNaGEmENT « »
Our expertise in materials science and contamination control enables our customers to meet the demands of the market by reducing costs, enhancing yields, increasing productivity and improving process control.
The following pages highlight products designed to solve your fab challenges by providing best-in-class purification, materials management and process control solutions.>>>
Challenge
El Grade Chemical manufacturing
El Grade Chemical manufacturing and End-user Facilities
End-user Facilities
Proc
essG
ard
NP
Cart
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Fluo
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Mic
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Fluo
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Chem
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and
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Inte
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Tubi
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and
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Pres
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Fluo
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Dym
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Man
ifold
Customer Challenges
Safe
ty
Safety • • •
Qua
lity
Batch-to-batch quality • • • • • • • • • • • • •Consistent chemical specification • • • • • •
Product performance stability • • • • • • • • • • • • •Product reliability • • • • • • • • • • • • • •
Cost
Ready to use • • • • • • • • • •Ease of handling • • • • • • • • • • •Uptime • • • • • • • • •High throughput • • • • • • • • •Low cost of operation • • • •Long product lifetime • • • • • • • • • • • • •Minimum maintenance • • • •Serviceability • • • • • •
Gree
n Environmentally friendly • • • • •Minimize waste • • • •
For over 40 years, Entegris has been at the forefront of providing comprehensive microcontamination control solutions – with products and services that surround key processes such as bulk chemical, wet etch and clean, lithography, chemical mechanical planarization and wafer handling.
bulk chemical management solutions
El Grade Chemical manufacturing
End-user Facilities
Filters Connection Systems
Bulk Containers and Drums
Fittings, Tubing and Pipe
Valves and Manifolds
Filters
Connection Systems
Tanks
Pressure Transducers
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FEaTuRE aDVaNTaGE bENEFITSurface and depth filter design • Higher particle and gel
holding capability• Reducing filter changing due to
longer lifetime• Increase tool uptime
Robust polypropylene construction supports
Thermoplastic bonding with no adhesives
• Providing clean and durable performance
• Low extractable levels ensure superior downstream cleanliness
• Improving tool uptime due to long-term chemical compatibility
• Improving quality and overall yield
Available in different retention ratings, length and manifold adapter codes
• Superior retention of colloids and particles ensuring low particle counts
• Wide range of contaminants captured in a single filter unit
• Increasing overall chemical purity• Lower filtration costs
Available in cartridges (code F and code 0) and disposable configurations
• Fits most available housings • Saves time due to easy installations in the equipment
• No retrofit costs
Pleated depth filters with high flow and excellent broad range retention efficiency, ideal prefiltration applications or electronics parts plating processes.
Depth pleated structure providing longer lifetime.
• Pleated depth membrane
• Available in cartridge or disposable configuration
• Wide range of retention ratings from 0.5 μm to 40 μm
• Excellent chemical and heat resistance
Optimized for electronic chemical manufacturersConsumer electronic market: TFT-LCD, TN/STN, color filter, wet etching, stripping, developer, cleaningChemical mechanical planarization (CMP) slurry
ProcessGard® NP Cartridge Filters
performance
Market Application Benefit expected
CMP Central distribution Longer lifetime
Back end Solder bumping, C4 Longer lifetime
TFT-LCD Wet etching Developer Cleaning
Longer lifetime
TN/STN Wet etching Stripping Developer Cleaning
Longer lifetime
Color filter Wet etching Stripping Developer Cleaning
Longer lifetime
Optical disk UV lacquer Longer lifetimeReduce bubble issue
CRT PVA coating Longer lifetime
160
140
120
100
80
60
40
20
00.5 2.0 5.0 20 40
ProcessGard NP Lifetime
Retention Rating (µm)
Plug
ging
Tim
e un
der
Cont
inuo
us C
halle
nge
Processgard NP LifetimeCompetitor LifetimeCompetitor Crescent Lifetime
frequently asked questions
What will be my pressure drop?
0.7
0.6
0.5
0.4
0.3
0.2
0.1
0
9
8
7
6
5
4
3
2
1
0
0.05 µm1.0 µm
2.0, 3.0 µm
20, 30, 40 µm
5, 10 µm
0
0 2 4 6 8 10 12
10 20 30 40 50
Cartridges
Typical Flow Rate (L/min) - 1 cP @ 20°C (68°F)
GPM
Diff
eren
tial P
ress
ure
(bar
)
Diff
eren
tial P
ress
ure
(PSI
D)
0.6
0.5
0.4
0.3
0.2
0.1
0
8
7
6
5
4
3
2
1
0
0.05 µm1.0 µm
2.0 µm
5.0 µm
3.0 µm
10, 20 µm
0
0 0.2 0.4 0.6 0.8 1.0 1.2 1.4
1 2 3 4 5 6
Disposables
Typical Flow Rate (L/min) - 1 cP @ 20°C (68°F)
GPM
Diff
eren
tial P
ress
ure
(bar
)
Diff
eren
tial P
ress
ure
(PSI
D)
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FEaTuRE aDVaNTaGE bENEFIT
Available in two different PTFE membranes:– Hydrophobic (FP)– Hydrophilic (FP-HP)
• Optimized chemical compatibility• Spontaneous wetting
• More consistent, reliable process• Increased tool uptime due
to no prewetting needed in aqueous chemicals
Available in different retention ratings (0.05 μm to 10 μm), lengths (10’’, 20’’ and 30’’) and codes (0 and 7)
• Fits most available housings, and addresses all filtration requirements
• Saves time due to easy installations in the equipment
• Streamlined offering that covers all filtration needs
PTFE membrane and polypropylene construction
• Providing clean and durable performance
• Low extractable levels ensure superior downstream cleanliness
• Improved tool uptime due to long-term chemical compatibility
• Improving quality and overall yield
Fluorogard® FP and FP-hP Cartridge Filters
Fluorogard FP and FP-HP are constructed of hydrophobic or hydrophilic PTFE pleated membranes with polypropylene supports to enhance durability and cleanliness.
• Wide range of retention ratings from 0.05 μm to 10 μm
• Available in three different cartridge sizes (10’’, 20” and 30’’)
• Available in code 0, F, 7 and 5 (2-226 and 2-222 o-rings)
• Operating temperature up to 90°C
Optimized for filtration of process chemicals, e.g., water-based chemicals and organic solventsUsable in bulk or point-of-use applications
performanceChemical compatibility is mainly driven by the surface area exposed to chemicals. With its 7000 cm2 PTFE membrane in a PP structure, the Fluorogard FP exhibits very good chemical resistance in most applications. It is an economi-cal choice where PTFE material is required.
Ideal solution for electronic-grade chemical manufacturing and wet cleaning applications in many industries.
The hydrophilic version exhibits very good wettability even after drain and dry modes, without flow loss.
