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PSE-Programme-2004.doc/t
Ninth International Conference on Plasma Surface Engineering
Conference and Exhibition
Final Programme
September 13 – 17, 2004
Garmisch-Partenkirchen (Germany)
Organised by the European Joint Committee on Plasma and Ion Surface
Engineering (EJC/PISE)
PSE 2004, Garmisch-Partenkirchen (Germany) September 13 – 17, 2004
PSE-Programme-2004.doc
Scope of the PSE Conference: Applications of Plasma and Ion Beam Techniques in Surface Engineering and their Fundamentals The Ninth International Conference on Plasma Surface Engineering will be held from Monday, September 13 to Friday, September 17, 2004,in Garmisch-Partenkirchen. The conference is organised by the European Joint Committee on Plasma and Ion Surface Engineering. In view of the strong interest in the eight preceding PSE conferences with more than 600 delegates from Europe and overseas countries, these biennial conferences have become a well-established and prominent forum in the field of plasma and ion/particle beam assisted surface and thin film technology. It is the aim of the PSE conferences to provide an opportunity for the presentation of recent progress in research, development and applications of plasma and ion/particle beam surface modification and engineering, and of plasma and ion/particle beam assisted deposition of coatings and thin films. The presentations will contribute to the clarification of the relationships between the process parameters, the structural properties and the functional properties of the modified surface coatings and thin films, so as to bridge the gap between those involved in basic research and those who have to meet the rapidly increasing demands of industrial applications. Conference Chairman: H. Störi, Vienna (A) Conference Co-Chairman: H. Holleck, Karlsruhe (D) K. Rim, Suwon (ROK) International Scientific Committee S. Berg, Uppsala (S) W. Fleischer, Venlo (NL) J.I. Onate, San Sebastian, (E) J. Bottiger, Aarhus (DK) M. Hecq, Mons (B) P. Panjan, Ljubljana (SL) I. Braceras, San Sebastian (E) A.S. Korhonen, Hut (SF) H.K. Pulker, Innsbruck (A) E. Broszeit, Darmstadt (D) A. Matthews, Sheffield (UK) A. Ricard, Toulouse (F) D. Cameron, Dublin (IRL) H. Michel, Nancy (F) P. Rödhammer, Reutte (A) A. Cavaleiro, Coimbra (P) T. Müller, Wels (A) M.C.M. V. d.Sanden, Eindhoven (NL) R. D`Agostino, Bari (I) J. Musil, Plzen (CZ) K. Zdunek, Warsaw (PL) Advisory Board H. Bolt, Garching (D) P.J. Kelly, Salfort (UK) Y. Segui, Toulouse (F) A. Bouchoule, Orleans (F) S. C. Kwon, Changwon (ROK) R.P. Shimshock, Mountain View (USA) G.A. Collins, Menai (AUS) J. J. Lee, Seoul (ROK) M. Sjöstrand, Stockholm (S) F. Cui, Beijing (CHINA) G.R. Lucovsky, Raleigh (USA) J. van Stebut, Nancy (F) H. Dimigen, Braunschweig (D) R. Messier, Pennsylvania (USA) O. Takai, Nagoya (J) H. Fujiyama, Nagasaki (J) S. Miyake, Osaka (J) M.R. Wertheimer, Montreal (CDN) R. Grün, Siegen (D) W. Möller, Dresden (D) R. Wilhelm, Garching (D) J.G. Han, Suwon (ROK) W.-D. Münz, Sheffield (UK) G.K. Wolf, Heidelberg (D) J. Heberlein, Minneapolis (USA) H. Oechsner, Kaiserslautern (D) T. Yoshida, Tokyo (J) S. Hogmark, Uppsala (S) A. Ohl, Greifswald (D) R. Kassing, Kassel (D) R.J. Peters, Duesseldorf (D) Editorial Board U. Helmersson, Linköping (S) C. Oehr, Stuttgart (D) H. Störi, Vienna (A) H. Holleck, Karlsruhe (D) V. Rigato, Legnaro (I) R. Suchentrunk, Egmating (D) Honorary Founding Chairman K.-T. Rie, Braunschweig (D) Conference Management and Secretary VDI Technologiezentrum GmbH Dr. Karin Reichel Marion Böckmann Graf-Recke-Str. 84 D-40239 Duesseldorf (Germany) http://www.akplasma.org/pse2004.php3 e-mail: akplasma@vdi.de Tel: +49 211 6214 -567 Fax: +49 211 6214 - 484 European Joint Committee on Plasma and Ion Surface Engineering (EJC/PISE) TU Braunschweig Prof. Dr.-Ing. K.-T. Rie (Chairman) Bienroder Weg 53 D-38108 Braunschweig (Germany) Tel: +49 531 391 9402 / 9406 Fax: +49 531 391 9400
Saturday / Sunday, September 11 – 12, 2004 Room Zugspitze
PSE 2004 1
Tutorial “Fundamentals and Trends in Plasma Surface Processing”
in connection with 9th International Conference on Plasma Surface Engineering (PSE 2004) Time Saturday, September 11 13:30 – 14:45 FUNDAMENTALS OF PLASMAS FOR THIN FILM DEPOSITION
H. Kersten Institute of Low-Temperature Plasma Physics, Greifswald (Germany)
14:45 – 16:00 PLASMA-SURFACE INTERACTION AND ION BOMBARDMENT
W. Möller Forschungszentrum Rossendorf, Dresden (Germany)
16:00 – 16.30 coffee break 16:30 – 17:45 FUNDAMENTALS OF REACTIVE SPUTTERING
S. Berg Ångstrom Laboratory, University of Uppsala (Sweden)
17:45 – 19:00 HIGH-POWER PULSED MAGNETRON SPUTTERING
U. Helmersson University of Linköping (Sweden)
19:30 Dinner and Social Get-Together Sunday, September 12
8:45 – 10:00 ADVANCED PLASMA DIAGNOSTICS FOR THIN FILM DEPOSITION
M.C.M. van de Sanden Dept. of Applied Physics, Eindhoven University of Technology (The Netherlands)
10:00 – 11:15 PROCESS CONTROL FOR LARGE AREA MAGNETRON SPUTTERING
J. Strümpfel Von Ardenne Anlagentechnik GmbH, Dresden (Germany)
11:15 – 12:30 THIN FILM STRESS AND TEXTURE CONTROL
J. Bøttiger Institute of Physics and Astronomy, University of Århus (Denmark)
12:30 – 14:00 Lunch 14:00 – 15:15 CARBON-BASED HARD COATINGS
B. Schultrich Fraunhofer Institute for Material and Beam Technology, Dresden (Germany))
15:15 – 16:30 PLASMA TREATMENT OF POLYMERS
Chr. Oehr Fraunhofer Institute of Interfacial Engineering and Biotechnology, Stuttgart (Germany
Please note that an additional registration for the tutorial is necessary. An early registration is recommended because the number of participants is limited. The registration form is also available at www.akplasma.org/pse2004.php3
PSE 2004, Garmisch-Partenkirchen September 13 – 17, 2004
PSE 2004 2
Tutorial Saturday / Sunday, September 11 – 12, 2004 Tutorial ”Fundamentals and Trends in Plasma Surface Processing” Room Zugspitze, see page 1 Social Events / Opening Ceremony For delegates and accompanying persons the Welcome Reception and the combined Industrial/Bavarian Evening on Tuesday evening are included in the registration fee. For organisational reasons it is indispensable to mark the respective box on the registration form. Monday, September 13, 2004 11:00 – 14:00 Opening Ceremony and Welcome Reception Room Richard Strauss Tuesday / Wednesday, September 14 - 15, 2004 Industrial Exhibition Room Werdenfels and Foyer Tuesday September 14, 2004 18:30 – 23:00 Combined Industrial and Bavarian Evening in combination with the poster session in the Congress Center Room Werdenfels and Foyer, First Floor, Restaurant Tuesday September 14, 2004 15:10 – 18:20 Workshop: Successful Applications of Plasma and Ion-based Processes The Workshop is organised by Arbeitskreis Plasmaoberflächentechnologie (PISE Germany), VDI Technologiezentrum GmbH and the Society of Vacuum Coaters (SVC). Room Olympia Wednesday, September 15, 2004 16:00 – 18:50 Workshop: Thin Film Quality - Standardisation of Test Methods & Supporting Measures The workshop is organised by BAM (Germany), NPL (UK), VITO (Belgium) and CEN/TC 184/WG5 Room Zugspitze Special Events (only for invited members) Monday, September 13, 2004 19:30 – 22:00 Meeting EJC/PISE Thursday, September 16, 2004 18:30 – 19:30 Meeting DGPT Job Placement Center / Technology Placement Center During the conference an information board is placed in the foyer as ”job placement center”. Companies which would like to offer a job or participants who are looking for a new job will find respective forms for completion. The „technology placement center“ will act as an intermediary for scientific/technological queries and will support cooperative ventures and proposals for problem-solving. Contacts can be arranged on request at the conference office. Visiting Tours Garmisch–Partenkirchen is a well-known resort in the foothills of the Bavarian Alps, embedded in an enchanting landscape of mountains, lakes, villages, baroque churches, and famous castles of the Bavarian kings. Several bus tours are offered by the tourist-office which is located next to the Kongresshaus in Garmisch-Partenkirchen.
Monday, September 13th, 2004 Room Richard Strauss
PSE 2004 3
11:00 – 12:30 Opening
Opening Ceremony H. Störi, Conference Chairman
Welcome Address Mayor of Garmisch-Partenkirchen
Materials Research in the 6th Framework Programme J. L. Vallés European Commission, Brussels (Belgium)
Welcome Reception 14:15 – 14:55 Chairman: A. Ricard, Toulouse (France) Plenary Lecture P1
REAL TIME IN SITU DIAGNOSTICS OF PVD GROWTH USING SYNCHROTRON RADIATION Jørgen Bøttiger Institute of Physics and Astronomy, Aarhus University (Denmark)
15:10 – 16:40 Poster Session (Foyer and First Floor) Oral Session MoA (afternoon session): Large Area Coatings Chairman: G. Bräuer, Braunschweig (Germany) 16:40 – 17:10 Keynote Lecture K1
MICROWAVE PECVD FOR LARGE AREA COATING" M. Liehr, M. Diegues-Campo Applied Films GmbH, Alzenau (Germany)
17:10 – 17:30 MoA1
PLASMA ACTIVATED ELECTRON BEAM EVAPORATION FOR LARGE AREA HARD COATING J.-P. Heinss, Ch. Metzner, B. Scheffel, O. Zywitzki Fraunhofer-Institut für Elektronenstrahl- und Plasmatechnik (FEP), Dresden (Germany)
17:30 – 17:50 MoA2
LINEAR RADIO FREQUENCY PLASMA SOURCES FOR LARGE SCALE INDUSTRIAL APPLICATIONS IN PHOTOVOLTAICS H. Schlemm, M. Fritzsche, D. Roth Roth & Rau Oberflächentechnik AG, Hohenstein-Ernstthal (Germany)
17:50 – 18:10 MoA3
INVESTIGATION OF THE PRACTICABILTY OF LOW-PRESSURE MICROWAVE PLASMAS IN THE STERILISATION OF FOOD PACKAGING MATERIALS AT INDUSTRIAL LEVEL J. Schneider1, K. M. Baumgärtner2, J. Feichtinger3, J. Krüger1, P. Muranyi4, A. Schulz1, M. Walker1, J. Wunderlich4, U. Schumacher1 1 Institut für Plasmaforschung, University of Stuttgart, Stuttgart (Germany) 2 Muegge Electronic GmbH, Reichelsheim (Germany) 3 Robert Bosch GmbH, Gerlingen-Schillerhöhe (Germany) 4 Fraunhofer Institut für Verfahrenstechnik und Verpackung, Freising (Germany)
18:10 – 18:30 MoA4
DEVELOPMENT OF A NEW METER-SCALE LARGE-AREA RF PLASMA SOURCE WITH CONTROL CAPABILITIES OF POWER DEPOSITION PROFILES BY INDEPENDENTLY-OPERATED MULTIPLE LOW-INDUCTANCE ANTENNA UNITS Y. Setsuhara1, A. Ebe2, T. Shoji3, K. Takahashi1 and K. Ono1 1 Department of Aeronautics and Astronautics, Graduate School of Engineering, Kyoto University (Japan) 2 EMD Corporation, Kyoto (Japan) 3 Department of Energy Engineering and Science, Graduate School of Engineering, Nagoya University (Japan)
Monday, September 13th, 2004 Room Richard Strauss
PSE 2004 4
18:30 – 18:50 MoA5
REACTIVE MAGNETRON SPUTTERING OF LARGE AREA Nb2O5 FILMS DEPOSITED FROM BOTH CERAMIC AND METAL TARGETS IN MF AND DC MODE J. Struempfel1, F. Milde1, Ch. Koeckert1, D. Wurczinger2, A. Schintlmeister3 1 VON ARDENNE GmbH, Dresden (Germany), 2 SenVac GmbH, Friedberg (Germany) 3 PLANSEE AG, Reutte (Austria)
Monday, September 13th, 2004 Room Olympia
PSE 2004 5
14:15 – 14:55 Plenary Lecture P1 (see page 3, Room Richard Strauss) 15:10 – 16:40 Poster Session (Foyer and First Floor) Oral Session MoB (afternoon session): Plasma-CVD Chairman: Th. Müller, Wels (Austria) 16:40 – 17:10 Keynote Lecture K2
PLASMA PRODUCTION OF SILICON CLUSTERS AND NANOCRYSTALLINE SILICON PARTICLES: A NEW WAY FOR NANOSTRUCTURED SILICON THIN FILMS P. Roca i Cabarrocas Laboratoire de Physique des Interfaces et des Couches Minces (UMR 7647 CNRS), Ecole Polytechnique, Palaiseau (France)
17:10 – 17:30 MoB1
NANOCRYSTALLINE OXIDE COATINGS BY THERMAL AND PLASMA ENHANCED CHEMICAL VAPOUR DEPOSITION S. Mathur and P. Kuhn Institute of New Materials, Saarbrücken (Germany)
17:30 – 17:50 MoB2
RF POWER EFFECT ON TEOS/O2 PECVD OF SiO2 THIN FILMS Ch. Voulgaris, E. Amanatides, D. Mataras Plasma Technology Laboratory, Dept. Chem. Engineering, University of Patras (Greece)
17:50 – 18:10 MoB3
MULTIFUNCTIONAL FILMS FOR TEMPERATURE SENSITIVE MATERIALS PREPARED BY PACVD USING ORGANOMETALLIC PRECURSORS J. Mahrholz1, T. Hosenfeldt2, K.-T. Rie3 1,3 Institut für Oberflächentechnik und Plasmatechnische Werkstoffentwicklung Technische Universität Braunschweig (Germany) 2 INA-SCHAEFFLER KG, Herzogenaurach (Germany)
18:10 – 18:30 MoB4
DEVELOPMENT OF PE-CVD Si/C/N:H-FILMS FOR TRIBOLOGICAL UND CORROSIVE COMPLEX-LOAD CONDITIONS D. Probst1, H. Hoche1, Y. Zhou2, R. Hauser2, T. Stelzner3, H. Scheerer1, E. Broszeit1, C. Berger1, R. Riedel2, H. Stafast3 1 Institute of Materials Technology, Darmstadt University of Technology (Germany) 2 Department for Disperse Solids, Darmstadt University of Technology (Germany) 3 Institute for Physical High Technology, Jena (Germany)
18:30 – 18:50 MoB5
CHEMICAL VAPOR DEPOSITION OF ORGANOSILICON COMPOSITE FILMS FOR POROUS LOW-K DIELECTRICS A. D. Ross and K. K. Gleason Department of Chemical Engineering, Massachusetts Institute of Technology Cambridge ( USA)
Monday, September 13th, 2004 Room Zugspitze
PSE 2004 6
14:15 – 14:55 Plenary Lecture P1 (see page 3, Room Richard Strauss) 15:10 – 16:40 Poster Session (Foyer and First Floor) Oral Session MoC (afternoon session): Characterization and Diagnostics Chairman: J. Engemann, Wuppertal (Germany) 16:40 – 17:10 Keynote Lecture K3
PLASMA SURFACE INTERACTIONS IN TREATMENTS OF ORGANIC MATERIALS T. Belmonte, T. Czerwiec, G. Henrion, V. Hody, J.M. Thiebaut Laboratoire de Science et Génie des Surfaces - Ecole des Mines - Nancy (France)
17:10 – 17:30 MoC1
COMPARISON OF THE IONISATION EFFICIENCY OF TWO IONISED PHYSICAL VAPOUR DEPOSITION PROCESSES : MAGNETRON DISCHARGE ASSISTED BY MICROWAVE PLASMA OR RADIO-FREQUENCY PLASMA. L. De Poucques, J. C. Imbert, P. Vasina1, C. Boisse-Laporte, L. Teulé-Gay, M. Touzeau. Lab. de Phys. des Gaz et des Plasmas, Université Paris-Sud (France) 1 Department of Physical Electronics, Brno (Czech Republic)
17:30 – 17:50 MoC2
DIAGNOSTIC OF AN ELECTROLYTIC MICROARC PROCESS FOR ALUMINIUM ALLOYS OXIDATION F. Mecuson1,2,3, T. Czerwiec2, T. Belmonte2, L. Dujardin3, A. Viola3 , G. Henrion1 1 Laboratoire de physique des Milieux Ionisés et Applications, Université Henri Poincaré, Vandoeuvre (France) 2 Laboratoire de Science et Génie des surfaces, Ecole des Mines, Nancy (France) 3 Messier-Bugatti, Laboratoire DS/T/UA, Molsheim (France)
17:50 – 18:10 MoC3
PLASMA AND ION BEAM CHARACTERIZATION BY NON-CONVENTIONAL METHODS H. Kersten, R. Wiese, M. Hannemann, A. Kapitov, F. Scholze1, H. Neumann1 INP e. V. Greifswald (Germany), 1 IOM e. V. Leipzig (Germany)
18:10 – 18:30 MoC4
DENSITIES OF N AND O-ATOMS IN N2-O2 FLOWING GLOW DISCHARGES AND POST-DISCHARGES BY ACTINOMETRY AND NO TITRATION J. Henriques1,2 , S. Villeger1, J. Levaton3, J. Nagai4 , S.I.V. Santana4, J. Amorim3,4 and A. Ricard1 1 CPAT- Toulouse (France) 2 IST- Lisboa (Portugal) 3 Laboratório Interdisciplinar de Materiais (LABMAT) - Universidade Federal de Santa Catarina, Florianópolis (Brazil) 4 Departamento de Física, Instituto Tecnológico de Aeronáutica, Centro Técnico Aeroespacial, São José dos Campos (Brazil)
18:30 – 18:50 MoC5
ELECTRON DENSITY MEASUREMENTS IN A MICROWAVE-EXCITED DEPOSITION PLASMA G. F. Leu, A. Brockhaus, J. Engemann Forschungszentrum für Mikrostrukturtechnik – fmt, University of Wuppertal (Germany)
Tuesday, September 14th, 2004 Room Richard Strauss
PSE 2004 7
08:30 – 9:10 Chairman: W. Möller, Dresden (Germany) Plenary Lecture P2
STRESS GENERATION AND RELIEF PROCESSES IN THIN FILMS DEPOSITED WITH ENERGETIC IONS M.M.M. Bilek, L. Ryves, T. Oates, G. Pearce, D.R. McKenzie
School of Physics, University of Sydney (Australia) Oral Session TuA (morning session): PVD I Chairmen: P. Eh. Hovsepian, Sheffield (United Kingdom)
R. Tietema, Venlo (The Netherlands) 09:20 – 09:50 Keynote Lecture K4
APPLICATION OF INDUCTIVELY COUPLED PLASMA TO CVD AND PVD Jung-Joong Lee School of Materials Science & Engineering, Seoul National University, Seoul (Korea)
09:50 – 10:10 TuA1
PEMFC ELECTRODE PROCESSING BY PLASMA SPUTTERING A. Caillard1, P. Brault1, C. Charles2, R. Boswell2, J. Durand3, S. Roualdes3 1 Groupe de Recherches sur l’Energétique des Milieux Ionisés, Université d’Orléans (France) 2 Plasma Research Laboratory, Research School of Physical Science and Engineering, Australian National University CANBERRA (Australia) 3 IEMM, Université Montpellier II, Montpellier (France)
10:10 – 10:30 TuA2
INFLUENCE OF TARGETS CONFIGURATION ON THE STRUCTURE AND HARDNESS OF MAGNETRON SPUTTERED TiAl THIN FILMS. A. Manaia, J.C. Oliveira and A. Cavaleiro ICEMS, Departamento de Engenharia Mecanica, Universidade de Coimbra (Portugal)
10:30 – 10:50 TuA3
GOOD TiN FILMS ON COLD SUBSTRATES BY ENERGETIC CLUSTER IMPACT (ECI) A. Haefele, O. Fiess and H. Haberland 1 Department of Physics and Freiburg Materials Research Center, Freiburg (Germany)
10:50 – 11:10 coffee break 11:10 – 11:30 TuA4
WEAR AND CORROSION RESISTANT PVD-COATINGS FOR MAGNESIUM ALLOYS: DEVELOPMENT, CHARACTERISATION AND EXPERIMENTAL RESULTS H. Hoche1, C. Blawert2, E. Broszeit1, C. Berger1 1 Institute of Materials Technology & State Testing Institute for Materials Darmstadt, Technical University Darmstadt (Germany) 2 GKSS Research Center, Geesthacht (Germany)
11:30 – 11:50 TuA5
FORMATION OF NANOSTRUCTURED Re-Ni-Cr DIFFUSION BARRIER COATINGS ON Nb SUPERALLOYS BY THERMIONIC VACUUM ARC (TVA) METHOD C. P. Lungu1, I. Mustata1, G. Musa1, A.M. Lungu1, V. Zaroschi1, K. Iwasaki2, Y. Matsumura2, R. Tanaka2, I. Iwanaga2, H. Tanaka2, T. Oi2, K. Fujita2 1 Japan Ultra-high Temperature Materials Institute, Ube, Yamaguchi (Japan)
2 National Institute for Lasers, Plasma and Radiation Physics, Magurele-Bucharest (Romania)
11:50 – 12:10 TuA6
TRIBOLOGICAL AND CORROSION RESISTANCE PROPERTIES OF Cr-N AND Cr-Si-N COATINGS REACTIVELY SPUTTER DEPOSITED D. Mercs, S. Naamane, N. Bonasso, C. Coddet Laboratoire d'Etudes et de Recherche sur les Matériaux, les Procédés et les Surfaces (LERMPS) / Université de Technologie de Belfort – Montbéliard (UTBM) - BELFORT Cedex (France)
Tuesday, September 14th, 2004 Room Richard Strauss
PSE 2004 8
12:10 – 12:30 TuA7
Zr-BASED METALLIC GLASS THIN FILMS SYNTHESIZED BY PLASMA SPUTTERING A.L. Thomann1, M. Pavius1, P. Brault1, A. Caillard1, P. Gillon2 1 GREMI CNRS/Université d’Orléans (France) 2 LCSR CNRS, Orléans (France)
12:30 – 12:50 TuA8
GROWTH PHENOMENA IN ROOM-TEMPERATURE PULSED LASER DEPOSITED CHROMIUM AND CHROMIUM NITRIDE COATINGS J.M. Lackner1, W. Waldhauser1, R. Berghauser1, R. Ebner1, G. Kothleitner2 1 Laser Center Leoben, JOANNEUM RESEARCH Forschungsgesellschaft mbH, Niklasdorf (Austria) 2 Research Institute for Electron Microscopy (ZfE), Graz (Austria)
Tuesday, September 14th, 2004 Room Olympia
PSE 2004 9
08:30 – 9:10 Plenary Lecture P2 (see page 7, Room Richard Strauss) Oral Session TuB (morning session): Surface Modification (Etching, Cleaning,
Functionalisation) Chairman: Y. Segui, Toulouse (France) 09:20 – 09:50 Keynote Lecture K5
INTERACTION OF LOW DENSITY FULLY DISSOCIATED OXYGEN PLASMA WITH POLYMER-MATRIX COMPOSITES M. Mozetic Institute Jozef Stefan, Ljubljana (Slovenia)
09:50 – 10:10 TuB1
FILM PROPERTY ENHANCEMENT THROUGH LINEAR ION SOURCE SUBSTRATE PRE-TREATMENT J.W. Bradley1, G.T. West2, P.J. Kelly2 and I. Swindells1 1 Dept of Physics, UMIST, Manchester (United Kingdom) 2 Surface Engineering Group, University of Salford (United Kingdom)
10:10 – 10:30 TuB2
IMPROVEMENT OF AMINO GROUP FUNCTIONALIZATION OF POLYMERS BY NON-DEPOSITING LOW-PRESSURE PLASMAS B. Finke, K. Schröder, A. Ohl Institut für Niedertemperatur-Plasmaphysik, Greifswald (Germany)
10:30 – 10:50 TuB3
SURFACE OXIDATION INSIDE OF MACROSCOPIC POROUS POLYMERIC MATERIALS Andreas Holländer Fraunhofer-Institut für Angewandte Polymerforschung, Potsdam (Germany)
10:50 – 11:10 coffee break 11:10 – 11:30 TuB4
ADHESION OF METALS TO PLASMA-INTRODUCED FUNCTIONAL GROUPS AT POLMER SURFACES R. Mix, G. Kühn, J. Friedrich Bundesanstalt für Materialforschung und –prüfung, Berlin (Germany)
11:30 – 11:50 TuB5
THE FTIR SPECTROSCOPY AND THE MICRO-CALORIMETRY OF POLYMER SAMPLES IMMERSED IN LOW TEMPERATURE PLASMA J. Schafer, J. Meichsner University of Greifswald (Germany)
11:50 – 12:10 TuB6
A NEW PLASMA PROCESS FOR GENERATION OF MONOFUNCTIONAL SURFACES B. Jacoby1, M. v. Gradowski1, C. Bram1, R. Foerch2, C. Oehr3, H. Hilgers1
1 IBM Deutschland GmbH E&TS EMEA, Mainz (Germany) 2 Max Planck Institute for Polymer Research, Mainz (Germany) 3 Fraunhofer Institute for Interfacial Engineering and Biotechnology, Stuttgart (Germany)
12:10 – 12:30 TuB7
SITE SPECIFIC PLASMACHEMICAL AMINO FUNCTIONALISATION OF POLYMERIC HEMOPERFUSION MEMBRANES M. Mueller1, M. Storr2, C. Oehr1 1 Fraunhofer Institute for Interfacial Engineering and Biotechnology, Stuttgart (Germany) 2 Gambro Dialysatoren GmbH & Co KG, Hechingen (Germany)
12:30 – 12:50 TuB8
PET AND PTFE MODIFICATION BY DIELECTRIC BARRIER DISCHARGE L. Aubrecht, J. Koller, H. Koshelyev, J. Pichal Department of Physics, Faculty of Electrical Engineering, Czech Technical University, Prague (Czech Republic)
Tuesday, September 14th, 2004 Room Zugspitze
PSE 2004 10
08:30 – 9:10 Plenary Lecture P2 (see page 7, Room Richard Strauss) Oral Session TuC (morning session): Corrosion Protection, Stress Control, Adhesion Chairman: Ch. Mitterer, Leoben (Austria) 09:20 – 09:50 Keynote Lecture K6
INFLUENCE OF ION ENERGY AND SUBSTRATE TEMPERATURE DURING PRETREATMENT ON SUBSTRATE-COATING INTERFACES PREPARED BY FILTERED CATHODIC ARC EVAPORATION Arutiun P. Ehiasarian1, P. Eh. Hovsepian1, A. Anders2, I. Petrov3 1 Materials Research Institute, Sheffield Hallam University (United Kingdom) 2 Plasma Applications Group, Lawrence Berkeley National Laboratory (USA) 3 Materials Research Laboratory, University of Illinois at Urbana-Champaign (USA)
09:50 – 10:10 TuC1
STUDY OF THE MOISTURE AND THERMAL RESISTANCE OF AlN / ZrN / AlN MULTILAYERS COATING M. Del Re, R. Gouttebaron, J.P. Dauchot and M. Hecq Laboratoire de Chimie Inorganique et Analytique, Mons (Belgium)
10:10 – 10:30 TuC2
TAILORED ADHESION PROMOTING AND CORROSION RESISTANT THIN PLASMA POLYMER FILMS AT ADHESIVE/METAL INTERFACES G. Grundmeier, K. Wapner, M. Stratmann Max-Planck-Institute for Iron Research, Düsseldorf (Germany)
10:30 – 10:50 TuC3
CORRELATION BETWEEN PIII NITRIDING PARAMETERS AND CORROSION BEHAVIOUR OF AUSTENITIC STAINLESS STEELS S. Mändl1, D. Manova1, H. Neumann1, M.T. Pham2, E. Richter2, B. Rauschenbach1, 1 Leibniz-Institut für Oberflächenmodifizierung, Leipzig (Germany) 2 Institut für Ionenstrahlphysik und Materialforschung, Dresden (Germany)
10:50 – 11:10 coffee break 11:10 – 11:30 TuC4
ON THE SEMICONDUCTIVE EFFECT OF PASSIVE FILMS FORMED ON NANOMULTILAYERED TiN/CrN COATINGS DEPOSITED ONTO STEEL Christophe Mendibide, Philippe Steyer, Jean-Pierre Millet Laboratoire de Physico-Chimie Industrielle, INSA de Lyon, Villeurbanne (France)
11:30 – 11:50 TuC5
INFLUENCE OF BIAS VARIATION ON RESIDUAL STRESS AND TEXTURE IN TiAlN PVD COATINGS Helen Blomqvist, Mats Ahlgren AB Sandvik Coromant, Stockholm (Sweden)
11:50 – 12:10 TuC6
INTERFACE MODIFICATION OF SiC FIBRE – COPPER MATRIX COMPOSITES BY APPLYING A TITANIUM INTERLAYER A. Brendel1, C. Popescu1, H. Schurmann2, H. Bolt1 1 Max-Planck-Institute for Plasma Physics, EURATOM Association, Garching (Germany) 2 German Aerospace Center (DLR), Koeln (Germany)
Tuesday, September 14th, 2004 Room Zugspitze
PSE 2004 11
12:10 – 12:30 TuC7
X-RAY DIFFRACTION ANALYSIS OF THE RESIDUAL STRESS STATE IN PVD TiN/CrN MULTILAYER COATINGS DEPOSITED ON TOOL STEEL, AND ITS CORRELATION WITH WEAR RESISTANCE. C. Mendibide1, P. Steyer1, C. Esnouf2, P. Goudeau3, D. Thiaudiere4, M. Gailhanou4, J. Fontaine5
1 LPCI, INSA, Lyon (France) 2 CECM, INSA, Lyon (France) 3 LMP, University of Poitiers (France) 4 LURE, University of Paris-Sud, Orsay (France) 5 LTDS, Ecole Centrale, Lyon (France)
12:30 – 12:50 TuC8
INFLUENCE OF SPECIAL MECHANICAL PRE-TREATMENTS ON ADHESION OF DIAMOND COATINGS FOR HARDMETAL CUTTING TOOLS Friederike Deuerler 1, Volker Buck 2, Michael Pohl 3, Christian Heßing3
1 Universität Wuppertal, Fachgebiet Materialkunde, Wuppertal (Germany) 2 Universität Duisburg-Essen, AG Dünnschichttechnologie, Essen (Germany) 3 Ruhr-Universität Bochum, Institut für Werkstoffe, Bochum (Germany)
Tuesday, September 14th, 2004 Room Richard Strauss
PSE 2004 12
14:15 – 14:55 Chairman: R. D' Agostino, Bari (Italy) Plenary Lecture P3
SURFACE MODIFICATION OF METALS FOR IMPLANTS TO IMPROVE BIOCOMPATIBILITY AND LONGTERM STABILITY R. Thull, W. Braun, U. Gbureck, P. Drechsler University of Würzburg (Germany)
Oral Session TuA (afternoon session): Biological and Medical Applications Chairman: Ch. Oehr, Stuttgart (Germany) 15:10 – 15:40 Keynote Lecture K7
CONTEMPORARY OPPORTUNITIES IN PLASMA SURFACE ENGINEERING OF IMPLANT DEVICES Marco Morra and Clara Cassinelli Nobil Bio Ricerche, Villafranca d’Asti (Italy)
15:40 – 16:00 TuA9
BIOMEDICAL COATINGS BASED ON DLC AND C-N F. Z. Cui, X. L. Qing Biomaterials Lab, Department of Material Science and Engineering, Tsinghua University, Beijing (China)
16:00 – 16:20 TuA10
AMINO-FUNCTIONALISED PLASMA POLYMER FILMS FOR DNA IMMOBILIZATION AND HYBRIDISATION R. Förch, Z. Zhang, W. Knoll MPI für Polymerforschung, Mainz (Germany)
16:20 – 16:40 TuA11
PLASMA-BASED ION IMPLANTATION OF RADIOISOTOPES (32P) FOR BIOMEDICAL APPLICATIONS M.A. Fortin1, B. Stansfield1, R. Paynter1, F. Marion1, A. Sarkissian2, B. Terreault1 1 INRS-ÉMT, Varennes, Québec (Canada) 2 Plasmionique Inc., Varennes, Québec (Canada)
16:40 – 17:10 coffee break 17:10 – 17:30 TuA12
IMMOBILIZATION OF RGD-CONTAINING PEPTIDES AND CARBOHYDRATES ON PLASMA-DEPOSITED ACRYLIC ACID COATINGS FOR BIOMEDICAL DEVICES L. C. Lopez1, Loredana Detomaso1, Roberto Gristina2, Riccardo d’Agostino1,2, Pietro Favia1,2 1 Department of Chemistry, University of Bari (Italy) 2 Institute of Inorg. Methodology of Plasma (IMIP) CNR (Italy)
17:30 – 17:40 TuA13
CaTiO3 FILMS SPUTTER-DEPOSITED UNDER SIMULTANEOUS Ti-ION IMPLANTATION ON Ti-SUBSTRATE K. Asami, N. Ohtsu, K. Saito and T. Hanawa* Institute for Materials Research, Tohoku University, Sendai (Japan) *Biomaterials Center, National Institute for Materials Science, Tsukuba (Japan)
17:50 – 18:10 TuA14
MICROFABRICATION OF BIOCOMPATIBLE METALLIC STENT Y. P. Kathuria Faculty of Science and Engineering, Ritsumeikan University, Kusatsu-shi (Japan)
Tuesday, September 14th, 2004 Room Richard Strauss
PSE 2004 13
18:10 – 18:30 TuA15
PE-CVD OF AG/TEFLON-LIKE COATINGS ON MEDICAL-GRADE PVC TO CONTROL BACTERIAL ADHESION D.J. Balazs1, B. Strahm1, K. Triandafillu2, J.-L. Dorier3, C. Hollenstein3 and H.J. Mathieu1 1 Materials Science Department, Swiss Federal Institute of Technology, Lausanne (Switzerland) 2 Department of Environmental Science and Technology, Swiss Federal Institute of Technology, Lausanne (Switzerland) 3 Plasma Physics Research Center, Swiss Federal Institute of Technology, Lausanne (Switzerland)
18:30 – 23:00 Poster Session (Foyer and First Floor) and
Industrial and Bavarian Evening (Room Werdenfels, Foyer, Restaurant)
Tuesday, September 14th, 2004 Room Olympia
PSE 2004 14
14:15 – 14:55 Plenary Lecture P3 (see page 12, Room Richard Strauss) Oral Session Workshop: Successful Applications of Plasma and Ion-based Processes
organised by Arbeitskreis Plasmaoberflächentechnologie (PISE Germany), VDI Technologiezentrum GmbH (Germany) and the Society of Vacuum Coaters (SVC), (USA) The aim of the workshop is to present successful industrial applications of plasma and ion-based processes. This premises an effective transfer of these technologies from research to industry. Speakers from industrial companies will discuss specific practical use. Applications like those for the automotive industry and medical technology will be presented. Another subject are plasma-based coatings for optics i.e. interference filters. Special attention will be paid to the performance and cost benefits obtained.
