parylene-based pressure sensor for iop measurement

2007/12/26 Sensing and Actuation in Miniaturized Systems presentation#3 Chia-Min Lin

Parylene-based pressure sensor for IOP measurement

Presenter : Chia-Min Lin (9535811)

Research from Caltech Micromachining Laboratory

2007/12/26 Sensing and Actuation in Miniaturized Systems presentation#3 Chia-Min Lin

Outline

Motivation Design concept / Fabrication process Results Summary

2007/12/26 Sensing and Actuation in Miniaturized Systems presentation#3 Chia-Min Lin

Motivation

Glaucoma is a debilitating disease affecting the optic nerve that results in loss of vision for hundreds of millions of people worldwide.

Raised intraocular pressure is a significant risk factor for developing glaucoma.

Wikipedia

2007/12/26 Sensing and Actuation in Miniaturized Systems presentation#3 Chia-Min Lin

Traditional IOP sensor

Contact tonometer Non-contact tonometer

Wikipedia

2007/12/26 Sensing and Actuation in Miniaturized Systems presentation#3 Chia-Min Lin

Implantable biodevice

P.-J. Chen et al., JMM, 2007.

2007/12/26 Sensing and Actuation in Miniaturized Systems presentation#3 Chia-Min Lin

Bourdon tube theory

Wikipedia

2007/12/26 Sensing and Actuation in Miniaturized Systems presentation#3 Chia-Min Lin

Microchannel

M. J. de Boer et al., JMEMS, 2000.

SurfaceBonding Buried

2007/12/26 Sensing and Actuation in Miniaturized Systems presentation#3 Chia-Min Lin

Parylene microchannel

P.-J. Chen et al., μTAS’05.

Concept and Fabrication results Fabrication results

2007/12/26 Sensing and Actuation in Miniaturized Systems presentation#3 Chia-Min Lin

Cont’d

P.-J. Chen et al., Lab Chip, 2006.

2007/12/26 Sensing and Actuation in Miniaturized Systems presentation#3 Chia-Min Lin

Spiral-tube pressure sensor (1G)

P.-J. Chen et al., IEEE MEMS’05.

Apply Bourdon tube theory Fabrication process

Unpowered

2007/12/26 Sensing and Actuation in Miniaturized Systems presentation#3 Chia-Min Lin

Cont’d

Fabrication results Testing in water results

P.-J. Chen et al., Sensors and Actuators A, 2006.

2007/12/26 Sensing and Actuation in Miniaturized Systems presentation#3 Chia-Min Lin

Implantable pressure sensor (2G)

P.-J. Chen et al., MMB’06.

Fabrication processUnpowered

Monolithic fabrication and packaging

2007/12/26 Sensing and Actuation in Miniaturized Systems presentation#3 Chia-Min Lin

Cont’d

Fabrication results Implatable results

2007/12/26 Sensing and Actuation in Miniaturized Systems presentation#3 Chia-Min Lin

Cont’d

P.-J. Chen et al., JMM, 2007.

P.-J. Chen et al., μTAS’06.

In vitro (water)

2007/12/26 Sensing and Actuation in Miniaturized Systems presentation#3 Chia-Min Lin

Cont’d

In vivo (rabitt)Ex vivo (rabitt)

2007/12/26 Sensing and Actuation in Miniaturized Systems presentation#3 Chia-Min Lin

Summary

An implantable, unpowered micromechanical parylene-based pressure sensor has been successfully developed as a part of a novel paradigm for intraocular pressure (IOP) sensing.

Monolithic fabrication and packaging of the microdevices have been successfully demonstrated.

The micromachined IOP sensors were characterized in vitro, ex vivo, as well as in vivo.

2007/12/26 Sensing and Actuation in Miniaturized Systems presentation#3 Chia-Min Lin

Thanks for your attention !