Fluorogard FP-HP Heat-resistance Test75
60
45
30
15
0
Flow
Rat
e (L
/min
)
1st a
utoc
lave n
onpr
ewett
ed
1 day
after
nonp
rewett
ed
1 day
after
IPA pr
ewett
ed
2nd a
utoc
lave n
onpr
ewett
ed
2nd a
utoc
lave I
PA pr
ewett
ed
1 day
after
nonp
rewett
ed
FP-HP 10 µm 0.1 kg/cm²
FP-HP 0.2 µm 0.2 kg/cm²
FP-HP 10 µm 0.05 kg/cm²
FP-HP 0.2 µm 0.1 kg/cm²
frequently asked questions
What is my flow capability for a Fluorogard FP 10’’ cartridge?
How do I create the right part number for ordering the FP filter?
0.30
0.25
0.20
0.15
0.10
0.05
0
4.0
3.5
3.0
2.5
2.0
1.5
1.0
0.5
0
0.05 µm
0.10 µm
0.20 µm
0.50 µm
1.0 µm 3.0 µm
10.0 µm
0
0 2 4 6 8 10
10 20 30 40Typical Flow Rate (L/min) – 1 cP @ 20°C (68°F)
GPM
Diff
eren
tial P
ress
ure
(bar
)
Diff
eren
tial P
ress
ure
(PSI
D)
retention ratingZ = 0.05 μmV = 0.10 µmG = 0.20 μmH = 0.50 μmA = 1.0 μmS = 3.0 μmC = 10.0 μm
Cartridge ConfigurationO = Code 0F = Code F 7 = Code 7
Cartridge Length1 = 10”2 = 20”3 = 30”
CWE — — — 0 — 1 K *
O-ring MaterialV = Viton®E = EPDMT = TEV (Teflon®
Encapsulated Viton®)
Quantity 1 = 1/pack
* Optional Chemlock key attached to cartridge for use with Chemlock housing ONLY
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Microgard Plus patented UPE membrane shows the highest retention efficiency of any membrane. It offers low surfactant binding and spontaneous wettability in solvents.
• High retention efficiency of up to 99.999% at rated particle size
• Removal of microbubbles and gels
• Low pressure drop
• Low leaching of ionic/metallic contamination from filter
Optimized for bulk chemical distribution systems, filtration of stripping photo- chemicals, photoresist stripping at temperatures below 70°C.
microgard™ Plus Cartridge Filters
FEaTuRE aDVaNTaGE bENEFITHydrophobic UPE membrane wets spontaneously in solvents
• No prewetting or flush-up required for rapid start-up
• Eliminates IPA and the risk of chemistry interactions
• Lower operational cost and increased tool uptime through fast filter installation and qualification
High retention efficiency and superior downstream cleanliness
• Low particle counts and metal contamination in bulk chemical production and chemical delivery systems
• Cleaner chemicals protect processes and end-user products. Reduced need for exchange of downstream filters.
Sponge-like structure of patented UPE membrane
• Excellent retention of microbubbles and gels
• Reduction of defects, yield improvement
Large filtration area • Long filter lifetime and low pressure drop
• Improved COO due to reduced need for maintenance
performance
frequently asked questions
UPE vs. PTFE Membrane Particle Count Comparison
Pleated 0.05 µm PTFE filter
UPE 0.1 µm filter
10,000
1,000
100
10
12 3 4 5 6 87 9 10 11 12 13 1514 16 17 18 19 2120
Dispense Number
Part
icle
s/w
afer
>0.
15 µ
m
V2 20 nm V2 10 nm V2 5 nmAsymmetric
Mini 10 nmAsymmetric
Filter Type
Tota
l Def
ects
First runConfirmation run
Total Defectivity Comparison by Filter
Microgard Plus LE 10” Asymmetric UPE
1.4
1.2
1.0
0.8
0.6
0.4
0.2
0
18
16
14
12
10
8
6
4
2
0
5 nm
0
0 1 2 3 4 5
5 10 15 20Typical Flow Rate (L/min) – 1 cP @ 20°C (68°F)
GPM
Diff
eren
tial P
ress
ure
(bar
)
Diff
eren
tial P
ress
ure
(PSI
D)
10 nm
Microgard Plus 10” Filters
1.4
1.2
1.0
0.8
0.6
0.4
0.2
0
18
16
14
12
10
8
6
4
2
00
0 1 2 3 4 5 6 7
5 10 15 20 3025Typical Flow Rate (L/min) – 1 cP @ 20°C (68°F)
GPM
Diff
eren
tial P
ress
ure
(bar
)
Diff
eren
tial P
ress
ure
(PSI
D)
10 nm 20 nm
30 nm
0.05 nm
0.1 nm
0.2 nm
Why does the Microgard Plus have better flow characteristics than other filters?Entegris’ surface modification technology enhances the membrane to create less pressure drop and greater surface area.
Why does Microgard Plus hold back gels more effectively than PTFE filters?The string and node structure of PTFE allows gels to pass through easily. Furthermore, pressure pushes gels through PTFE membranes. The sponge-like structure of UPE prevents gels from passing through the membrane and additionally has more loading capacity.
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For applications where a package greater than 200 liters is required. The inner wetted material is identical to the 200 Liter HDPE Trilayer drum.
• UN tested and approved, and in compliance with DOT for packaging Group II and III chemicals (100 kPa rated)
• Accommodates Sentry QCII and QCIII quick connect systems
• Package includes three ports
• High-purity package
• Fork pocket opening on all four sides
Optimized for: wet etch and clean – HF, H2O2, H2SO4, H3PO4, CMP – Colloidal silica, KOH-based slurry
FluoroPure® 1000 liter Intermediate bulk Container (IbC)
FEaTuRE aDVaNTaGE bENEFITSame wetted material as FluoroPure Trilayer 200 liter (55 gallon) HDPE drums
• Relieves user from testing qualification
• Saves both time and money • Faster startup time
Three ports: 1. POU drum insert2. Return drum insert 3. Burst disk
• Dispensing, recirculation and safe shipping of chemical via separate ports
• More flexibility for facility setup
UN tested and approved, and in compliance with DOT for packaging Group II and III chemicals (100 kPa rated)
• Complete package • Legal permission for
worldwide use
• No extra testing • Suitable for worldwide application
and transportation
UN tested and approved with Sentry QCII and QCIII quick connect systems
• Single source supplier for chemical bulk delivery system
• Complete package• No extra testing; ready for use
All-plastic design (HDPE material) • Reusable application • Decreases handling cost per gallon of delivered chemical
performance• Expected cleanliness levels
— Trilayer particles (counted in DI water)
15 particles/mL @ 0.2 6 particles/mL @ 0.3 1 particle/mL @ 0.5
— Typical metals: Less than 170 ppt total metals
• Package is approved for safe operation at 100 kPa (not approved for pressure dispense)
• The burst disk ensures operator safety — Gauge pressure up to 100 kPa
0.2 µm 0.3 µm 0.5 µm
Num
ber o
f Par
ticle
s/m
L
Particle Size
Trilayer IBC
Advantage Trilayer
Particle Testing (Counting in DI Water)35
30
25
20
15
10
5
0
frequently asked questions
What makes our solution unique?The clean Entegris Trilayer inner materials.