Chairmen: R. Grün, Siegen (Germany) R. Shimshock, Society of Vacuum Coaters (USA)
15:10 – 15:20 Introduction
TRANSFER OF PLASMA TECHNOLOGIES FROM RESEARCH TO INDUSTRIAL APPLICATION R. Grün Plasma Technik Grün GmbH, Siegen (Germany)
15:20 – 15:40 IW1
EXPECTED DEVELOPMENTS IN AUTOMOTIVE APPLICATIONS OF COATINGS G. J. van der Kolk Bodycote PVD Coatings, Venlo (The Netherlands)
15:40 – 16:00 IW2
SYNTHESES OF MULTIFUNCIONAL LAYER SYSTEMS USING THE PACVD DUPLEX PROCESS FOR AUTOMOBILE INDUSTRY K. S. Klimek1, A. Gebauer-Teichmann2, K.-T. Rie1 1 Institut für Oberflächentechnik und Plasmatechnische Werkstoffentwicklung, Technische Universität Braunschweig (Germany) 2 Volkswagen AG Werk Kassel, Baunatal (Germany)
16:00 – 16:20 IW3
ADHESION PROMOTION ON CATHEDERS FOR LUBRICOUS COATING F. Hild PVA Tepla America Inc., Corona (USA)
16:20 – 16:40 IW4
APPLICATIONS FOR FUNCTIONALIZATION OF MICROSTRUCTURE SURFACES H. Reinecke, O. Lippold STEAG microParts GmbH, Dortmund (Germany)
16:40 – 17:10 coffee break 17:10 – 17:30 IW5
PLASMA ENHANCED COATINGS FOR OPTICAL APPLICATIONS R. Shimshock Society of Vacuum Coaters, MLD Technologies LLC, Mountain View (USA)
17:30 – 17:50 IW6
PLASMA-INDUCED DEPOSITON FOR OPTICAL INTERFERENCE FILTERS U. Schallenberg, S. Jakobs mso jena Mikroschichtoptik GmbH, Jena (Germany)
17:50 – 18:10 IW7
LINEAR PLASMA SOURCE FOR INLINE PRE-TREATMENT OF VACUUMBASED ROLL-TO-ROLL COATING Torsten Lindner, Rolf Rank* Unitec Helmsdorf GmbH, Stolpen (Germany) *Fraunhofer Institute for Electron Beam and Plasma Technology (FEP), Dresden (Germany)
Tuesday, September 14th, 2004 Room Olympia
PSE 2004 15
18:10 – 18:30 IW8
IN-LINE COATING OF OPTICAL SUBSTRATES S. Runkel, O. Hohn Singulus Technologies AG, Kahl/Main (Germany)
18:30 – 23:00 Poster Session (Foyer and First Floor) and
Industrial and Bavarian Evening (Room Werdenfels, Foyer, Restaurant)
Tuesday, September 14th , 2004 Room Zugspitze
PSE 2004 16
14:15 – 14:55 Plenary Lecture P3 (see page 12, Room Richard Strauss) Oral Session TuC (afternoon session): Plasma Generation, New Plasma and Ion
Sources Chairman: Y. Setsuhara, Kyoto (Japan) 15:10 – 15:40 Keynote Lecture K8
TECHNICAL PHYSICS OF THE CATHODIC VACUUM ARC EVAPORATION B. Schultrich1, J. Vetter2, O. Zimmer1, P. Siemroth3 1 Fraunhofer Institute for Material and Beam Technology (IWS), Dresden (Germany) 2 Sulzer- Metaplas Ionon GmbH, Bergisch Gladbach (Germany) 3 Arc Precision GmbH, Dresden (Germany)
15:40 – 16:00 TuC9
ION CURRENT DENSITY PROFILE CONTROL OF SCABALE BROAD BEAM SOURCES AND ITS APPLICATION H. Neumann1, F. Scholze1, M. Tartz1, S. Mändl1, M. Nestler2, R. Weller3, T. Blum4, H. Kersten5, R. Wiesee, M. Schulze6, H. Schlemm7, B. Rauschenbach1 1 IOM e.V., Leipzig (Germany) 2 Roth Rau Oberflächentechnik AG, Hohenstein Ernstthal (Germany) 3 SenVac GmbH, Friedberg (Germany) 4 OSTEC Oberflächen-und Schichttechnologie GmbH, Meißen (Germany) 5 INP e.V., Greifswald (Germany) 6 AIS Automation GmbH, Dresden (Germany) 7 JENION, Jena (Germany)
16:00 – 16:20 TuC10
ENHANCED SURFACE-WAVE PROPAGATION ALONG A CORRUGATED PLASMA-DIELECTRIC INTERFACE Ivan P. Ganachev1, Yasuhiro Nojiri2 and Hideo Sugai2 1 Shibaura Mechatronics Corporation (Japan) 2 Nagoya University (Japan)
16:20 – 16:40 TuC11
POWER FLOW IN A MICROWAVE DISCHARGE FOR OPTICAL FIBER PREFORM PCVD: PLASMA CHARACTERIZATION D. Korzec, S. Kytzia, J. Engemann Microstructure Research Centre-fmt, University of Wuppertal (Germany)
16:40 – 17:10 coffee break 17:10 – 17:30 TuC12
INTERNAL OSCILLATING CURRENT-SUSTAINED RF PLASMAS: PARAMETERS, STABILITY, AND POTENTIAL FOR SURFACE ENGINEERING K. Ostrikov1,2, E. Tsakadze3, Z. Tsakadze1 and S. Xu1
1 Plasma Sources and Applications Center, NIE, Nanyang Technological University, Singapore (Singapore) 2 School of Physics, The University of Sydney (Australia) 3 RISOE National Laboratory, Roskilde (Denmark)
17:30 – 17:50 TuC13
INFLUENCE OF EFFECT OF PLASMA “SHIELDING” BY SOLID SURFACE AT LASER IRRADIATION M.R. Bedilov, R.M. Bedilov, E.N. Tajihanov, A.R. Matnazarov Research Institute of Applied Physics, Tashkent (Uzbekistan)
17:50 – 18:10 TuC14
EFFECTIVE SEPARATOR FOR EXTRACTION OF HEAVY DROPS FROM PLASMA FLOW V.I. Maslov, I.I. Aksenov, S.V. Barchuk, A.M. Egorov, D.Yu. Frolova*, N.M. Maslova, I.N. Onishchenko NSC Kharkov Institute of Physics and Technology, Kharkov (Ukraine) *Karazin Kharkov National University, Kharkov (Ukraine)
Tuesday, September 14th , 2004 Room Zugspitze
PSE 2004 17
18:10 – 18:30 TuC15
PRODUCTION OF ION BEAM BY 1064, 532, 355 AND 266 NM LASER–INDUCED SURFACE ELEMENT UNDER APPLIED ELECTRIC FIELD Ahmed Asaad I. Khalil Laser Applications in Industry, Communications and Fiber optics department, National Institute of Laser Enhanced Science (NILES), Cairo University, Giza (Egypt)
18:30 – 23:00 Poster Session (Foyer and First Floor) and
Industrial and Bavarian Evening (Room Werdenfels, Foyer, Restaurant)
Wednesday, September 15th, 2004 Room Richard Strauss
PSE 2004 18
08:30 – 9:10 Chairman: A. Matthews, Sheffield (United Kingdom) Plenary Lecture P4
PLASMA SIMULATION OF MAGNETRON SPUTTERING Eiji Shidoji, Takahiro Mashimo Asahi Glass co., ltd., Research Center, Yokohama (Japan)
Oral Session WeA (morning session): Thin Film and Surface Characterization and
Analysis Chairman: V. Rigato, Legnaro (Italy) 09:20 – 09:50 Keynote Lecture K9
ELECTRON MICROSCOPY: DOES IT SOLVE MATERIALS PROBLEMS OF NANO-STRUCTURED COATINGS? Jeff Th.M. De Hosson, Nuno J.M. Carvalho, Yutao Pei, Damiano Galvan Department of Applied Physics, Materials Science Center and Netherlands Institute for Metals Research, University of Groningen (The Netherlands)
09:50 – 10:10 WeA1
LATERAL FORCE-DISPLACEMENT MEASUREMENTS - A NEW TECHNIQUE FOR THE INVESTIGATION OF MECHANICAL SURFACE PROPERTIES T. Chudoba1, M. Karniychuk2, F. Richter2 1 ASMEC GmbH, Radeberg (Germany) 2 Technische Universität Chemnitz, Institut für Physik, Chemnitz (Germany)
10:10 – 10:30 WeA2
STRUCTURAL AND MECHANICAL PROPERTIES OF PVD TiAlCrN COATINGS DEDICATED TO HIGH SPEED MACHINING A.S. Dehlinger1, F. Lapostolle1, J. von Stebut2, D. Mercs1, C. Coddet1
1 Laboratoire d'Etudes et de Recherche sur les Matériaux, les Procédés et les Surfaces (LERMPS) / Université de Technologie de Belfort – Montbéliard (UTBM) BELFORT Cedex (France) 2 Laboratoire de Science et Génie des Surfaces, Nancy (France)
10:30 – 10:50 WeA3
PROPERTIES OF REACTIVELY SPUTTERED W-Si-N FILMS J. Musil1,2, R. Daniel1, J. Soldán1, P. Dub1, K. Fadenberger3, G. Hawranek3, P. H. Mayrhofer3 1 Department of Physics, University of West Bohemia, Plzen (Czech Republic) 2 Institute of Physics, The Academy of Sciences of the Czech Republic, Praha (Czech Republic) 3 Department of Physical Metallurgy and Materials Testing, University of Leoben (Austria)
10:50 – 11:10 coffee break 11:10 – 11:30 WeA4
ON THE EVALUATION OF STRESSES FOR COATED MATERIALS DURING NANOINDENTATION WITH SHARP INDENTERS N. Schwarzer1, T. Chudoba2, G. M. Pharr3 1 Technical University of Chemnitz, Institute of Physics, Chemnitz (Germany) 2 Advanced Surface Mechanics (ASMEC), Rossendorf (Germany) 3 University of Tennessee and Oak Ridge National Laboratory, Department of Materials Science and Engineering, Knoxville (USA)
11:30 – 11:50 WeA5
KINETICS OF THE THIN FILMS TRANSFORMATION Ti/Al MULTILAYER → ?-TiAl A. S. Ramos1, M. T. Vieira1, M. F. Vieira2 1 ICEMS, Departamento de Engenharia Mecânica, Faculdade de Ciências e Tecnologia, Universidade de Coimbra (Portugal) 2 GMM/IMAT, Departamento de Engenharia Metalúrgica, Faculdade de Engenharia, Universidade do Porto (Portugal)
Wednesday, September 15th, 2004 Room Richard Strauss
PSE 2004 19
11:50 – 12:10 WeA6
STRUCTURAL AND OPTICAL INVESTIGATIONS OF SiOXNY THIN FILMS DEPOSITED BY R.F. SPUTTERING F. Rebib1, E. Tomasella1, M. Dubois1, J. Cellier1, T. Sauvage2, M. Jacquet1. 1 Laboratoire des Matériaux Inorganiques, UMR CNRS 6002, Université Clermont-Ferrand (Blaise Pascal), Aubière (France) 2 CERI-CNRS, Orléans (France)
12:10 – 12:30 WeA7
STRUCTURE AND PROPERTIES OF HYBRID COATINGS A.D. Pogrebnjak1, Yu.N. Tyurin2, D.L. Alontseva3, Sh.M. Ruzimov4, V.V. Ponaryadov3, V.V. Vasilyuk1, Yu.A. Kravchenko1 1 Sumy Institute for Surface Modification, Sumy (Ukraine) 2 O.E.Paton Electric Welding Institute, NAS of Ukraine, Kiev (Ukraine) 3 Belarus State University, Minsk (Belarus) 4 National University of Uzbekistan, Tashkent (Uzbekistan)
12:30 – 12:50 WeA8
PHYSICAL AND MECHANICAL PROPERTY EVOLUTION IN ZrNxOy THIN FILMS AS A FUNCTION OF THERMAL TREATMENTS F. Vaz1, L. Rebouta1, P. Carvalho1, L. Cunha2, E. Alves3, Ph. Goudeau4, J. P. Rivière4 1 Universidade do Minho, Dept. Física, Azurém, Guimarães (Portugal)
2 Universidade do Minho, Dept. Física, Gualtar, Braga (Portugal) 3 ITN, Departamento de Física, E.N.10, Sacavém (Portugal) 4 Laboratoire de Métallurgie Physique, Université de Poitiers, Futuroscope (France)
Wednesday, September 15th, 2004 Room Olympia
PSE 2004 20
08:30 – 9:10 Plenary Lecture P4 (see page 18, Room Richard-Strauss) Oral Session WeB (morning session): PVD II, Ion Beam and Plasma Immersion
Techniques Chairman: V. Magula; Bratislava (Slovakia) 09:20 – 09:50 Keynote Lecture K10
ANNEALING-RELATED PHENOMENA IN HARD COATINGS P.H. Mayrhofer, C. Löcker, C. Mitterer Department of Physical Metallurgy and Materials Testing, University of Leoben (Austria)
09:50 – 10:10 WeB1
ADVANCEMENT IN LOWMELTING SOLDER DEPOSITION BY PULSED MAGNETRON SPUTTER-PVD-PROCESS FOR MICROSYSTEMTECHNOLOGY K. Bobzin, E. Lugscheider, A. Erdle Materials Science Institute, RWTH Aachen (Germany)
10:10 – 10:30 WeB2
INCREASING THE DEPOSITION RATE OF OXIDES FILMS BY INCREASING THE PLASMA REACTIVITY R. Snyders*, R. Gouttebaron, J.P. Dauchot and M. Hecq Laboratoire de Chimie Inorganique et Analytique, Université de Mons-Hainaut, Bâtiment Materia Nova, Mons (Belgium)
10:30 – 10:50 WeB3
VANADIUM NITRIDE COATINGS PRODUCED USING PLASMA ASSISTED E-BEAM PVD Nils Stavlid, Urban Wiklund Department of Materials Science, Uppsala University (Sweden)
10:50 – 11:10 coffee break 11:10 – 11:30 WeB4
STUDIES OF THE TEMPORAL BEHAVIOUR OF A PULSED MAGNETRON DEPOSITION DISCHARGE Thomas Welzel, Thoralf Dunger, Stefan Welzel, Hartmut Kupfer, Frank Richter Technische Universität Chemnitz, Institut für Physik, Chemnitz (Germany)
11:30 – 11:50 WeB5
TRIBOLOGICAL IMPROVEMENTS OF ION IMPLANTED TECHNOLOGICAL ALLOYS: PI3 VERSUS CONVENTIONAL ION IMPLANTATION J.A. García, R. Martínez, R.J. Rodríguez, B. Lerga, A. Medrano AIN Centro de Ingeniería Avanzada de Superficies, Cordovilla – Pamplona (Spain)
11:50 – 12:10 WeB6
PROSPECTS OF COMBINED TECHNOLOGIES ON THE BASIS OF PLASMA - ION DEPOSITION, ION IMPLANTATION, ION ALLOYING, AND LASER STRENGTHENING G.I. Kostyuk, ?.?. Voliak National Airspace University, Kharkov (Ukraine)
12:10 – 12:30 WeB7
DEVELOPMENT OF Ti BASED COATINGS USING PLASMA IMMERSION ION IMPLANTATION ASSISTED DEPOSITION S. Mukherjee1, F. Prokert2, E. Richter2, W. Möller2 1 FCIPT, Institute for Plasma Research, Gandhinagar (India) 2 FWII, Forschungszentrum Rossendorf, Dresden (Germany)
12:30 – 12:50 WeB8
METAL PLASMA IMMERSION ION IMPLANTATION & DEPOSITION METAL PLASMA IMMERSION ION IMPLANTATION & DEPOSITION (MPIII&D) USING A METAL PLASMA SOURCERonghua Wei, Tom Booker, Chris Rincon, Jim ArpsSouthwest Research Institute, San Antonio, Texas (USA)
Wednesday, September 15th, 2004 Room Zugspitze
PSE 2004 21
08:30 – 9:10 Plenary Lecture P4 (see page 18, Room Richard Strauss) Oral Session WeC (morning session): Plasma Diffusion Treatment, Thermal Spraying Chairmen: M. Remy, Nancy (France)
R. Suchentrunk, Egmating (Germany) 09:20 – 09:50 Keynote Lecture K11
SURFACE MODIFICATION OF ALUMINUM USING ION NITRIDING AND BARREL NITRIDING M. Okumiya1, Y. Tsunekawa1, H. Sugiyama2, Y. Tanaka2, N. Takano2, M. Tomimoto2 1 Toyota Technological Institute, Nagoya (Japan) 2 Student of Toyota Technological Institute, Nagoya (Japan)
09:50 – 10:10 WeC1
NEW PATHWAYS IN PLASMA NITRIDING METAL ALLOYS C. A. Figueroa, and F. Alvarez Instituto de Física “Gleb Wataghin”, Unicamp, Campinas (Brazil)
10:10 – 10:30 WeC2
RF PLASMA NITRIDING OF IRON-BASED ALLOYS PRE-TREATED BY SHOT PEENING Hans Ferkel and Lothar Wagner Institut für Werkstoffkunde und Werkstofftechnik der TU Clausthal, Clausthal-Zellerfeld (Germany)
10:30 – 10:50 WeC3
ASSESSMENT OF THE APPLICATION POTENTIAL OF THE INTENSIFIED GLOW DISCHARGE FOR INDUSTRIAL PLASMA NITRIDING OF TI-6Al-4V N. Kashaev, H.-R. Stock, P. Mayr Foundation Institute for Materials Science, Bremen (Germany)
10:50 – 11:10 coffee break 11:10 – 11:30 WeC4
PULSE PLASMA TREATMENT OF ALUMINIUM ALLOY EXTRUSION DIES M. Zlatnovic1, V. Zlatanovic2
1 Faculty of Electrical Engineering, Belgrade (Serbia) 2 Batalab, Belgrade (Serbia)
11:30 – 11:50 WeC5
SURFACE MATERIAL DESIGN OF 316 STAINLESS STEEL BY COMBINATION OF LOW TEMPERATURE PLASMA CARBURIZING AND NITRIDING M. Tsujikawa, Daisuke Yoshida, Naohiko Yamauchi, Nobuhiro Ueda, Takumi Sone, Shinichi Tanaka Osaka Prefecture University (Japan)
11:50 – 12:10 WeC6
IN SITU FORMATION OF Al-Si-Mg BASED COMPOSITE COATING BY DIFFERENT REACTIVE THERMAL SPRAY PROCESSES I Ozdemir1,2, I. Hamanaka1, M. Hirose1, Y. Tsunekawa1 and M. Okumiya1
1 Toyota Technological Institute, Nagoya (Japan) 2 Dokuz Eylul Univ. Faculty of Eng. Dept. of Metallurgical and Materials Eng. Izmir (Turkey)
12:10 – 12:30 WeC7
SURFACE PROTECTION OF LIGHT ALLOYS BY LASER ASSISTED ATMOSPHERIC PLASMA SPRAYING (LAAPS) Steffen Nowotny, Roman Zieris, Eckhard Beyer Fraunhofer-Institut für Werkstoff- und Strahltechnik, Dresden (Germany)
Wednesday, September 15th, 2004 Room Zugspitze
PSE 2004 22
12:30 – 12:50 WeC8
CORROSION PERFORMANCE OF CAST IRON THERMAL SPRAY COATINGS ON AL ALLOY FOR AUTOMOTIVE COMPONENTS S.H. Ahn1, H.G. Kim1, J.G. Kim1, Ismail Ozdemir2,3, Y. Tsunekawa2
1 Department of Advanced Materials Engineering, Sungkyunkwan University Suwon (Korea) 2 Material Processing Lab, Toyota Technological Institute, Nagoya (Japan) 3 Dokuz Eylul Univ. Dept. of Metallurgical and Materials Eng., Bornova-Izmir (Turkey)
Wednesday, September 15th, 2004 Room Richard Strauss
PSE 2004 23
14:15 – 14:55 Chairman: J. Musil, Plzen (Czech Republic) Plenary Lecture P5
NANO-SCALE, MULTI-FUNCTIONAL COATINGS IN THE MATERIAL SYSTEM B-C-N-H S. Ulrich Forschungszentrum Karlsruhe, Institut für Materialforschung I, Karlsruhe (Germany)
15:10 – 16:40 Poster Session (Foyer and First Floor) Oral Session WeA (afternoon session): Thin Film and Surface Characterization II Chairman: J. Th.M. De Hosson, Groningen (The Netherlands) 16:40 – 17:10 Keynote Lecture K12
BONDING STRUCTURE OF FULLERENE-LIKE CARBON NITRIDE THIN FILMS R. Gago1, I. Jiménez2, M. Vinnichenko1, J. Neidhardt3, L. Hultman3, W. Möller1 1 Forschungszentrum Rossendorf, Dresden (Germany) 2 ICTP-Consejo Superior de Investigaciones Científicas, Madrid (Spain) 3 Linköping University, Linköping (Sweden)
17:10 – 17:30 WeA9
TOF-SIMS ANALYSIS OF ULTRA-THIN PLASMA POLYMER FILMS BY MEANS OF MULTIVARIATE TECHNIQUES M. v. Gradowski1, M. Wahl2, B. Jacoby1, H. Hilgers1 1 IBM Engineering & Technology Services (E&TS) EMEA Laboratory, Mainz (Germany) 2 Institut für Oberflächen und Schichtanalytik IFOS GmbH, Kaiserlautern (Germany)
17:30 – 17:50 WeA10
PHASE TRANSITION IN TUNGSTEN CARBIDE FILMS ANALYZED WITH BRILLOUIN LIGHT SCATTERING SPECTROSCOPY T. Wittkowski, G. Distler, K. Jung, B. Hillebrands, J.D. Comins* Fachbereich Physik and Forschungsschwerpunkt MINAS, Technische Universität Kaiserslautern (Germany) *Material Physics Research Institute, School of Physics, University of the Witwatersrand, Johannesburg (South Africa)
17:50 – 18:10 WeA11
EFFECT OF THERMAL ANNEALING ON PHASE TRANSITION AND MICRO-HARDNESS OF TixCryAlzN FILMS Tomonari Yamamoto1, Hiroyuki Hasegawa1, Kenji Yamamoto2 and Tetsuya Suzuki1 1 Center for Materials Science, Keio University, Hiyoshi, Kohoku-ku, Yokohama (Japan) 2 Materials Research Laboratory, Kobe Steel Ltd, Kobe, Hyogo (Japan)
18:10 – 18:30 WeA12
CHARACTERIZATION OF NANOSTRUCTURED Zr(O, C) / Cu / a-C:H COATINGS: CORRELATION OF THE MECHANICAL PROPERTIES WITH THE FILM STRUCTURE S. Lang1, T. Beck1, V. Briancon1, U. May1, A. Schattke1, A. Dinia2
1 Robert Bosch GmbH, Stuttgart (Germany) 2 Institut de Physique et Chimie des Matériaux de Strasbourg (France)
18:30 – 18:50 WeA13
GROWTH MECHANISM OF SiOx FILMS DEPOSITED ON PARTICLES BY PECVD B. Borer, Ph. Rudolf von Rohr Institute of process engineering, ETH Zurich (Switzerland)
Wednesday, September 15th, 2004 Room Olympia
PSE 2004 24
14:15 – 14:55 Plenary Lecture P5 (see page 23, Room Richard-Strauss) 15:10 – 16:40 Poster Session (Foyer and First Floor) Oral Session WeB (afternoon session):
Superhard Coatings, Low Friction Coatings, Nano Structures Chairman: J.-J. Lee, Seoul (Korea) 16:40 – 17:10 Keynote Lecture K13
BORON-BASED HARD COATINGS – STATE OF THE ART K. Bewilogua, M. Keunecke Fraunhofer-Institut für Schicht- und Oberflächentechnik, Braunschweig (Germany)
17:10 – 17:30 WeB9
THE INFLUENCE OF ALLOYING ELEMENTS ON THE PHASE STABILITY AND MECHANICAL PROPERTIES OF AlCrN COATINGS Jose L. Endrino, Volker Derflinger Balzers AG, General Coatings, Balzers (Liechtenstein)
17:30 – 17:50 WeB10
NEW MULTIFUNCTIONAL PVD-HARDCOATING FOR STEEL SHEET FORMING P. Pesch1, S. Sattel1, S. Woestmann2, S. Ulrich3 1 TZO GmbH, Rheinbreitbach (Germany) 2 TKS AG, Dortmund (Germany) 3 Forschungszentrum Karlsruhe, Institut für Materialforschung I (Germany)
17:50 – 18:10 WeB11
LASER ELECTRODISPERSION OF SOLIDS – A NOVEL METHOD OF MONODISPERSE NANOSTRUCTURE FABRICATION V.M. Kozhevin, D.A. Yavsin, S.A. Gurevich A.F. Ioffe Physico-Technical Institute, Russian Academy of Sciences, St. Petersburg (Russia)
18:10 – 18:30 WeB12
SINGLE CHAMBER PVD/PECVD PROCESS FOR CARBON NANOTUBES GROWTH T.M. Minea, S. Point, C. Godon, A. Gohier, A. Granier, F. Alvarez* LPCM- IMN, Universite de Nantes, CNRS – UMR, Nantes Cedex (France) *Instituto de Física "Gleb Wataghin", Universidade Estadual de Campinas, Unicamp, São Paulo (Brazil)
18:30 – 18:50 WeB13
STRUCTURE-PROPERTY RELATIONS IN CrC/a-C:H COATINGS DEPOSITED BY REACTIVE MAGNETRON SPUTTERING G. Gassner1, P.H. Mayrhofer1, C. Mitterer1, J. Kiefer2
1 Department of Physical Metallurgy and Materials Testing, University of Leoben (Austria) 2 TCE Technical Coatings Engineering GmbH, Kapfenberg (Austria)
Wednesday, September 15th, 2004 Room Zugspitze
PSE 2004 25
14:15 – 14:55 Plenary Lecture P5 (see page 23, Room Richard-Strauss) 15:10 – 16:40 Poster Session (Foyer and First Floor) Workshop Thin Film Quality – Standardisation of Test Methods & Supporting
Measures organised by BAM (Germany), NPL (UK), VITO (Belgium) and CEN/TC 184/WG5 The purpose of this workshop is to review recent activity in the field of standardisation of test methods for characterising thin film coatings and to provide an update on the situation since the previous workshop on the subject, held at PSE 2000. In a series of short presentations the workshop will review the activity at the international (CEN and ISO), National (AFNOR, BSI, DIN, etc) and industry (e.g. VDI) level. Presentations will cover different aspects of the standardisation process – prenormative research, the development of written standards and the preparation of standards support measures, such as certified reference materials. The workshop will conclude with an expert panel discussion on the standardisation needs of industry and how these can be addressed by future standards projects.
