title of the presentation on several lines of text · > analog output 0.5-4.5 v > low...
Post on 24-Mar-2020
1 Views
Preview:
TRANSCRIPT
This document and the information therein are the property of Safran. They must not be copied or communicated to a third party without the prior written authorization of Safran
ColibrysACCELERATIONTILT SENSORS
9/7/2016
This document and the information therein are the property of Safran. They must not be copied or communicated to a third party without the prior written authorization of Safran
TS family Tilt sensors
Colibrys / Confidential / Tilt presentation2
5. Introducing
TS9001:• Product architecture
• Specifications: bias
performance, bias
stability
• Competitive landscape
1. Colibrys
MEMS
technology
2. What is tilt
measurement?
3. Applications 4. TS family
products
specifications
6. Conclusions 7. Sources of
information
8. Annexes
This document and the information therein are the property of Safran. They must not be copied or communicated to a third party without the prior written authorization of Safran
Colibrys / Confidential / Tilt presentation3
OUR VISION
World leader for high-end, robust MEMS
sensors, supported by a commitment of
excellence over the long term
Partner of choice for who wants to pioneer in
innovative high performance MEMS
This document and the information therein are the property of Safran. They must not be copied or communicated to a third party without the prior written authorization of Safran
Colibrys / Confidential / Tilt presentation4
OUR MISSION
Being the strategic partner for MEMS
technology within the Safran group, Safran
Colibrys is a worldwide leader in the high-end
MEMS accelerometer market
This document and the information therein are the property of Safran. They must not be copied or communicated to a third party without the prior written authorization of Safran
MEMS capacitive technology
Colibrys / Confidential / Tilt presentation5
MEMS • Silicon micro-machined sensor chip
• High-end dual side alignment and photolitho
• 3 wafers assembly by silicon fusion bonding (SFB) 3D Bulk Technology
ADC
MEMS ASIC
Mechanics• Spring-mass system
• Large mass and small gap
• Controlled gas damping
1
2
This document and the information therein are the property of Safran. They must not be copied or communicated to a third party without the prior written authorization of Safran
Colibrys key differentiation: Bulk micromachining
Colibrys / Confidential / Tilt presentation6
Surface micro-machining Bulk micro-machining
Sensor design- In plan
displacement
- Out of plan
displacement
Gap control
- Thin proof mass
- Gap control by photolithography and
DRIE etching (precision 17%)
- Gap of ~4 to 6µm ±10’000Å
- Thick proof mass
- Gap control by oxide growth (precision 1.5%)
- Gap of ~2µm ±300Å
Mass- 0.03 to 0.3 milligrams
- Larger noise and lower stability
- 5 to 15 milligrams
- Much lower Brownian noise and better
stability due to larger mass
Capacitor- 2 x 2 to 5pF
- Larger noise and lower stability
- 2 x 15 to 50pF
- Much larger capacitances: required for
low noise and high stability
Manufacturing
- Smaller in size
- Up to three axis
possible with one
single die
- Monolithic
- MEMS above IC
- Rapid etching due to small thickness of
the mass (thickness ~5 to 10µm)
- Lower manufacturing cost
- Larger in size
- Only one axis
- Hybrid assembly
- Longer etching time
due to mass thickness (>350µm).
- More expensive and larger but better
performances (no compromises)
This document and the information therein are the property of Safran. They must not be copied or communicated to a third party without the prior written authorization of Safran
Colibrys key differentiation: Bulk micromachining
Colibrys / Confidential / Tilt presentation7
Surface micro-machining Bulk micro-machining
Sensor design- In plan
displacement
- Out of plan
displacement
Gap control
- Thin proof mass
- Gap control by photolithography and
DRIE etching (precision 17%)
- Gap of ~4 to 6µm ±10’000Å
- Thick proof mass
- Gap control by oxide growth (precision 1.5%)
- Gap of ~2µm ±300Å
Mass- 0.03 to 0.3 milligrams
- Larger noise and lower stability
- 5 to 15 milligrams
- Much lower Brownian noise and better
stability due to larger mass
Capacitor- 2 x 2 to 5pF
- Larger noise and lower stability
- 2 x 15 to 50pF
- Much larger capacitances: required for
low noise and high stability
Manufacturing
- Smaller in size
- Up to three axis
possible with one
single die
- Monolithic
- MEMS above IC
- Rapid etching due to small thickness of
the mass (thickness ~5 to 10µm)
- Lower manufacturing cost
- Larger in size
- Only one axis
- Hybrid assembly
- Longer etching time
due to mass thickness (>350µm).