Will the FluoroPure 1000 liter IBC also have the same inner liner as the 200 liter version?Yes, the 1000 and 200 liter packages both utilize the inner liner material.
Can I connect the Sentry QCII and QCIII quick connect systems?Yes, both systems are connectable.
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UN tested and approved for all Entegris Sentry quick connect systems. High purity option for transporting and distributing chemicals.
• UN tested and approved, and in compliance with DOT for packaging Group II and III chemicals
• Tall chime protects drum insert during transportation
• Corrosion-free performance
• Compatible with our Sentry QCII and QCIII quick connect system
Optimized for wet etch and clean application and chemical mechanical planarization.
FluoroPure® 55 Gallon (200 liter) advantage Trilayer and Trilayer hDPE Drum
FEaTuRE aDVaNTaGE bENEFITWetted inner liner of the purest virgin HDPE
• Ensures chemical integrity and cleanliness
• Minimize metallic, organic and particle contamination
UN tested and approved, and in compliance with DOT for packaging Group II and III chemicals (100 kPa rated)
• Legal permission for worldwide use
• No extra testing • Suitable for worldwide applications
and transportation
UN tested and approved with Sentry QCII and QCIII quick connect systems
• Single source supplier for chemical bulk delivery system
• Complete package• No additional testing; ready for use
Molded-in chime • Protection for drum insert and closure during transportation
• No spending for new DIP tube (compared to competition)
Reusable package • Reduced disposal costs • Package cost is rapidly amortized over several round-trips
Unique sump design • Maximum retrievability • Minimizes residual chemical
performance
Drop test results for HDPE Trilayer Drum:
Drum Drop Height Failure rate
Entegris drum 2.0 meters 0% (0 of 6)
Competitor Japanese drum
1.9 meters 50% (3 of 6)
Competitor US drum
1.9 meters 67% (4 of 6)
frequently asked questions
Can I connect the Sentry QCII and QCIII quick connect systems?Yes, both systems are connectable.
What design features improve the strength and closure protection?The single-piece design with molded-in chimes increases strength and closure protection. See the performance test results provided above.
When do I use Trilayer or Advantage Trilayer drum?Please contact the factory with your media to discuss which drum would perform better for your specific application.
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Key-coded Sentry QCIII Quick Connect System with recirculation option is the safest method of connecting FluoroPure chemical containers into your distribution equipment.
• Recirculation option (3⁄4’’ connection)
• Key-coded connection system to prevent misconnects
• 2 check valves (in fill and dispense port)
• Dispense head: wetted parts include PFA, FEP and Kalrez® 4001 materials
• Drum insert: wetted parts are PFA or poly - ethylene with FEP encapsulated o-rings
Optimized for wet etch and clean applications: HF, H2O2, H2SO4, H3PO4, HNO3, MAE and chemical mechanical planarization.
Sentry™ QCIII Quick Connect System
FEaTuRE aDVaNTaGE bENEFITKey-coded system (same key code system as for QCII)
• Safety for maintenance personnel• Insurance in maintaining correct
chemical dispense to the POU
• Cost-savings due to fewer changing operations for inserts (reduced maintenance)
4-port option:
Recirculation and dispense in one connection
• Minimization of operator errors • Lower labor costs with fewer connections and easier handling (self-alignment)
• Avoid damaging slurry performance
Cv 5.0 vs. 3.3 for Sentry QCII system
• Higher flow rate • Longer pump life due to less pump stress
O-ring free main dispense seal at drum insert
• No maintenance / replacement necessary
• Increase tool up time• Cost-savings due to no
maintenance / replacement
performance• 4-port includes recirculation diffuser
• Drum insert has no o-ring vs. three o-rings on Sentry QCII and one o-ring on shipping cap
• Improved assembly features — Dual engagement thread creates easy assembly by operators in chemical room
— Requires less “push down” force by operator
— Connection can be made without any visual alignment
frequently asked questions
Are the connections exclusive to Flaretek® fittings?Yes, all three connections are Flaretek connections.
Can you use QCIII dispense head with QCII drum insert?No.
Dispense Port Water Flow vs. Pressure Drop
18.9 37.9 56.8 75.70
Pres
sure
Dro
p (k
Pa)
Pres
sure
Dro
p (P
SI)
Pressure drop flow out (PSI)
Pressure drop flow in (PSI)
20
15
10
5
0
137.9
103.4
68.9
34.5
00 5 10 15 20
Flow Rate (GPM)
Flow Rate (L/min)
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21ENTEGRIS , INC . « » bulk ChEmICal maNaGEmENT « » 20 «» bulk ChEmICal maNaGEmENT « » ENTEGRIS , INC .
Key-coded Sentry QCII Quick Connect System is the safest method of connecting FluoroPure chemical containers.
• Key-coded connection system prevents misconnects
• One connection provides dispensing, venting and level detection
• Check valve designed to seal off backflow when disconnecting the Sentry QCII system (safety)
• Dispense head: wetted parts include PFA, FEP and Kalrez 4079 materials
• Drum insert: wetted parts are PFA or poly- ethylene with FEP encapsulated o-rings
• Optional high-flow dispense head is available (includes 1⁄4 turn plug valve)
Optimized for wet etch and clean applications: HF, H2O2, H2SO4, H3PO4, HNO3, MAE and chemical mechanical planarization.
Sentry™ QCII Quick Connect System
performance• Approximately 700 different key codes for
different chemicals available — We can create a new key code for every chemical/blending/mixture
• Flow performance: — DHT has a Cv of 3.3 — Increased flow DH has a Cv of 5.3
• A wide range of accessories are available for QCII (e.g. covers, code checker, shipping plugs)
frequently asked questions
Are the connections exclusive to Flaretek fittings?Yes, all three connections are Flaretek connections.
Do I have to use other key codes for the increased flow DH?No, it is the same key code system as for DHT.
Increased flow DH has no check valve in – is it safe?By incorporating a PTFE plug valve, Entegris has successfully eliminated the chemical restriction while maintaining operator safety and increasing flow capacity.
Water Flow vs. Pressure Drop @ 3/4” port
130
25
20
15
10
5
0
207.0
172.5
138.0
103.5
69.0
34.5
0
0 1 2 3 4 5 6 7
Flow Rate (GPM)
Flow Rate (L/min)
Pres
sure
Dro
p (P
SI)
Pres
sure
Dro
p (k
Pa)
20 4 6 8 10 12 14 16 18 20
Dispense with poppet
Filling with poppet Dispense
without poppet
Filling without poppet
FEaTuRE aDVaNTaGE bENEFIT
Key-coded system (same key code system as for QCIII)
• Improved operator safety• Insurance in maintaining correct
chemical dispense to the P.O.U.