Chairmen:
P. Hatto, Convenor of CEN/TC 184/WG5, Durham (UK) M. Griepentrog, Berlin (Germany)
16:00 – 16:10 Introduction
OPENING OF THE WORKSHOP AND OVERVIEW OF INTERNATIONAL STANDARDISATION ACTIVITIES FOR THIN FILMS Peter Hatto Convenor of CEN/TC 184/WG5, IonBond Ltd. Durham (United Kingdom)
16:10 – 16:30 SW1
PREPARATION, CHARACTERISATION AND CERTIFICATION OF REFERENCE COATINGS FOR SURFACE AND THIN FILM TECHNOLOGY: BAM CERTIFIED REFERENCE MATERIALS Uwe Beck, Michael Griepentrog, Alexander Dück, Mathias Procop, Wolfgang Österle Bundesanstalt für Materialforschung und –prüfung, Berlin (Germany)
16:30 – 16:50 SW2
A CERTIFIED REFERENCE MATERIAL AND ITS USE FOR EVALUATING THE PERFORMANCE OF SCRATCH TESTERS Jan Meneve Flemish Institute for Technical Research VITO, Mol (Belgium)
16:50 – 17:10 SW3
DEVELOPMENT OF CERTIFIED REFERENCE MATERIALS FOR DEPTH SENSING INDENTATION TESTING Nigel Jennett National Physical Laboratory (NPL), Teddington (United Kingdom)
17:10 – 17:30 SW4
USING THE ROCKWELL INDENTATION TECHNIQUE FOR EVALUATING THE ADHESION OF THIN COATINGS Kris De Bruyn Wetenschappelijk en Technisch Centrum van de Metaalverwerkende Nijverheid WTCM Diepenbeck (Belgium)
17:30 – 17:50 SW5
MULTI-MODE SCRATCH TESTING – A EUROPEAN STANDARDS, MEASUREMENTS AND TESTING STUDY Jürgen von Stebut Ecoles des Mines Nancy (France)
17:50 – 18:10 SW6
ON THE EVALUATION OF THIN FILM DUCTILITY Albano Cavaleiro University of Coimbra (Portugal)
Wednesday, September 15th, 2004 Room Zugspitze
PSE 2004 26
18:10 – 18:30 SW7
MICROSCALE ABRASION TESTING OF COATINGS Mark Gee National Physical Laboratory (NPL), Teddington (United Kingdom)
18:30 – 18:50 Discussion
ROUND TABLE DISCUSSION ON ASPECTS OF STANDARDISATION OF TEST METHODS FOR COATINGS AND NEEDS FOR NEW ACTIVITIES IN THE AREA
Thursday, September 16th, 2004 Room Richard Strauss
PSE 2004 27
08:30 – 9:10 Chairman: O. Takai, Nagoya (Japan) Plenary Lecture P6
THE USE OF HIGH POWER PULSED MAGNETRON SPUTTERING FOR THE REACTIVE DEPOSITION OF OXIDE FILMS W. D. Sproul, D. J. Christie, D. C. Carter, and F. G. Tomasel Advanced Energy Industries, Inc., Fort Collins (USA)
Oral Session ThA (morning session): Carbon Coatings I Chairman: D. Cameron, Dublin (Ireland) 09:20 – 09:50 Keynote Lecture K14
A NANOSCALE APPROACH FOR THE CHARACTERIZATION OF AMORPHOUS CARBON-BASED LUBRICANT COATINGS J.C. Sánchez-López, D. Martínez-Martínez, C. Fernández-Ramos, A. Fernández Instituto de Ciencia de Materiales de Sevilla, centro mixto CSIC-Univ. Sevilla (Spain)
09:50 – 10:10 ThA1
PROPERTIES OF DLC THIN FILMS PRODUCED BY RF PE-CVD FROM PYRROLE MONOMER O.Takai1,3, V. Anita1,2 and N. Saito3
1 Center for Integrated Research in Science and Engineering, Nagoya University (Japan) 2 “AL.I.Cuza” University, Dep. of Plasma Physics, Iasi (Romania) 3 Department of Material Engineering Processing, Graduate School of Engineering, Nagoya University (Japan)
10:10 – 10:30 ThA2
RAMAN SPECTROSCOPY STUDY OF C/Cr COATINGS DEPOSITED BY THE COMBINED STEERED CATHODIC ARC/UNBALANCED MAGNETRON SPUTTERING TECHNIQUE Y. N. Kok1, P. Eh. Hovsepian1, J. G. Wen2, I. Petrov2 1 Materials Research Institute, Sheffield Hallam University (UK) 2 Materials Science Department and Frederick Seitz Materials Research Laboratory, University of Illinois, Urbana, (USA)
10:30 – 10:50 ThA3
DIAMOND-LIKE CARBON FILMS AS COATINGS FOR A REDUCED SURFACE ADSORPTIVITY OF IMPURITIES U. Müller1, R. Hauert1, P. Gröning2, J. Gobrecht3, C. Kleinlogel4 1 EMPA Dübendorf - Abt.125, Dübendorf (Switzerland) 2 EMPA Thun - Abt.126, Thun (Switzerland) 3 Laboratory for Micro- and Nanotechnology, Paul Scherrer Institute (PSI), Villigen (Switzerland) 4 Sensirion AG, Zürich (Switzerland)
10:50 – 11:10 coffee break 11:10 – 11:30 ThA4
PULSED LASER DEPOSITION OF SUPERHARD AMORPHOUS CARBON FILMS WITH LOW INTERNAL STRESS Steffen Weißmantel, Günter Reiße, Dirk Rost Hochschule Mittweida, University of Applied Sciences (Germany)
11:30 – 11:50 ThA5
ULTRA HYDROPHOBIC WETTING BEHAVIOUR OF AMORPHOUS CARBON FILMS H. Schulz, M. Leonhardt(*), H.-J. Scheibe(*), B. Schultrich Fraunhofer-Institut für Werkstoff- und Strahltechnik, Dresden (Germany) (*) Fraunhofer USA, Center for Coatings and Laser Applications, Michigan State University, East Lansing (USA)
Thursday, September 16th, 2004 Room Richard Strauss
PSE 2004 28
11:50 – 12:10 ThA6
INFLUENCE OF DIFFERENT INTERLAYERS AND BIAS VOLTAGE ON THE PROPERTIES OF A-C:H COATINGS PREPARED BY REACTIVE DC MAGNETRON SPUTTERING M. Weber, K. Bewilogua, H. Thomsen, R. Wittorf, M. Keunecke Fraunhofer Institute for Surface Engineering and Thin Films, Braunschweig, (Germany)
12:10 – 12:30 ThA7
IMPACT OF A TaC:C LOW-FRICTION COATING ON TOOL LIFE WHEN THREAD ROLLING SILICON-CONTAINING CAST ALUMINIUM D. Nilsson1, M. Larsson2, U. Wiklund1, S. Hogmark1 1 Dept. of Materials Science, The Ångström Laboratory, Uppsala University (Sweden) 2 Balzers Sandvik Coating AB, Stockholm (Sweden)
12:30 – 12:50 ThA8
CHARACTERIZATION OF INTERFACES IN STEPWISE GRADED DLC FILMS BY NANOINDENTATION AND FFM C. Ziebert, M. Stüber, S. Ulrich, H. Holleck Forschungszentrum Karlsruhe, Institut für Materialforschung I (Germany)
Thursday, September 16th, 2004 Room Olympia
PSE 2004 29
08:30 – 9:10 Plenary Lecture P6 (see page 27, Room Richard-Strauss) Oral Session ThB (morning session): Atmospheric Pressure Processes Chairman: L. Bardos, Uppsala (Sweden) 09:20 – 09:50 Keynote Lecture K15
ATMOSPHERIC GLOW STABILIZATION. DO WE NEED PRE-IONIZATION ? E. Aldea, H. de Vries*, P.Peeters , M.C.M van de Sanden Eindhoven University of Technology, Dept. of Applied Physics (The Netherlands)
09:50 – 10:10 ThB1
NON THERMAL PLASMAS AS STERILISATION AND COATING TECHNIQUE Christian Schrader1, Phillip Sichler2, Lutz Baars-Hiibbe1, Karl-Heinz Gericke1, Stephanus Büttgenbach2 1 Institut für Physikalische und Theoretische Chemie,, Technische Universität Braunschweig (Germany) 2 Institut für Mikrotechnik,, Technische Universität Braunschweig (Germany)
10:10 – 10:30 ThB2
PLASMA ENHANCED CVD AT ATMOSPHERIC PRESSURE FOR WIDE AREA COATING ON TEMPERATURE SENSITIVE MATERIALS Ines Dani, Volkmar Hopfe, Daniela Rogler, Liliana Roch, Gerrit Mäder Fraunhofer Institute Material and Beam Technology, IWS, Dresden (Germany)
10:30 – 10:50 ThB3
THE EFFECT OF PLASMA GAS MIXTURES ON THE ATMOSPHERIC PRESSURE GLOW-DISCHARGE DEPOSITION OF THIN FILM MATERIALS Martin J. Davis, David W. Sheel, Martyn E. Pemble Institute for Materials Research, University of Salford (United Kingdom)
10:50 – 11:10 coffee break 11:10 – 11:30 ThB4
SURFACE MODIFICATION OF PET FILM BY A DBD DEVICE AT ATMOSPHERIC PRESSURE P. Esena1,C. Riccardi1, S. Zanini1, M. Tontini1, Poletti2, F. Orsini2
1 Dipartimento di Fisica G. Occhialini, Università degli Studi di Milano-Bicocca, Milano (Italy) 2 Istituto di fisiologia generale e chimica biologica, Università degli Studidi Milano (Italy)
11:30 – 11:50 ThB5
PLASMA TREATMENT ON FINGER AND TOE NAILS PRIOR TO COATING WITH A VARNISH C. Kaemling, S. von Nostitz-Wallwitz, A. Kaemling, W. Viöl University of Applied Sciences and Arts, Department of Science and Technology, Göttingen (Germany)
11:50 – 12:10 ThB6
PLASMA POLYMERISATION OF HYBRID ORGANIC-INORGANIC MONOMERS IN AN ATMOSPHERIC PRESSURE DIELECTRIC BARRIER DISCHARGE Sabine Paulussen, Robby Rego, Olivier Goossens, Dirk Vangeneugden VITO - Flemish Institute for Technological Research, Mol (Belgium)
12:10 – 12:30 ThB7
PATTERNED DBD TREATMENT FOR AREA-SELECTIVE METALLIZATION OF POLYMERS - PLASMA PRINTING S. Kreitz, C. Geßner, C. Penache, C.-P. Klages Fraunhofer Institute for Surface Engineering and Thin Films (IST), Braunschweig (Germany)
Thursday, September 16th, 2004 Room Olympia
PSE 2004 30
12:30 – 12:50 ThB8
STRUCTURAL EVOLUTION OF ALUMINA COATING DURING PLASMA ELECTROLYTIC OXIDATION OF AL IN ALKALINE SOLUTIONS A.L. Yerokhin1, T. Pilkington1, M. Moncus2, L.O. Snizhko3, A. Leyland1, M. Baker2 and A. Matthews1 1 Department of Engineering Materials, University of Sheffield (United Kingdom) 2 University of Surrey, Guildford (United Kingdom) 3 State University of Chemical Technology, Dnepropetrovsk (Ukraine)
Thursday, September 16th, 2004 Room Zugspitze
PSE 2004 31
08:30 – 9:10 Plenary Lecture P6 (see page 27, Room Richard-Strauss) Oral Session ThC (morning session): High Rate Deposition, Pulsed Plasmas Chairman: J. Bradley, Manchester (United Kingdom) 09:20 – 09:50 Keynote Lecture K16
POSSIBILITIES AND CHALLENGES ASSOCIATED WITH HIGH POWER PULSED MAGNETRON SPUTTERING Ulf Helmersson, Jones Alami, Johan Bohlmark, Martina Lattemann and Arutiun P. Ehiasarian* Department of Physics, Linköping University (Sweden) *Materials Research Institute, Sheffield Hallam University (United Kingdom)
09:50 – 10:10 ThC1
REACTIVE LASER PLASMA COATING FORMATION P. Schaaf, M. Kahle, E. Carpene Universität Göttingen, Zweites Physikalisches Institut (Germany)
10:10 – 10:30 ThC2
DC TPCVD SYNTHESIS OF THE COATINGS FROM LIQUID SINGLE SOURCE Si-B-C-N AND Si-C-N-Ti PRECURSORS Johannes Wilden1, Andreas Wank2, Alena Bykava2 1 Institute of Production Engineering, Ilmenau Technical University (Germany) 2 Institute of Composite Materials, Chemnitz University of Technology (Germany)
10:30 – 10:50 ThC3
DEPOSITION OF TiXAl1-XN USING BIPOLAR PULSED DUAL MAGNETRON SPUTTERING M. Åstrand, T. I. Selinder and M. E. Sjöstrand AB Sandvik Coromant, Stockholm (Sweden)
10:50 – 11:10 coffee break 11:10 – 11:30 ThC4
TIME DEVELOPMENT OF PLASMA PARAMETERS IN PULSED MAGNETRON PLASMA H. Bäcker1 and J.W. Bradley2 1 Off Line Coatings, Pilkington, Lathom/Ormskirk (United Kingdom) 2 UMIST, Department of Physics, Manchester (United Kingdom)
11:30 – 11:50 ThC5
ANOMALOUS BEHAVIOR OF A HIGH POWER PULSED MAGNETRON PLASMA V. Kouznetsov1, J. R. Drake2, N. Brenning2, I. Axnäs2, L. Hultman3, U. Helmersson3 1 Chemfilt R&D AB c/o Royal Institute of Technology, Alfven Laboratory, Stockholm (Sweden) 2 Alfven Laboratory, Royal Institute of Technology, Stockholm (Sweden) 3 Thin Film Physics Division, Department of Physics, Linköping University (Sweden)
11:50 – 12:10 ThC6
TIME-RESOLVED DIAGNOSTICS OF HIGH-POWER PULSED DC MAGNETRON DISCHARGES FOR IONIZED HIGH-RATE SPUTTERING OF METALLIC FILMS J. Vlcek, A.D. Pajdarova, P. Belsky, M. Kormunda, S. Potocky, J. Musil Department of Physics, University of West Bohemia, Plzen (Czech Republic)
12:10 – 12:30 ThC7
HIGH QUALITY FILMS ON COMPLEX SHAPED SUBSTRATES WITH IONISED PVD J. Alami, P.Å.O. Persson, J. Böhlmark, U. Helmersson IFM, Linköping University (Sweden)
Thursday, September 16th, 2004 Room Zugspitze
PSE 2004 32
12:30 – 12:50 ThC8
HIGH POWERED PULSED MAGNETRON SPUTTERING OF METALLIC FILMS IN AR, NE, AND HE PLASMAS S.L. Rohde, J. Li; D.M. Mihut Dept. of Mechanical Engineering, Lincoln (USA)
Thursday, September 16th, 2004 Room Richard Strauss
PSE 2004 33
Chairman: M. R. Wertheimer, Montréal (Canada) 14:15 – 14:55 Plenary Lecture P7
PROCESSING OF POLYMERS BY PLASMA TECHNOLOGIES F. Arefi-Khonsari, M. Tatoulian, F. Bretagnol, R. Jafari, W. Morscheidt Laboratoire de Genie des Procedes Plasmas et Traitement de Surface, ENSCP, Paris (France)
15:10 – 16:40 Poster Session (Foyer and First Floor) Oral Session ThA (afternoon session): Carbon Coatings II Chairman: H. Biederman, Prague (Czech Republic) 16:40 – 17:10 Keynote Lecture K17
CARBON COATING SELECTION FOR INDUSTRIAL APPLICATIONS J. Vetter1, J. Brand2, O. Kayser1, P. Siemroth3 1 Sulzer-Metaplas Ionon GmbH, Bergisch Gladbach (Germany) 2 FhG-IST Braunschweig, Braunschweig (Germany) 3 Arc Precision GmbH, Dresden (Germany)
17:10 – 17:30 ThA9
SUPERHARD AMORPHOUS CARBON FILMS FROM 1 nm TO 100 µm THICKNESS: PROPERTIES AND APPLICATION B. Schultrich1, V. Weihnacht1, H. Schulz1, P. Siemroth2, H.-J. Scheibe3 1 Fraunhofer-Institut für Werkstoff- und Strahltechnik, Dresden (Germany) 2 Arc Precision GmbH; Dresden (Germany) 3 Fraunhofer USA, Center for Coatings and Laser Applications, Michigan State University (USA)
17:30 – 17:50 ThA10
BIOCOMPATIBILITY OF DIAMOND Katarzyna Bakowicz, Stanislaw Mitura
Biomedical Engineering Division, Institute of Materials Science & Engineering, Technical University of Lodz (Poland)
17:50 – 18:10 ThA11
LINK BETWEEN THE CHARACTERISTICS OF A PULSED MICROWAVE PLASMA USED FOR DIAMOND GROWTH AND THE PROPERTIES OF THE FILMS T. Lamara, M. Belmahi, G. Henrion, J. Bougdira, M. Rémy Lab. Physique des Milieux Ionisés et Applications – CNRS Université Henri Poincaré –VANDOEUVRE les NANCY Cedex (France)
18:10 – 18:30 ThA12
METAL CARBON LAYERS STATE OF THE ART AND FUTURE APPLICATION T.G. Krug, C. Strondl, R. Tietema Hauzer Techno Coating BV, Venlo (The Netherlands)
18:30 – 18:50 ThA13
NOVEL APPROACHES IN THE DEVELOPMENT OF ADVANCED TRIBOLOGICAL COATINGS FOR TEMPERATURE SENSITIVE COMPONENTS BY MEANS OF PULSED DC SPUTTERING G. Erkens, R. Cremer; T. Rasa CemeCon AG, Würselen (Germany)
18:50 – 19:10 ThA14
DIAMOND-LIKE CARBON COATING FOR CUTTING TOOLS IN INDUSTRIAL APPLICATION U. Hornauer, F.-R. Weber G-Elit GmbH – GÜHRING Group, Berlin (Germany)
Thursday, September 16th, 2004 Room Olympia
PSE 2004 34
14:15 – 14:55 Plenary Lecture P7 (see page 33, Room Richard Strauss) 15:10 – 16:40 Poster Session (Foyer and First Floor) Oral Session ThB (afternoon session): Plasma Polymerisation, Coatings on Polymers Chairman: D. Hegemann, St. Gallen (Switzerland) 16:40 – 17:10 Keynote Lecture K18
MICRO- AND NANO-STRUCTURED SURFACES, PRODUCED BY MEANS OF PLASMA PROCESSES, MODULATE ADHESION OF EUKARYOTIC CELLS. E. Sardella1, Roberto Gristina2, Giorgio S. Senesi2, Loredana Detomaso1, Erica D’Aloia1, Riccardo d’Agostino1,2, Pietro Favia1,2 1 Department of Chemistry, University of Bari (Italy) 2 Institute of Inorg. Methodology of Plasma, (IMIP) CNR (Italy)
17:10 – 17:30 ThB9
DETECTION AND IDENTIFICATION OF PINHOLES IN PLASMA-POLYMERISED THIN FILM BARRIER COATINGS ON METAL FOILS. A. Schulz1, D. Herrmann2, F. Kessler2, J. Schneider1, M. Walker1, U. Schumacher1 1 Institut für Plasmaforschung, Universität Stuttgart, Stuttgart (Germany) 2 Zentrum für Sonnenenergie- und Wasserstoff-Forschung (ZSW), Stuttgart (Germany)
17:30 – 17:50 ThB10
ULTRATHIN CARBON-FLUORINE FILM PROCESSING J. Barz, M. Haupt, U. Vohrer, Ch. Oehr Fraunhofer Institute for Interfacial Engineering and Biotechnology, Stuttgart (Germany)
17:50 – 18:10 ThB11
FUNCTIONAL COATING DEPOSITION BY PLASMA POLYMERISATION Anita Mistry1, F.R. Jones1 and T. English2 1 Department of Engineering Materials, The University of Sheffield (United Kingdom) 2 Corus Plc., Rotherham (United Kingdom)
18:10 – 18:30 ThB12
MACROSCOPIC PLASMA-CHEMICAL APPROACH TO PLASMA POLYMERIZATION OF HMDSO D. Hegemann, U. Schütz, A. Fischer Swiss Federal Laboratories for Materials Testing and Research EMPA, Laboratory for Functional Fibres and Textiles, St.Gallen (Switzerland)
18:30 – 18:50 ThB13
SURFACE ANALYSIS OF PLASMA-DEPOSITED POLYMER FILMS BY TIME OF FLIGHT STATIC SECONDARY ION MASS SPECTROMETRY (TOF-SSIMS) BEFORE AND AFTER EXPOSURE TO AMBIENT AIR U. Oran, S. Swaraj, J. F. Friedrich and W. E. S. Unger Bundesanstalt für Materialforschung - und prüfung (BAM), Berlin (Germany)
18:50 – 19:10 ThB14
MECHANICAL AND OPTICAL PROPERTIES OF PLASMA-POLYMERIZED VINYLTRIETHOXYSILANE R. Prikryl1, V. Cech1, L. Zajickova2, J. Vanek1, S. Behzadi3 and F.R. Jones3 1 Institute of Materials Chemistry, Brno University of Technology, Brno (Czech Republic) 2 Department of Physical Electronics, Masaryk University, Brno (Czech Republic) 3 Department of Engineering Materials, University of Sheffield (United Kingdom)
Thursday, September 16th, 2004 Room Zugspitze
PSE 2004 35
14:15 – 14:55 Plenary Lecture P7 (see page 33, Room Richard Strauss) 15:10 – 16:40 Poster Session (Foyer and First Floor) Oral Session ThC (afternoon session): Optical Properties, Process Control, Hybrid
Processes Chairman: P. Frach, Dresden (Germany) 16:40 – 17:10 Keynote Lecture K19
NANO-MOTHEYE ANTIREFLECTION PATTERN BY PLASMA TREATMENT OF POLYMERS A. Kaless, P. Munzert, U. Schulz, N. Kaiser Fraunhofer Institute of Applied Optics and Precision Engineering, Jena (Germany)
17:10 – 17:30 ThC9
TiO2/SiO2 THIN FILMS PREPARED BY PLASMA AND ION BEAM ASSISTED CHEMICAL VAPOUR DEPOSITION F. Gracia1, F. Yubero1, T. Girardeau2, J.P. Espinós1, A.R. González-Elipe1 1 Instituto de Ciencia de Materiales de Sevilla (CSIC-U. Sevilla), (Spain) 2 Laboratoire de Metallurgie-Univ POITIERS Futuroscope-Chasseneuil (France)
17:30 – 17:50 ThC10
ION BOMBARDMENT EFFECTS ON NUCLEATION OF SPUTTERED Mo NANO-CRYSTALS IN Mo/B4C/Si MULTILAYERS V. Rigato1, G.Salmaso1, A. Patelli2, E. Bontempi3, L. Depero3, Nuno Carvalho4, Jeff Th. M. de Hosson4 1 LNL-INFN, Via dell'Università 2, Legnaro-Padova (Italy) 2 Dip. Ingegneria dell’Informazione – Università di Padova, (Italy) 3 INSTM, Laboratorio di Strutturistica Chimica – Università di Brescia (Italy) 4 Dept. Applied Physics, University of Groningen (The Netherlands)
17:50 – 18:10 ThC11
IN-PROCESS RATE DETERMINATION OF SPUTTERED OPTICAL FILMS BY USE OF A FAST AOS SPECTROMETER MONITORING SELECTED PLASMA EMISSION LINES Thomas Löhken1, Michael Vergöhl1, René Dittrich2 and Till Wallendorf2 1 Fraunhofer IST, Braunschweig (Germany) 2 IfU Diagnostic Systems GmbH, Lichtenau (Germany)
18:10 – 18:30 ThC12
REACTIVE GAS CONTROL OF NON STABLE PLASMAS. Victor Bellido-González, Benoit Daniel, John Counsell, Dr Dermot Monaghan GENCOA, Liverpool (United Kingdom)
18:30 – 18:50 ThC13
QUANTUM CASCADE LASER- AND TUNABLE DIODE LASER-ABSORPTION SPECTROSCOPY: A VALUABLE TOOL FOR ON-LINE PROCESS MONITORING H. Ferber1, S. Glitsch2, F. Hempel2, J. Röpcke2, S. Saß2 1 DaimlerChrysler Forschung und Technik, Forschungszentrum Ulm (Germany) 2 INP Greifswald, Greifswald (Germany)
18:50 – 19:10 ThC14
TRIBOLOGICAL PROPERTIES OF A CrN COATING CONTAINING CARBON NANOPARTICLES S. Mutti, S. Luridiana Microcoat S.p.a., Sedriano (Italy)
Friday, September 17th, 2004 Room Richard Strauss
PSE 2004 36
08:30 – 9:10 Chairman: J. G. Han, Suwon (Korea) Plenary Lecture P8
DEPOSITION AND PROPERTIES OF NANOSTRUCTURED HARD COATINGS Jörg Patscheider1, Franz-Josef Haug1 and Thomas Zehnder1,2 1 EMPA, Laboratory for Surfaces, Coatings and Magnetism, Dübendorf (Switzerland)
2 CAFI, Le Locle (Switzerland) Oral Session FrA: Nano Composites Chairman: A. Cavaleiro, Coimbra (Portugal) 09:20 – 09:50 Keynote Lecture K20
RECENT PROGRESS IN FUNDAMENTAL UNDERSTANDING AND DEVELOPMENT OF MULTICOMPONENT NANOSTRUCTURED THIN FILMS Dmitry Shtansky, Evgeny Levashov Moscow State Institute of Steel and Alloys, Moscow (Russia)
09:50 – 10:10 FrA1
TiC/a-C NANOCOMPOSITE COATINGS: NANOSTRUCTURE AND PROPERTIES D. Galvan, Y.T. Pei, J.Th.M. De Hosson, A. Cavaleiro* Materials Science Center and Netherlands Institute for Metals Research, University of Groningen (The Netherlands) *University of Coimbra, Coimbra (Portugal)
10:10 – 10:30 FrA2
IN SITU INVESTIGATION OF THE INTERNAL STRESS WITHIN THE nc-Ti2N/nc-TiN NANOCOMPOSITE COATINGS PRODUCED BY A COMBINED MAGNETRON SPUTTERING AND ION IMPLANTATION METHOD E.Grigore1, C.Ruset1, K.Short2, H.Dong3, X.Y.Li, T.Bell3 1 The National Institute for Laser, Plasma and Radiation Physics, Bucharest (Romania) 2 Australian Nuclear Science and Technology Organisation, Materials Division, Menai (Australia) 3 The University of Birmingham, School of Engineering (Department of Metallurgy & Materials), Birmingham (United Kingdom)
10:30 – 10:50 FrA3
CHARACTERIZATION OF TaN-Cu NANOCOMPOSITE THIN FILMS C. M. Wang, J. H. Hsieh, C. Li, and T. P. Chen School of Mechanical and Production Engineering, Nanyang Technological University (Singapore)
10:50 – 11:10 coffee break 11:10 – 11:30 FrA4
DESIGN, CONSTITUTION AND PERFORMANCE OF MULTIFUNCTIONAL NANOCOMPOSITE COATINGS FOR TRIBOLOGICAL APPLICATIONS M. Stueber Forschungszentrum Karlsruhe, Institute of Materials Research I (Germany)
11:30 – 11:50 FrA5
PHYSICAL PROPERTIES VERSUS STRUCTURE IN (Ti,Si,Al)N NANOCOMPOSITE COATINGS S. Carvalho1, L. Rebouta1, F. Vaz1, J.A. Mendes1, S. Lanceros-Méndez1, A. Cavaleiro2 and E. Alves3 1 Dept. Física, Universidade do Minho, Azurém, Guimarães (Portugal) 2 ICMES – Fac. Ciências e Tecnologia da Universidade de Coimbra (Portugal) 3 ITN, Dept. de Física, Sacavém (Portugal)
Friday, September 17th, 2004 Room Richard Strauss
PSE 2004 37
11:50 – 12:10 FrA6
DEPOSITION OF Ti-B-C-N NANOCOMPOSITE COATINGS BY DC UNBALANCED MAGNETRON SPUTTERING: EFFECTS OF SUBSTRATE TEMPERATURE AND BIAS VOLTAGE I.-W. Park1, K.H. Kim1, A.O. Kunrath2, D. Zhong2, J. J. Moore2
1 Department of Materials Science and Engineering, Pusan National University (South Korea) 2 Advanced Coatings and Surface Engineering Laboratory, Colorado School of Mines, Golden (USA)
12:10 – 12:30 FrA7
W-B-N SPUTTER-DEPOSITED THIN FILMS FOR MECHANICAL APPLICATION C. Louro1, R. Lamni2, F. Lévy2 1 ICEMS, Departamento de Engenharia Mecânica – Polo II-Universidade de Coimbra (Portugal) 2 Institut of Physics of Complexe Matter, EPFL, Lausanne (Switzerland)
12:30 – 12:50 FrA8
NANOCOMPOSITE HARD COATINGS PRODUCED BY PULSE MAGNETRON SPUTTERING H. Klostermann, B. Böcher, F. Fietzke, Th. Modes, and O. Zywitzki Fraunhofer Institut für Elektronenstrahl- und Plasmatechnik, Dresden (Germany)
12:50 Closing
Friday, September 17th, 2004 Room Olympia
PSE 2004 38
08:30 – 9:10 Plenary Lecture P8 (see page 36, Room Richard Strauss) Oral Session FrB: Wear Resistance, Tribology, Solid Lubricants Chairman: W. Fleischer, Venlo (The Netherlands) 09:20 – 09:50 Keynote Lecture K21
TRIBOLOGICAL CHALLENGES FOR PLASMA SURFACE ENGINEERED MATERIALS – A REVIEW P. A. Dearnley School of Mechanical Engineering, University of Leeds (United Kingdom)
09:50 – 10:10 FrB1
Nb, Hf, OR B ALLOYED Ti1-xAlxN COATINGS K. Kutschej1, N. Fateh1, P. H. Mayrhofer2, M. Kathrein3, P. Polcik4, C. Mitterer2 1 Materials Center Leoben, Franz-Josef-Strasse 13, 8700 Leoben, Austria 2 Department of Physical Metallurgy and Materials Testing, University of Leoben (Austria) 3 CERATIZIT Austria GmbH, Reutte (Austria) 4 Plansee AG, Reutte (Austria)
10:10 – 10:30 FrB2
CHARACTERIZATION OF MONO, MULTILAYERS AND MULTICOMPONENT HARD COATINGS DEPOSITED BY R.F. MAGNETRON SPUTTERING: APPLICATION TO WOOD MACHINING C. Labidi1, C. Nouveau1, M.A. Djouadi2 1 Ecole Nationale Supérieure d’Arts et Métiers, LaBoMaP, Cluny (France) 2 Institut des Matériaux Jean Rouxel, Nantes (France)
10:30 – 10:50 FrB3
ION-INDUCED STRESS RELAXATION DURING MAGNETRON SPUTTER DEPOSITION OF CUBIC BORON NITRIDE THIN FILMS B. Abendroth, R. Gago, F.Eichhorn, A. Kolitsch, W. Möller Institute for Ion Beam Physics and Materials Research, Forschungszemtrum Rossendorf, Dresden (Germany)
10:50 – 11:10 coffee break 11:10 – 11:30 FrB4
FAILURE DURING SCRATCH TESTING OF THIN AND THICK CrN COATINGS EXAMINED USING FIB R. Hoy1, V. Sivel1, G.C.A.M. Janssen2
1 Netherlands Institute for Metals Research, Delft (The Netherlands) 2 Delft University of Technology, Department of Materials Science and Engineering (The Netherlands)
11:30 – 11:50 FrB5
PLASMA IMMERSION ION IMPLANTED TITANIUM-BORON BASED COATINGS: TRIBOLOGICAL BEHAVIOR AT ROOM AND HIGH TEMPERATURES B. Prakash, J.P. Celis Katholieke Universiteit Leuven, Department Metaalkunde en Toegepaste Materiaalkunde, Leuven (Belgium)