- More expensive and larger but better
performances (no compromises)
Bulk micromachining combined with hybrid
assembly offer the best opportunity for high-end
performances
This document and the information therein are the property of Safran. They must not be copied or communicated to a third party without the prior written authorization of Safran
What is Tilt?
Tilt is an angle of object inclination with respect to terrestrial
gravity vector (1G).
Fig. 1. tilt angle
What is Tilt measurement?
Colibrys / Confidential / Tilt presentation8
)cos(1][ gga
Fig. 2. Tilt sensor output vs rotation at 360°
Tilt sensor position
This document and the information therein are the property of Safran. They must not be copied or communicated to a third party without the prior written authorization of Safran
Colibrys / Confidential / Tilt presentation9
STANDARD PERFORMANCES: TS9001 – 1GSTATIC MEASUREMENTS UP TO +/-90°
Geotechnical monitoring of critical locations: in-place
inclinometers
Civil Engineering: survey and SHM
Railways: train positioning systems
Military: levelling antennas
This document and the information therein are the property of Safran. They must not be copied or communicated to a third party without the prior written authorization of Safran
Colibrys / Confidential / Tilt presentation10
STANDARD PERFORMANCES TS8002 – 2GSTATIC 3D MEASUREMENTS OR VIBRATION ENVIRONMENTS
Drilling: logging while drilling (LWD)
Railways: train tilt systems
Naval – Military: sonar towed arrays antenna
Industrial: construction machines
This document and the information therein are the property of Safran. They must not be copied or communicated to a third party without the prior written authorization of Safran
Colibrys / Confidential / Tilt presentation11
HIGH PERFORMANCES: TS1000T – 2,5,10G ENERGY SECTOR, HIGH TEMPERATURE
High precision tilt measurement is required for harsh
environments, high depth exploration in Energy market - Oil and
Gas extraction, Fracking, Mining...
TS1000T target applications in Energy market :
MWD (Measurement While Drilling)
HDD (Horizontal Directional Drilling)
Orientation of borehole logging instruments.
This document and the information therein are the property of Safran. They must not be copied or communicated to a third party without the prior written authorization of Safran
HDD,
orientation of
logging
instruments
How to choose an accelerometer for the energy market?
Colibrys / Confidential / Tilt presentation12
Sectors of energy applications
- 40°C + 125°C
Borehole
surveyWireline,
inplane,
inclinometers
Measurement
While Drilling
(MDW)
Logging
survey
< 0.1° all error, EOL
< 0.5-1° all error, EOL
System accuracy
This document and the information therein are the property of Safran. They must not be copied or communicated to a third party without the prior written authorization of Safran
TS family products: specifications
Colibrys / Confidential / Tilt presentation13
Tilt measurement
key parameters
What does it define for
tilt measurement ?
