bio-mems and nanotechnology
TRANSCRIPT
Bio-MEMS and Nanotechnology
Course Code: BMED-6004
Prof. Dr. Gyeong-Man Kim
Center of Biomedical Engineering
1 nm = 10-9 m
= 13000 km
Earth
Euro Coin
= 16 mm
Difference: 1,2 x 10-9 !!
“Nanos“ Greek: “Dwarf“
Nanotechnologyis the design, characterization, production
and applications of structures, devices and systems by controlling shape and size
at the nanometer scale.
What is Nanotechnology?
Nanotechnology
Nanotechnology is “Multidisciplinary” !
Materials Science
Physics
Chemistry
Biology
Info.Technology
MechanicalEngineering
ElectricalEngineering
NanoMedicine
What is MEMS?
Micro-Electro-Mechanical Systems
MEMS is a technology, consisted of microelectronic elements, actuators, sensors, and mechanical structures built onto a substrate, which is usually silicon.
They are developed using microfabrication techniques: deposition, patterning, and etching.
The benefits on this small scale integration brings the technology to a vast number and variety of devices.
What is Bio-MEMS?
BioMEMS is biomedical or biological applications of MEMS.
What is MEMS?
MicroElectroMechanical System
➢Micro: Small size, micro-fabricated structures
➢Electro: Electrical signal control e.g., sense, computer, etc. (In / Out)
➢Mechanical: functionality, e.g., actuate, etc. (In / Out)
➢ System: Structures, devices, system controls
MEMS is the integration of mechanical elements, sensors, actuators and electronics on a common silicon substratethrough microfabrication technology.
• Structures support and transmit loads.
• Mechanisms transfer/transform motion AND support and transmit loads.
• Another view: both transfer and transform energy (load*motion)
• Most MEMS are sensors and actuators, i.e., they are transducers.
• Transducers are energy transformers and transmitters.
Structures & Mechanisms
MEMS
What is MEMS?
➢MEMS technology is the integration of mechanical elements, sensors, actuators and electronics on a common silicon substrate through microfabrication technology.
What is MEMS?
Smartphones, tablets, cameras, gaming devices, and many other electronics have MEMS technology inside of them
http://www.chipworks.com/en/technical-competitive-analysis/resources/blog/inside-the-samsung-galaxy-s5/
➢MEMS technology is based on a number of tools and methodologies, which are used to form small structures with dimensions in the micrometer scale.
➢MEMS fabrication approach that conveys the advantages of miniaturization, multiple components, and microelectronics to the design and construction of integrated electromechanical systems.
➢Made up of components between 1-100 µm in size.
➢Devices vary from below one µm up to several mm.
What is MEMS Technology?
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10 nm 1 um 100 um 10 mm 1 m
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Accepted Size Range for MEMS
Components
Microelectronics:
• “brain” that receives, processes, and makes decisions
• data comes from microsensors
Microsensors:
• constantly gather data from environment
• pass data to microelectronics for processing
• can monitor mechanical, thermal, biological, chemical optical, and magnetic readings
Microactuator:
• acts as trigger to activate external device
• microelectronics will tell microactuator to activate device
Microstructures:
• extremely small structures built onto surface of chip
• built right into silicon of MEMS
MEMS Fabrication Process