11:50 – 12:10 FrB6
MECHANICAL PROPERTIES OF NANOCRYSTALLINE Ti-B-(N) COATINGS PRODUCED BY DC MAGNETRON SPUTTERING A. García-Luis, M. Brizuela, J.I. Oñate, J.C. Sánchez-López*, D. Martínez-Martínez*, C. López-Cartes*, A. Fernández* Fundación INASMET, Mikeletegui Pasealekua, Donostia-San Sebastián (Spain) *Instituto de Ciencia de Materiales de Sevilla (CSIC-Univ. Sevilla) (Spain)
Friday, September 17th, 2004 Room Olympia
PSE 2004 39
12:10 – 12:30 FrB7
DEPOSITION OF MAGNETRON SPUTTERED TiN-MoS2 COMPOSITE COATING WITH Ti-TiN GRADED INTERLAYER Mahfujur Rahman1, Julfikar Haider1 and M.S.J. Hashmi 1,2 1 NCPST and MPRC, Dublin City University (Ireland) 2 School of Mechanical and Manufacturing Engineering, Dublin City University, (Ireland)
12:30 – 12:50 FrB8
THE EFFECT OF SOLID LUBRICANTS ON TOOL PERFORMANCE DURING DRILLING N.R. Thomas1, D.G. Teer1, S. Hickman1, J. Wallbank2 and S. Barnes2
1 Teer Coatings Ltd, Hartlebury (United Kingdom) 2 Warwick Manufacturing Group, University of Warwick (United Kingdom)
12:50 Closing
Friday, September 17th, 2004 Room Olympia
PSE 2004 40
08:30 – 9:10 Plenary Lecture P8 (see page 36, Room Richard-Strauss) Oral Session FrC (morning session): Theory and Modelling Chairman: S. Berg, Uppsala (Sweden) 09:20 – 09:50 Keynote Lecture K22
MODELING OF GAS DISCHARGE PLASMAS: WHAT CAN WE LEARN FROM IT? A. Bogaerts University of Antwerp, Dept. of Chemistry (Belgium)
09:50 – 10:10 FrC1
MATERIALS’ HARDNESS DETERMINATION, BY MEANS OF A FEM SUPPORTED SIMULATION OF NANOINDENTATION K.–D. Bouzakis, N. Michailidis Laboratory for Machine Tools and Manufacturing Engineering, Mechanical Engineering Department, Aristoteles University of Thessaloniki (Greece)
10:10 – 10:30 FrC2
A CONTRIBUTION OF MOLECULAR DYNAMIC SIMULATION FOR SOPHISTICATED ENGINEERING OF COATING PROCESSES APPLIED TO PVD-DC SPUTTER DEPOSITION E. Westkämper1,3, P. Klein2, B. Gottwald1, S. Sommadossi1, P. Baumann2, A. Gemmler3 1 IFF, Univ. Stuttgart (Germany)
2 Fraunhofer-ITWM (Germany) 3 Fraunhofer-IPA, Stuttgart (Germany)
10:30 – 10:50 FrC3
STRENGTH OF COATINGS - A NEW CONCEPT OF MECHANICAL EVALUATION ON THE BASIS OF SIMULATED FRACTURE BEHAVIOR - S. Kamiya1, H. Nagasawa1, K. Yamanobe1, H. Hanyu2, S. Suzuki1, M. Saka1 1 Department of Mechanical Engineering, Tohoku University, Sendai (Japan) 2 OSG CORPORATION, Research & Development, Toyokawa (Japan)
10:50 – 11:10 coffee break 11:10 – 11:30 FrC4
MODELS FOR PLASMA NITRIDING OF FERRITIC STEELS J.-D. Kamminga1, G.C.A.M. Janssen2 1 Netherlands Institute for Metals Research, AL Delft (The Netherlands) 2 Delft University of Technology, Department of Materials Science and Engineering, AL Delft (The Netherlands)
11:30 – 11:50 FrC5
INFLUENCE OF PLANETARY KINEMATICS AND BATCH FILLING ON FILM HOMOGENEITY AND DEPOSITION RATE IN INDUSTRIAL BATCH COATERS– A SIMULATION APPROACH B. Schultrich, S. Völlmar, D. Römer Fraunhofer-Institut für Werkstoff- und Strahltechnik, Dresden (Germany)
11:50 – 12:10 FrC6
EXPERIMENTAL ANALYSIS AND KINETIC MODEL OF A RF O2/HMDSO PLASMA FOR SiO2 DEPOSITION M. Goujon1,2, T. Belmonte1, G. Henrion2
1 LSGS (UMR CNRS 7570) Ecole des Mines, Nancy (France) 2 LPMIA (UMR CNRS 7040) Université H. Poincaré, Vandoeuvre les Nancy (France)
12:10 – 12:30 FrC7
APPLICATION TO ATMOSPHERIC PRESSURE PLASMA DEVICES OF AIR CHEMICAL KINETICS SIMULATIONS C.Riccardi, R.Barni, P.Esena Dipartimento di Fisica G. Occhialini, Università degli Studi di Milano-Bicocca and INFM, Milano (Italy)
Friday, September 17th, 2004 Room Olympia
PSE 2004 41
12:30 – 12:50 FrC8
MONTE CARLO SIMULATION OF THE PVD TRANSPORT PROCESS FOR ALLOYS E. Lugscheider, D. Parkot Materials Science Institute, RWTH Aachen University (Germany)
12:50 Closing
Monday, September 13th, 2004 Poster Session 15:10 – 16:40
PSE 2004 42
Poster – Corrosion MoP1 INFLUENCE OF PROCESS PARAMETERS ON THE CORROSION
PROPERTIES OF ELECTROLYTIC CONVERSION PLASMA COATED MAGNESIUM ALLOYS C. Blawert1, V. Heitmann1, W. Dietzel1, H. M. Nykyforchyn2 and M. D. Klapkiv2 1 Center for Magnesium Technology, GKSS Research Center, Geesthacht (Germany) 2 Karpenko Physico-Mechanical Institute of the National Academy of Sciences of Ukraine, Lviv (Ukraine)
MoP2 CORROSION BEHAVIOUR OF THERMALLY FLAME SPRAYED FeCr
COATINGS ON STEEL SUBSTRATES N. F. Ak1, E. Celik1,2, K. Demirkurt2, A. Cakir1
1 Dokuz Eylul University, Metallurgical And Materials Engineering, Izmir (Turkey) 2 KROMA, AOSB, Izmir (Turkey)
MoP3 CORROSION RESISTANCE MECHANISM OF PLASMA-BASED LOW-
ENERGY NITROGEN ION IMPLANTED AUSTENITIC STAINLESS STEEL M. K. Lei1, X. M. Zhu2 1 Surface Engineering Laboratory, Department of Materials Engineering, Dalian University of Technology, Dalian (China) 2 Department of Materials Science and Engineering, Dalian Railway Institute, Dalian (China)
MoP4 A STUDY ON CORROSION CHARATERIZATION OF PLASMA OXIDIZED
65/35 BRASS WITH VARIOUS FREQUENCIES Chang Gyu Park1, Seung Ho Ahn1, Jung Gu Kim1, Yun Mo Jung2, Sang Ju Lee2, Jeon Gun Han2 1 Department of Advanced Materials Engineering, Sunkyunkwan University, Suwon (Korea) 2 Center for Advanced Plasma Surface Technology, Sunkunkwan University Suwon (Korea)
MoP5 RESISTANCE TO ELECTROCHEMICAL CORROSION OF CrXNY-COATED,
DLC-COATED AND NITRIDED TOOL STEEL IN THE ENVIRONMENT OF WET WOOD J. Kaminski1, J. Rudnicki1, C. Nouveau2, A. Savan3 and P. Beer4 1 Faculty of Material Sciences, Warsaw University of Technology, Warsaw (Poland) 2 Research and Technology Organisation (SERAM-ENSAM), Cluny (France) 3 Centre Suisse d’Electronique et de Microtechnique, Neuchatel (Switzerland) 4 Faculty of Wood Technology, Agricultural University of Poznan (Poland)
MoP6 TiN-NCD COMPOSITE COATING PRODUCED ON THE TI6AL4V ALLOY
INTENDED FOR MEDICAL APPLICATIONS. A. Sokolowska1,2, T. Wierzchon2, S. Mitura1, J. Rudnicki2, P. Niedzielski1, A. Boczkowska2 , G. Boguslawski1 1 Institute of Materials Science, Lódz University of Technology (Poland) 2 Faculty of Materials Sciences and Engineering, Warsaw University of Technology (Poland)
MoP7 THE CORROSION PROPERTIES OF IMPLANTED MATERIALS WITH
PROTECTIVE COATINGS IN THE ISOTONIC PHYSIOLOGICAL SOLUTION. A.V. Zykova1, V.V. Luk’yanchenko2, V.I. Safonov3 1 Scientific Centre of Physical Technologies, Kharkov (Ukraine) 2 INMASTERS, Ltd, Kharkov (Ukraine) 3 Centre of Scientific & Technical Researchs Kharkov (Ukraine)
Monday, September 13th, 2004 Poster Session 15:10 – 16:40
PSE 2004 43
MoP8 STRUCTURE OF DUPLEX CrN/NbN COATINGS AND THEIR PERFORMANCE AGAINST CORROSION AND WEAR T.Savisalo1, D. B. Lewis1, Q.Luo1, M. Bolton2, P. Hovsepian1
1 Sheffield Hallam University, Materials Research Institute (United Kingdom) 2 Eltro (GB) Ltd. Hampshire (United Kingdom)
MoP9 EFFECT OF MACROPARTICLE DEFECTS ON OXIDATION BEHAVIOR OF
NITRIDE BASED COATINGS AT RELATIVELY LOW TEMPERATURE F. Üstel1, N. Solak2, M. Ürgen2, S. Aydin2 and A.F. Cakir2 1 Sakarya University, Department of Metallurgy and Materials Science, Adapazari (Turkey) 2 Istanbul Technical University, Department of Metallurgical and Materials Engineering, Istanbul (Turkey)
MoP10 HIGH TEMEPERATURE CORROSION PROPERTIEIS OF CrNX AND SiNX
COATINGS DEPOSITED BY IBAD METHOD J.Pitter, F.Cerny1, J.Cizner2 and J.Suchanek3 ATG Ltd., Prague (Czech Republic) 1 Czech Technical University, Faculty of Mechanical Engineering, Dept. of Physics, Prague (Czech Republic) 2 SVUM Comp., Research Centre Bechovice, Prague (Czech Republic) 3 Czech Technical University, Faculty of Mechanical Engineering, Dept. of Technology, Prague (Czech Republic)
MoP11 STRUCTURE AND PROPERTIES OF COMBINED COATINGS C/Al/Al2O3
A.D. Pogrebnjak1, B.P. Gritsenko2, Yu.N. Tyurin3, N.A. Pogrebnjak (Jr.)1, D.A. Alontseva4, M.L Zhadkevich3 ,Sh.M. Ruzimov5 1 Sumy Institute for Surface Modification, Sumy (Ukraine) 2 Institute for Physics of Strength and Material Science, Tomsk (Russia) 3 O.E.Paton Electric Welding Institute, NAN of Ukraine, Kiev (Ukraine) 4 East-Kazakhstan Technical University, Ust-Kamenogorsk (Kazakhstan) 5 National Tashkent University (Uzbekistan)
MoP12 SiOX-LIKE THIN FILMS PLASMA POLYMERISED FROM A MIXTURE OF
HEXAMETHYLDISILOXANE AND OXYGEN FOR IMPROVING THE CORROSION BEHAVIOUR A. Cremona1, L. Laguardia1, E. Mesto2, E. Vassallo1 1 Istituto di Fisica del Plasma - CNR Milan (Italy) 2 Università degli Studi di Bari - Dip. Geomineralogico (Italy)
Poster – Plasma-CVD MoP13 INFLUENCE OF HYDROGEN SULPHIDE ADDITION ON THE ALUMINA
DEPOSITION BY PLASMA CVD M. Fink1, J. Laimer1, H. Störi1, C. Mitterer2 1 Institut für Allgemeine Physik, Vienna University of Technology (Austria) 2 Institut für Metallkunde und Werkstoffprüfung, Montanuniversität Leoben (Austria)
MoP15 DESIGN AND CHARACTERISATION OF A CAPACITIVELY COUPLED
PLASMA REACTOR FOR DEPOSITION OF SILICON-FILMS USING VHF UP TO 500 MHZ J. Ruediger, A. Kottwitz; R. Terasa; J. Bartha University of Technology Dresden (Germany)
Monday, September 13th, 2004 Poster Session 15:10 – 16:40
PSE 2004 44
MoP16 VHF PLASMA CVD OF SILICON OXIDE
K. Schade, F. Stahr, S. Röhlecke, O. Steinke, R. Richter1, F. Schopper1, J. Hartung2
FAP Forschungs- und Applikationslabor Plasmatechnik GmbH, Dresden (Germany) 1 Max-Planck-Institut für Physik, MPI Halbleiterlabor, München (Germany) 2 VON ARDENNE Anlagentechnik GmbH, Dresden (Germany)
MoP17 Micro-Jet Plasma CVD with HMDSO/O2
Kamel Silmy1, Andreas Holländer1, Jan Thömel2 and Andreas Dillmann2 1 Fraunhofer-Institut für Angewandte Polymerforschung, Potsdam (Germany) 2 Hermann-Föttinger-Institut für Strömungsmechanik, Technische Universität Berlin (Germany)
MoP18 SINGLE SOURCE PRECURSORS FOR PLASMA-ENHANCED CVD OF
Si-C-N FILMS INVESTIGATED BY MASS SPECTROMETRY Th. Stelzner, M. Arold, F. Falk, H. Stafast IPHT Jena e.V. (Germany)
MoP19 ADHESION, FRICTION AND THERMAL BEHAVIOURS OF SiC BASED FILMS
GROWN BY MICROWAVE PACVD ON TITANIUM ALLOYS L. Thomas1, M. Joinet1, G. Covarel2, V. Lucas3, C. Boher4 1 CNRS-IMP - Tecnosud - Rambla de la Thermodynamique, Perpignan (France) 2 Institut Universitaire de Technologie de Mulhouse (France) 3 EADS-CCR - Suresnes (France) 4 CROMeP - EMAC - Campus Jarlard - ALBI CT (France)
MoP20 APPLICATION OF TWO-STAGE AND CONTINUOUS DUPLEX PROCESSES
TO SURFACE TREATMENT OF HOT FORGING DIES Jan Walkowicz, Jerzy Smolik, et al. Institute for Terotechnology, Radom (Poland)
Poster – Surface Modification MoP21 SHORT-TIME PLASMA SURFACE MODIFICATION OF POLYMER
POWDERS IN A DOWNFLOWING TUBE REACTOR C. Arpagaus1, Ph. Rudolf von Rohr1, A. Rossi2 1 Institute of Process Engineering, ETH Zurich (Switzerland) 2 Laboratory for Surface Science and Technology, ETH Zurich (Switzerland) Department of Inorganic and Analytical Chemistry, Università degli Studi di Cagliari (Italy)
MoP22 ACCESS OF DIFFERENT PLASMA PROCESSES TO HIGH ASPECT RATIO
GAPS AND HOLES OF COMPLEX MICROSTRUCTURES ANALYZED BY XPS W. Besch, K. Schröder, A. Ohl Institut für Niedertemperatur-Plasmaphysik, Greifswald (Germany)
MoP23 PLASMA MODIFICATION OF NANO- AND MICRO-PARTICLES
V. Brüser1, M.M. Khan1, G. Thieme2, H. Kersten1 1 Institute of Non-Temperature Plasma Physics (INP), Greifswald (Germany) 2 University of Greifswald, Department of Physics, Greifswald (Germany)
MoP24 PLASMA SURFACE MODIFICATION OF CARBON FIBRES
V. Brüser1, M. Heintze1, J. Lohmar2, H. Bubert3, W. Brandl4, G. Marginean4 1 Institute of Low-Temperature Plasma Physics, Greifswald (Germany) 2 Degussa-Hüls AG, Marl (Germany) 3 Institute of Spectrochemistry and Applied Spectroscopy, Dortmund (Germany) 4 University of Applied Sciences, Gelsenkirchen (Germany)
Monday, September 13th, 2004 Poster Session 15:10 – 16:40
PSE 2004 45
MoP25 MODIFICATION OF POLYESTER TRACK MEMBRANES BY PLASMA TREATMENTS Lazea, L.I. Kravets1, B. Albu2, C. Ghica3, G. Dinescu National Institute for Laser, Plasma and Radiation Physics, Magurele Bucharest (Romania) 1 Joint Institute for Nuclear Research, Flerov Laboratory of Nuclear Reactions, Dubna (Russia) 2 Research Centre for Membranes and Macromolecular Materials, Bucharest (Romania) 3 National Institute of Materials Physics, Magurele, Bucharest (Romania)
MoP26 PLASMA TREATMENT OF POLYETHYLENE POWDER FOR BETTER
ADHESION TO METAL SUBSTRATE J. Hladík1, P. Špatenka1, P. Knoth2
1 Technical University of Liberec, Faculty of Machinery Engineering, Department of Material Science (Czech Republic) 2 ARPLAS GmbH, Wolfen – Thalheim (Germany)
MoP27 STUDY ON THE PHOTOCATALYTIC ACTIVITY IMPORVEMENT OF TIO2
THIN FILMS USING OXYGEN PLASMA SURFACE TREATMENT METHODS C.-K. Jung, Y.-H. Song, T.-K. Kim1, J. -H. Oh1, J.-H. Boo Department of Chemistry, SungKyunKwan University, Suwon (Korea) 1 SolarTech. CO. Ltd. (Korea)
MoP28 NEW BIODEGRADABLE MATERIAL BASED ON RF PLASMA MODIFIED
STARCH Mariusz Kaczmarek1, Hieronim Szymanowski1, Maciej Gazicki-Lipman1, Boguslaw Wozniak2, Jacek Józwiak2
1 Institute for Materials Science and Engineering, Technical University of Lodz (Poland) 2 Leather Research Institute, Lodz (Poland)
MoP29 INFLUENCE OF PLASMA TREATMENT ON THE FIBRE, SIZING AND
MATRIX SYSTEM OF REINFORCED POLYMERS M. Kaiser, R. Emmerich, H. Urban, D. Gittel Fraunhofer Institute of Chemical Technology, Pfinztal (Germany)
MoP30 PLASMA-BONDING OF POLYMERS
F. Katzenberg Universität Dortmund (Germany)
MoP31 MOBILE PLASMA ACTIVATION OF POLYMERS USING THE PLASMAGUN
Roland Gesche, Reinhold Kovacs, Joachim Scherer Aurion Anlagentechnik GmbH, Seligenstadt (Germany)
MoP32 EFFECT OF THE OXYGEN PLASMA TREATMENT PARAMETERS ON
THE CARBON NANOTUBES SURFACE PROPERTIES G. Marginean1, W. Brandl1, V. Chirila1,2 1 University of Applied Sciences, Gelsenkirchen (Germany) 2 University “Politehnica” Timisoara (Romania)
MoP33 STUDY ON THE ETCH PROCESSES OF VARIOUS MATERIALS USING A
LOW ANGLE FORWARD REFLECTED NEUTRAL BEAM ETCHING SYSTEM B.J.Park, D.H.Lee, S.D.Park, G.Y.Yeom Department of Materials Engineering, Sungkyunkwan University, Suwon (South Korea)
Monday, September 13th, 2004 Poster Session 15:10 – 16:40
PSE 2004 46
MoP34 ALTERNATIVE ETCHING GASES TO SF6 FOR PLASMA ENHANCED
CHAMBER CLEANING IN SILICON DEPOSITION SYSTEMS T. Rößler, M. Albert, R. Terasa, J.W. Bartha University of Technology, Dresden (Germany)
MoP35 PLASMA POLYMER INTERLAYERS AS ADHESION PROMOTORS IN PE-
TITANIUM COMPOSITES Rolf-Dieter Schulze, Jörg Friedrich, Dietmar Schulze Federal Institute for Materials Research and Testing, Berlin (Germany)
MoP36 MODIFICATION OF LIGNOCELLULOSIC FIBRES BY AR PLASMA
TREATMENTS IN COMPARISON WITH CHEMICAL AND BIOLOGICAL TREATMENTS S. Zanini, C. Riccardi, C. Canevali, M. Orlandi, L. Zoia, E-L Tolppa, F. Agnoli1 Universita’ degli Studi di Milano-Bicocca, Milano (Italy) 1 Dipartimento di Chimica Fisica, Venezia (Italy)
MoP37 MICROWAVE PLASMA MODIFICATION AND GRAFT COPOLYMERIZATION
OF WOOD SURFACES X. K. Yang1, G. B. Du2, T. C. Quan1, X. Y.Yang1, and J. Zhang3
1 Analysis & Test Institute of Yunnan Province, Kunming (P.R.China) 2 Southwest Forestry College, Kunming (P.R.China) 3 Department of Physics, Yunnan University, Kunming (P.R.China)
Poster – Generation MoP38 INVESTIGATION OF LASER-PRODUCED PLASMA INTERACTION WITH
MATERIALS W,V AND Mo R. Khaydarov, U. Kunishev, G. Berdiyorov, E.Tojihanov Scientific-Research Institute of Applied Physics at the National University of Uzbekistan, Tashkent (Uzbekistan)
MoP39 MULTIPURPOSE 14.5 GHZ ECR ION SOURCE: SPECIALITIES AND
APPLICATION FOR SURFACE MODIFICATION S.KÖKÉNYESI2, S. BIRI1, I. IVÁN2, J. PÁLINKÁS2, I.A. SZABÓ2, E. TAKÁCS2, A. VALEK1 1 Institute of Nuclear Research (ATOMKI), Debrecen (Hungary) 2 University of Debrecen, Debrecen (Hungary)
MoP40 AN APPLICATION OF CYLINDRIC ELECTROMAGNETRON ELECTRODE TO
PLASMA ENHANCED PVD AND CVD PROCESSES AND THEIR COMBINATION F. Olcaytug, H. Schalko, H. Ebel, A. Sobczyk, M. Kaczmarek, C. Rapiejko, H.Szymanowski, M. Gazicki-Lipman, H. Yasuda Institute for Materials Science and Engineering, Lodz (Poland)
MoP41 FAST OPTICAL EMISSION SPECTROSCOPY (OES) DURING THE
DEPOSITION OF MAGNETIC COATINGS USING RF-SPUTTERING TECHNIQUES AND PULSED ARC PLASMA Bernd Engers1, Guido Willers1, Swen Marke2, Till Wallendorf2 1 Angaris GmbH, Halle (Germany) 2 IfU Diagnostic Systems GmbH, Lichtenau (Germany)
Poster – New Plasma and Ion Sources MoP42 PROPERTIES AND APPLICATIONS OF THE ELECTRON-BEAM PLASMA
GENERATED INSIDE A CLOSED VOLUME Abdul Mahir, Michael Vasiliev Department of Aerospace Research, Moscow Institute of Physics and Technology, Dolgopruny (Russia)
Monday, September 13th, 2004 Poster Session 15:10 – 16:40
PSE 2004 47
MoP43 PLASMAPOLYMERISATION USING AN ION GUN INVERSE MAGNETRON SOURCE Victor Bellido-González1, Dr Dermot Monaghan1, Sarah Powell1, Alberto García2, Marta Brizuela2, 1 GENCOA LTD, Wavertree Technology Park, Liverpool (UK) 2 INASMET, Parque Tecnológico, Donostia-San Sebastian (Spain)
MoP44 CHARACTERISTICS OF PLASMA AND SINX ETCHING USING A
MAGNETICALLY ENHANCED INTERNAL-ANTENNA-TYPE INDUCTIVELY COUPLED PLASMA SYSTEM S. J. Jung, K. N. Kim, Y. J. Lee, and G.. Y. Yeom Dept. of Materials Engineering, Sungkyunkwan University, Suwon (Korea)
MoP45 PLASMA CHARACTERISTICS OF AN INDUCTIVELY COUPLED PLASMA
(ICP) SYSTEM BY EMPLOYING MULTIPOLAR MAGNETIC FIELDS K.N. Kim, S.J. Jung, and G.Y. Yeom, Dept. of Materials Engineering, Sungkyunkwan University, Suwon (Korea)
MoP46 TECHNOLOGICAL SYSTEMS WITH CROSSED E×B FIELDS AND VACUUM
ARC PLASMA SOURCES I. Levchenko1, M. Romanov1, M. Keidar2 1 National Airspace University, Kharkov (Ukraine) 2 Department of Aerospace Engineering, The University of Michigan, Ann Arbor (USA)
MoP47 NON-LINEAR EVOLUTION OF VORTICES IN ELECTROSTATIC PLASMA
LENS FOR HIGH-CURRENT ION BEAM FOCUSING FOR MATERIAL PROCESSING V.I. Maslov2, A.A. Goncharov1, I.N. Onishchenko2, V.L. Stomin2, V.N. Tretyakov3 1 Institute of Physics NASU, 252650 Kiev 2 NSC Kharkov Institute of Physics & Technology, Kharkov (Ukraine) 3 Karazin Kharkov National University, Kharkov (Ukraine)
MoP48 APPLICATION OF THE BALLISTIC PLASMATRON OF SUPERADIABATIC
COMPRESSION FOR SURFACE TREATMENT V. Shmelev, S. Podoynitsyn, N. Vasilik Institute of Chemical Physics of Russian Academy of Science, Moscow (Russia)
MoP49 STUDIES OF SQUIRREL CAGE TYPE COAXIAL ACCELERATOR FOR IPD
PROCESS Marek Rabinski1, Krzysztof Zdunek2, Marian Paduch3, Krzysztof Tomaszewski3 1 Institute for Nuclear Studies, Otwock-Swierk (Poland) 2 Warsaw University of Technology (Poland) 3 Institute of Plasma Physics and Laser Microfusion, Warsaw (Poland)
MoP50 OFF-RESONANCE MICROWAVE ION SOURCE FOR IMPLANTATION
N. Sakudo, R. Nishimoto, Y. Tamashiro, T. Shinohara and M. Matsumine Kanazawa Institute of Technology, Advanced Materials R & D Center, Ishikawa (Japan)
MoP51 SOURCE OF SOLID IONS BASED ON CYLINDRICAL MAGNETRON
SPUTTERING SYSTEM A.A. Bizyukov, I.A. Bizyukov, A.E. Kashaba, K.N. Sereda Kharkov National University (Ukraine)
Monday, September 13th, 2004 Poster Session 15:10 – 16:40
PSE 2004 48
MoP52 CHARACTERISTICS OF VAPOR - AIR DISCHARGES WITH POROUS
ELECTROLYTE ELECTRODE FOR METAL SURFACES MODIFICATION M.F. Achatov2, A.F. Gaisin1, E.E. Son1, R.S. Sharifullin2 1 Moscow Institute of Physics and Technology; Department of Physical Mechanics (Russia) 2 Kasan Technical University
MoP53 THE ELECTROLITE JET – METAL ELECTRODE VAPOUR-AIR DISCHARGE
FOR PLASMA SURFACE PROCESSING A.F. Gaisin, E.E. Son Moscow Institute of Physics and Technology, Department of Physical Mechanics (Russia)
Poster – Plasma Diagnostics MoP54 ION DETECTION MASS SPECTROMETRY OF ATMOSPHERIC PLASMA
GENERATION Y. Aranda Gonzalvo, J.A. Rees, C.L. Greenwood, D. Seymour and I.D. Neale Hiden Analytical Ltd., Warrington (United Kingdom)
MoP55 SPATIALLY RESOLVED MASS SPECTROMETRY OF REACTIVE AR/SF6/N2
PLASMA JETS Thomas Arnold1, Sergey Grabovsky2 Axel Schindler1, Hans-Erich Wagner2 1 Leibniz-Institute for Surface Modification, Leipzig (Germany) 2 Ernst-Moritz-Arndt-University, Greifswald (Germany)
MoP56 PROPERTIES OF FIELD EMISSION FROM HIGH VOLTAGE RF ANTENNA
Vl.V. Bobkov, J.-M. Noterdaeme, R. Wilhelm Max-Planck-Institut für Plasmaphysik, EURATOM Association, Garching (Germany)
MoP57 INVESTIGATIONS OF AN ATMOSPHERIC PRESSURE PLASMA JET BY
OPTICAL EMISSION SPECTROSCOPY S. Förster, C. Mohr, W. Viöl University of Applied Sciences and Arts, Department of Science and Technology, Göttingen (Germany)
MoP58 DENSITIES OF N AND H ATOMS BY LIF IN MICROWAVE FLOWING POST-
DISCHARGES F.Gaboriau1, M. Hazard1,2, N. Gherardi2 , F. Massines2 and A. Ricard1
1 CPAT 2 LGET, CNRS – Univ. Paul Sabatier, Toulouse (France)
MoP59 DESIGN AND STUDY OF A DBD REACTOR FOR THE PLASMA
REMEDIATION OF VOCS AND HYDROCARBONS IN AIR Victor Rico1, José Cotrino1, Alfonso Caballero1, Agustín R. González-Elipe1, Juan Perez-Tinao Gironella2, Maria A.Arilla2 1 Instituto de Ciencia de Materiales de Sevilla (CSIC-Univ. Sevilla) (Spain) 2 INABENSA, Sevilla (Spain)
MoP60 PLASMA DIAGNOSTICS IN THE PULSE MAGNETRON SPUTTERING
SYSTEM USED FOR DEPOSITION OF CARBON AND TiC:H THIN FILMS M. Cada1 , Z. Hubicka1, V. Kulikovski1,2, P. Adámek1,3, P. Bohác1 1 Institute of Physics ASCR, Prague (Czech Republic) 2 Institute for Problems of Materials Science, Academy of Sciences of Ukraine, Kiev (Ukraine) 3 University of South Bohemia, College of Education, Dept. Phys., Ceské Budejovice (Czech Republic)
Monday, September 13th, 2004 Poster Session 15:10 – 16:40
PSE 2004 49
MoP61 NEGATIVE IONS IN ARGON-OXYGEN DISCHARGES
H.M. Katsch, C. Manthey, A.Wagner and H.F. Döbele Institut für Experimentelle Physik, Universität Duisburg-Essen (Germany)
MoP62 OPTICAL EMISSION SPECTRA AND ION ENERGY DISTRIBUTIONS IN TiN
DEPOSITION PROCESS BY REACTIVE PULSED MAGNETRON SPUTTERING Yong M. Kim1, Min J. Jung1, J. Vlcek2, J. Musil2 and Jeon. G. Han1 1 Center for Advanced Plasma Surface Technology, Sungkyunkwan University, Suwon (Korea) 2 Dept. of Physics, University of West Bohemia, Plzen (Czech Republic)
MoP63 VIBRATIONAL-ROTATIONAL TEMPERATURE MEASUREMENT OF
ATMOSPHERIC PRESSURE COLD PLASMA FOR POLYMER SURFACE MODIFICATION J. H. Kim, Y. H. Choi, Y. S. Hwang Department of Nuclear Engineering, Seoul National University (Korea)
MoP64 CORRELATION BETWEEN GDMS AND ABSORPTION SPECTROSCOPY IN
Ar/N2 REACTIVE AMPLIFIED MAGNETRON DISCHARGES S. Konstantinidisa, A Ricard2, R. Snyders1, H. Vandeparre1, J.P. Dauchot1, M. Hecq1
1 Laboratory of Inorganic and Analytical Chemistry, University of Mons-Hainaut, Materia Nova, Mons (Belgium) 2 CPAT, Univ. Paul Sabatier, Toulouse (France)
MoP65 PRODUCTION OF AMMONIA RADICALS IN A DIELECTRIC BARRIER
DISCHARGE AND THEIR INJECTION FOR DENITRIFICATION Y. Kusano, F. Leipold, A. Fateev, B. Stenum, E. Tsakadze, H. Egsgaard and H. Bindslev Risø National Laboratory, Roskilde (Denmark)
MoP66 TIME RESOLVED DIAGNOSTICS OF TRANSIENT AND STABLE SPECIES IN
FLUOROCARBON PLASMAS BY INFRARED TUNABLE DIODE LASER SPECTROSCOPY Onno Gabriel, Konstantin Li, Jürgen Meichsner Institute of Physics, University of Greifswald (Germany)
MoP67 STUDY OF PLASMA PARAMETERS IN A HMDSO-CONTAINING RF
