nrc-london (micromachining) 2017-18

NRC-AST-London Capabilities in Micromachining by Evgueni Bordatchev NRC-AST-London evgueni.bordatchev@nrc-cnrc.gc.ca

February 2017

Evgueni Bordatchev, NRC-AST-London, 2017

High Aspect Ratio Pins

2

Ø200um

6mm

1mm square

aspect ratio = 1:30 (< 4 hrs)

Evgueni Bordatchev, NRC-AST-London, 2017

High Aspect Ratio Spiral

3

1:280 aspect ratio wall: 25 um width, 7 mm height (< 9 hrs)

7 mm

25 um

Evgueni Bordatchev, NRC-AST-London, 2017

Array of Vertical Tubes

4

4.9 mm

Ø1 mm Ø0.35 mm

Evgueni Bordatchev, NRC-AST-London, 2017

Egg Carton 3D Structure

5

16 mm x 16 mm x 4 mm

Evgueni Bordatchev, NRC-AST-London, 2017

High Aspect Ratio Honeycomb structure

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3 mm 25µm

7mm

1:280 aspect ratio wall: 25 um width, 7 mm height (< 6 hrs)

Evgueni Bordatchev, NRC-AST-London, 2017

Microfluidic die on thin metal foil

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micro-fluidic die in brass (38 µm thick)

38um depth 15um

replica in thin PMMA sheet

Evgueni Bordatchev, NRC-AST-London, 2017

Micro-Optical Structure (micro-lens)

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a) insert b) geometry c) surface quality

30 mm x 30 mm

Evgueni Bordatchev, NRC-AST-London, 2017

Die for concave micro-lens array

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Ra = 50 ÷ 70 nm

Evgueni Bordatchev, NRC-AST-London, 2017

V-groves on 3D surfaces (curved)

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16 mm × 16 mm Brass

Sa ≤ 10 nm

pitch: 200 µm depth: 100 µm included angle: 90°

R 100 mm

Evgueni Bordatchev, NRC-AST-London, 2017

V-groves on 3D surfaces (curved)

11

16 mm × 16 mm PMMA Sa ≤ 10 nm

R 100 mm

pitch: 200 µm depth: 100 µm included angle: 90°

Evgueni Bordatchev, NRC-AST-London, 2017

V-groves on 3D surfaces (waved)

12

16 mm × 16 mm PMMA

Sa ≤ 10 nm

pitch: 200 µm depth: 100 µm included angle: 90°

R 18 mm

R 18 mm

R 18 mm

Evgueni Bordatchev, NRC-AST-London, 2017

Micromilling: pyramid and thin wall

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1 mm wall width: 0.05 mm wall depth: 2 mm aspect ratio: 1:40

Sa : 140–200 nm (pyramid side

surface) Sa: 80–100 nm

(bottom along tool path)

Evgueni Bordatchev, NRC-AST-London, 2017

Bullseye Plasmonic Lens

14

top

bottom

25 mm

Evgueni Bordatchev, NRC-AST-London, 2017

Linear array of V-grooves (Al) 0.25 mm step, 0.15 mm depth

15

250X

88.710

149.5um 249.35um

Cutting

controlled directional reflectivity

~90 deg ~45 deg ~65 deg

Evgueni Bordatchev, NRC-AST-London, 2017

Planar Micro-optical Prismatic Elements (25 x 25 x 8 µm)

16

25µm

25µm

Evgueni Bordatchev, NRC-AST-London, 2017

Direct machining of plastics (e.g. PMMA) with optical surface quality

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direct machining of plastics with optical quality

Ra < 40 nm (max) and 17 nm (min)

40 x 40 x 40 µm pyramids (60 µm apart)

40 µm

60 µm

Evgueni Bordatchev, NRC-AST-London, 2017

Flycutting machining of brass with optical surface quality

18

flycutting

Ra = 3.7 nm over 1 mm2

area

Evgueni Bordatchev, NRC-AST-London, 2017

Milling of flat metallic surfaces (brass) with optical surface quality

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micromilled plate

min Ra = 13.6 nm

Sa = 43.5 nm over 1 mm2 area

Evgueni Bordatchev, NRC-AST-London, 2017

Micromilling of flat surfaces (Sa = 12 nm)

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Sa = 12 nm 11 x 11 mm

Evgueni Bordatchev, NRC-AST-London, 2017

Micromilling of a microfluidic die (brass)

21

Sa = 47.13 nm Sa = 42.04 nm

Sa = 46.71 nm Sa = 85.32 nm

10 mm

54 mm

Evgueni Bordatchev, NRC-AST-London, 2017

Direct machining of plastics (e.g. PMMA) with optical surface quality (microfluidic chip)

22

Evgueni Bordatchev, NRC-AST-London, 2017

Direct machining of plastics (e.g. PMMA) with optical surface quality (microfluidic chips)

23

direct machining of plastics with optical quality

Ra < 20 nm

Evgueni Bordatchev, NRC-AST-London, 2017

Micromachining of Cemented Carbide (95 HRA): Surface Quality

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Evgueni Bordatchev, NRC-AST-London, 2017

Micromachining of Cemented Carbide (95 HRA): Surface quality (Sa)

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Sa:

Evgueni Bordatchev, NRC-AST-London, 2017

Light Pipe Insert (Brass)

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Evgueni Bordatchev, NRC-AST-London, 2017

Laser texturing of super-hydrophobic surfaces: Water drop test

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Evgueni Bordatchev, NRC-AST-London, 2017

Laser texturing of super-hydrophobic surfaces: Self-cleaning performance

28

Evgueni Bordatchev, NRC-AST-London, 2017

Laser texturing of super-hydrophilic surfaces: Water drop test

29

Evgueni Bordatchev, NRC-AST-London, 2017

Laser texturing of super-hydrophilic surfaces: Vertical super-hydrophilic time-lapse

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Evgueni Bordatchev, NRC-AST-London, 2017

Texturing of Al alloy

31

14 mm x 14 mm

Evgueni Bordatchev, NRC-AST-London, 2017

Texturing of PMMA plastics

32

14 mm x 14 mm

Evgueni Bordatchev, NRC-AST-London, 2017

Texturing of grey-scale images

33

10 mm x 10 mm

Evgueni Bordatchev, NRC-AST-London, 2017

Texturing using retroreflective structures in plastics and in metal

34

Evgueni Bordatchev, NRC-AST-London, 2017

Capabilities in Micromachining, Micro-optics and Surface Functionalization

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Contact information: Dr. Evgueni Bordatchev NRC-AST-London Automotive and Surface Transportation 1-519-430-7107 evgueni.bordatchev@nrc.gc.ca