axcelis gsd he analyzers 99559 liner pump chamber, graphite 17370590 5 99575b liner, gdm-pump...
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G-30-007AH12 03
PO Box 217 Leander, TX USA 78646-0217 ● ● ●800-621-9598
A Resource for Semiconductor Manufacturers
Illustrated Parts Guide forAxcelis GSD HE Analyzers
Note *All graphite parts are available in a VIG version. Contact sales for more information.
G-30-007AH12 032 PO Box 217 Leander, TX USA 78646-0217 ● ● ●800-621-9598
A Resource for Semiconductor Manufacturers
* Glemco offers improvements, modifications, or alternatives to standard OEM replacement components as indicated in red throughout this guide.
Item P/N Description OEMs1 99213 Extension Liner, Graphite 171229302 99259 Accel Graphite Tube 171229503 99264 Exit Liner, Graphite 171229104 99453A Beam Defining Aperture, Graphite 172082405 99481 Long Strike Plate, Graphite 170996616 99489 Aperture, Post Accel, Graphite 171229407 99576 Exit Shield, Outer, Graphite 171005218 99576A Exit Shield, Outer, Graphite, Modified - 3” Extended Strike Zone 171005219 99684 Inner Beam Dump, Graphite 17099631
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87 6
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4
3
2
1
GSD Analyzer 1
G-30-007AH12 033 PO Box 217 Leander, TX USA 78646-0217 ● ● ●800-621-9598
A Resource for Semiconductor Manufacturers
* Glemco offers improvements, modifications, or alternatives to standard OEM replacement components as indicated in red throughout this guide.
Item P/N Description OEMs1 99213 Extension Liner, Graphite 171229302 99259 Accel Graphite Tube 171229503 99264 Exit Liner, Graphite 171229104 99453A Beam Defining Aperture, Graphite 172082405 99466 Outer Exit Shield, Graphite 171228906 99467 Inner Exit Shield, Graphite 171229007 99467A Inner Exit Shield, Graphite, Modified - 1.5” Extended Strike Zone 17122900 REF8 99467B Inner Exit Shield, Graphite, Modified - 3” Extended Strike Zone 17122900 REF9 99481 Long Strike Plate, Graphite 1709966110 99489 Aperture, Post Accel, Graphite 1712294011 99684 Inner Beam Dump, Graphite 17099631
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10
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2
1
GSD Analyzer 2
G-30-007AH12 034 PO Box 217 Leander, TX USA 78646-0217 ● ● ●800-621-9598
A Resource for Semiconductor Manufacturers
* Glemco offers improvements, modifications, or alternatives to standard OEM replacement components as indicated in red throughout this guide.
Item P/N Description OEMs1 99213 Extension Liner, Graphite 171229302 99259 Accel Graphite Tube 171229503 99264 Exit Liner, Graphite 171229104 99453 Exit Aperture, Source Housing, Graphite 171316105 99467 Inner Exit Shield, Graphite 171229006 99467A Inner Exit Shield, Graphite, Modified - 1.5” Extended Strike Zone 17122900 REF7 99467B Inner Exit Shield, Graphite, Modified - 3” Extended Strike Zone 17122900 REF8 99489 Aperture, Post Accel, Graphite 171229409 99591 Liner, Magnet, Duct, Graphite 1723333010 99684 Inner Beam Dump, Graphite 17099631
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4
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2
1
GSD Analyzer 3
G-30-007AH12 035 PO Box 217 Leander, TX USA 78646-0217 ● ● ●800-621-9598
A Resource for Semiconductor Manufacturers
* Glemco offers improvements, modifications, or alternatives to standard OEM replacement components as indicated in red throughout this guide.
Item P/N Description OEMs1 99213 Extension Liner, Graphite 171229302 99259 Accel Graphite Tube 171229503 99264 Exit Liner, Graphite 171229104 99453A Beam Defining Aperture, Graphite 172082405 99467 Inner Exit Shield, Graphite 171229006 99467A Inner Exit Shield, Graphite, Modified - 1.5” Extended Strike Zone 17122900 REF7 99467B Inner Exit Shield, Graphite, Modified - 3” Extended Strike Zone 17122900 REF8 99489 Aperture, Post Accel, Graphite 171229409 99531 Liner, Graphite 1723673010 99531A Liner, Graphite 1723672011 99531B Liner, Graphite, Modified - 1” Strike Zone Thickness 1723672012 99575A Magnet Analyzer, Graphite 1723674013 99581 Threaded Insulating Cap 1716797014 99591 Liner, Magnet, Duct 1723333015 99684 Inner Beam Dump, Graphite 17099631
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1
GSD Analyzer 4
G-30-007AH12 036 PO Box 217 Leander, TX USA 78646-0217 ● ● ●800-621-9598
A Resource for Semiconductor Manufacturers
* Glemco offers improvements, modifications, or alternatives to standard OEM replacement components as indicated in red throughout this guide.
Item P/N Description OEMs1 99213 Extension Liner, Graphite 171229302 99259 Accel Graphite Tube 171229503 99264 Exit Liner, Graphite 171229104 99453A Beam Defining Aperture, Graphite 172082405 99467 Inner Exit Shield, Graphite 171229006 99467A Inner Exit Shield, Graphite, Modified - 1.5” Extended Strike Zone 17122900 REF7 99467B Inner Exit Shield, Graphite, Modified - 3” Extended Strike Zone 17122900 REF8 99489 Aperture, Post Accel, Graphite 171229409 99531 Liner, Graphite 1723673010 99531B Liner, Graphite, Modified - 1” Strike Zone Thickness 1723672011 99575 Magnet Analyzer, Graphite 1716796012 99581 Threaded Insulating Cap 1716797013 99684 Inner Beam Dump, Graphite 1709963114 99867 Pump Extension Liner, Graphite 1728376015 99867A Pump Extension Liner, Graphite, Modified - .77” Strike Zone Thickness 17283760
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65
4
3
2
1
GSD Analyzer 4
G-30-007AH12 037 PO Box 217 Leander, TX USA 78646-0217 ● ● ●800-621-9598
A Resource for Semiconductor Manufacturers
* Glemco offers improvements, modifications, or alternatives to standard OEM replacement components as indicated in red throughout this guide.
Item P/N Description OEMs1 99372 Liner Pump Chamber - Left, Graphite 173706002 99378 Liner, Pump Chamber, Graphite 173233403 99397 Liner Pump Chamber - Right, Graphite 173706104 99559 Liner Pump Chamber, Graphite 173705905 99575B Liner, GDM-Pump Chamber, Graphite 173233506 99591A Liner Magnet Duct, Graphite 17370580
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43
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1
Beamguide Extension, 70° Magnet