DISCHARGE J. Matheis1, D. Hegemann2, Ch. Oehr3 and A. Lunk1 1 Institut für Plasmaforschung, Universität Stuttgart (Germany) 2 Eidgenössische Materialprüfungs- und Forschungsanstalt (EMPA), St. Gallen (Switzerland) 3 Fraunhofer für Grenzflächen- und Bioverfahrenstechnik IGB, Stuttgart (Germany)
MoP68 COMPARATIVE STUDY OF DC AND PULSED POST MAGNETRON
DISCHARGES Santosh Kumar Dandapat & S. Mukherjee FCIPT, Institute of Plasma Research, Gandhinagar (India)
MoP69 CHARACTERISTICS OF PLASMA PARAMETERS IN N2/Ar ECR PLASMA
FOR NITRIDATION H. Muta, D. H. Thang and Y. Kawai Kyushu University, Kasuga, Fukuoka (Japan)
Monday, September 13th, 2004 Poster Session 15:10 – 16:40
PSE 2004 50
MoP70 STUDY OF PLASMA IN HYBRID MAGNETRON-LASER DEPOSITION
SYSTEM USED FOR TiC THIN FILMS PREPARATION M. Novotný1, M. Jelínek1, J. Bulír1, Z. Zelinger2 1 Institute of Physics, Academy of Sciences of the Czech Republic, Prague (Czech Republic) 2 J. Heyrovský Institute of Physical Chemistry, Academy of Sciences of the Czech Republic, Prague (Czech Republic)
MoP71 CHARACTERIZATION OF DC, PULSED-DC AND RF PLASMAS IN A DUAL
FACING TARGET MAGNETRON SPUTTERING SYSTEM. V. Rigato1, G. Salmaso1, F. Refosco1, A. Patelli2 1 INFN- Laboratori Nazionali di Legnaro (Italy) 2 Dip. Ingegneria dell’Informazione – Università di Padova, via Gradenigo, Padova (Italy)
MoP72 SELECTIVE EFFECT OF ION/SURFACE INTERACTION IN LOW FREQUENCY
PACVD OF SIC:H FILMS : COMPARISON BETWEEN EXPERIMENTS AND SIMULATION A.Soum Glaude1, L.Thomas1, E.Tomasella2, J.M.Badie3, R.Berjoan3 1 CNRS-IMP, Tecnosud - Rambla de la Thermodynamique, Perpignan (France) 2 CNRS-LMI, 24 Avenue des Landais, Aubière (France) 3 CNRS-IMP, BP5 Odeillo - Font Romeu (France)
MoP73 PHASE AND SPACE RESOLVED EMISSION SPECTROSCOPIC
INVESTIGATIONS OF AN INDUCTIVELY COUPLED RF PLASMA USING AN IMAGING ACOUSTO-OPTIC SPECTROMETER Viktor Kadetov1, Timo Gans1, Uwe Czarnetzki1, Swen Marke2, Till Wallendorf2 1 Ruhr-Universität Bochum, Institut für Plasma- und Atomphysik, Bochum (Germany) 2 IfU Diagnostic Systems GmbH, Lichtenau (Germany)
MoP74 SOLIDS PLASMAS DIAGNOSTIC TECHNIQUES
V. Kouznetsov1, J. R. Drake2, N. Brenning2, I. Axnäs2 1 Chemfilt R&D AB c/o Royal Institute of Technology, Alfven Laboratory, Stockholm (Sweden) 2 Alfven Laboratory, Royal Institute of Technology, Stockholm (Sweden)
MoP75 TIME-RESOLVED LANGMUIR PROBE DIAGNOSTICS OF HIGH-POWER
PULSED DC MAGNETRON DISCHARGE PLASMAS A.D. Pajdarova, J. Vlcek, P. Kudlacek, and J. Lukas Department of Physics, University of West Bohemia, Plzen (Czech Republic)
Poster – Large Area Coatings MoP76 UPSCALING OF NEW MULTIFUNCTIONAL THIN FILM SYSTEMS AS A
RESULT OF R&D COOPERATION BETWEEN SMES AND RESEARCH-INSTITUTES S. Sattel, P. Pesch TZO GmbH, Rheinbreitbach (Germany)
MoP77 SYNTHESIS OF POLYCRYSTALLINE SILICON THIN FILMS ON THE LARGE-
SCALE (680MMX880MM) GLASS SUBSTRATE BY PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION USING LARGE-SCALE INDUCTIVELY COUPLED PLASMA SOURCE WITH MULTIPLE INTERNAL ANTENNAS UNITS A. Ebe1, Y. Setsuhara2, T. Shoji3, S. Miyake1 1 EMD Corporation, Kyoto (Japan) 2 Department of Aeronautics and Astronautics, Kyoto University (Japan) 3 Department of Energy Engineering and Science, Nagoya University (Japan)
Monday, September 13th, 2004 Poster Session 15:10 – 16:40
PSE 2004 51
MoP78 PHOTOCATALYTIC TITANIUM DIOXIDE THIN FILMS PREPARED BY
REACTIVE PULSE MAGNETRON SPUTTERING AT LOW TEMPERATURE AND EFFECT OF NITROGEN DOPING D. Glöß, P. Frach, O. Zywitzki, T. Modes, S. Klinkenberg, C. Gottfried Fraunhofer-Institut für Elektronenstrahl- und Plasmatechnik (FEP), Dresden (Germany)
MoP79 PRODUCTION OF LARGE AREA VHF PLASMA USING LADDER SHAPED
ELECTRODE H. Takatsuka1, Y. Takeuchi2, Y. Yamauchi1, T. Shioya and Y. Kawai Graduate School of Engineering Sciences, Kyushu University, Fukuoka (Japan) 1 Nagasaki Shipyard & Machinery Works, Mitsubishi Heavy Industries Ltd., Isahaya, Nagasaki (Japan) 2 Nagasaki Research & Development Center, Mitsubishi Heavy Industries Ltd., Fukahori, Nagasaki (Japan)
MoP80 INFLUENCE OF THE MAGNETIC FIELD ON PROPERTIES OF MgO FILM
DEPOSITED BY CATHODIC VACUUM ARC METHOD Eun-Sung Lee1, Jong-Kuk Kim1, Sung-Kyu Bae1, Sunghun Lee1, Young-Sang Cho2 1 Advanced Thin Film Group, Korea Institute of Machinery and Materials (KIMM), Changwon, Kyungnam (Korea) 2 A-tech system, Kyunggido (Korea)
MoP81 DYNAMIC PACVD COATING OF STRIP METAL WITH SILICON OXIDE,
TITANIUM OXIDE AND AMORPHOUS CARBON FILMS K. Ortner, T. Jung Fraunhofer-Institut für Schicht- und Oberflächentechnik, Braunschweig (Germany)
MoP82 OPTIMIZATION OF DC MAGNETRON SPUTTERING PROCESS FOR
INDUSTRIAL THIN GRADIENT FILM OF SOLAR THERMAL ABSORBERS Shuxi Zhao, Ewa Wäckelgård Uppsala University, The Ångström Laboratory, Uppsala (Sweden)
Poster – Flat Panels MoP83 CHARACTERISTICS OF SIO2 FILMS DEPOSITED BY ROOM
TEMPERATURE PE-CVD FOR OLED PASSIVATION C. H. Jeong, J. H. Lee, J. T. Lim, N. G. Jo, and G. Y. Yeom Department of Materials engineering, Sungkyunkwan university, Suwon, Korea
MoP84 CHARACTERIZATION OF BN THIN FILMS FOR THE APPLICATION AS A
PROTECTIVE LAYER IN PDP Sunghun Lee, Jong-Kuk Kim, Eungsun Byon, and Gun-Hwan Lee Advanced Thin Film Group, Korea Institute of Machinery and Materials, Changwon (Korea)
MoP85 PROPERTIES OF TRANSPARENT-CONDUCTING ANODE WITH AN IMI
STRUCTURE FOR INVERTED TOP-EMISSION ORGANIC LIGHT-EMITTING DIODES J.T. Lim, N.G. Cho, C.H. Jeong, *Y.W. Ko, *J.H. Lee, G.Y. Yeom Dept. of Materials Engineering, Sungkyunkwan Univ., Suwon (Korea) *Electronics and Telecommunications Research Institute (ETRI), Taejon (Korea)
Tuesday, September 14th, 2004 Poster Session 18:30 – 22:00
PSE 2004 52
Poster – Stress Control, Permeation TuP1 MECHANICAL STRESS EVOLUTION DURING THERMAL CYCLING OF
PECVD SILICON OXIDE FILMS G. Ayvazyan, S. Minasyan, and K. Melkonyan Engineering Academy of Armenia, Yerevan (Armenia)
TuP2 X-RAY DIFFRACTION ANALYSIS OF RESIDUAL STRESSES IN SMOOTH
FINED-GRAIN DIAMOND COATINGS DEPOSITED ON TA6V ALLOYS FOR TRIBOLOGICAL APPLICATIONS. P. Goudeau1, L. Vandenbulcke2, C. Met2, M.I. De Barros3, P. Andreazza4, D. Thiaudiere5, M. Gailhanou5 1 LMP, University of Poitiers (France) 2 LCSR, CNRS, Orleans (France) 3 LTDS, ECL, Lyon (France) 4 CRMD Orleans (France) 5 LURE, University of Paris-Sud, Orsay (France)
TuP3 CONTROL OF MACROSTRESS IN REACTIVELY SPUTTERED MO(AL)NX
FILMS BY ENERGY OF BOMBARDING IONS J. Šuna, J. Musil and P. Dohnal Department of Physics, University of West Bohemia, Plzen (Czech Republic)
TuP4 APPLICATION OF THE INTERFACIAL INDENTATION TEST FOR ADHESION
TOUGHNESS DETERMINATION D. Chicot1, P. Araujo2, A. Tricoteaux3, J. Lesage1. 1 Laboratoire de Mécanique de Lille, UMR CNRS 8107, U.S.T. Lille., IUT A GMP, Le Recueil, Villeneuve d’Ascq (France) 2 Universidade Tiradentes, UNIT, ITP, Aracaju - SE (Brazil) 3 LMP/LAMAC, Université de Valenciennes et du Hainaut-Cambrésis, IUT MP, Maubeuge (France)
TuP5 STRESS AND MECHANICAL PROPERTIES OF LOW-DIMENSIONAL
SYSTEMS Ti-Cr-N DEPOSITED BY VACUUM ARC V.V. Uglov1, V.M. Anishchik1, S.V. Zlotski1, G.Abadias2, S.N. Dub3 1 Belarussian State University, Minsk (Belarus) 2 Laboratoire de Mètallurgie Physique Universitè de Poitiers, Chasseneuil Futuroscope cedex (France) 3 Institute of Superhard Materials, Kiev (Ukraine)
TuP6 BOUNDRY-FREE Ta-Zr AND Ta-Zr-N BARRIER FILMS BY REACTIVE CO-
SPUTTERING Z. Z. Tang, J.H. Hsieh, and C. Li School of Mechanical and Production Engineering, Nanyang Technological University (Singapore)
Poster – Thin Film and Surface Characterization and Analysis TuP7 IN-SITU X-RAY DIFFRACTION DURING SPUTTER DEPOSITION OF Ti1-XAlXN
THIN FILMS M. Beckers1, N. Schell1,2, R.M.S. Martins1,2, W. Möller1 1 Institute of Ion Beam Physics and Materials Research, Forschungszentrum Rossendorf, P.O. Box 510119, 01314 Dresden (Germany) 2 ROBL-CRG at ESRF, Grenoble (France)
TuP8 STRUCTURE AND PROPERTIES OF TITANIUM OXIDE LAYERS
DEPOSITED BY REACTIVE ELECTRON BEAM EVAPORATION T. Modes1, B. Scheffel1, Chr. Metzner1, O. Zywitzki1, E. Reinhold2
1 Fraunhofer Institut Elektronenstrahl- und Plasmatechnik, Dresden (Germany) 2 Von Ardenne Anlagentechnik GmbH, Dresden (Germany)
Tuesday, September 14th, 2004 Poster Session 18:30 – 22:00
PSE 2004 53
TuP9 INVESTIGATION OF THE NANOSTRUCTURE AND POST-COAT THERMAL
TREATMENT OF WEAR RESISTANT PVD CRTICU(B,N) COATINGS M.A. Monclus1, M.A. Baker1, C. Tsotsos2, A. Leyland2, A. Matthews2
1 The Surface Analysis Laboratory, School of Engineering, University of Surrey (United Kingdom) 2 Department of Engineering Materials, The University of Sheffield (United Kingdom)
TuP10 MACROSCOPIC FUNCTION VS. MICROSCOPIC AND NANOSCOPIC
FEATURES: MULTI-PROBE TESTING OF SURFACES AND THIN FILMS BY OPTICAL CHARACTERISATION TECHNIQUES Uwe Beck, Andreas Hertwig Bundesanstalt für Materialforschung und –prüfung, Berlin (Germany)
TuP11 SURFACES FOR FOOD INDUSTRY: EFFECTS OF MICROSCOPIC AND
MACROSCOPIC FEATURES, ROUGHNESS, AND SURFACE ENERGY ON THE ADHESION AND KINETICS OF SPECIES AND THE CLEANING OF SURFACES Uwe Beck1, Georg Reiners1, Nadja Gamer1, R. Schmidt2, K. Sommer3, U.Bobe3 1 Bundesanstalt für Materialforschung und –prüfung, Berlin (Germany) 2 Fachhochschule Jena (Germany) 3 TU München (Germany)
TuP12 IMPACT TEST ON COATINGS AND OTHER HARD MATERIALS AT
ELEVATED TEMPERATURES K. –D. Bouzakis, G. Maliaris, S. Kompogiannis, D. Koptsis Laboratory for Machine Tools and Manufacturing Engineering, Mechanical Engineering Department, Aristoteles University of Thessaloniki (Greece)
TuP13 INFLUENCE OF ANNEALING TREATMENTS AND THICKNESS ON THE
THERMIC STABILITY AND THE CRYSTALLOGRAPHIC ORIENTATIONS OF THIN CHROMIUM NITRIDE LAYERS (CrN, Cr2N) L. Chekour1, C. Nouveau2, A. Chala3, C. Labidi2 , N. Rouag4, M.A. Djouadi5 1 Laboratoire des Couches Minces et Interfaces, Université de Constantine, (Algérie) 2 LABOMAP, Ecole Nationale Supérieure d’Arts et Métiers, Cluny (France) 3 Laboratoire des Matériaux Semi-conducteurs et Métalliques, Université de Biskra (Algérie) 4 Laboratoire de microstructures et défauts dans les matériaux, Université de Constantine (Algérie) 5 LPCM, Institut des Matériaux UMR Nantes (France)
TuP14 HIGH SUBSTRATE TEMPERATURE TO MODIFY MECHANICAL
PROPERTIES OF TITANIUM OXYNITRIDE THIN FILMS PREPARED BY REACTIVE SPUTTERING Jean-Marie Chappé, Joseph Gavoille, Nicolas Martin, Jan Lintymer, Jamal Takadoum
Laboratoire de Microanalyse des Surfaces (LMS), Ecole Nationale Supérieure de Mécanique et des Microtechniques (ENSMM), Besançon (France)
TuP15 MODIFICATION OF WC HARD ALLOY BY COMPRESSIVE PLASMA FLOW.
V.V. Uglov1, V.M. Anishchik1, V.M. Astashynski2, N.N. Cherenda1, I.G. Gimro2, A.V. Kovyazo2 1 Belarusian State University, Minsk (Belarus) 2 Institute of Molecular and Atomic Physics, National Academy of Sciences of Belarus, Minsk (Belarus)
Tuesday, September 14th, 2004 Poster Session 18:30 – 22:00
PSE 2004 54
TuP16 TREATMENT OF COPPER BY HIGH FREQUENCY OXYGEN PLASMA
U. Cvelbar, M. Mozetic and A. Zalar Institut Jozef Stefan, Ljubljana (Slovenia)
TuP17 THERMAL STABILITY OF MAGNETRON SPUTTERED ZR-SI-N FILMS
R. Daniel1, J. Musil1, P. Zeman1, C. Mitterer2 1 Department of Physics, University of West Bohemia, Plzen (Czech Republic) 2 Department of Physical Metallurgy and Materials Testing, University of Leoben, (Austria)
TuP18 XPS INVESTIGATIONS OF CHROMIUM NITRIDE THIN FILMS
A. Lippitz and Th. Hübert Bundesanstalt für Materialforschung und –prüfung (BAM), Berlin (Germany)
TuP19 MODIFICATION OF ELECTRODE MATERIALS FOR PLASMA TORCHES
I.R. Jankov1, R.N. Szente2, I.D. Goldman1, M.N.P. Carreño3, M.A. Valle3, M. Behar4, C.A.R. Costa5, F. Galembeck5, R. Landers6 1 Instituto de Física, Universidade de São Paulo, São Paulo- SP (Brazil) 2 Divisão de Mecânica e Eletricidade, Instituto de Pesquisas Tecnológicas do Estado de São Paulo- IPT, São Paulo (Brazil) 3 Departamento de Sistemas Eletrônicos- PSI, Escola Politécnica, Universidade de São Paulo (Brazil) 4 Instituto de Física, Universidade Federal de Rio Grande do Sul, Porto Alegre- RGS (Brazil) 5 Instituto de Química, Universidade Estadual de Campinas (Brazil) 6 Instituto de Física Gleb Wataghin, Universidade Estadual de Campinas (Brazil)
TuP20 ELECTRICAL AND PHYSICAL CHARACTERISTICS OF METAL-INSULATOR
(HfO2)-METAL CAPACITORS S.W. Jeong and Yonghan Roh*
School of Information and Communication Engineering, Sungkyunkwan University, Suwon (Korea)
TuP21 EFFECTS OF ANNEALING TEMPERATURE ON CHARACTERISTICS OF
HfO2 DEPOSITED ON INTRINSIC-Si (40 Å and 60 Å ) /Si0.8Ge0.2/p-Si S. H . Jeong , H. D. Kim and Y. Roh* School Of Information And Communication Engineering, Sungkyunkwan University, Suwon (Korea)
TuP22 STRUCTURE AND MECHANICAL PROPERTIES OF MAGNETRON
SPUTTERED ZrOx AND Zr-Cu-O FILMS J.Musil and M.Jirout Department of Physics, University of West Bohemia, Plzen (Czech Republic)
TuP23 MECHANICAL AND STRUCTURAL CHARACTERIZATION OF OXIDATION
RESISTANT PVD CrSiN FILMS A. Thobor-Keck1, A.S. Dehlinger1, F. Lapostolle1, D. Pilloud2, J-F. Pierson2, J. von Stebut3, C. Coddet1 1 Laboratoire d'Etudes et de Recherche sur les Matériaux, les Procédés et les Surfaces (LERMPS) / Université de Technologie de Belfort – Montbéliard (UTBM) BELFORT (France) 2 Centre de Recherche sur les Ecoulements, les Surfaces et les Transferts (CREST – UMR CNRS 6000) Université de Franche-Comté - Pôle Universitaire Montbeliard (France) 3 Laboratoire de Science et Génie des Surfaces, Ecole des Mines de Nancy (France)
Tuesday, September 14th, 2004 Poster Session 18:30 – 22:00
PSE 2004 55
TuP24 NANOINDENTATION OF CHROMIUM ZIGZAG THIN FILMS SPUTTER
DEPOSITED J. Lintymer1, N. Martin1, J.-M. Chappé1, J.Gavoille1, P Delobelle2, J. Takadoum1 1 Laboratoire de Microanalyse des Surfaces (LMS) Ecole Nationale Supérieure de Mécanique et des Microtechniques (ENSMM) Besançon (France) 2 Laboratoire de Mécanique Appliquée Raymond Chaléat (LMARC - UMR 6604 CNRS), Université de Franche-Comté, Besançon (France)
TuP25 CHARACTERIZATION OF NANOSTRUCTURED TI-AL-SI-N THIN FILMS
DEPOSITED BY R.F.-REACTIVE SPUTTERING METHOD T. Mae1, M. Nose2, H. Suzuki3, E. Honbo4 , Y. Okumura5 and Y. Sakamoto1 1 Toyama National College of Technology, Toyama (Japan) 2 Takaoka National College, Takaoka (Japan) 3 Graduate school, Toyama University, Toyama (Japan) 4 Toyama Industrial Research Center, Takaoka (Japan) 5 Technical Department, Daido Industry Co. Ltd., Kaga (Japan)
TuP26 ADHESION REDUCTION OF OPTICAL POLYMER MELTS ON SCREWS OF
INJECTION MOLDING MACHINES BY SURFACE MODIFICATION WITH PVD COATINGS K. Bobzin, E. Lugscheider, M. Maes, F. Manz Materials Science Institute, RWTH Aachen University (Germany)
TuP27 THICKNESS DEPENDENCE OF Bi2Te3 THIN FILMS PROPERTIES
Martin Pavelka1– Radek Zeipl2 – Miroslav Jelínek1 - Jarmila Walachová2
Václav Studnicka 1 1 Institute of Physics,Academy of Science of the Czech Republic, Prague (Czech Republic) 2 Institute of Radio Engineering and Electronics, Academy of Science of the Czech Republic, Prague (Czech Republic)
TuP28 STABILITY OF REACTIVELY SPUTTERED SILVER OXIDE FILMS
J.F. Pierson *, C. Rousselot Département CREST, Institut FEMTO-ST (UMR CNRS 6174), Université de Franche-Comté, Montbéliard (France)
TuP29 IN-SITU IR-SPECTROSCOPIC AND KELVIN PROBE INVESTIGATIONS OF
PLASMA MODIFIED MODEL SUBSTRATES J. Raacke, M. Giza, G. Grundmeier Max-Planck-Institute for Iron Research, Düsseldorf (Germany)
TuP30 STRUCTURAL AND CHEMICAL EFFECTS ON THE HARDNESS
BEHAVIOUR OF Cr(Al)N COATINGS J.C. Sánchez-López1, D. Martínez-Martínez1, C. López-Cartes1, A. Fernández1, M. Brizuela2, A. García-Luis2, J.I. Oñate2 1 Instituto de Ciencia de Materiales de Sevilla (CSIC-Univ. Sevilla) (Spain) 2 Fundación Inasmet, Mikeletegui Pasealekua, Donostia-San Sebastián (Spain)
TuP31 APPLYING THE LASER-ACOUSTIC TEST METHOD TO OPTIMISE THE
DEPOSITION OF DIAMOND-LIKE CARBON FILMS Harald Schulz, Dieter Schneider, Hans-Joachim Scheibe and Bolko Schöneich Fraunhofer Institute for Material and Beam Technology, Dresden (Germany)
Tuesday, September 14th, 2004 Poster Session 18:30 – 22:00
PSE 2004 56
TuP32 LASER-ACOUSTIC TESTING OF DEFECTIVE FILMS
Michael Leonhardt, Dieter Schneider, Joerg Kaspar, Steffen Schenk, Fraunhofer Institut für Werkstoff- und Strahltechnik, Dresden (Germany)
TuP33 ELECTRONIC PROPERTIES OF CrOXNY-FILMS, DEPOSITED BY REACTIVE
DC MAGNETRON SPUTTERING FROM A CHROMIUM TARGET IN Ar/O2/N2-ATMOSPHERES R. Mientus1, K. Ellmer Hahn-Meitner-Institut, Berlin (Germany) 1 Optotransmitter-Umweltschutz-Technologie e.V., Berlin (Germany)
TuP34 CHARACTERIZATION OF THIN FILM MATERIALS WITH ERDA
E. Strub, W. Bohne, J. Röhrich Hahn-Meitner-Institut, Berlin (Germany)
TuP35 CHARACTEROZATON OF OXIDE FILMS GENERATED ON STAINLESS
STEEL IN WATER VAPOR AND OXYGEN PLASMAS Tatsuya Suzuki, Yukiko Sawado, Yasuhiko Fujii Research Laboratory for Nuclear Reactors, Tokyo Institute of Technology (Japan)
TuP36 THERMAL STABILITY OF TiAlN/Mo MULTILAYERS
C.J. Tavares1, C. Vidrago1, J.P. Rivière2, E. Lebourhis2
1 Depto. de Física, Universidade do Minho, Azurém, Guimarães (Portugal) 2 Lab. de Metallurgie Physique, Université de Poitiers, Futuroscope (France)
TuP37 COMPARISON OF THE STRUCTURAL AND OPTICAL PROPERTIES OF
ZINC OXIDE THIN FILMS DEPOSITED FROM R.F. AND D.C. SPUTTERING AND SPRAY PYROLYSIS. A. Mosbah1, A. Moustaghfir2, S. Abed3, N. Bouhssira3, M.S. Aida3, E. Tomasella2, M. Jacquet2 1 Physics department, Faculty of Sciences, Ferhat Abbas University, Sétif (Algeria) 2 Laboratoire des Matériaux Inorganiques, UMR CNRS 6002, Université Clermont Ferrand (Blaise Pascal), Aubière (France) 3 Thin Films and Interfaces Laboratory, Faculty of Sciences, Mentouri University, Constantine (Algeria)
TuP38 THE FORMATION OF LOW-DIMENSIONAL STRUCTURES BY
COMPRESSIVE PLASMA FLOWS V.V. Uglov(a) , V.M. Anishchik1, Yu.V. Sveshnikov1, V.M. Astashynski2, E.A. Kostyukevich2, A.M. Kuzmitski2, V.V. Askerko2 1 Belarussian State University, Minsk (Belarus) 2 Institute of Molecular and Atomic Physics of National Academy of Sciences of Belarus, Minsk (Belarus)
TuP39 FORMATION OF NITRIDE PHASES UNDER THE ACTION OF
COMPRESSION PLASMA FLOW ON IRON AND CARBON STEEL V.V. Uglov, V.M. Anishchik, V.V. Astashynski Belarusian State University, Minsk (Belarus)
TuP40 MECHANICAL PROPERTIES AND SURFACE MORPHOLOGY OF COPPER
COATING ON STAINLESS STEEL AFTER ELECTRON BEAM TREATMENT V.P. Rotstein1, A.B. Markov1, V.V. Uglov2, A.K. Kuleshov2, M.V. Novitskaya2, S.N. Dub3, Y. Pauleau4, F. Thièry4 1 Institute of High Current Electronics, Tomsk (Russia) 2 Belarusian State University, Minsk (Belarus) 3 Institute of Superhard Materials, Kiev (Ukraine) 4 National Polytechnic Institute of Grenoble, Grenoble (France)
Tuesday, September 14th, 2004 Poster Session 18:30 – 22:00
PSE 2004 57
TuP41 STRUCTURAL FEATURES OF FILMS PRODUCED BY THE IMPULSE
PLASMA DEPOSITION METHOD E. Wierzbinski, M. Mirkowska, K. Nowakowska - Langier, K. Zdunek Faculty of Material Science and Engineering, Warsaw University of Technology, (Poland)
TuP42 MICROMACHINING AND NANOTESTING OF MINIATURE PVD COATING
SPECIMENS M. Smid, E. Coronel, U. Wiklund, and S. Hogmark The Ångström Laboratory, Uppsala University (Sweden)
TuP43 FABRICATION OF LOW TEMPERATURE POLY-SILICON BY INDUCTIVELY
COUPLED PLASMA ASSISTED MAGNETRON SPUTTERING Keun-Cheol Yoo1, Bohwan Park1, Junghoon Joo2 and Jung-Joong Lee1 1 School of Materials Science and Engineering, Seoul National University, Seoul (Korea) 2 Department of Materials Science and Engineering, Kunsan National University, Kunsan (Korea)
TuP44 HIGH-TEMPERATURE OXIDATION RESISTANCE OF Ta-Si-N COATINGS
WITH A HIGH Si CONTENT P. Zeman, J. Musil, H. Zeman, R. Daniel Department of Physics, University of West Bohemia, Plzen (Czech Republic)
TuP45 ATOMIC STEP ORIENTATIONS ON Si(5 5 12)-2X1 SURFACES
J.Zhang1,2, T.Ding1, S.H.Cho2, W.X.Quan2, Y.Z.Zhu2 1 Dept. of Physics, Yunnan University, Kunming (P.R.China) 2 Dept. of Physics, Chonbuk National University, Chonju (Korea)
TuP46 SURFACE MECHANICAL RELIABILITY ASSESSMENT OF THIN COATINGS
BY MACRO-INDENTATION AND FRICTION FATIGUE TESTING S. Poulat1, D. Mercs1, C. Charron1, 2, J.P. Arnould2 , J. von Stebut2 1 Teer Coatings Ltd., Hartlebury Worcs. (United Kingdom) 2 Laboratoire de Science et Génie des Surfaces, Ecole des Mines, Nancy (France)
Poster – PVD TuP47 THE INFLUENCE OF THE PROCESS PARAMETERS ON THE DIELECTRIC
FILMS GROWN IN A PULSED MAGNETRON SPUTTERING SYSTEM M. Braic, V. Braic, M. Balaceanu, G. Pavelescu National Institute for Optoelectronics, Bucharest (Romania)
TuP48 MULTI-LAYER DEPOSITION BY MAGNETRON SPUTTERING
P. Plantin1, P. Brault1, A.-L. Thomann1, T. Sauvage2, A. Pineau3, C. Wang4 1 Groupe de Recherches sur l’Energétique des Milieux Ionisés UMR6606 -CNRS, Ecole Polytechnique de l’Université d’Orléans, Université d’Orléans (France) 2 Centre d’Etudes et de Recherches par Irradiations, Orleans (France) 3 Centre de Recherches sur la Matière Divisée – UMR 6619 CNRS – Université d’Orléans (France) 4 School of Science, Beijing University of Astronautics and Aeronautics, Beijing (P. R. China)
Tuesday, September 14th, 2004 Poster Session 18:30 – 22:00
PSE 2004 58
TuP49 SYNTHESIS, CHARACTERISATION, AND PROPERTIES OF TUNGSTEN
OXYNITRIDES N.J.M. Carvalho1,2, N. Parreira1, A. Cavaleiro1, and J.Th.M. De Hosson2
1 ICEMS – Faculdade de Ciências e Tecnologia da Universidade de Coimbra, Dep. Eng. Mecânica, Polo II, Coimbra (Portugal) 2 Dep. Of Applied Physics, Materials Science Center and Netherlands Institute for Metals Research, University of Groningen (The Netherlands)
TuP50 SYNTHESIS AND CHARACTERIZATION OF HARD COATING THIN FILMS
DEPOSITED BY TRIODE SPUTTERING A. Chala1, M.A. Djouadi2, C. Nouveau3, M.S. Aida4 1 Laboratory of Metallic Materials, Physics Department, University of Biskra (Algeria) 2 Institut des Matériaux Jean Rouxel, Nantes (France) 3 Laboratoire Bourguignon des Matériaux et Procédés, ENSAM, Cluny (France) 4 Laboratoire des Couches Minces et Interfaces, University of Constantine, (Algeria)
TuP51 METAL-DOPED CARBON FILMS OBTAINED BY MAGNETRON
SPUTTERING B. T. Cieciwa1, M. Balden1, I. Quintana1, E. de Juan Pardo1, A. Wiltner1, M. Sikora2, H. Bolt1
1 Max-Planck-Institut für Plasmaphysik, EURATOM Association, Garching (Germany) 2 AGH University of Science and Technology, Department of Solid State Physics, Krakow (Poland)
TuP52 DEPOSITION OF LixZn1-xO THIN FILMS BY MEANS OF HOLLOW CATHODE
SPUTTERING SYSTEM Z. Hubicka1, M. Cada1, P. Adámek2, A. Deyneka1, L. Jastrabík1, G. Suchaneck3, G. Gerlach3
1 Institute of Physics ASCR, Prague (Czech Republic) 2 University of South Bohemia, College of Education, Dept. Phys., Ceské Budejovice (Czech Republic) 3 Institute of Solid State Electronics, University of Technology Dresden (Germany)
TuP53 SUBPICOSECOND AND ENHANCED NANOSECOND PLD TO GROW ZnO
FILMS IN NITROGEN AMBIENT Miroslav Jelinek1, Agriro Klini2, T. Kocourek1, M. Novotný1, Costas Fotakis2, Radek Zeipl3, Antonino Santoni4 1 Institute of Physics AS CR, Prague (Czech Republic) 2 Foundation for Research and Technology – Hellas (FORTH), Institute of Electronic Structure and Laser (IESL), Laser and Application Division, Heraklion Crete (Greece) 3 Institute of Radio Engineering and Electronics AS CR, Prague (Czech Republic) 4 ENEA, Centro Ricerche Frascati, Via Enrico Fermi, Frascati, Roma (Italy)
