Applications of Applications of Micro Electro Mechanical SystemsMicro Electro Mechanical Systems

(MEMS)(MEMS)

Jobin Philip

Introduction

IC invention

Large number of transistors on single silicon chip

Interconnected to functional circuits

Micro-fabricated Membrane Mirrors

12 mm in diameter

Less than 1um in thickness

Micro-fabricated Membrane Mirrors

Optical Switching

High optical efficiency

Good potential for aberrations correction

Coupling efficiency of 3000 interconnections

Micro-fabricated Membrane Mirrors

Two Axis Micro-mirror

Micro-Mirror

Micro-Mirror

Optical Switch

2x2 Optical Switch

Cross State

Bar State

Optical Switch

NxN Optical Link

Agilent Bubble Switch

Segmented Mirrors

Space Optical Telecommunication Reliable, Small in size, Light in weight, & Easy to

fabricate

Air Turbulence causes optical aberrations

Quick response time, therefore able correct optical aberrations

Segmented Micro-Mirrors

Segmented Micro-Mirrors

Grating Light Valve (GLV)Incident Reflected

Oth Mode

Ribbons

Silicon Light Machines: http://www.siliconlight.com

Incident DiffractedDiffracted

+1st Mode

+3rd Mode

Down ribbons

Up ribbons

GLV Projection System Digital Projection System using Grating Light

Valve If pixel is “off”, light is reflected straight off GVL into

the absorbing screen If pixel is “on”, light is diffracted at an angle,

propagating through the lens to the focal plane

GLV

Color Wheel

Lens

Focal Plane

Prism

Screen

Optical Input

Next Generation Projectors

Question…???

Optical Switch