applied materials™ xr200s ion implanter€¦ · applied materials™ xr200s ion implanter tool id...

the total ion implantation solution

Ion beam services UK, 36B Inchmuir road, Whitehill industrial estate, Bathgate, EH48 2EP, united kingdom

Email: [email protected]

Ibs group website: www.ion-beam-services.com ibs uk website & shop: www.ionbeamservicesuk.com

APPLIED MATERIALS™ xR200s ION IMPLANTER

TOOL ID IBS2015002 OEM/MODEL AMAT xR200s

SERIAL NUMBER M545 PROCESS IMPLANT

VINTAGE 2001 WAFER SIZE 125 MM

TOOL IS CURRENTLY CONFIGURED FOR 125MM WAFERS. IT CAN BE RECONFIGURED

FOR EITHER 150MM OR 200MM. FULL REFURBISHMENT /INSTALLATION & COMMIS-

SIONING ARE ALSO AVAILABLE AT AN ADDITION COST

EQUIPMENT DATASHEET

SYSTEM APPLIED MATERIALS xR200S

CONTROL SYSTEM STANDARD

SOFTWARE VERSION

GAS BOX POSITION 1—SDS BORON

POSITION 3—SDS PHOSPHOROUS

SOURCE TYPE ULTRA LONG LIFE (IHC)

DUAL BELLOWS EXTRACTION YES

MRS YES

SOURCE LINERS YES

LOW ENERGY BORON YES

Xr BEAM OPTICS YES

DUAL TILT YES ±10OC

DIRECT DRIVE YES

HDPFS YES

FAST PUMP PACKAGE YES

WAFER SIZE 125MM (150MM AND 200MM AVAILABLE)

POWER REQUIREMENTS 208 V, 3 phase, 60 Hz

MAINS MATCHING TRANSFORMER YES

PRINTER/MODEM NO

HOLLOW GRIPPER YES

APPLIED MATERIALS™ xR200s HIGH CURRENT IMPLANTER

EQUIPMENT DATASHEET

SOURCE TURBO PUMP LEYBOLD 1000C

MRS TURBO PUMP LEYBOLD

SOURCE MECH PUMP Edwards QDP40

LOADER MECH PUMP EDWARDS QP80 & QMB

MAIN CHAMBER CYRO CT10

CYRO COMPRESSOR CT 9600 X 2

EQUIPMENT DATASHEET

Documents