TuP54 METALLIZATION OF PIEZOELECTRIC BANDS BY THE USE OF HIGH
DENSITY PLASMA J. Hennecart, P-Y. Jouan, A. Tricoteaux, F. Ebel and N. Horny LMP/LAMAC, Université de Valenciennes et du Hainaut-Cambrésis, IUT MP Maubeuge (France)
Tuesday, September 14th, 2004 Poster Session 18:30 – 22:00
PSE 2004 59
TuP55 A STUDY ON THE ENERGY DISTRIBUTION FOR GRID-ASSISTING
MAGNETRON SPUTTERING Min J. Jung1, J. Houska2, P. Baroch2, J. Vlcek2, J. Musil2, K.H. Nam1, Jeon G. Han1 1 Center for Advanced Plasma Surface Technology Sungkyunkwan University, Suwon (Korea) 2 Department of Physics, University of West Bohemia, Plzen (Czech Republic)
TuP56 LARGE- SCALE VACUUM ARC COATINGS FACILITY
D.A. Karpov, V.V. Ivanov, A.A. Filippov, V.A. Krilov, V.M. Lisichkin, V.Ya. Moiseev, S.G. Saksaganskiy, R. Ni*, M. Zhanji* D.V. Efremov Institute of Electrophysical Apparatus, St.-Petersburg (Russia) *Lanzhou Institute of Physics, Lanzhou (China)
TuP57 DEVELOPMENT OF THIN FILMS FOR THE CONTROL OF INTERFACE
PROPORTIES OF SIC-FIBRE / STEEL COMPOSITES S. Levchuk, A. Brendel, H. Maier, H. Bolt Max-Planck-Institut fuer Plasmaphysik, EURATOM Association, Garching (Germany)
TuP58 CHROMIUM REACTIVE SPUTTERING IN ARGON-OXYGEN AN ARGON-
WATER VAPOUR MIXTURES C. Nouvellon1, JP Dauchot2, M. Hecq2, H. Cornil3
1 Unité de Chimie Inorganique et Analytique, Materia Nova, Mons (Belgium) 2 Laboratoire de Chimie Inorganique et Analytique, Université de Mons Hainaut, Materia Nova, Mons (Belgium) 3 Arcelor Innovation, Flémalle (Belgium)
TuP59 REACTIVE SPUTTERING OF IRON IN AR-N2 AND AR-O2 MIXTURES
C. Petitjean, C. Rousselot, J.F. Pierson * Département CREST, Institut FEMTO-ST (UMR 6174), Université de Franche-Comté, Pôle Universitaire, Montbéliard (France)
TuP60 MULTILAYER INTERFERENCE FILTERS APPLIED ON HIGHLY LOADED
DISCHARGE LAMPS BY MAGNETRON SPUTTERING Arnd Ritz Philips GmbH Forschungslaboratorien, Aachen (Germany)
TuP61 LASER-ARC MODULE FOR DEPOSITION OF SUPERHARD AMORPHOUS
CARBON (TA-C) WITH INDUSTRIAL BATCH COATERS C.-F. Meyer, M. Leonhardt1, H.-J. Scheibe1, B. Schultrich, H. Schulz Fraunhofer-Institut für Werkstoff- und Strahltechnik, Dresden (Germany) 1 Fraunhofer USA, Center for Coatings and Laser Applications, Michigan State University, East Lansing (USA)
TuP62 EVOLUTION OF DROP PHASE IN ARC DISCHARGE AT LOW PRESSURE
A.A.Bizyukov, V.I.Gritsenko, E.V.Romaschenko1, K.N.Sereda, A.D.Chibisov Kharkiv National University, Kharkiv (Ukraine) 1 East-Ukrainian National University, Lugansk (Ukraine)
TuP63 CORRELATION BETWEEN SPATIAL DISTRIBUTION OF VOLATILE AND
CONDENSED COMPONENTS OF REACTIVE PLASMA FLOW GENERATED BY CIRCULAR VACUUM-ARC SOURCES ON THE STOICHIOMETRY AND DEFECTIVENESS OF DEPOSITED COATINGS Jan Walkowicz1, Jerzy Smolik1, Rafal Brudnias1, Barabara Kulakowska-Pawlak2 and Wieslaw Zyrnicki2 1 Institute for Terotechnology, Radom (Poland) 2 Institute of Inorganic Chemistry and Metallurgy of Rare Elements, Wroclaw University of Technology, Wroclaw (Poland)
Tuesday, September 14th, 2004 Poster Session 18:30 – 22:00
PSE 2004 60
TuP64 INFLUENCE OF THE VACUUM-ARC SOURCE MAGNETIC SYSTEM
CONFIGURATION AND ARC DISCHARGE PARAMETERS ON THE EVOLUTION, STRUCTURE AND LOCATION OF ARC SPOTS ON THE CATHODE SURFACE Jan Walkowicz1, Jerzy Smolik1, Zbigniew Slomka1, Barabara Kulakowska-Pawlak2 and Wieslaw Zyrnicki2 1 Institute for Terotechnology, Radom (Poland) 2 Institute of Inorganic Chemistry and Metallurgy of Rare Elements, Wroclaw University of Technology, Wroclaw (Poland)
TuP65 MAGNETIC-FIELD-ASSISTED PULSED LASER DEPOSITION OF HARD
COATINGS Dirk Rost, Günter Reiße, Steffen Weißmantel Hochschule Mittweida, University of Applied Sciences, Mittweida (Germany)
TuP66 PROPERTIES OF NANO-MULTILAYERED HARD COATINGS DEPOSITED
BY A NEW AIP-UBMS HYBRID COATING SYSTEM K. Yamamoto1, S. Kujime2, K. Takahara2 1 Materials Research lab., Kobe Steel Ltd. (Japan) 2 Advanced Products & Technology Dept., Kobe Steel Ltd. (Japan)
TuP67 VACUUM ARC DEPOSITION BY USING A VENETIAN BLIND PARTICLE
FILTER O. Zimmer Fraunhofer Institute for Material and Beam Technology (IWS), Dresden (Germany)
TuP68 FIXTURES FOR ECONOMICAL PVD PRODUCTION
S. Esser 4pvd, Service & Supply, Aachen (Germany)
Poster – Biological and Medical Applications TuP69 STERILIZATION OF BIOLOGICAL MATERIALS WITH CORONA DISCHARGE
PLASMA L. Aubrecht, J. Koller, V. Scholtz Department of Physics, Faculty of Electrical Engineering, Czech Technical University, Prague (Czech Republic)
TuP70 SYNTHESIS AND CHARACTERIZATION OF TiN,TiAlN AND TiN/TiAlN
BIOCOMPATIBLE COATINGS M. Braic, V.Braic, M.Balaceanu, G.Pavelescu, A.Vladescu National Institute for Optoelectronics, Bucharest (Romania)
TuP71 ELECTROCHEMICAL PROPERTY AND CELL ADHESION OF METAL ION
IMPLANTATED TITANIUM FOR MEDICAL IMPLANTS Eungsun Byon1, Jong-Kuk Kim1, Sungmo Moon1, Yongsoo Jeong1, Lee-Ra Cho2, Beom-Seok Chang2, Young-Taeg Sul3, Takao Hanawa4 1 Surface Engineering Department, Korea Institute of Machinery and Materials, Changwon (Korea) 2 Kangnung National University Dental Hospital, Gangneung (Korea) 3 Dept. of Biomaterial Sciences/Handicap Research, University of Göteborg, (Sweden) 4 Biomaterials Center, National Institute for Materials Science, Tsukuba (Japan)
Tuesday, September 14th, 2004 Poster Session 18:30 – 22:00
PSE 2004 61
TuP72 FORMATION OF BIOCOMPATIBLE MATERIALS WITH NANOSTRUCTURED
SURFACE Elinson V.M., Drachev A.I.1, Potraysay V.V., Laymin A.N., Fedorova S.S. “MATI”- Russian State Technological University named K.E.Tsiolkovsky; Moscow (Russia) 1 Enikolopov Institute of Synthetic Polymer Materials Russian Academy of Sciences (Russia)
TuP73 FIBROPLAST GROWTH ON PVD COATED SURFACES OF DENTAL
IMPLANTS Michael Griepentrog1, Maren Herzog2, Alexander Dück1, Matthias Hannig3, Birte Größner-Schreiber2 1 BAM Federal institute for Materials Research and Testing, Berlin (Germany) 2 University of Kiel, School of Dental Medicine, Clinic for Restorative Dentistry and Periodontology, Kiel (Germany) 3 University of Saarland, Clinic for Restorative Dentistry and Periodontology, Homburg (Germany)
TuP74 PLASMA DEPOSITED ACRYLIC ACID AND ALLYLAMINE COATINGS:
STABLE SURFACES TO CONTROL FIBROBLASTS BEHAVIOUR L. Detomaso1, Roberto Gristina2, Giorgio S. Senesi2, Pietro Favia2, Riccardo d’Agostino2
1 Department of Chemistry, University of Bari (Italy) 2 Institute of inorganic Methodologies and Plasmas (IMIP), CNR Bari (Italy)
TuP75 THE SYNTHESIS OF TiAlSiN FILM DEPOSITED USING MAGNETRON
SPUTTERING SYSTEM H.Y.Lee1, W.S.Jung1, J.G.Han1, S.M.Seo2, J.H.Kim2, Y.H.Bae2 1 Center for Advanced Plasma Surface Technology, Sung Kyun Kwan University, Suwon (Korea) 2 Research complex, Max plasma Co., Sung Kyun Kwan University, Suwon (Korea)
TuP76 PLASMA AIDED SURFACE MODIFICATION FOR THE GENERATION OF
DNA MICROARRAYS Neumann, T. and Rühe, J.*
Institute for Microsystems Technology, Freiburg (Germany) TuP77 PECVD OF BIOCOMPATIBLE COATINGS ON 316L STAINLESS STEEL
G. Ram Prasad1, D. C. Cameron1, B. P. McNamara2 and R. O’Kennedy3
1 National Centre for Plasma Science and Technology 2 National Centre for Sensors Research 3 School of Biotechnology Dublin City University (Ireland)
TuP78 SURFACE PROCESSES AND PROPERTIES OF ION IMPLANTED NiTi
ALLOY N. Shevchenko, M.-T. Pham, E. Richter, and M.F. Maitz Forschungszentrum Rossendorf e.V., Institute of Ion Beam Physics and Materials Research, Dresden (Germany)
TuP79 PLASMA ENHANCED CVD DEPOSITION OF TITANIUM OXIDE FOR
BIOMEDICAL APPLICATIONS. A. Sobczyk, J. Kowalski, M. Gazicki-Lipman, W. Jakubowski, L. Klimek, H. Szymanowski Institute for Materials Science and Engineering, Technical University of Lodz (Poland)
Tuesday, September 14th, 2004 Poster Session 18:30 – 22:00
PSE 2004 62
TuP80 STRUCTURE AND PROPERTIES OF TITANIUM BASED COATINGS
PREPARED BY METAL PLASMA IMMERSION ION IMPLANTATION AND DEPOSITION I. Tsyganov1, M. F. Maitz2, E. Wieser2, E. Richter2, H. Reuther2 1 Lipetsk State Technical University, Lipetsk (Russia) 2 Forschungszentrum Rossendorf e.V., Institute of Ion Beam Physics and Materials Research, Dresden (Germany)
Poster – Sensors TuP81 STRUCTURAL AND ELECTRICAL PROPERTIES OF PZT COATINGS ON
PLANE GLASS-SUBSTRATES AND FIBERS M. Amberg, F.-J. Haug, K. Glaentz, M. Halbeisen, D. Hegemann, A. Fischer Swiss Federal Laboratories for Materials Testing and Research (EMPA), Laboratory for Functional Fibers and Textiles, St.Gallen (Switzerland)
TuP82 INDUSTRIAL SCALE MAGNETRON SPUTTERED MOLYBDENUM FILMS:
A COMPREHENSIVE STUDY OF THE RELATION BETWEEN NANOSTRUCTURE AND THERMO-ELECTRICAL PROPERTIES W. Hilber1, F. Schäffler2, K. Hingerl2 1 E+E Elektronik GmbH, Engerwitzdorf (Austria) 2 Universität Linz, Institut für Festkörper- und Halbleiterphysik (Austria)
TuP83 INFLUENCE OF RF BIAS VOLTAGE ON AlN GROWTH USED FOR SAW
DEVICES. V. Mortet1, A. Djouadi2 and P-Y. Jouan3 1 Institute of Physics, Academy of Sciences of the Czech Republic, Prague (Czech Republic) 2 LPCM, Institut des Matériaux UMR 6502, Nantes (France) 3 LMP/LAMAC, Université de Valenciennes et du Hainaut-Cambrésis, IUT MP Maubeuge (France)
TuP84 TiN OXIDE THIN FILMS PREPARED BY LASER-ASSISTED CVD:
STRUCTURAL AND GAS SENSING PROPERTIES. J. Lancok, A. Santoni, S. Loreti, I. Menicucci , C. Minarini Institute of Physics, Academy of Sciences of the Czech Republic, Prague (Czech Republic) ENEA C.R. Frascati (Italy) ENEA-Portici, Località Granatello, Portici, (Italy)
TuP85 PHOTOLITHOGRAPHIC STRUCTURING OF A THIN METAL FILM COIL ON A
ZERODUR CYLINDER F. Löffler, C. Siewert Physikalisch-Technische Bundesanstalt, Braunschweig (Germany)
Wednesday, September 15th, 2004 Poster Session 15:10 – 16:40
PSE 2004 63
Poster – Optical and Electrical Properties WeP1 ELECTRICAL AND OPTICAL INVESTIGATIONS OF HIGHLY (001)
TEXTURED WSX AND MOSX FILMS DEPOSITED BY REACTIVE MAGNETRON SPUTTERING S. Seeger, T. Guminskaya, T. Dittrich, K. Ellmer Hahn-Meitner-Institut, Dept. Solar Energetic, Berlin (Germany)
WeP2 SOME PROPERTIES OF TIMGN THIN FILMS DEPOSITED BY REACTIVE DC
MAGNETRON SPUTTERING M. Fenker1, M. Balzer1, H. Kappl1, O. Banakh2 1 FEM, Schwäbisch Gmünd (Germany) 2 Institute of Applied Sciences, Le Locle (Switzerland)
WeP3 OPTICAL MEASUREMENT OF THE TI IMPLANTED SAPPHIRE
N. K. Huang, D. Z. Wang. and J. R. Lei Key Lab of Radiation Physics and Technology (Sichuan University), Ministry of Education; Institute of Nuclear Science and Technology, Sichuan University, Chengdu (P. R. China)
WeP4 FLUORESCENCE PROPERTIES OF CRYSTALLINE EU DOPED Y2O3
NANOSTRUCTURES EMBEDDED BY AMORPHOUS MATRIX ELABORATED BY PULSED LASER DEPOSITION. J. Lancok, C. Garapon, A. Pillonet, O. Marty, J. Mugnier LPCML, CNRS UMR 5620-Université Lyon-I, Villeurbanne (France) Institute of Physics Academy of Sciences (Czech Republic)
WeP5 PROTECTIVE COATINGS INCREASING THE REFLECTANCE OF MIRRORS
R.T. Galiaoutdinov, N.F. Kashapov, G.S. Luchkin Kazan State Technological University, Kazan (Russia)
WeP6 PROPERTIES OF ELECTRICALLY HEATED MIRRORS
R.?. Galiaoutdinov, N.?. Kashapov, G.S. Luchkin The Kazan state technological university, Kazan (Russia)
WeP7 PROPERTIES AND ELECTROCHROMIC PERFORMANCES OF
REACTIVELY SPUTTERED TUNGSTEN OXIDE FILMS WITH WATER AS REACTIVE GAS H. Sadiki1, C. Rousselot1, J.F. Pierson1, N. Martin2, G. Terwagne3 1 Département C.R.E.S.T., Institut F.E.M.T.O.-ST (UMR CNRS 6174), Université de Franche-Comté, Pôle Universitaire, Montbéliard (France) 2 LMS-E.N.S.M.M., 26, Besançon (France) 3 L.A.R.N., Faculté des Sciences, Département de Physique, Namur (France)
WeP8 CHARACTERISATION OF BLACK PLASMA ELECTROLYTIC OXIDATION
COATINGS ON ALUMINIUM ALLOYS T. Pilkington1, A.L. Yerokhin1, A. Leyland1, A. Matthews1, P. Shashkov2, V. Samsonov2, A. Shatrov2 1 Department of Engineering Materials, University of Sheffield (United Kingdom) 2 Keronite Ltd., Abington, Cambridge (United Kingdom)
WeP9 IMPROVED RESISTIVITY OF ION DOPED DC SPUTTERED ZnO:(Al) FILMS
FROM NOVEL CERAMIC TARGET MATERIAL Florian Ruske1, Volker Sittinger1,Bernd Szyszka1, Wolfgang Werner1, Karl-Uwe van Osten2, Klaus Dietrich2, Ricarda Rix2 1 Fraunhofer IST, Braunschweig (Germany) 2 GfE Metalle und Materialien GmbH, Nürnberg (Germany)
Wednesday, September 15th, 2004 Poster Session 15:10 – 16:40
PSE 2004 64
WeP10 LOW-TEMPERATURE ACTIVATION OF ION-IMPLANTED NANO-SCALE
DOPANT LAYER FOR ULTRA-SHALLOW SEMICONDUCTOR JUNCTION FORMATION BY NONEQUILLIBRIUM PHONON EXCITATION PROCESSES Y. Setsuhara1, M. Hashida2, M. Fuita3, K. Takahashi1 and K. Ono1 1 Department of Aeronautics and Astronautics, Kyoto University, Yoshida-honmachi, Sakyo-ku, Kyoto (Japan) 2 Institute for Chemical Research, Kyoto University, Gokasho Uji, Kyoto (Japan) 3 Institute for Laser Technology, Suita, Osaka (Japan)
WeP11 EXCIMER LASER INDUCED CRYSTALLIZATION OF AMORPHOUS
HYDROGENATED CARBON-GERMANIUM FILMS FABRICATED BY PLASMA CVD J. Tyczkowski, P. Kazimierski, Y. Hatanaka1, T. Aoki2 Technical University of Lodz, Faculty of Process and Environmental Engineering, Lodz (Poland) 1 Aichi University of Technology, Manori, Nishihazama-cho Gamagohri, Aichi (Japan) 2 Research Institute of Electronics, Shizuoka University, Johoku, Hamamatsu (Japan)
Poster – Plasma Polymerisation WeP12 DEPOSITION OF THE ORGANIC POLYMER THIN FILMS BY PECVD AND
COMPARISON OF THEIR PHYSICAL AND ELECTROCHEMICAL PROPERTIES S. H. Cho, I.-S. Bae, Y. J. Yu1, and J. G. Kim1, J.-H. Boo Department of Chemistry, SungKyunKwan University, Suwon (Korea) 1 Department of Advanced Materials Engineering, SungKyunKwan University, Suwon (Korea)
WeP13 PLASMA POLYMERIZATION OF DYE-CONTAINING THIN FILMS
A. Barranco, M. Bielmann, O. Groening, R. Wildmer, P. Groening Swiss Federal Laboratories for Materials Testing and Research-EMPA, Thun (Switzerland) Solid State Physics Group, Physics Dept. University of Fribourg (Switzerland)
WeP14 INFLUENCE OF THE SUBSTRATE CONDITION ON THE NUCLEATION OF
PLASMA-PARYLENE COMPOSITE FILMS G. Dinescu, B. Mitu, C. Petcu National Institute for Laser, Plasma and Radiation Physics, Magurele, Bucharest (Romania)
WeP15 SEMI-CONDUCTIVE POLYMERIC FILMS OBTAINED BY PLASMA
POLYMERIZATION OF ANTHRACENE IN DC DISCHARGE A. Drachev, A. Gilman, Yu. Fedoseev, E. Demidova, À. Kuznetsov Enikolopov Institute of Synthetic Polymeric Materials, Russian Academy of Sciences (Russia)
WeP16 PLASMA INDUCED POLYMERISATION OF UNSATURATED AMPHIPHILES
IN AEROSOL AND THIN FILMS Jörg Ehlbeck1, Mario Maaß1,Torsten Dwars2, Hans Fuhrmann2, Günther Oehme2 1 Institut für Niedertemperatur-Plasmaphysik, Greifswald (Germany) 2 Leibniz Institut für Organische Katalyse, Rostock (Germany)
WeP17 SPECIFICS OF ALLYL POLYMERIZATION IN PULSED PLASMAS
J. Friedrich, V. Gerstung, R. Mix, G. Kühn Bundesanstalt für Materialforschung und –prüfung, Berlin (Germany)
Wednesday, September 15th, 2004 Poster Session 15:10 – 16:40
PSE 2004 65
WeP18 RF MAGNETRON SPUTTERING OF POLYISOBUTYLENE AND LOW
DENSITY POLYETHYLENE J. Kousal1, J. Hanuš1, A. Choukorov1, P. Hlídek1, H. Biederman1, D. Slavínská1, J. Zemek2
1 Department of Macromolecular Physics, Charles University, Prague (Czech Republic) 2 Institute of Physics, Academy of Sciences, Prague (Czech Republic)
WeP19 DEPOSITION OF METAL PHTHALOCYANINE FILMS BY GLOW DISCHARGE
INDUCED SUBLIMATION FOR GAS SENSING APPLICATIONS G. Maggioni1, S. Carturan1, A. Quaranta2, M. Tonezzer2, A. Patelli3, R. Ceccato2, A. Vomiero1, G. Della Mea2 1 University of Padua c/o INFN - LNL, Legnaro, Padova (Italy) 2 Department of Materials Engineering and Industrial Technologies, University of Trento, Povo (TN) (Italy) 3 Department of Electronics and Informatics, University of Padua, Padova (Italy)
WeP20 A STUDY OF THE MOLECULAR DAMAGE OF POLYIMIDE PRECURSOR
MONOMERS DEPOSITED BY GLOW DISCHARGE INDUCED SUBLIMATION G. Maggioni1, A. Quaranta2, E. Negro2, S. Carturan1, A. Scandurra3, G. Della Mea2 1 University of Padua c/o INFN - LNL, Legnaro, Padova (Italy) 2 Department of Materials Engineering and Industrial Technologies, University of Trento, Povo (TN) (Italy) 3 Laboratorio Superfici e Interfasi - Consorzio Catania Ricerche, c/o ST Microelectronics, Catania (Italy)
WeP21 DC PLASMA-POLYMERIZATION OF PYRROLE: STRUCTURE AND
PROPERTIES F. Nastase, Claudia Nastase and Ioan Stamatin University of Bucharest, Faculty of Physics, 3Nano-SAE Research Centre, Bucharest- Magurele (Romania)
WeP22 TAILOR-MADE SURFACES BY PLASMA POLYMERIZATION OF
ALLYLAMINE AND POST PLASMA REACTIONSJörg Pahnke and Jürgen Rühe Chemistry and Physics of Interfaces, Institute for Microsystem Technology (IMTEK), University of Freiburg (Germany)
WeP23 PLASMA POLYMERISATION OF METHYLPHENYLSILANE AND
PHENYLTRIMETHYLSILANE O. Salyk, P. Broza, N. Dokoupil, R. Herrmann, I. Kuritka1, J. Prycek, M. Weiter Faculty of Chemistry, Brno University of Technology, Brno (Czech Republic) 1 Faculty of Technology, Tomas Bata University in Zlin (Czech Republic)
WeP24 LARGE AREA VHF PLASMA POLYMERISATION ELECTRODE SYSTEM
K. Schade, J. Kuske, S. Röhlecke, F. Stahr, O. Steinke FAP Forschungs- und Applikationslabor Plasmatechnik GmbH, Dresden (Germany)
WeP25 A MASS SPECTROMETRIC STUDY OF CONTINUOUS WAVE PLASMA
POLYMERISATION OF ACRYLIC ACID WITH HELP OF DIFFERENT CARRIER GASES. V. Sciarratta, B. Elkin, M. Müller, U. Vohrer, C. Oehr, H. Brunner Fraunhofer-Institute for Interfacial Engineering and Biotechnology, Stuttgart (Germany)
Wednesday, September 15th, 2004 Poster Session 15:10 – 16:40
PSE 2004 66
WeP26 X-RAY ABSORPTION AND PHOTOELECTRON SPECTROSCOPY ON
PLASMA-POLYMERIZED FILMS PREPARED FROM ORGANIC MOLECULES (ETHYLENE, ALLYL ALCOHOL, STYRENE) S. Swaraj, U. Oran, A. Lippitz, R.-D. Schulze, J. F. Friedrich and W. E. S. Unger Bundesanstalt für Materialforschung und –prüfung (BAM), Berlin (Germany)
Poster - Plasma DiffusionTreatment WeP27 STUDY OF THE DUPLEX TREATMENT ON 32CDV13 LOW ALLOY STEEL:
APPLICATION IN WOOD MACHINING A. Chala1, L. Chekour2, M.A. Djouadi3, C. Saied1, M.S. Aida2, C. Nouveau4 1 Département de Physique, Université de Biskra (Algérie) 2 Laboratoire des couches minces et interfaces, Université de Constantine, (Algérie) 3 Institut des Matériaux Jean Rouxel, Nantes (France) 4 LABOMAP – ENSAM, Cluny (France)
WeP28 ON DOUBLE LAYERS STRUCTURES IN PLASMA ASSISTED NITRIDING OF
AUSTENITIC STAINLESS STEEL AND NICKEL ALLOYS T. Czerwiec, H. He, V. Rigaud, S. Weber, C. Dong, H. Michel Laboratoire de Science et Génie des Surfaces, Ecole des Mines, Nancy (France)
WeP29 THE RECENT PROGRESS IN PLASMA BORIDING -SCALING UP-
P. Kaestner1, J. Brand2, J. Crummenauer3, G. Laudien4, S. J. Son1, K.-T. Rie1
1 Institut für Oberflächentechnik und plasmatechnische Werkstoffentwicklung, IOPW, University of Braunschweig (Germany) 2 Fraunhofer-Institut für Schicht- und Oberflächentechnik, Braunschweig (Germany) 3 Sulzer Metaplas Ionon Oberflächenveredelungstechnik GmbH, Bergisch Gladbach (Germany) 4 Volkswagen AG, Wolfsburg (Germany)
WeP30 EFFECT OF FREQUENCY ON THE PROPERTIES OF AISI 4340 STEEL
J. Alphonsa1, S. Gaurav2, G. Akshat2, G. Jhala1, S. Tiwari3, S. Gupta1 and S. Mukherjee1 1 FCIPT, Institute for Plasma Research, Gandhinagar (India) 2 IIT, Kharagpur (India) 3 NML, Ahmedabad (India)
WeP31 APPLICATION OF PLASMA IMMERSION ION IMPLANTATION FOR
IMPROVED PERFORMANCE OF TOOLS AND INDUSTRIAL COMPONENTS M. Ueda, L.A.Berni, R.M.Castro Associated Laboratory of Plasma, National Institute for Space Research, S.J.Campos, S. Paulo (Brazil)
WeP32 EFFECT OF NITROGEN ON THE PLASMA (ION) CARBURIZED LAYER OF
HIGH NITROGEN AUSTENITIC STAINLESS STEEL SUS316LN(0.56%N) Y. Ueda1, N. Kanayama1, K. Ichii2, T. Oishi2 and H. Miyake2 1 Shimane Institute for Industrial Technology, Shimane (Japan) 2 Faculty of Engineering, Kansai University, Osaka (Japan)
Poster – Ion Beam and Plasma Immersion Techniques WeP33 ENERGETIC NEUTRAL GENERATION IN COLLISIONAL CATHODE SHEATH
K.S. Suraj and S. Mukherjee FCIPT, Institute for Plasma Research, Gandhinagar (India)
Wednesday, September 15th, 2004 Poster Session 15:10 – 16:40
PSE 2004 67
WeP34 ELECTROCHEMICAL CORROSION PROPERTIES OF AISi 304 SS TREATED
BY LOW, INTERMEDIATE AND HIGH TEMPERATURE PLASMA IMMERSION ION IMPLANTATION IN A TOROIDAL VESSEL A. E. Muñoz-Castro1, R. Valencia A.1, S. R. Barocio1, R. López-Callejas1,2, A.Mercado-Cabrera1, O. G. Godoy-Cabrera1,2, D. A. Fuentes-González1, and J. Arellano-Calderón1,2 1 Instituto Nacional de Investigaciones Nucleares, Plasma Physics Laboratory, México D.F. (México) 2 Instituto Tecnológico de Toluca, Electrical and Electronic Department, Toluca (México)
WeP35 NITRIDE FORMATION IN TRANSITION METALS DURING HIGH DOSE –
HIGH TEMPERATURE IMPLANTATION S. Mändl, J.W. Gerlach, B. Rauschenbach Leibniz-Institut für Oberflächenmodifizierung, Leipzig (Germany)
WeP36 TWO-DIMENSIONAL SHEATH EVOLUTION IN METAL PLASMA IMMERSION
ION IMPLANTATION S. Mändl1, G. Thorwarth2, B. Stritzker2, B. Rauschenbach1, 1 Leibniz-Institut für Oberflächenmodifizierung, Leipzig (Germany) 2 Universität Augsburg, Experimentalphysik IV, Augsburg (Germany)
WeP37 COMBINED DEPOSITION AND IMPLANTATION OF Cu ON Si USING METAL
PLASMA IMMERSION ION IMPLANATION S. Mändl, B. Rauschenbach Leibniz-Institut für Oberflächenmodifizierung, Leipzig (Germany)
WeP38 IMPROVEMENTS OF TRIBOLOGICAL PROPERTIES OF CrNiMo AND
CrCoMo ALLOYS BY NITROGEN PLASMA IMMERSION ION IMPLANTATION M.Ueda1, L.A.Berni1, R.M.Castro1, H.Reuther2, M.Lepienski3, P.C.Soares Jr3 1 Associated Laboratory of Plasma, National Institute for Space Research, S.J.Campos, S.Paulo (Brazil) 2 Institute of Ion Beam Physics and Materials Research, Center Rossendorf, Dresden (Germany) 3 Department of Physics, Federal University of Paraná (Brazil)
WeP39 LOW LOSS WAVEGUIDE IN Nd3+-DOPED SILICATE GLASS FABRICATED
BY CARBON ION IMPLANTATION Shi-Ling Li1, , Ke-Ming Wang1,2, Feng Chen1, Xue-Lin Wang1, Gang Fu1, Qing-Ming Lu3, Li-Li Hu4, Ding-Yu Shen5, Hong-Ji Ma5, Rui Nie5 1 School of Physics and Microelectronics, Shandong University (China) 2 State Key Laboratory of Crystal Materials, Shandong University (China) 3 School of Chemistry and Chemical Engineering, Shandong University (China) 4 Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai (China) 5 Department of Technical Physics & the Key Laboratory of Heavy Ions Physics, Ministry of Education, China, Peking University, Beijing (China)
Poster – High Rate Deposition and Pulsed Plasmas WeP40 HIGH-RATE REACTIVE MAGNETRON SPUTTERING OF TRANSPARENT
TITANIUM DIOXIDE FILMS J. Musil, P.Baroch and D. Herman Department of Physics, University of West Bohemia, Plzen (Czech Republic)
Wednesday, September 15th, 2004 Poster Session 15:10 – 16:40
PSE 2004 68
WeP41 COMPOSITION OF TI-C:H FILMS OBTAINED BY PULSED AND
CONTINUOUS MAGNETRON SPUTTERING V. Kulikovsky1,2, A. Kuzmichev3, P. Bohac1, K. Jurek1 and L. Jastrabik1
1 Institute of Physics, ASCR, Prague (Czech Republic) 2 Institute for Problems of Materials Science, Academy of Sciences of Ukraine, Kiev (Ukraine) 3 National Technical University of Ukraine “Kiev Polytechnical Institute”, Kiev (Ukraine)