• Cost-savings due to fewer changing operations for inserts (reduced maintenance)
Increased flow dispense head with Cv 5.3 available
• High flow rate • Longer pump life due to less pump stress
Dispense head key code ring replacement available
• Replace only key code ring instead of complete dispense head
• Lower replacement costs
Different o-ring material options (FEP encapsulated silicone, FEP encapsulated Viton and FEP encapsulated EPDM)
• Compatibility for all chemicals • O-ring core material can be selected to match media compatibility for longer service
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23ENTEGRIS , INC . « » bulk ChEmICal maNaGEmENT « » 22 «» bulk ChEmICal maNaGEmENT « » ENTEGRIS , INC .
The Chemlock housing offers a space- and time-saving solution like no other cartridge filter housing available today. It is available in different sizes and a large variety of fitting configurations.
• Small footprint
• Easy and fast filter changeout
• Improved safety and handling
• Lower cost of ownership
• Available in PFA and PP
Optimized for bulk chemical distribution systems, wet etch and clean applications: HFF, H2O2, H2SO4, H3PO4, HNO3 etc., chemical mechanical planarization and electronic grade chemical manufacturing.
Chemlock® housing PFa / PP
installation*
frequently asked questions
Can I use any standard 10“ filter in this housing?Yes, standard filters without Chemlock-key will fit, but they have to be inserted the traditional way in the housing head.
Why does Entegris recommend using a housing wrench and torque wrench?This ensures proper installation of the filter and avoids leakages.
Can I upgrade the Chemgard bowl to Chemlock?Yes, the Chemlock bowl is compatible with full benefits.
Competitor Housing Chemlock Housing
1. Insert cartridge into bowl.
2. Twist filter 1⁄4-turn to lock.
3. Attach head to bowl.
4. Tighten locking ring to easily seat double o-rings. Use a Chemlock/Chemgard™ integrated housing wrench to ensure proper tightening.
Chemlock housing saves more than 210 mm (8.3”) for 10” cartridge; 457.2 mm (18”) for 20” cartridge
IMPORTANT: To ensure a leak-free seal, it is indispensable to follow the instructions from the Chemlock installation manual. To view an electronic file of this manual, go to www.entegris.com
FEaTuRE aDVaNTaGE bENEFITSmaller footprint, “minimal-clearance”
Cartridge/bowl design
• Requires less space for cartridge changeout
• Lower cost of ownership due to space-savings
Simple ¼ turn twist to lock cartridge into the bowl
• Cartridge can be inserted outside of the cabinet
• Reduced downtime due to easy access to filter and secured cartridge insertion
Compact head design with molded-on fittings
• Minimized footprint• Ensures compatibility for most
filter applications
• Lower cost of ownership, no need for extra fittings and connections
Easy cartridge changeout design • Provides virtual hands-free cartridge changeout for maximum safety and cleanliness
• Allows for quick installation and reduced exposure to chemicals and vapors
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25ENTEGRIS , INC . « » bulk ChEmICal maNaGEmENT « » 24 «» bulk ChEmICal maNaGEmENT « » ENTEGRIS , INC .
QuickChange ATM and ATE filters are prewet and nondewetting ultraclean filters that enable rapid nanoparticle removal at low pressure drop and high flow rates.
• Enabling of rapid filter changeout due to prewet membrane.
• No loss of membrane surface in outgassing chemicals due to patented nondewetting technology
• Retention of nanoparticles while maintaining high flow
• Low metal extractables ensure cleanliness of chemicals
• High membrane-surface area enables low pressure drop and long lifetime
Optimized for aqueous aggressive acids and bases, outgassing chemicals like SC1, SC2, SPM and piranha and high-temperature applications.
QuickChange® aTm and aTE Filters
performance• QuickChange nondewetting filters
do not dewet
• Entegris’ nondewetting filter membrane delivers yield enabling performance by providing consistent retention and flow properties
frequently asked questions
What is the shelf life of a QuickChange filter?QuickChange filters are autoclaved to prevent microbiological contamination. Entegris warranties unlimited shelf life for QuickChange.
Why are QuickChange filters higher in price than other Teflon filters?QuickChange is an extremely clean filter, and its prewetting and nondewetting technology requires high manufacturing input. All advantages as shown above easily pay off over time and help our customers save money in the long run.
3.25
3.00
2.75
2.50
2.25
2.00
1.75
1.50
Average Pressure Drop in SC2 at 80°C (Due to Drain and Refill Cycles of New Membranes with
and without QuickChange Modification)
Drain Number
kPa/
(L/m
in)
QuickChange does not dewet
Hydrophobic PTFE dewets
QC ATM 30 nm QC ATM 50 nm ATM 50 nm hydrophobic
Drain 1
Initial Drain 2
Drain 3
Drain 4
Drain 5
Drain 6
Drain 7
FEaTuRE aDVaNTaGE bENEFIT
Prewet and nondewetting PTFE membrane
• Eliminates prewetting and flushing cycles
• High-purity, ultraclean, ready-to-use filter
• Consistent flow performance in outgassing chemistries
• Higher yields and longer life through consistent filter performance
• Increased tool time and decreased COO through longer filter life
• Decreased COO through reduced work/chemical consumption
High membrane surface area • ATM and ATE designs add 100% and 145% of surface area respectively to standard 10“ elements
• Lower flow resistance and higher flow• Extended lifetime
• Reduced overall maintenance• Lower COO and increased OEE
through extended filter lifetime
High retention • Smaller particle removal, 30 nm • Cleaner device, higher yield needed for advanced technology nodes
Low metal extractables • Reduction in qualification time, ensures ultraclean processing, low risk of metallic contamination of wafers
• Higher yield and wafer throughput
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27ENTEGRIS , INC . « » bulk ChEmICal maNaGEmENT « » 26 «» bulk ChEmICal maNaGEmENT « » ENTEGRIS , INC .
Hydrophilic dual-capture membrane for superior particle removal. Intercept is one of the most advanced UPE liquid microcontamination platforms available.
• Hydrophilic membrane eliminates need for prewetting and minimizes formation of microbubbles
• Even with a 0.2 μm membrane, particle retention down to 0.03 μm (pH <2.5 and no surfactant) is enhanced, while maintaining high flow rate
• Long filter lifetime
• Extremely clean filter, low metal extractables
Optimized for DHF, HF, BOE solutions in chemical delivery systems, batch baths and single wafer tools.