Bias long term
stability
System long lifecycle without re-
calibration;
maintenance economy;
long term accuracy
Non linearity Better SF accuracy
Noise Resolution – lowest acceleration
measured
Reliability of
parameters
Long lifecycle, repeatability of
performances, tight spread
Consumption Adapted for autonomous
system, especially for civil
Engineering
Colibrys Tilt Products
DatasheetUnit TS9001.D TS8002.D TS1002T
Range Typ. (1σ) +/- 1 g (+/-90°) +/- 2g +/- 2g
Bias temperature
coeficient
°/°C <0.006 0.012 0.0086
Bias Long term stability ̽ ° < 0.043 < 0.086 <0.114
Scale factor mV/g 2000 1000 1350
Scale factor temperature
coeficient
ppm/°C 100 100 120
Scale Factor long term
Stability (one Year)
ppm 300 300 1000
Resolution @ 1Hz ° 0.0025 0.0057 0.0004
Noise (in Band) [°/√Hz] 0.0005 0.001 0.0004
Non- Linearity % FS <1 <1 < 0,3
Operating temperature [°C] -40 to 125°C -40 to 125°C - 50+175
Shock (single shock) [g] 6000 6000 6000
Consumption mW 2 2 9.9
Package LCC20 LCC48 LCC20
* the test conditions for the TS1000T are more severe
compared to other Colibrys sensors
This document and the information therein are the property of Safran. They must not be copied or communicated to a third party without the prior written authorization of Safran
The main differentiation factor of Colibrys sensors – accurate functioning in harsh
environments, performance long term stability, high reliability
Those features are indispensable for tilt applications in 4 targeted by TS Family
Markets :
Essential Tilt applications for TS product family
Colibrys / Confidential / Tilt presentation14
Energy Civil
Engineering
Military Railways
This document and the information therein are the property of Safran. They must not be copied or communicated to a third party without the prior written authorization of Safran
Colibrys / Confidential / Tilt presentation15
INTRODUCTION OF TS9001 Architecture
This document and the information therein are the property of Safran. They must not be copied or communicated to a third party without the prior written authorization of Safran
MEMS sensor
> 3D bulk-die
> Optimized for bias stability
> Patended soft die attach process
Stability
Low noise ASIC
> Analog output 0.5-4.5 V
> Low consumption < 400 UA
> Ratiometric output
> Microcontroller for calibration datas
> Ext. temperature sensor
LCC Substrate
> Leadless ceramic package
8.9 mm x 8.9 mm
Finishing: W/Ni/Au
Hermetically sealed
TS9001 sensor architecture
Colibrys / Confidential / Tilt presentation16
This document and the information therein are the property of Safran. They must not be copied or communicated to a third party without the prior written authorization of Safran
Colibrys / Confidential / Tilt presentation17
EACH PRODUCT IS FULLY TESTED
BEFORE DELIVERY TO THE CUSTOMER
CALIBRATIONSBias
Scale factor
Non linearity
Frequency response
MEASURESBias & scale factors
temperature coefficient
on tumble tests
Operating current
consumption
Non linearity
This document and the information therein are the property of Safran. They must not be copied or communicated to a third party without the prior written authorization of Safran
Colibrys / Confidential / Tilt presentation18
A LONG-TERM RELATIONSHIP Long-term supply guarantee
Financial back-up by an international SAFRAN group
Guarantee of product performance proved by track records
Technical expertise
Customized terms & conditions
Excellence in operations and service
Supply chain efficiency
Custom design solution
This document and the information therein are the property of Safran. They must not be copied or communicated to a third party without the prior written authorization of Safran
Colibrys / Confidential / Tilt presentation19
TS FAMILY TARGET SECTORS FOR TILT
MEASUREMENT ARE:
Energy Railway
Civil Engineering Military
Where accurate functionning in harsh environnements,long-term stability of performances are mandatory forSystem confidence
TS FAMILY EXISTS IN:
Standard temperature up to 125 °C
High performance and temperature up to 175°C
This document and the information therein are the property of Safran. They must not be copied or communicated to a third party without the prior written authorization of Safran
Colibrys / Confidential / Tilt presentation20
ALL DOCUMENTATION YOU NEED IN
ONE CLICK:
Datasheets TS9001, TS8002, TS1000TRecommended circuit
Functional Block Diagram
SMD, handling recommandations
Application Notes:Train Positioning
Drilling
Tilt survey
www.safran-colibrys.com
top related