WeP42 INFLUENCING OF PLASMA AND COATINGS DURING THE PHYSICAL
VAPOUR DEPOSITION THROUGH COMBINATION OF STEERED ARC AND MODIFIED PULSED ARC PROCESS E. Hettkamp; H. Mecke Otto-von-Guericke-University of Magdeburg; Institute of Electric Power Systems; Magdeburg (Germany)
WeP43 INVESTIGATIONS OF SILICON NITRIDE LAYERS DEPOSITED IN PULSED
MICROWAVE GENERATED AMMONIA-SILANE PLASMAS U. Schweitzer, J. Krüger, J. Schneider, M. Walker, and U. Schumacher, Institut für Plasmaforschung, Universität Stuttgart (Germany)
WeP44 HIGH-POWER PULSED MAGNETRON SPUTTERING WITH A GROOVED
TARGET J. Lukas, J. Lestina, J. Musil, and J. Vlcek Department of Physics, University of West Bohemia, Plzen (Czech Republic)
WeP45 COMPARISON OF THE OPERATING CHARACTERISTICS OF AN OPPOSED
TARGET MAGNETRON USING FERROMAGNETIC AND NON-FERROMAGNETIC TARGETS T. Moiseev and D. C. Cameron National Centre for Plasma Science and Technology, Dublin City University (Ireland)
WeP46 BEHAVIOUR OF SURFACE TEMPERATURE OF SUBSTRATE AT PULSED
VACUUM – PLASMA PROCESSING. A.A.Bizyukov, A.Y.Kashaba, E.V.Romaschenko*, K.N.Sereda Kharkiv National University, Kharkiv (Ukraine) * East-Ukrainian National University, Lugansk (Ukraine)
WeP47 TEMPORAL AND SPATIAL SURVEY OF PLASMA PARAMETERS IN A
PULSED MAGNETRON DISCHARGE A Vetushka, S Thompson and J W Bradley Dept. of Physics, UMIST, Manchester (United Kingdom)
WeP48 INNOVATIVE PULSED PLASMA POWER SUPPLIES
S. Wimmer, Thomas Müller; Roland Kullmer MICROPULS® Plasmagenerators, Rübig GmbH & Co KG, Wels (Austria)
WeP49 EFFECT OF PLASMA TEMPERATURE AND PLASMA PULSATION
FREQUENCY ON ATOMIC NITROGEN PRODUCTION T. Godfroid, J. P. Dauchot, M. Hecq Université de Mons-Hainaut, laboratoire de Chimie Inorganique et Analytique Bâtiment Materia-Nova, Parc Initialis, Mons (Belgium)
Poster – Atmospheric Pressure Processes WeP50 STUDY OF THE CHARACTERISTICS OF A PLASMA REACTOR FOR THE
PROMOTION OF CHEMICAL REACTIONS R.Benocci, C.Broggi, M. Piselli, C. Riccardi
Università degli Studi di Milano-Bicocca, Dipartimento di Fisica, Milano (Italy)
Wednesday, September 15th, 2004 Poster Session 15:10 – 16:40
PSE 2004 69
WeP51 SILICON NITRIDE DEPOSITION ON TEMPERATURE SENSITIVE PARTS AT
ATMOSPHERIC PRESSURE BY MEANS OF ARC ACTIVATED CVD Daniela Rogler1, Gerrit Mäder1, Volkmar Hopfe1, Ines Dani1, Klaus Landes2, Eckart Theophile2, Ulrich Kreißig3 1 Fraunhofer Institute Material Beam Technology, Dresden (Germany) 2 University of Federal Armed Forces, Munich (Germany) 3 Forschungszentrum Rossendorf (Germany)
WeP52 ATMOSPHERIC PRESSURE MICROWAVE CVD FOR DEPOSITION
FUNCTIONAL LAYERS - CHARACTERISATION OF SILICA LAYER PROPERTIES Liliana Roch, Volkmar Hopfe, Ines Dani, Beate Leupolt, Bolko Schöneich, Romy Liske, Wulf Grählert1, B. Schuhmacher, C. Ostwald2, Simon Hurst, Benito Guillermo3 1 Fraunhofer Institute Material and Beam Technology, IWS, Dresden (Germany) 2 ThyssenKrupp Stahl AG / Dortmunder Oberflächencentrum GmbH (Germany) 3 Pilkington European Technical Centre
WeP53 EFFECTS OF INDIUM-THIN-OXIDE (ITO) SURFACE PRE-CLEANING USING
He/O2 ATMOSPHERIC PRESSURE PLASMA ON THE PERFORMANCE OF EL DEVICES J. H. Lee, C.H. Jeong, N.G. Jo, J.T. Lim, Y.H. Lee, S.J. Kyung, and G.Y. Yeom Dept. of Materials Engineering, Sungkyunkwan Univ. Suwon, Kyunggi (Korea)
WeP54 SURFACE TREATMENT OF POLYMER MATERIALS USING AN
ATMOSPHERIC COLD PLASMA JET AND THEIR SURFACE CHARACTERISTICS D. K. Song1,2, S. H. Baeg1, M. H. Baeg1, S. H. Yang1 and S. G. Kang2 1 Nano Surface Technology Team, Korea Institute of Industrial Technology, Cheonan (Korea) 2 Surface Engineering Lab, Division of Materials Science and Engineering, Han-yang University, Seoul (Korea)
WeP55 SURFACE MODIFICATION OF COTTON FIBRE WITH A GLOW DISCHARGE
IN AMBIENT AIR Eef Temmerman1, Christophe Leys1 and Yuri Akishev2 1 Department of Applied Physics, Ghent University, Ghent (Belgium) 2 State Research Centre of Russian Federation TRINITI, Troitsk, Moscow Region (Russia)
WeP56 PLASMA CLEANING OF „ENDLESS" SUBSTRATES BY USE OF A TANDEM
DIELECTRIC BARRIER DISCHARGE M. Teschke, D. Korzec, E. G. Finantu-Dinu, J. Engemann Forschungszentrum für Mikrostrukturtechnik, University of Wuppertal (Germany)
WeP57 CHARACTERISATION OF POLYMER FILMS PRODUCED BY A DBD IN AR /
FLUOROCARBON MIXTURES I. P. Vinogradov and A. Lunk Institut für Plasmaforschung, Universität Stuttgart (Germany)
WeP58 3-IN-1"-PLASMA WIRE SYSTEM
D. Wandke, W. Viöl University of Applied Sciences and Arts, Department of Science and Technology, Göttingen (Germany)
Wednesday, September 15th, 2004 Poster Session 15:10 – 16:40
PSE 2004 70
WeP59 SURFACE MODIFICATION OF WOOD AND TIMBER MATERIALS BY
DIELECTRIC BARRIER DISCHARGES A. Wolkenhauer, G. Avramidis, P. Rehn, W. Viöl University of Applied Sciences and Arts, Department of Science and Technology, Göttingen (Germany)
Poster – Hybrid and Duplex Processes WeP60 DUPLEX TREATMENT FOR THE ENHANCEMENT OF COMPONENTS
WORKING LIFE D. Braga1, J.P. Dias1, A. Cavaleiro2 1 LED-IPN, Instituto Pedro Nunes, Coimbra (Portugal) 2 ICEMS, Departamento de Engenharia Mecanica, Universidade de Coimbra, (Portugal)
WeP61 PLASMA STUDY OF A DLC/TiC/Ti PARALLEL DEPOSITION PROCESS
COMBINING PULSED LASER DEPOSITION AND MAGNETRON SPUTTERING J. Bulír, M. Novotný, M. Jelínek, T. Kocourek, V. Vorlícek, V. Studnicka Institute of Physics, Academy of Sciences of the Czech Republic (Czech Republic)
WeP62 IMPROVEMENT OF LASER SINTERED TOOLS WITH PVD COATINGS
P. Panjan1, S. Dolinšek2, M. Dolinšek3, M. Tušek4, M. Cekada1 1 Jozef Stefan Institute, Ljubljana (Slovenia) 2 University of Ljubljana, Faculty of Mechanical Engineering, Ljubljana (Slovenia) 3 Regional Technological Center Zasavje, Hrastnik (Slovenia) 4 TKC d.o.o., Ljubljana (Slovenia)
WeP63 TRANSIENT LOW-TEMPERATURE ATOMIC AND MASS TRANSPORT AND
OTHER PROCESSES IN NANO-STRUCTURED Al2O3 CERAMICS S. M. Duvanov, Applied Physics Institute, National Academy of Sciences of Ukraine, Sumy (Ukraine)
WeP64 MODIFICATION OF TRIBOLOGICAL PROPERTIES OF NITROGEN
IMPLANTED PVD COATINGS R.J. Rodríguez, M. Rico, A. Medrano, G. G. Fuentes, R. Martínez, B. Lerga and J.A. García. AIN Centro de Ingeniería Avanzada de Superficies, Cordovilla – Pamplona (Spain)
WeP65 IPVD DEPOSITION OF TITANIUM BASED THIN FILMS
J.C. Imbert, C. Boisse-Laporte, L. de Poucques, L. Teule-Gay, O. Voldoire, M. Touzeau and J. Bretagne. Laboratoire de Physique des Gaz et des Plasmas, Université Paris-Sud, ORSAY (France)
WeP66 THE SYNTHESIS OF WC-TI THIN FILM DEPOSITED BY HYBRID COATING
SYSTEM W.S. Jung1, H.Y. Lee1, J.G. Han1, J.H. Kim2, S.M. Seo2, E.H. Bae2 1 Center for Advanced Plasma Surface Technology, Sung Kyun Kwan University, Suwon (Korea) 2 Research complex, Max plasma Co., Sung Kyun Kwan University, Suwon (Korea)
Wednesday, September 15th, 2004 Poster Session 15:10 – 16:40
PSE 2004 71
WeP67 SYNTHESIS OF TiB2 COATINGS BY ICP ASSISTED DC MAGNETRON
SPUTTERTING Bohwan Park1, Dong-Ha Jung1, Hoon Kim1, Keun-Cheol Yoo1, Jung-Joong Lee1, Jung-Hoon Joo2 1 School of Mater. Sci. Eng., Seoul National University, Seoul (Korea) 2 Department of Materials Science and Engineering, Kunsan National University (Korea)
Poster – In-situ Process Control WeP68 ALGORITHM FOR PRESSURE CONTROL OF INDUSTRIAL PLASMA-
CHEMICAL REACTORS G. Ayvazyan, R. Barsegyan, and A. Gyurjyan Engineering Academy of Armenia, Yerevan (Armenia)
WeP69 POST-PROCESS-ANALYSES OF THE TEMPORAL FILM DEVELOPMENT
THROUGHOUT PHYSICAL VAPOR DEPOSITION BY USING THE COATINGWATCH Frank Hollstein1, Renate Ohser-Wiedemann2, Tomas Nowotny3
1 TECHNO-COAT Oberflaechentechnik GmbH (Germany) 2 Freiberg University of Mining and Technology - Institute of Physical Metallurgy ( Germany) 3 Hochschule Zittau/Goerlitz (FH) – University of Applied Sciences (Germany)
WeP70 PROCESS CONTROL FOR HIGH RATE REACTIVE DEPOSITION OF Al
DOPED ZnO FILMS USING ICP-ASSISTED MAGNETRON SPUTTERING S. J. Jung1, B. M. Koo1, Y. H. Han1, J. J. Lee1, and J. H. Joo2
1 School of Materials Science and Engineering, Seoul National University (Korea) 2 Department of Materials Science and Engineering, Kunsan National University, Kunsan (Korea)
WeP71 Mo/Si MULTILAYER GROWTH MONITORING BY REAL TIME IN SITU
SPECTROSCOPIC ELLIPSOMETRY Eva Schubert, S. Mändl, H. Neumann, B. Rauschenbach Leibniz-Insitut für Oberflächenmodifizierung Leipzig e.V., Leipzig (Germany)
Poster – Polymer and Textile Treatment WeP72 ElECTROSPUN NON-WOVEN MATS OF EVOH
Yujun Zhang1,2, Yudong Huang1, Guifen Gong2, Zhenhao Jin2 1 Dept. of Applied Chemistry, Harbin Institute of Technology (China) 2 School of Materials Science and Engineering, Harbin University of Science and Technology (China)
WeP73 COMPERATIVE STUDY OF PLASMA-INDUCED AND WET-CHEMICAL
CLEANING OF SYNTHETIC FIBERS M. Keller, A. Ritter, D. Hegemann and A. Fischer Swiss Federal Laboratories for Materials Testing and Research (EMPA), Laboratory for Functional Fibers and Textiles, St. Gallen (Switzerland)
WeP74 DEPOSITION OF TECHNICAL TEXTILES WITH WATER-/OIL-REPELLENT
COATINGS IN A DIELECTRIC BARRIER DISCHARGE AT ATMOSPHERIC PRESSURE A. Dinkelmann1, A. Lunk2 , M. Shakhatre2 , T. Stegmaier1 , I. Vinogradov2
1 Institut für Textil- und Verfahrenstechnik Denkendorf (Germany) 2 Institut für Plasmaforschung, Universität Stuttgart (Germany)
Wednesday, September 15th, 2004 Poster Session 15:10 – 16:40
PSE 2004 72
WeP75 PENETRATION OF THE OXYGEN PLASMA THROUGH LAYERS OF THE
PES FABRICS T. Vatuna, P. Špatenka Technical University of Liberec, Faculty of Mechanical Engineering, Department of Material Science (Czech Republic)
Poster – Nano Structures WeP76 MICROCHEMICAL, MECHANICAL AND WEAR RESISTANT
CHARACTERISTICS OF ARC PLASMA DEPOSITED TICN/ZRCN SUPERLATTICE COATINGS M. Balaceanu, M. Braic, V. Braic, G. Pavelescu National Institute for Optoelectronics, Bucharest (Romania)
WeP77 ZrN/TiN MULTILAYERS AS DEBRIS SHIELDS FOR EUV MIRRORS GROWN
M. Braic1, P. Choi2, C. Dumitrescu2, M. Balaceanu1
1 Tehnoprof Centre, National Institut for Optoelectronics, Magurele-Bucharest (Romania) 2 EPPRA, SILIC, Courtaboeuf (France)
WeP78 INVESTIGATION OF STRUCTURED TiAlN- AND TiOX-COATINGS WITH
MOTHEYE-LIKE SURFACE MORPHOLOGIES F. Burmeister, E. Schaeffer , G. Kleer, W. Doell Fraunhofer Institut für Werkstoffmechanik, Freiburg (Germany)
WeP79 STUDING THE GROWTH CONDITIONS, THE ALIGNMENT AND
STRUCTURE OF THE ZnO NANORODS J. Grabowska*, K. K. Nanda, E. McGlynn, J. -P. Mosnier and M. Henry School of Physical Sciences and National Centre for Plasma Science & Technology, Dublin City University, Glasnevin, Dublin (Ireland)
WeP80 TOPOGRAPHIC PROCESSING OF ELASTOMER SURFACES
F. Katzenberg Universität Dortmund (Germany)
WeP81 XRD AND RBS STRUCTURAL REFINEMENT OF SIMULTANEOUS
DEPOSITION OF TiAlN/Mo MULTILAYERS C. Vidrago1, C.J. Tavares1, L Rebouta1, E. Alves2, J.P. Rivière3
1 Depto. de Física, Universidade do Minho, Azurém, Guimarães (Portugal) 2 Instituto tecnológico e Nuclear, Sacavém (Portugal) 3 Lab. de Metallurgie Physique, Université de Poitiers, Futuroscope (France)
Poster – Laser Treatment and Thermal Spraying WeP82 LASER CLEANING AND NITRIDING OF IRON SURFACES BY IN AIR LASER
TREATMENT A.-L. Thomann1, A. Basillais1, M. Wegscheider1, N. Semmar1, C. Boulmer-Leborgne1, A. Péreira2, P. Delaporte2, M. Sentis2 1 GREMI, CNRS/Université d’Orléans (France) 2 P3, CNRS/Université de la Méditerranée, Pôle scientifique de Luminy, Marseille (France)
WeP83 APPLICATION OF ULTRA MICRO-INDENTATION AND SCRATCH
TESTS ON FeCr COATINGS ON STEEL SUBSTRATES H. Cetinel, M. Toparli, E. Celik, T. Aksoy Dokuz Eylul University, Metallurgical and Materials Engineering, Bornova, Izmir (Turkey)
Wednesday, September 15th, 2004 Poster Session 15:10 – 16:40
PSE 2004 73
WeP84 PRETREATMENT FOR PLASMA SPRAY PROCESSING BY CATHODE
SPOTS OF LOW PRESSURE ARC Tsuginori Inaba1, Yuya Kubo2, Satoru Maezono2, Masayuki Hara2, Toru Iwao3, Hiroshi Ogura4, Shogo Tobe4 1 Chuo University, Faculty of Science and Engineering, Department of Electrical, Electronic, and Communication Engineering, Tokyo (Japan) 2 Chuo University, Graduate School of Science and Engineering, Course of Electrical, Electronic, and Communication Engineering, Tokyo (Japan) 3 Musashi Institute of Technology, Faculty of Engineering, Department of Electrical and Electronic Engineering, Tokyo (Japan) 4 Ashikaga Institute of Technology, School of Engineering, Department of Mechanical Engineering, Tochigi (Japan)
WeP85 WEAR BEHAVIOR OF FLAME-SPRAYED Al2O3-TiO2 COATINGS ON PLAIN
CARBON STEEL SUBSTRATES I. M. KUSOGLU1, B. UYULGAN1, E. ÇELIK1,2 and Ö. DEMIRKURT2 1 Dokuz Eylul University, Faculty of Engineering, Dept. of Metallurgical and Materials Engineering, Bornova, Izmir (Turkey) 2 Kroma, AOSB, Izmir (Turkey)
WeP86 HVOF THERMAL SPRAYED COATINGS ON ALUMINIUM ALLOYS AND
ALUMINIUM MATRIX COMPOSITES J. A. Picas1, A. Forn1, R. Rilla2 and E. Martín1 1 Materials Science Department, Polytechnic University of Catalonian, Vilanova i
la Geltrú (Spain) 2 RALSA (Rilla, Alvarez y López, S.A.). Langreo (Spain)
WeP87 EXPERIMENTAL STUDY OF EFFECTIVE EFFICIENCY IN A CERAMIC
COATED DIESEL ENGINE I. Taymaz1, K.Çakir and A. Mimaroglu 1 Faculty of Engineering, University of Sakarya, Esentepe Kampusu, Adapazari-(Turkey)
WeP88 THERMAL BEHAVIOUR OF HVOF SPRAYED WC–BASED COATINGS
C. Tekmen1, A. Turk2, E. Celik1, O. Culha1 1 Dokuz Eylul University, Metallurgical and Materials Engineering, Izmir (Turkey) 2 Sakarya University, Metallurgical and Materials Engineering, Sakarya (Turkey)
WeP89 THE EFFECT OF THERMAL CYCLING CONDITIONS ON THE FAILURE
BEHAVOUR OF MgZrO3 COATINGS C. Tekmen1, I. Ozdemir1,2, E. Celik1, U. Cocen1, Y. Tsunekawa2
1 Dokuz Eylul University, Metallurgical and Materials Engineering, Bornova, Izmir (Turkey) 2 Toyota Technological Institute, Material Processing Lab, Hisakata Tempaku, Nagoya (Japan)
Thursday, September 16th, 2004 Poster Session 15:10 – 16:40
PSE 2004 74
Poster – Wear Resistance ThP1 COMBINATION COATINGS IN B-C-N AND Ti-B-N SYSTEM FOR
TOOLS – CHARACTERIZATION AND APPLICATION TESTS M.Keunecke1, K.Bewilogua1, E. Wiemann2, H. Thomsen1, R. Wittorf1 1 Fraunhofer-Institute for Surface Engineering and Thin Film (IST), Braunschweig (Germany) 2 Institute for Machine Tools and Factory Management, Technical University Berlin (Germany)
ThP2 WEAR BEHAVIOUR OF NANO-STRUCTURED PVD HARD COATINGS
TiAlCrYN IN HIGH SPEED MILLING OF AUTOMOTIVE ALUMINIUM-SILICON ALLOYS Q. Luo1, P.Eh. Hovsepian1, G. Robinson1, M. Howarth1, R. Ebner2, W. Liebfahrt3, A. Deeming4, T. Zeus5, A. Herrmann6
1 Materials Research Institute, Sheffield Hallam University, Sheffield (United Kingdom) 2 Werkstoff-Kompetenzzentrum Leoben, Leoben (Austria) 3 Böhler Edelstahl GmbH & Co KG, Kapeenberg (Austria) 4 Hydra Clarkson International, Sheffield (United Kingdom) 5 Emuge Werk Richard Glimpel GmbH & Co. KG, Lauf (Germany) 6 Advanced Process Technologies, Centro Ricerche Fiat, Torino (Italy)
ThP3 EFFECT OF MICRO-BLASTING AND POLISHING OF COATED CUTTING
INSERT SUBSTRATES AND SURFACES ON THEIR MILLING PERFORMANCE K.–D. Bouzakis1, G. Skordaris1, N. Michailidis1, G. Erkens2 1 Laboratory for Machine Tools and Manufacturing Engineering, Mechanical Engineering Department, Aristoteles University of Thessaloniki (Greece) 2 CemeCon AG, Würselen (Germany)
ThP4 PVD HARD COATINGS APPLIED FOR WEAR PROTECTION OF DRAWING
DIE P. Panjan1, I. Boncina2, J. Bevk2, M. Cekada1 1 Jožef Stefan Institute, Ljubljana (Slovenia) 2 Kolektor d.o.o., Idrija (Slovenia)
ThP5 WEAR BEHAVIOUR OF HVOF SPRAYED WC-BASED COATINGS
E. Celik1, C. Tekmen1, B. Uyulgan1, O. Culha1, A. Turk2 1 Dokuz Eylul University, Metallurgical and Materials Engineering, Bornova, Izmir (Turkey) 2 Sakarya University, Metallurgical and Materials Engineering, Sakarya (Turkey)
ThP6 TRIBOLOGICAL BEHAVIOUR OF Cr2O3 COATINGS AS BEARING
MATERIALS E. Celik, H. Cetinel, C. Tekmen
Dokuz Eylul University, Metallurgical and Materials Engineering, Bornova, Izmir (Turkey)
ThP7 INVESTIGATION ON TiAlN/ZrN COATINGS FOR GLASS MOULDING
APPLICATIONS M. Hock, G. Kleer Fraunhofer-Institut für Werkstoffmechanik, Freiburg ( Germany)
ThP8 WEAR BEHAVIOUR OF MARTENSITIC STAINLESS STEEL AFTER PIII
SURFACE TREATMENT D. Manova, S. Mändl, H. Neumann, B. Rauschenbach Leibniz-Institut für Oberflächenmodifizierung, Leipzig (Germany)
Thursday, September 16th, 2004 Poster Session 15:10 – 16:40
PSE 2004 75
ThP9 DEPOSITION OF CrN COATINGS BY CVD AND PVD FOR WEAR
RESISTANCE APPLICATION Siddhartha K. Pradhan, C. Nouveau La.Bo.Ma.P., ENSAM, Cluny (France)
ThP10 LOW TEMPERATURE ION NITRIDING OF THE CUTTING KNIVES MADE OF
HSS STEEL P. Beer1, J. Rudnicki2, S. Bugliosi3, A. Sokolowska2,4, E. Wnukowski5
1 Department of Machines Construction Faculty of Wood Technology, AR in Poznan (Poland) 2 Faculty of Materials Sciences and Engineering, Warsaw University of Technology (Poland) 3 Instituto di Scienza e Technologia dei Materiali Ceramici , C.N.R., Orbassano (IO) (Italy) 4 Institute of Materials Science, Lódz University of Technology, Lódz (Poland) 5 GASS Ltd., Suwalki (Poland)
ThP11 WEAR BEHAVIOUR OF THERMALLY FLAME SPRAYED FeCr COATINGS
ON PLAIN CARBON STEEL SUBSTRATE B. Uyulgan1, E. Celik1, N.F. Ak1, I. Ozdemir2 1 Dokuz Eylul University, Metallurgical And Materials Engineering, Bornova, Izmir (Turkey) 2 Material Processing Lab., Toyota Technological Inst. 2-R-1, Hisakata, Tempaku Nogaya (Japan)
ThP12 SCRATCH RESISTANCE AND WEAR OF CrNX COATINGS
P. van Essen 1,2, R. Hoy1, J.-D. Kamminga1, G.C.A.M. Janssen2, A.P. Ehiasarian3 1 Netherlands Institute for Metals Research, Delft (The Netherlands) 2 Delft University of Technology, Department of Materials Science and Engineering, Delft (The Netherlands) 3 Materials Research Institute, Sheffield Hallam University (United Kingdom)
ThP13 ELEMENTAL DISTRIBUTIONS AND INTERMIXING IN TiAlN/VN
SUPERLATTICE HARD COATINGS AT ANGSTROM RESOLUTION Zhaoxia Zhou, W Mark Rainforth, U Falke1, A Bleloch1, Papken Eh Hovsepian2, and W -Dieter Münz2 Department of Engineering Materials, The University of Sheffield (United Kingdom) 1 SuperSTEM at Daresbury laboratory, Daresbury, Cheshire (United Kingdom) 2 Materials Research Institute, Sheffield Hallam University (United Kingdom)
ThP14 BALL CRATERING AN EFFICIENT TOOL FOR WEAR RATE
DETERMINATION OF THIN COATINGS LOCAL WEAR MECHANISMS ON PERFORATED SCOATINGS Christian Leroy1, Kirsten Ingolf Schiffmann2, Karel van Acker3, Jürgen von Stebut1 1 LSGS, Nancy (France) 2 Fraunhofer Institut für Schicht- und Oberflächentechnik, Braunschweig (Germany) 3 VITO, Mol (Belgium)
ThP15 INVESTIGATION OF SEVERAL PVD COATINGS FOR BLIND HOLE TAPING
IN AUSTENITIC STAINLESS STEEL A. Reiter1, B. Brunner2, M. Ante1, J. Rechberger2 1 BALZERS Ltd., Balzers (Liechtenstein) 2 FRAISA SA., Bellach (Switzerland)
Thursday, September 16th, 2004 Poster Session 15:10 – 16:40
PSE 2004 76
Poster – Tribology ThP16 TRIBOLOGICAL BEHAVIOUR OF W-ti-N SPUTTERED THIN FILMS
P. N. Silva1, J.P. Dias1, A. Cavaleiro2 1 LED&MAT – Instituto Pedro Nunes, Coimbra (Portugal) 2 ICEMS - Departamento de Engenharia Mecanica - FCTUC, Coimbra (Portugal)
ThP17 WEAR BEHAVIOUR OF ELECTRIC ARC SPRAYED CuSn COATING
E. Dokumaci, E. Celik, M. I. Muglali, M. Toparli Dokuz Eylül University, Metallurgical and Materials Engineering, Izmir (Turkey)
ThP18 MAGNETRON SPUTTERING OF CrN COATINGS WITH ADDITIONS OF
ALUMINIUM: MECHANICAL AND TRIBOLOGICAL STUDY M. Brizuela1, A. García-Luis1, I. Braceras1, J.I. Oñate1, J.C. Sánchez-López2, D. Martínez-Martínez2, C. López-Cartes2, A. Fernández2 1 FUNDACION INASMET, Donostia-San Sebastián (Spain) 2 Instituto de Ciencia de Materiales de Sevilla (CSIC-Univ. Sevilla) (Spain)
ThP19 THE TRIBOLOGICAL BEHAVIORS OF Ti-Al-Si-N COATING LAYERS WITH
DIFFERENT COUNTERPART MATERIALS AND SLIDING SPEEDS Hyeong-Ho Jin, Jung Wook Kim, Young-Rae Cho, Kwang Ho Kim, Seog-Young Yoon School of Materials Science and Engineering, Pusan National University, Busan (South Korea)
ThP20 NANOSTRUCTURE INFLUENCE ON DLC-Ag TRIBOLOGICAL COATINGS
C. P. Lungu1, I. Mustata1, G. Musa1, A. M. Lungu1, V. Zaroschi1 K. Iwasaki2, R. Tanaka2, T. Oi2, K. Fujita2 1 National Institute for Lasers, Plasma and Radiation Physics, Magurele-
Bucharest (Romania) 2 Japan Ultra-high Temperature Materials Institute, Ube, Yamaguchi (Japan)
ThP21 DETERIORATION MECHANISMS OF ALUMINUM EXTRUSION DIE AND THE
LIFE-TIME IMPROVEMENT OF THE DIE WITH PVD COATINGS S. Masa1, S. Matsuoka2, M. Nose3, T. Ishikuro4 and T.Yago5 1 Graduate school of Toyama Prefectural University, Kurokawa, Kosugi (Japan) 2 Dept. of Mechanical Engineering, Toyama Prefectural University, Kurokawa, Kosugi (Japan) 3 Takaoka National College (Japan) 4 Industrial Research Center (Japan) 5 Hokunetsu Co. Ltd., Toyama (Japan)
ThP22 THE TRIBOLOGICAL AND THERMO-TRIBOLOGICAL BEHAVIOUR OF PVD COATINGS: A COMPARATIVE INVESTIGATION G. Nayal Institute of Materials Research, Aleppo (Syria)
ThP23 FUNCTIONALLY GRADED Ti-CNX(H) COATINGS WITH ENHANCED
TRIBOLOGICAL PROPERTIES D. Boscarino1, S. Vezzù2, S. Restello2, V. Rigato2 1 Thin Films srl, Padova (ITALY) 2 INFN-Laboratori Nazionali di Legnaro, Legnaro (PD) (ITALY)
Thursday, September 16th, 2004 Poster Session 15:10 – 16:40
PSE 2004 77
ThP24 TRIBOLOGY IN DRY MACHINING USING (Cr,Al)N AND (Ti,Al)N COATED
TOOLS C. Berger1, E. Abele2, E. Broszeit1, H. Hoche1, H. Scheerer1, B. Schramm2 1 Institute of Materials Technology, Darmstadt University of Technology (Germany) 2 Institute of Production Management, Technology and Machine Tools, Darmstadt University of Technology (Germany)
ThP25 SLIDING WEAR BEHAVIOR OF BORONIZED AISI 52100 STEEL
U Sen1, S Sen and H Unal 1 Sakarya University, Technical Education Faculty, Department of Metal Education, Sakarya (Turkey)
ThP26 HARD TRIBOLOGICAL Ti-Si-B-(N) AND Ti-Al-Si-B-(N) COATINGS
D.V. Shtansky1, A.N. Sheveiko1, M.I. Petrzhik1, E.A. Levashov1, A. Leyland2, A.L. Yerokhin2, A. Matthews2 1 Moscow State Institute of Steel and Alloys, Moscow (Russia) 2 Department of Engineering Materials, University of Sheffield, Sheffield (United Kingdom)
ThP27 TRIBOLOGICAL COATINGS: FROM ENIGMA OF CHOICES TO QUALITY
MANAGEMENT Dr. Alexander A. Minewitsch TTZH „Tribologie & Hochtechnologien“, Garbsen (Germany)
Poster - Ultra Hard Materials ThP28 LOW FREQUENCY RF-PAMOCVD OF THE NEW NANOCRYSTALLINE
MULTILAYERED MATERIALS FOR SUPER-HARDNESS APPLICATIONS D.-C. Lim, C. -K. Jung, J. H. Park, and J.-H. Boo* Center for Advanced Plasma Surface Technology and Department of Chemistry, Sungkyunkwan University, Suwon (Korea)
ThP29 DYNAMIC DIAGNOSTICS OF PLASMA-SURFACE INTERACTION DURING
BORON NITRIDE DEPOSITION K. Matsushita and T. Yoshida Department of Materials Engineering, Graduate School of Engineering, The University of Tokyo (Japan)
ThP30 SUPER-HARD CARBON MATERIALS AND BORON NITRIDE LAYERS
PRODUCED ON THE AL2O3-MO CUTTING EDGES A. Olszyna Faculty of Materials Science and Technology, Warsaw University of Technology (Poland)
ThP31 HARD Si-C-N AND Si-B-C-N FILMS PREPARED BY REACTIVE MAGNETRON