Intercept® Filters
performance• Intercept removes particles in typical DHF
applications by an additional mechanism to sieving: physisorption
• Particle retention below rated pore size is achieved, enhancing process capability
frequently asked questions
How does this dual-capture mechanism work?Sieving (i.e., size exclusion) is the most common capture mechanism. Utilizing patented surface modification technology (pH <2.5), the Intercept UPE membrane’s physisorption (so-called “van der Waals forces”) become active with small particles adhering the membrane surface. This is how a 0.2 μm retention rating filter achieves a 0.03 μm retention rating performance.
FEaTuRE aDVaNTaGE bENEFIT
Advanced membrane technology • Dual particle capture can improve process performance and reduce on-wafer particle defects
• Higher yield and throughput through efficient nanoparticle removal
Hydrophilic membrane • No prewetting or flush-up required for rapid start-up
• Eliminates IPA and the risk of chemistry interactions
• Increased tool up-time through fast filter installation/qualification
Universal filter design • One filter fits many applications • All-polyethylene cartridge provides
clean drop-in replacement for existing filters
• Fast ROI through easy implementation
Pore
Pore
by Sieving
by Impaction
by Cake
Sieving - size exclusion
Interception - particle capture by van der Waals force and impaction
Intercept metal Extractables Sample Data
Filter: Intercept
Membrane: Hydrophilic UPE
Material: PE
Chemical: 10% HCl
Metal µg/unit (ppb)
Na 4.9
Mg 1.5
Al 7.7
K 2.9
Ca 8.0
Ti 0.4
Cr 0.5
Mn 0.0
Fe 5.7
Ni 0.2
Cu 0.1
Zn 1.8
Pb 0.1
Total 33.8
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CIlITIES
29ENTEGRIS , INC . « » bulk ChEmICal maNaGEmENT « » 28 «» bulk ChEmICal maNaGEmENT « » ENTEGRIS , INC .
Broad range of tubing and pipe made from 100% virgin high-purity PFA material for highly corrosive, ultrapure applications.
• Tube flaring process provides leak-free connections and offers design flexibility
• PureBond weld process is ideal when permanent connections are required
• Non-intrusive, non-contaminating and permanent serialized laser-marking allows immediate material identification
• Standard wall tubing is available in 1⁄4’’, 3⁄8’’, 1⁄2’’, 3⁄4’’, 1’’, 11⁄4’’, 11⁄2’’sizes
• Pipe is available in 1⁄4’’, 1⁄2’’, 3⁄4’’, 1’’, 2’’ sizes
• Pipe and tubing are available in different PFA grades
Optimized for bulk distribution, valve manifold boxes mainline, wet etch and clean applications: HF, H2O2, H2SO4, H3PO4, HNO3, MAE and chemical mechanical planarization.
Tubing and Pipe
performance
frequently asked questions
Can I use the standard 4200 material with surfactant?4200 should not be used with fluorinated surfactants.
Are all tubings available as coiled tubing?Yes, the standard straight wall tubing can be coiled customized.
Is a convoluted tubing available?Yes, available in ½”, ¾” and 1” sizes.
How can I identify my installed tubing? Laser marking identifies the size, and traceability to a material lot number and production inspection record (except 0.030’’ wall).
FEaTuRE aDVaNTaGE bENEFIT
PFA material of construction • Broad chemical compatibility• Long product life
• Lower cost of ownership through increased productivity and throughput
Long-term performance testing at various media temperatures
• Products can be used with confidence at maximum continuous rating
• Added safety• Lower cost of ownership through
increased manufacturing uptime
Laser marked tubing • Sure method of traceability • Accurate and easy identification in critical situations
Available in different PFA grades: 4200, 4300 and 4400 (HP plus)
• Customizable in different material quality requirements
• Exact grade of PFA can be selected to best fit the application
• Increased product performance and longer product life
Pressure vs. Temperature
300
250
200
150
100
50
0
1724
1379
1034
690
345
0
37.80
50 100 150 200 250 300 350 400
65.5 93.3 121.1 148.9 176.7 204.4Fluid Temperature (°C)
Fluid Temperature (°F)
Pres
sure
(PSI
G)
AT250-047
AT375-062
*1” and 11/4” ratings vary slightly. Please consult the factory for specific rating information.
AT500-062
AT1000-062,AT1250-075*
AT750-062
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CIlITIES
31ENTEGRIS , INC . « » bulk ChEmICal maNaGEmENT « » 30
Entegris has the broadest range of PFA fitting configurations and sizes available for Flaretek, FlareLock®II and PureBond.®
• Most complete line of flare and pipe fitting connection applications
• Flare fittings provide leak-free performance in demanding applications
• PureBond weldable pipe fittings provide a rigid, permanent, leak-free piping system
• Broad range of sizes and configurations: flare 1⁄4’’ – 11⁄4’’, PureBond 1⁄8’’ – 2” elbows, unions, reducers, caps, tees, crosses and adapters
Optimized for bulk distribution, valve manifold boxes mainline, wet etch and clean applications: HF, H2O2, H2SO4, H3PO4, HNO3, MAE and chemical mechanical planarization.
Tube and Pipe Fittings
FEaTuRE aDVaNTaGE bENEFITPFA wetted surfaces • Provides high purity and
chemical resistance • Long product life
• Lower cost of ownership through increased productivity and throughput
Largest installed customer base of PFA fittings
• Global manufacturing and support• Assured reliability and performance
• High service levels in all regions • Lower cost of ownership through
increased manufacturing uptime
Available in a broad range of sizes and configurations
• Single source supplier for all high-purity, corrosive chemical connection needs
• Suitable for a wide variety of FPD applications
• Reduces number of suppliers• Lower design cost
performance Flow Pattern Comparison Standard vs. Sweep Elbow at 5 GPm
The Computational Fluid Dynamics software analysis shows a 56% increase in flow and 60% lower pressure drop through the same size fitting at 5 GPM. Eliminating the sharp corner also reduces the shear rate of slurries.
maximum Pressure Capabilities @ Room Temperature — Values in PSIG (kPa)
Flarelock II Size PVDF Nut PFa Nut CPFa Nut PFa Nut1⁄4” 225 (1551) 225 (1551) 225 (1551) 225 (1551)3⁄8” 225 (1551) 225 (1551) 225 (1551 225 (1551)1⁄2” 190 (1310 190 (1310) 190 (1310) 190 (1310)3⁄4” 110 (758) 110 (758) 110 (758) 140 (965)
1” 75 (514) 75 (514) 75 (514) 90 (620)
11⁄4” 80 (552) — — N/A
frequently asked questions
What is Flaretek?The flaring process provides a permanent expansion (flare) of the tubing end, allowing insertion of the Flaretek fitting body.
What are the tools required to make a proper Flaretek connection?A heating source (air gun), mandrel and tube cutter.
What are the requirements to make a PureBond connection?A 1‘‘ or 2‘‘ Entegris PureBond tool.
