ii-1

OXC

3

3D SW MEMS

MEMS

PV Peak-Valley: 50nm

ii-2

PV nm 1.5nm

MEMS

10MPa

0.1

Deep RIE Deep RIE 100

PV 50nm 100nmPt

MEMS Si

MEMSMEMS

MEMS

MEMS

A B

ii-3

MEMS Au/Cr Al

1.25 100

SiSiN

6.0 100

D

SW

MEMS

SW

ICIC

2/1000

ii-4

Au Al

CuPI

PI SiN Si1010

Si

SW

ii-5

WXC

WXC

SW

10/1000

DMEMS

SW–

»

MEMS

ii-6

MEMS

MEMS SW

Si Deep RIE

/ / 10nmMEMS Deep RIE MEMS

MEMSIC

MEMS

SW

Cu PI

ii-7

MEMS

ii-8

WSS

MEMS

ii-9

SWMEMS MEMS

Si Deep RIE/ /

WSS

SW

ICS/N IC

SW

ii-10

Au Al

1010

MEMS SW SW

SW

ii-11

MEMS WSS

WDM ROADM

Ovum-RHK StartraxTokyo 2005 2005 12

Single-lor

Multi- l OutputFibers

WDM Fiber IN

Front-EndOptics

DiffractionGrating

Backend Optics

MEMSMirrors

Axis-of-Rotation

MirrorControl Signals

FiberConcentrator

Array

ii-12

ii-13