scanning electron microscope, sem jingming long, nanna rut jónsdóttir, kári sveinbjörnsson &...
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Scanning Electron Microscope, SEM
Jingming Long, Nanna Rut Jónsdóttir, Kári Sveinbjörnsson & Guðfinnur
Baldur Skæringsson 12/10/2010
Content
3. Sample preparation3. Sample preparation
2. Device2. Device
1. The principle of SEM1. The principle of SEM
The principle of SEM
0.5~2nm
5~10nm
Device
背向散射電子偵測器
Nitrogen gas inlet
Column
Sample Chamber Door
Controlers
X-Ray Detector
Gold Coater?
Device
Device
Sample preparation
All samples must conduct electricity. To measure a non-conducting sample it must be covered with a thin layer of gold.
Non-conducting samples usually not chemically analyzed. Sulphur cannot be analyzed in a non-conducting sample, Au and S appear at similar places in X-ray.
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Example
Secondary electron Backscattered electron
Example
X ray characteristics analysis of element
Energy dispersive spectrometry EDS
E N D
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