What does a X at the end of a part number mean (e.g. E8-8FN-1X)?X means fitting body is made of PFA HP Plus and it is recommended for chemicals containing fluorinated surfactants.
When is FlareLock II recommended? For elevated temperatures >100°C or higher pressure (see chart) and before/after pumps (pulsation / vibration).
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CIlITIES
33ENTEGRIS , INC . « » bulk ChEmICal maNaGEmENT « » 32
reliable field-repairable 1⁄2’’ orifice Integra valves with many configuration options (manual, multiturn, pneumatic, 2-way, 3-way, high-pressure).
• Available in options compliant to SEMI® standard
• No external metal parts
• All wetted parts are molded PFA
• Unique top loading design allows for field repair
• Piston shaft is encapsulated in PFA diaphragm
• Unique body design allows for 100% cavity drainage
Optimized for bulk distribution, valve manifold boxes mainline, wet etch and clean applications: HF, H2O2, H2SO4, H3PO4, HNO3, MAE and chemical mechanical planarization.
Integra® 1⁄2” Orifice Valve
FEaTuRE aDVaNTaGE bENEFITPiston shaft is encapsulated in the molded PFA diaphragm
• No metal contact with media • No contamination – high purity
Available with electronic leak detection and position indication sensors
• Capability to detect media and to monitor valve position (open or closed)
• Advanced process control
Top loading design • Allows field repair • Lower cost of ownership
Available with ECTFE cap • More robust material for base applications
• No discoloration when using ammonia
1⁄2” Integra Pneumatic Valve Cutaway View
performance• Pressure range of 29” Hg to 80 PSIG (5.5 bar)
• 0 to 120 PSIG (8.3 bar) for high pressure valve
• Ambient temperature rating from room temperature to 65°C (150°F)
• Media temperature ratings start at room temperature and vary depending on the style
• Most Cv ratings are 2 to 3
frequently asked questions
Is the maximum inlet pressure same as the maximum outlet pressure?Outlet pressure is reduced due to valve and diaphragm design.
Is valve repair possible? Do I need tools?Yes, repair is possible. A repair kit and repair tools are available.
Is there a 1⁄2‘‘ orifice sampling (T) valve available?Yes, manually and pneumatically normally closed MA8-3X-xx.
Is there a 1/2‘‘ orifice 3-way valve available?Yes, manually and pneumatically normally closed D8-3X-xx.
Is the 3-way valve available with different inlet/outlet configurations? Yes - the D8 series is available with inlet/outlet ports opposite of a standard valve.
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CIlITIES
35ENTEGRIS , INC . « » bulk ChEmICal maNaGEmENT « » 34
New 3⁄4’’ design (manual and pneumatic designs) for higher flow and small footprint.
• Increasing flow capacity
• Reducing pressure drop
• No external metal parts
• Minimizing turbulence
• Saving valuable space
• High temperature version available (180°C/30 PSIG)
Optimized for bulk distribution, valve manifold boxes mainline, wet etch and clean applications: HF, H2O2, H2SO4, H3PO4, HNO3, MAE and chemical mechanical planarization.
Integra® 3⁄4” Orifice Valve
FEaTuRE aDVaNTaGE bENEFITUnique internal radius • High flow with small footprint • Lower cost of ownership due to
space-savings
Top loading design • Allows field repair • Lower cost of ownership
Available with electronic leak detection and position indication sensors
• Capability to detect media and to monitor valve position (open or closed)
• Advanced process control
Manual valve safety lockout option • Helps protect users and equipment • Decreased risk of chemical exposure during equipment maintenance
performance• Pressure range of 29” Hg to 80 PSIG (5.5 bar)
• Media temperature rating
— up to 165°C @ standard valve
— up to 180°C @ high temp valve
• Ambient temperature rating from 23°– 32°C (73°– 90°F)
• Cv ratings from 7.0 to 8.5
• Manual valve safety lockout option
Increases Flow Capacity, Decreases Pressure Drop, Reduces Shear
frequently asked questions
Is there a higher-temperature version?Yes, in a 2-way and a sampling configuration.
Is there a 3⁄4‘‘ orifice sampling (T) valve available?Yes, in the DH high temperature configuration
What is meant by “internal radius“? Technology used from the sweep elbow design to avoid sharp corners.
Is the valve recommended for slurry application? Yes, due to the internal radius – it prevents shearing.
Internal radius
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CIlITIES
37ENTEGRIS , INC . « » bulk ChEmICal maNaGEmENT « » 36
1’’ for bulk chemical distribution where high flow is required (manual, pneumatic, sampling designs).
• Ideal for high flow application
• No external metal parts
• Unique below design
• Available up to 11⁄4’’ Flaretek connection
Optimized for bulk distribution, valve manifold boxes mainline, wet etch and clean applications: HF, H2O2, H2SO4, H3PO4, HNO3, MAE and chemical mechanical planarization.
Integra® 1” Orifice Valve
FEaTuRE aDVaNTaGE bENEFITBellows design • Increased flow rates • Lower cost of ownership due
to space-savings
Top loading design • Allows field repair • Lower cost of ownership
Actuator body / outer cap • More robust valve design • Longer lifetime in high-flow applications
performance• Pressure range of 29” Hg to 80 PSIG (5.5 bar)
— 40 PSIG (2.8 bar) @ 93°C (200°F)
• Ambient temperature rating from 23°– 38°C (73°–100°F)
• Media temperature rating from 23°–93°C (73°–200°F)
• Cv ratings from 9 to 13.6
frequently asked questions
Is there a 1‘‘ orifice sampling (T) valve available?Yes, in both manual and pneumatic designs.
Could slurry particles agglomerate in the bellows?No, due to “no touch” pleat design.
Is there a 3-way valve available? No.
Is valve repair possible? Do I need tools? Yes, repair is possible. A repair kit and repair tools are available.
• Unique bellows design – One piece – Optimum material – “No Touch” pleat design – Integral media seal
• Helps maintain media integrity
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CIlITIES
39ENTEGRIS , INC . « » bulk ChEmICal maNaGEmENT « » 38
Provide accurate and reliable inert pressure measurements. Measure gas or liquid pressure, allowing you to monitor process conditions for increased safety and system performance.
• Accuracy of 1% of full scale
• Nonmetallic sensing technology
• All wetted parts are constructed of PFA, PTFE , CTFE and Kalrez
• No moving parts
• No fill fluids
Optimized for bulk distribution, valve manifold boxes mainline, wet etch and clean applications: HF, H2O2, H2SO4, H3PO4, HNO3, MAE and chemical mechanical planarization.
NT® Pressure Transducers
FEaTuRE aDVaNTaGE bENEFITAll wetted parts are constructed of PTFE, sapphire and other high purity polymers for corrosion resistance
• Compatible with all semiconductor process chemistries
• Improves yield by increasing particle performance
Provides compatibility and easy integration with electronic displays and monitoring systems
• Enables tool interaction with pressure transducer and offers increased accuracy in pressure measurements
• Increases overall equipment efficiency
Industry standard Flaretek flared port connections
• Compact design enables easy installation
• Improves system design flexibility
No moving parts or fill fluids • Reduces contamination potential • Increases tool uptime
frequently asked questionsWhat is the PFA vs CTFE sensor interface when not using sapphire technology?• CTFE is generally used for aqueous solutions,
exceptions apply• PFA is generally used for solvents, exceptions apply• In temperatures above 50°C, PFA performs better
Where can I use NT pressure transducers?• System diagnostics• System pressure monitoring for tool queuing• Pressure at distribution modules, valve manifold
boxes and point-of-use• Differential pressure in filtration systems
Entegris chemical compatibility chart for Sensing and Control products*
Chemical Type Chemical
WETTED PaRTS NONWETTED PaRTS
CTFE**
PFa** PTFEkalrez® 4079
kalrez® 1050
kalrez® 6375uP
PVDF
PP
PE
Acids Acetic A/B B A A C A B B B
HFN A B A A/B B/C A/B B C B
Hydrochloric A B A A A A A B B
Hydrofluoric A C A A B A B B B
Nitric A B A A/B B/C A B C B
Phosphoric A A A A A A A B B
Sulfuric A A A A A A B C B
Bases Ammonium Fluoride A A A B A/B A A B B
Ammonium Hydroxide A B A B A/B A A A B
Potassium Hydroxide A A A A A A C B B
Oxidants Hydrogen Peroxide A A A A A A A B B
Dissolved Ozone A A A B B A/B A C C
Dissolved Chlorine B A A B B/C B A C B
Organic solvents Acetone B A A A A A C B B
n-Butyl Acetate B A A A A A B C C
Ethylene Glycol A A A A A A B A B
Isopropyl Alcohol A A A A A A A A B
Methanol A A A A A A A A B
Methyl Ethyl Ketone C A A A A A C B C
n-methyl pyrrolidone B A A A A A C B B
Tetra Methyl Ammonium Hydroxide (TMAH)
A B A B A A D D D
Organic solvents Acetates B A A A A A B B C
Categories Alcohols A A A A A A A A B
Amines B A A C A A C B C
Hydrocarbones, Aromatic
B A A A A A B C C
Hydrocarbons, Alkane A/B A A A A A B C B
Ketones B A A A A A B B C
High Temperature > 122°F (50°C)
B A A A/B A A A B A
* The compatibility chart is compiled from information published by: Entegris, DuPont Dow Elastomers, Welch Fluorocarbon, Little Giant Pump Company, the PDL Handbook and Compass Corrosion Guide.
** The suitability of CTFE and PFA is based on both chemical resistance and permeability.
Entegris neither represents nor warrants the accuracy or sufficiency of the information set forth in this chart for specific end-user applications. Ultimate responsibility for material selection remains with the end user. Nothing in this chart constitutes a change to the terms and conditions under which the Entegris product was sold.
A: Preferred, suitable for all high-purity applications
B: Acceptable, suitable for nonwetted parts in most applications. May not be suitable for wetted parts in high-purity applications
C: Not recommended for wetted parts in high-purity applications. May be suitable for nonwetted parts in some applications
D: Information not available
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CIlITIES
41ENTEGRIS , INC . « » bulk ChEmICal maNaGEmENT « » 40
Day tanks are a customized solution for non-transportable vessels from 50 L up to 1,900 L.
• Expertise in the design, development and manufacture of process tanks, mixing or storage vessels and shipping containers
• Custom and semi-custom vessels rotationally molded out of a variety of materials, including PFA and polyethylene
• Size capabilities range from 20 L to 1,900 L with a wall thickness from 1⁄16’” to 1⁄4’’
• Low volume runs are economical due to lower tooling costs compared to blowmolded or injection molded products
Optimized for wet etch and clean applications: HF, H2O2, H2SO4, H3PO4, HNO3, MAE and chemical mechanical planarization.
FEaTuRE aDVaNTaGE bENEFITOverpack options for PE/PFA:
– Ability of welding connections
– Sight windows
– Valve boxes
– Connection supports
– Stands (stainless steel, epoxy-coated carbon steel, PVC)
• Customized day tank along with customer requirements
• Flaretek connection possible• Level observation
• Reduces contamination risk
Overpack options for PE/PE:
– All connection NPT (no welding)
– Sight windows
– Valve boxes
– Connection supports
– Stands (stainless steel, epoxy-coated carbon steel, PVC)
• Customized day tank along with customer requirements
• Reduces contamination risk
FluoroPure® Day Tanks
performance
frequently asked questions
Could I have a drain in a PE/PFA day tank?Yes, a drain port can be molded and connections bonded.
Could I have a drain in a PE/PE day tank?No, a drain port is not available because of the non-bondable material.
What is the largest available volume?The largest volume for the day tank is 500 gallons.
Are different vessel volumes available?Yes, from 50 liters up to 500 gallons.
Part Number liter Gallon Diameter height
RM500T 500 132 1168 mm (46”) 1245 mm (49”)
RM10052 567 150 914 mm (36”) 940 mm (37”)
RM10022 719 190 813 mm (32”) 1499 mm (59”)
RM800T 800 211 1168 mm (46”) 1600 mm (63”)
RM1200T 1200 317 1168 mm (46”) 2108 mm (83”)
RM10087 1893 500 1219 mm (48”) 1930 mm (76”)
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CIlITIES
43ENTEGRIS , INC . « » bulk ChEmICal maNaGEmENT « » 42
Customized fluid control solution where a small footprint valve-function is needed with fewer potential leaking points – tailored to specific needs.
• Enables you to replace or change a single valve as needed
• FlareMount™ sealing technology provides a robust, leak-free seal
• Available with a dual FlareMount interface
• Manifold blocks are available in PFA or proprietary HyQ® PTFE
• Small footprint saves valuable equipment space
Optimized for wet etch and clean applications: HF, H2O2, H2SO4, H3PO4, HNO3, MAE and chemical mechanical planarization.
Dymension® Valve manifold
FEaTuRE aDVaNTaGE bENEFITManifold block – simplifies design – Single component – One part number
• Less space needed• Eliminates tubing and fitting
connections• Allows complex flow path
and control
• Reduces overall fluid delivery system cost - Less space - Reduced maintenance - Fewer potential leak points
Unique FlareMount technology - Replaceable valves - Interchangeable valves
• Eliminates gasket or o-rings• Increases serviceability • Enables simple field adjustments
• Lower cost of ownership
Manufacturing process via quick-turn capability
• Fast prototyping within 10 working days
• Short lead times• Reduces process start-up time
performance
frequently asked questionsWhat do I need for quoting?You will need a sketch / drawing where the specific function is described.
What is the lead time on such customized products?The lead time for a new prototype is 10 working days for up to 10 pieces.
Why does a manifold reduce overall fluid delivery system cost? Manifolds require less space and have reduced main-tenance. Manifolds also have fewer connections which
eliminates tubing and fitting connection, and allows complex flow pass and control in a single component.
How can I manage the mixing analysis? Entegris can perform computational analysis.
Are other types of manifolds available? Yes, there are Dymension full rinse, 3⁄8‘‘ and 1⁄2‘‘ stack valve, 1⁄2‘‘ custom Integra.
manifold Examplesmixing manifold Solution
• Optional integrated-mixing element: — Effective inline blending — Creates homogeneous chemical mix downstream of manifold — Mixer designs available for multiple flow requirements
• Computational fluid dynamics:
— Mixing analysis — Flow velocity — Flushing performance
Entegris®, Mykrolis®, Chemlock®, Chemgard™, Dymension®, FlareLock®, FlareMount™, Flaretek®, Fluorogard®, FluoroPure®, HyQ®, Integra®, Intercept®, LiquidLens™, Microgard™, NT®, ProcessGard®, PureBond®, QuickChange® and Sentry™ are trademarks of Entegris, Inc.Kalrez® and Viton® are registered trademarks of DuPont Dow Elastomers, L.L.C. Teflon® is a registered trademark of E. I. du Pont de Nemours and Company. SEMI® is a registered trademark of Semiconductor Equipment and Materials International.
NORTh amERICa
massachusetts Entegris, Inc. Corporate Headquarters 129 Concord Road Billerica, MA 01821 USA Tel. +1 978-436-6500 Fax +1 978-436-6735
minnesotaEntegris, Inc. 101 Peavey Road Chaska, MN 55318 USA Tel. +1 952-556-3131 Fax +1 952-556-1880
Customer Service Tel. +1 952-556-4181 Tel. 800-394-4083 (toll-free within
North America)Fax +1 952-556-8022 Fax 800-763-5820 (toll-free within
North America)
EuROPE
FranceCustomer Service Center for Southern, Western and Northern Europe Entegris S.A.S. Parc Centr’ Alp Ouest 196 rue du Rocher de Lorzier 38430 Moirans France Tel. +33 (0) 4 76 35 73 50 Fax +33 (0) 4 76 35 73 80
GermanyCustomer Service Centers for Eastern and Central Europe Entegris GmbH Hugo-Junkers-ring 5 Gebaude 107 Industriegebiet Klotzsche 01109 Dresden Germany Tel. +49 (0) 351-79597-0 Fax +49 (0) 351-79597-499
IsraelEntegris Israel Limited Izmargad Street 12 Kiryat-Gat Israel Tel. +972 (0) 73 221 00 00 Fax +972 (0) 73 221 00 22
JaPaN
Nihon Entegris K.K. Regional Headquarters Mita-Kokusai Bldg. 4-28, 1-Chome Mita Minato-Ku Tokyo, Japan 108-0073 Tel. +81 3-5442-9718 Fax +81 3-5442-9738
Nihon Entegris K.K. Shin-Osaka Prime Tower Bldg. 1-1, Nishinakajima 6-Chome Yodogawa-Ku Osaka, Japan 532-0011 Tel. +81 6-6390-0594 Fax +81 6-6390-3110
Nihon Entegris K.K. Hakataekihigashi 113 Bldg. 13-9 Hakataekihigashi 1-Chome Hakata-Ku Fukuoka, Japan 812-0013 Tel. +81 92-471-8133 Fax +81 92-471-8134
aSIa/PaCIFIC
ChinaEntegris (Shanghai) Microelectronics Trading Co., Ltd. Unit 606-609, Tower 1 German Centre No. 88, Ke Yuan Road Zhangjiang Hi-Tech Park Shanghai 201203 P.R. of China Tel. +86 21 2898 6710 Fax +86 21 5080 5598
Entegris (Beijing) Microelectronics Trading Co., Ltd. Room 1105, Zhaolin Mansion No. 15 Ronghua Middle Road BDA, Beijing 100176 P.R. of China Tel. +86 10 5107 8379 Tel. +86 10 5107 8300 Fax +86 10 5107 8326
aSIa/PaCIFIC
koreaEntegris Korea, Ltd. 8F, Seongok B/D 4-1, Sunae-dong Bundang-gu, Seongnam-city Kyunggi-do, Korea 463-825 Tel. +82 31 738-5300 Fax +82 31 738-5301
malaysiaEntegris (Malaysia) Sdn Bhd Unit 14 & 15, Lower Level 5 (Executive Wing), Hotel Equatorial No. 1 Jalan Bukit Jambul 11900 Bayan Lepas, Penang MalaysiaTel. +60-4-427-4200Fax +60-4-641-3294
SingaporeEntegris Singapore Pte Ltd. 31 Kaki Bukit Road 3 Techlink, #06-08/11 Singapore 417818 Tel. +65 6745-2422 Fax +65 6745-4477
TaiwanEntegris Asia LLC, Taiwan Branch 14F, No. 120, Sec. 2, Gong Dao Wu Road Hsinchu City 30072 Taiwan R.O.C. Tel. +886-3-571-0178 Fax +886-3-572-9520
Entegris Asia LLC, Taiwan Branch 14F-6, No. 126, Yung-Fu Road Taichung 40762 Taiwan R.O.C. Tel. +886-4-2463-9939 Fax +886-4-2463-9025
Entegris Asia LLC, Taiwan Branch 3F, No. 322, Chung-Cheng Road Hsinshih Township Tainan County 74447 Taiwan R.O.C. Tel. +886-6-589-6008 Fax +886-6-501-3799
rEGION TELEPHONE FAXNorth America 800-394-4083 800-763-5820Germany +49 (0) 351 795 97-0 +49 (0) 351 795 97-499France +33 (0) 4 76 35 73 50 +33 (0) 4 76 35 73 80United Kingdom +33 476 357 354 +33 476 357 380Italy +33 476 357 352 +33 476 357 380Israel +972 (0) 73 221 00 00 +972 (0) 73 221 00 22Japan +81 3-5442-9718 +81 3-5442-9738Malaysia +60-4-427-4200 +60-4-641-3294Korea +82-31 738-5300 +82-31 738-5302Taiwan +886-3-571-0178 +886-3-572-9520Singapore +65 6745-2422 +65 6745-4477China +86 21 2898 6710 +86 21 5080 5598
Entegris regional customer service centers
ENTEGrIS, INC.
Corporate Headquarters129 Concord RoadBillerica, MA 01821 USATel. +1 978-436-6500Fax +1 978-436-6735
www.entegris.com
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