SPUTTERING Z. Soukup, J. Vlcek, J. Cizek, S. Potocky, M. Kormunda, V. Perina University of West Bohemia, Dept. of Physics, Faculty of Applied Sciences, Prague (Czech Republic)
ThP32 STUDY OF PLASMA SPRAYED CERAMIC COATINGS FOR HIGH DENSITY
POWER MICROWAVE LOADS N.Spinicchia1, G.Angella3, R.Benocci2, A.Bruschi1, A.Cremona1, G.Gittini1, A.Nardone1, E.Signorelli3, E.Vassallo1 1 Istituto di Fisica del Plasma ENEA-CNR-EURATOM, Milano (Italy) 2 Università di Milano-Bicocca, Dipartimento di Fisica, Milano (Italy) 3 Istituto per l’Energetica e le Interfasi CNR, Milano (Italy)
Thursday, September 16th, 2004 Poster Session 15:10 – 16:40
PSE 2004 78
Poster – Nano Composites ThP33 CONSTITUTION, MICROSTRUCTURE, PROPERTIES AND PERFORMANCE
OF MAGNETRON SPUTTERED NANOCOMPOSITE COATINGS IN THE SYSTEM Ti-Al-N-C M.Stueber1, U.Albers1, H.Leiste1 1 Forschungszentrum Karlsruhe, Institute of Materials Research I (Germany)
ThP34 GROWTH MORPHOLOGY OF NITRIDE COATINGS SYNTHESIZED UNDER
DIFFERENT CONDITIONS E. Bergmann, A. Toppo; B. Burdet; A. Schuetze; V.H. Derflinger;M. Morstein;T. Cselle; M Tobler Geneva School of Engineering (Switzerland)
ThP35 OXIDATION RESISTANCE AND HARDNESS IN NANO-COMPOSITE TiN/SiNx
COATINGS DEPOSITED BY AN ARC-SPUTTER HYBRID PROCESS F.-J. Haug1, P. Schwaller1, J. Patscheider1, A. Karimi2, M. Tobler3 1 Swiss Federal Laboratories for Material Testing and Research (EMPA), Surfaces, Coatings, and Magnetism, Dübendorf (Switzerland) 2 Swiss Federal Institute of Technology (EPFL), Faculty of Basic Science, Lausanne (Switzerland) 3 Ionbond AG, Olten (Switzerland)
ThP36 HYBRID ICP/ SPUTTER DEPOSITION OF TiC/CaO NANOCOMPOSITE
FILMS FOR BIOMEDICAL APPLICATIONS W. Kulisch1,2, P. Colpo2, P.N. Gibson2, G. Ceccone2, D.V. Shtansky 3, E.A. Levashov3 and F. Rossi2, 1 Department of Natural Sciences, University of Kassel (Germany) 2 Institute for Health and Consumer Protection, Joint Research Centre, Ispra (Italy) 3 Moscow State Institute of Steel and Alloys (Russia)
ThP37 HARD ZrO2/Al2O3 NANOLAMINATED PVD COATINGS EVALUATED BY
NANOINDENTATION A. Portinha1, V. Teixeira1, J. Carneiro1, S. N. Dub2, R. Shmegera2
1 University of Minho - Physics Department, Guimarães (Portugal) 2 Institute for Superhard Materials, Kiev (Ukraine)
ThP38 A COMPARATIVE STUDY OF THE MECHANICAL AND TRIBOLOGICAL
PROPERTIES OF CERAMIC NITRIDE AND NANOSTRUCTURED METALLIC PVD COATINGS PRODUCED BY ELECTRON BEAM EVAPORATION. C. Tsotsos, A. Leyland and A. Matthews Department of Engineering Materials, University of Sheffield (United Kingdom)
Poster – Theory and Modelling (Thin Films, Particle Interaction, Processing, Kinetics) ThP39 FRACTAL BEHAVIOUR OF SIO2 THIN FILMS PREPARED BY MICROWAVE
PECVD Angel Yanguas, Jose Cotrino, Francisco Yubero, Agustin R. Gonzalez-Elipe Instituto de Ciencia de Materiales de Sevilla (CSIC-Univ. Sevilla) (Spain)
Thursday, September 16th, 2004 Poster Session 15:10 – 16:40
PSE 2004 79
ThP40 A MODEL FOR HARDNESS OF THIN COATED SURFACE FROM
STANDARD MICRO-INDENTATION TESTS J. Lesage1, D. Chicot1, A. Pertuz1, P-Y Jouan2, A. Soom3 1 Laboratoire de Mécanique de Lille, UMR CNRS 8107, U.S.T. Lille., IUT A GMP, Le Recueil, Villeneuve d’Ascq (France) 2 Laboratoire des matériaux avancés céramiques, LAMAC, Université de Valenciennes et du Hainaut-Cambrésis, Maubeuge (France) 3 Department of Mechanical & Aerospace Engineering, University at Buffalo, State University of New York, Amherst (USA)
ThP41 MODELLING OF FRACTURE IN COATING SYSTEMS SUBJECTED TO
THERMAL LOADING: USE OF FINITE ELEMENT TECHNIQUE A Mimaroglu, , I Taymaz, K Yilmazçoban and A Ozel University of Sakarya, Faculty of Engineering, Esentepe Kampusu, Adapazari, (Turkey)
ThP42 MECHANICAL PROPERTIES OF YTTRIUM DIBORIDE THIN FILMS
Denis Music, Helmut Dirichs, Raphael Mertens, Carlos Martinez and Jochen M. Schneider Materials Chemistry, Aachen (Germany)
ThP43 THERMAL ANALYSIS FOR CERAMIC COATED PISTON OF A DIESEL
ENGINE I.Taymaz1, U. Kocabicak and M. Firat 1 Faculty of Engineering, University of Sakarya, Esentepe Kampusu, Adapazari (Turkey)
ThP44 NUMERICAL INVESTIGATION OF THERMAL CYCLING IN WC-Ni AND WC-
Co COATINGS USING FINITE ELEMENT METHOD Mustafa Toparli 1, Hakan Cetinel1, Cagri Tekmen1, Erdal Celik1 1 Dokuz Eylul University, Metallurgical and Materials Engineering, Bornova, Izmir (Turkey)
ThP45 INFLUENCE OF INDENTATION DEPTH ON THE DETERMINATION OF THE
APPARENT YOUNG’S MODULUS OF BI-LAYER MATERIAL: EXPERIMENTS AND NUMERICAL SIMULATION. F. Cleymand, O. Ferry, R. Kouitat and J. von Stebut Laboratoire de Science et Génie des Surfaces, UMR CNRS 7570, INPL_Ecole des Mines; Nancy (France)
ThP46 A THREE DIMENSIONAL NUMERICAL STUDY OF VERTICAL INTERNAL
CRACKS IN A COATING/SUBSTRATE SPECIMEN UNDER SLIDING SPHERICAL CONTACT. R. Kouitat Njiwa and J. von Stebut Laboratoire de Science et Génie des Surfaces, UMR CNRS 7570, INPL_Ecole des Mines; Nancy (France)
ThP47 DESCRIPTION OF EVOLUTION OF NEWBORN FORMATIONS ON THE
CATHODE OF GLOW OR MAGNETRON DISCHARGES V.V. Bobkov1, S.S. Alimov1, Vl.V. Bobko2, Yu.V. Slyusarenko3, R.I. Starovoitov1 1 Kharkov National University, Kharkov (Ukraine) 2 Max-Planck-Institut für Plasmaphysik, EURATOM Association, Garching (Germany) 3 Kharkov Insitute of Physics and Technology, National Science Center, Kharkov (Ukraine)
Thursday, September 16th, 2004 Poster Session 15:10 – 16:40
PSE 2004 80
ThP48 ANOMALOUS INTERACTION OF MOVING ATOMS OR MOLECULES WITH
MODULATED SURFACE Vladimir I. Vysotskii, Nicolae V. Maksyta. Kiev Shevchenko University, Kiev (Ukraine)
ThP49 THE STABILITY ANALYSIS OF REACTIVE SPUTTERING PROCESS WITH
PLASMA CHEMISTRY Chuan. Li; J.H. Hsieh Nanyang Technological University (Singapore)
ThP50 SIMCOAT SIMULATION PROGRAM FOR PROCESS OPTIMISATION IN
INDUSTRIAL VACUUM ARC DEPOSITION S. Völlmar, D. Römer, B. Schultrich Fraunhofer-Institut Werkstoff-und Strahltechnik, Dresden (Germany)
ThP51 3D ETCHING MODELLING IN THE PRESENCE OF COMPLEX SHAPE
CONDUCTORS A.P. Smirnov1, J. J. Oh2, W. Park2, E.A. Sheina1, J. K. Shin2, A. B. Shmelev1 1 Moscow State University faculty of Computation Mathematics and Cybernetics, Moscow (Russia) 2 Samsung Advanced Institute of Technology, Computational Science and Engineering Laboratory, Suwon (Korea)
ThP52 EXPERIMENTAL AND THEORETICAL INVESTIGATIONS OF ION DENSITY
DISTRIBUTION IN PVD COATING CHAMBER WITH SEVERAL CATHODES O. Sobolyev; H. Mecke Otto-von-Guericke-University of Magdeburg; Institute of Electric Power Systems; Magdeburg (Germany)
ThP53 SYSTEM OF LINEAR WIRES IN ANISOTROPIC PLASMA
Yatsenko N.M., Yatsenko E.A. Department of Radiophysics and Electronics, Karazin Kharkiv National University, Kharkiv (Ukraine)
ThP54 ABNORMAL DIFFUSION OF ADSORBED ATOMS ON A SUBSTRATE IN
PLASMA AND CONTRIBUTIONS OF ELECTRON SYSTEM IN SUB-SURFACE LAYER Sadaharu Yoneda, Yoshihiro Furusato, Shinya Ohwatari, Masataka Taniguchi, Mituomi Yamaguchi, Kozo Obara Division of Nanostructure Advanced Materials, Kagoshima University (Japan)
ThP55 TWO TYPE DIFFUSION PROCESSES OF SPUTTERED PARTICLES
INDUCED BY COLLISIONS AT SUBSURFACE LAYER IN PLASMA Masakatsu Mabuchi, Mituomi Yamaguchi, Syogo Shirasawa, Hirotaka Manaka, Kozo Obara Division of Nanostructured Advanced Materials, Kagoshima University (Japan)
ThP56 NANOPOWDER MANAGEMENT AND PLASMA PARAMETERS IN RF
PARALLEL-PLATE SILANE-BASED DISCHARGES K. Ostrikov1,2, I. Denysenko2,3,4, S. V. Vladimirov1, M. Y. Yu3, C. H. Diong2 and S. Xu2 1 School of Physics, The University of Sydney, Sydney (Australia) 2 Natural Sciences, NIE, Nanyang Technological University (Singapore) 3 Theoretical Physics I, Ruhr-University Bochum (Germany) 4 Kharkiv National University (Ukraine)
Thursday, September 16th, 2004 Poster Session 15:10 – 16:40
PSE 2004 81
ThP57 THE RESONANCE ELECTRON ENERGY DISTRIBUTION FUNCTION NEAR
SURFACE WITH ADSORBED MOLECULES E.E. Son Moscow Institute of Physics and Technology, Department of Physical Mechanics (Russia)
Poster – Coatings on Polymers ThP58 NEW CONCEPTS FOR PRECISION OPTICAL AND ANTIREFLECTIVE
COATINGS DEPOSITED BY REACTIVE PULSE MAGNETRON SPUTTERING H. Bartzsch, J. S. Liebig, S. Lange, K. Goedicke, P. Frach Fraunhoferinstitut Elektronenstrahl- und Plasmatechnik, Dresden (Germany)
ThP59 DEPOSITION OF SiOx DIFFUSION BARRIERS ON FLEXIBLE PACKAGING
MATERIALS BY PECVD A.Bieder1, A. Grueniger1, Ph. Rudolf von Rohr1 1 Institute of process engineering, ETH Zurich (Switzerland)
ThP60 PROPERTIES OF ITO ON PET FILM IN DEPENDENCE ON THE COATING
CONDITIONS AND THERMAL PROCESSING Michael Boehme1, Christoph Charton2 1 Southwall Europe GmbH, Großröhrsdorf (Germany) 2 Fraunhofer Institute for Electron Beam and Plasma Technology, Dresden (Germany)
ThP61 THE LOW TEMPERATURE SYNTHESIS OF AL DOPED ZnO FILMS ON
POLYMER USING REACTIVE PULSE MAGNETRON SPUTTERING Yun M. Chung*, Min J. Jung, Yong M. Kim, Jeon G. Han Center for Advanced Plasma Surface Technology, Sungkyunkwan University, Suwon (Korea)
ThP62 ITO THIN FILM DEPOSITION BY REACTIVE D.C. MAGNETRON
SPUTTERING ON POLYMER SUBSTRATES FOLLOWED BY CO2 LASER POST TREATMENT A. Fischer1, R. Schwarz2, K. Gläntz1, F.-J. Haug3, M. Amberg1, D. Hegemann1, and G. Seyfang4 1 Swiss Federal Laboratories for Materials Testing and Research (EMPA): St. Gallen 2 SSZ Zug AG, Zug (Switzerland) 3 Dübendorf (Switzerland) 4 Swiss Federal Institute of Technology ETH Zürich (Switzerland)
ThP63 INVESTIGATION OF THE RF PULSE MODULATED PLASMA JET SYSTEM
DURING THE DEPOSITION OF Pb(ZrxTi1-x)O3 THIN FILMS ON POLYMER SUBSTRATES M. Cada1,3, Z. Hubicka1, P. Virostko1,3, A. Deyneka1, M. Tichý1,3, L. Jastrabík1, G. Suchaneck2, G. Gerlach2
1 Institute of Physics ASCR, Prague (Czech Republic) 2 Institute of Solid State Electronics, University of Technology, Dresden (Germany) 3 Faculty of Mathematics and Physics, Charles University in Prague (Czech Republic)
ThP64 TRANSPORT CHARACTERISTICS OF TRACK MEMBRANES MODIFIED IN
PLASMA OF DIMETHYLANILINE Lyubov I. Kravets1, Serguei N. Dmitriev1, Alla B. Gilman2, Aleksandr I. Drachev2 1 Joint Institute for Nuclear Research, Flerov Laboratory of Nuclear Reactions, Dubna (Russia) 2 Enikolopov Institute of Synthetic Polymeric Materials (Russia)
Thursday, September 16th, 2004 Poster Session 15:10 – 16:40
PSE 2004 82
ThP65 INVESTIGATIONS OF PLASMA POLYMERIZED BARRIER FILMS ON
POLYMERIC MATERIALS M. Walker, F. Meermann, J. Schneider, K. Bazzoun, J. Feichtinger, A. Schulz, J. Krüger and U. Schumacher Institute of Plasma Research, University of Stuttgart (Germany)
ThP66 PECVD OF NANOCRYSTALLINE SILICON LAYERS ON HIGH TG POLYMER
SUBSTRATES L. MacQueen1, G. Dennler2, J. Zikovsky1, M. R. Wertheimer1,4, M. Latreche3 and G. Czeremuszkin3 1 Groupe des Couches Minces and Department of Engineering Physics, École Polytechnique, Montréal (Canada) 2 Johannes Kepler University, Linz (Austria) 3 Nova-Plasma Inc., Montréal (Canada)
ThP67 BARRIER PROPERTIES OF HMDSO PLASMA TREATED
POLYETHYLENETEREPHTHALATE S. Zanini1, C. Riccardi1, M. Orlandi1, P. Esena1, M. Tontini1, V. Cassio2 1 Universita’ degli Studi di Milano-Bicocca, Milano (Italy) 2 Neograf s.r.l., Moretta (CN) (Italy)
Poster –Magnetic Devices, Solid Lubricants and Superhard Coatings ThP68 NANOSTRUCTURED GMR FILMS PREPARED BY TVA METHOD
I. Mustata1, C. P. Lungu1, A. M. Lungu1, C.Surdu-Bob1 G. Filoti2, C. Logofatu2, C. Negrila2
1 National Institute for Lasers, Plasma and Radiation Physics, Magurele-Bucharest (Romania) 2 National Institute for Materials Physics, Magurele-Bucharest (Romania)
ThP69 W-S-C SPUTTERED FILMS: INFLUENCE OF THE CARBON DOPING
METHOD ON THE MECHANICAL PROPERTIES M. Evaristo1, A. Nossa1, A. Cavaleiro2 1 Escola Superior de Tecnologia e Gestão, Instituto Politécnico da Guarda, Guarda (Portugal) 2 ICEMS – Departamento de Engenharia Mecânica – FCTUC, Coimbra (Portugal)
ThP70 THE LUBRICITY OF OXIDES REVISED BASED ON A POLARISABILITY
APPROACH B.Prakash, J.P.Celis Katholieke Universiteit Leuven, Department Metaalkunde en Toegepaste Materiaalkunde, Leuven (Belgium)
ThP71 DEPOSITION AND CHARACTERIZATION OF COMPOSITE HARD-SOLID
LUBRICANT COATING BY CLOSED-FIELD MAGNETRON SPUTTERING Julfikar Haider1, Mahfujur Rahman1, Brian Corcoran2 and M. S. J. Hashmi1,2
1 NCPST and MPRC, Dublin City University (Ireland) 2 School of Mechanical and Manufacturing Engineering, Dublin City University, (Ireland)
ThP72 MECHANICAL PROPERTIES OF BORON NITRIDE FILMS PREPARED BY
PLASMA-ENHANCED CHEMICAL VAPOR DEPOSITION Hangsheng Yang1, Chihiro Iwamoto2 and Toyonobu Yoshida1
1 Department of Materials Engineering, School of Engineering, The University of Tokyo, Tokyo (Japan) 2 Engineering Research Institute, School of Engineering, The University of Tokyo (Japan)
Thursday, September 16th, 2004 Poster Session 15:10 – 16:40
PSE 2004 83
Poster – Carbon Coatings ThP73 CHEMICAL BONDING AND MICROSTRUCTURE ASPECTS ON THE
TRIBOLOGICAL AND MECHANICAL BEHAVIOR OF NANOCRYSTALLINE TiC/AMORPHOUS CARBON COMPOSITES D. Martínez-Martínez1, J.C. Sánchez-López1, C. López-Cartes1, A. Fernández1, M. Brizuela2, A. García-Luis2, J.I. Oñate2 1 Instituto de Ciencia de Materiales de Sevilla (CSIC-Univ. Sevilla), Sevilla (Spain) 2 Fundación Inasmet, Mikeletegui Pasealekua, Donostia-San Sebastián (Spain)
ThP74 COMPARISON OF BULK AND SURFACE STRUCTURE IN A-C:H FILMS
D. Liu, G. Benstetter, W. Frammelsberger Electrical Engineering Department, University of Applied Sciences Deggendorf (Germany)
ThP75 BONDING ENVIROMENT IN FILMS DEPOSITED FROM Ar/CH4 AND
Ar/CH4/N2 ECR-DISCHARGES. EFFECT OF VOLTAGE POLARIZATION ON THE GROTH PROCESSES M. Camaro, R. Gago1, C. Gomez-Aleixandre and J.M. Albella Instituto de Ciencia de Materiales de Madrid (CSIC), Cantoblanco, Madrid (Spain) 1 Institut für Ionenstrahlphysik und Materialforschung, Forschungszentrum Rossendorf e.V., Dresden (Germany)
ThP76 NANOSTRUCTURED CARBON GROWTH BY EXPANDING RF PLASMA
ASSISTED CVD ON Ni-COATED SILICON SUBSTRATE S. Vizireanu, B. Mitu, G. Dinescu National Institute for Laser, Plasma and Radiation Physics, Magurele, Bucharest (Romania)
ThP77 THE STUDY OF STRESS IN NANOCRYSTALLINE DIAMOND FILM
SYNTHESIZED BY PLASMA ENHANCED HOT-FILAMENT CHEMICAL VAPOR DEPOSITION METHOD C. Z. Gu, H. J. Li, Z. L. Wang, J. J. Li Laboratory of Micrifabrication, Institute of Physics, Chinese Academy Sciences, Beijing (China)
ThP78 THE IMPROVEMENT OF CUTTING PERFORMANCE IN SEMI-DRY
CONDITION BY THE COMBINATION OF DLC COATING AND CVD SMOOTH SURFACE DIAMOND COATING H.Hanyu1, S.Kamiya2, Y.Murakami1, Y.Kondoh3 1 OSG CORPORATION, Research & Development, Aichi (Japan) 2 Tohoku University, Department of Mechanical Engineering, Sendai (Japan) 3 OSG CORPORATION, Mechanical Design, Arumi, Shinshiro, Aichi (Japan)
ThP79 WEAR-CORROSION PERFORMANCE OF Si-INCORPORATED DIAMOND-
LIKE CARBON (Si-DLC) FILMS H.G. Kim, S.H. Ahn, J.G. Kim, S.J. Park1, K.R. Lee1 Department of Advanced Materials Engineering, Sungkyunkwan University, Suwon (Korea) 1 Future Technology Research Division, Korea Institute of Science and Technology Cheongryang, Seoul (Korea)
ThP80 EFFECT OF CATALYSTS ON THE INTERNAL STRUCTURES OF CARBON
NANOTUBES DEPOSITION BY ATMOSPHERIC PRESSURE PE-CVD S.J. Kyung, Y.H. Lee, C. W. Kim, J.H. Lee and G.Y. Yeom Department of Materials Engineering, Sungkyunkwan University, Suwon (Korea)
Thursday, September 16th, 2004 Poster Session 15:10 – 16:40
PSE 2004 84
ThP81 EFFECT OF CARBON BUFFER LAYER ON ADHESION OF DLC COATINGS
ON WC-CO SUBSTRATES Jong-Kuk Kim1, Sung-Kyu Bae1, Eungsun Byon1, Sang-Jin Lee2, Kwang-Ryeol Lee 3 1 Surface Engineering Department, Korea Institute of Machinery and Materials, Changwon (Korea) 2 J&L Tech Co., Ltd., Siheung-City (Korea) 3 Future Technology Research Division, Korea Institute of Science and Technology, Seoul (Korea)
ThP82 NANOTUBE FORMATION AND FULLERENE BEAM ACCELERATION IN
NANOTUBE SOURCE WITH DUSTY PLASMA FLOW BY SELF-CONSISTENTLY FORMED NONMONOTONOUS ELECTRIC DOUBLE LAYER V.I.Maslov, A.M.Egorov, V.I.Lapshin, N.M.Maslova, I.N.Onishchenko, G.A.Skorobagat’ko, V.L.Stomin NSC Kharkov Institute of Physics & Technology, Kharkov (Ukraine)
ThP83 ACTIVE CORROSION PROTECTION FOR METALLIC SURFACES BY
NANOSTRUCTURED THIN FILMS E.M. Moser1, M. Bösch1, J. Painot1, S. Mikhailov2, F. Munnik2, O. Banakh2, M. Faller3, S. Virtanen4, P. Schmutz4, 1 University of Applied Sciences, Geneva (Switzerland) 2 University of Applied Sciences, Le Locle (Switzerland) 3 Swiss Federal Laboratories for Materials Testing and Research, Dübendorf (Switzerland) 4 Swiss Federal Institute of Technology, Zürich (Switzerland)
ThP84 PECVD OF ORDERED CARBON NANOTIP STRUCTURES: ROLE OF
ELEMENTARY PROCESSES IN THE IONIZED GAS PHASE K. Ostrikov1,2, Z. Tsakadze2, I. Denysenko2,3, P. Rutkevych2, S. V. Vladimirov1
and S. Xu2 1 School of Physics, The University of Sydney, Sydney (Australia) 2 Natural Sciences, NIE, Nanyang Technological University (Singapore) 3 Theoretical Physics I, Ruhr-University Bochum (Germany)
ThP85 THE ELECTRICAL AND STRUCTURAL PROPERTIES OF THE CNx FILMS
GROWN BY CLOSE FIELD UNBALANCED MAGNETRON SPUTTERING Yong Seob Park1,2, Byungyou Hong1,2 1 School of information and communication Engineering, Sungkyunkwan University, Suwon (Korea) 2 Center for Advanced Plasma Surface Technology (CAPST), Sungkyunkwan University, Suwon (Korea)
ThP86 INVESTIGATION OF NUCLEATION AND GROWTH MECHANISMS OF
NANOCRYSTALLINE DIAMOND/AMORPHOUS CARBON COMPOSITE FILMS C. Popov1, S. Boycheva1, M. Jelinek2 and W. Kulisch1 1 Institute of Microstructure Technologies and Analytics (IMA), University of Kassel (Germany) 2 Institute of Physics, Academy of Sciences of the Czech Republic, Prague (Czech Republic)
ThP87 INFLUENCE OF ENERGETIC ION BOMBARDMENT ON W-C:H COATINGS
DEPOSITED WITH W AND WC TARGETS C. Strondl, N.M. Carvalho; J.Th.M De Hosson; T. Krug; R. Tietema Hauzer Techno Coating BV, Venlo (The Netherlands)
Thursday, September 16th, 2004 Poster Session 15:10 – 16:40
PSE 2004 85
ThP88 TRIBOLOGICAL PROPERTIES OF SUPERHARD AMORPHOUS CARBON
FILMS (Ta-C) V. Weihnacht, H. Schulz, D. Klaffke1, H.-J. Scheibe2, B. Schultrich Fraunhofer-Institut für Werkstoff- und Strahltechnik, Dresden (Germany) 1 Bundesanstalt für Materialforschung und -prüfung, Berlin (Germany) 2 Fraunhofer USA, Center for Coatings and Laser Applications, Michigan State University, East Lansing (USA)
ThP89 CONTROL OF RESIDUAL STRESS AND ADHESION IN HARD CARBON
COATINGS N. Wöhrl, S. Reuter, O. Filipov and V. Buck Thin Film Technology Group, Dept. of Physics, University of Duisburg-Essen, Essen (Germany)
General Information Registration
PSE 2004 86
Conference Location The Ninth International Conference on Plasma Surface Engineering will be held in the Kongresshaus (Congress-Center) Richard-Strauss-Platz D-82467 Garmisch-Partenkirchen (Germany) Conference Office The conference office is located in the foyer of the congress center (main entrance). Opening hours, September 12 – 17, 2004: Sunday 16:00 to 19:00 h Wednesday 08:00 to 18:00 h Monday 08.00 to 18:00 h Thursday 08:00 to 18:00 h Tuesday 08:00 to 18:00 h Friday 08:00 to 14:00 h Conference Telephone/Telefax The conference office` telephone and telefax numbers are: phone +49-(0)8821 180812, fax +49-(0)8821 180850 Conference Language The conference language will be English. No simultaneous translation will be provided. Conference Secretariat/Registration Everybody who wishes to attend the conference has to register online at www.akplasma.org/pse2004.php3 or to complete the enclosed Registration Form and return it to the conference secretariat : VDI Technologiezentrum GmbH Marion Böckmann Graf-Recke-Str. 84 D-40239 Duesseldorf, Germany http://www.akplasma.org e-mail: akplasma@vdi.de Fax: +49 211 6214 484 Deadlines Registrations until August 15 will be considered for the list of participants. Hotel reservation has to be completed by the 09th of August the latest. Conference Fees Regular registration fee 480 € Reduced fee for early registration before July 15, 2004 450 € The registration fee includes the conference proceedings, book of abstracts, Welcome Reception, industrial/Bavarian Eevening. It does not include the tutorial on Saturday/Sunday. Two-days Ticket 295 € This special ticket is only valid for the conference and exhibition on Tuesday and Wednesday including book of abstracts and social evening. Students 180 € The students` fee does not include the proceedings and the tutorial on Saturday/Sunday. (To make sure to participate at a reduced fee a copy of your student card together with your registration is urgently requested.) Accompanying persons 50 € Fee includes Welcome Reception and Industrial/Bavarian Evening. Tutorial 150 €*/ 300 € This ticket is only valid for the tutorial ”Fundamentals and Trends in Plasma Surface Processing” on Saturday and Sunday. (* reduced fee for students, a copy of your student card together with your registration is urgently requested)
General Information Registration
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Mode of Payment For payment by banktransfer it is absolutely necessary to indicate the invoice number and to include the name of the participant. Authors have to fill in the enclosed registration form, too. The conference fee includes V.A.T. of 16 %. After August 09 no further conference information will be mailed, but handed over at the conference office in Garmisch-Partenkirchen. Exhibition An exhibition of machines, equipment and services will be held during the conference on Tuesday and Wednesday. For further details please contact the conference secretariat. Conference Proceedings Proceedings of the International Conference on Plasma Surface Engineering will be published after the conference and distributed to all regular delegates. Accommodation Tourist Information (Ms Hofmann) Postfach 15 62 82467 Garmisch-Partenkirchen
Germany Phone: +49-(0)8821 180-726 Fax: +49-(0)8821 180-759
has been appointed the official agent for hotel reservations. Please use the online booking form for hotel reservations at: www.akplasma.org\pse2004.php3. Delegates will receive a confirmation of the hotel reservation from the „tourist information office“ directly. Hotel reservations should be made by the 09th August the latest. Participants are requested to notify any changes or cancellations of room reservations to the hotel directly. Insurance The VDI Technologiezentrum GmbH as the organiser of the conference cannot accept responsibility for personal accidents or loss of or damage to private property of participants and accompanying persons which may occur either during, or arising from the conference. Participants should, therefore take whatever steps they consider necessary regarding insurance. Restaurants A variety of restaurants in town offer local and international food for lunch. During the exhibition light meal will be offered against cash in the exhibition area. No special arrangement for lunch will be made. Taxi Taxis can be ordered by calling 2408 and 2409 (Marienplatz) or 1616 (Bahnhofsplatz). Car Parking Car parking space for about 250 cars is available at the congress center. Participants arriving by car are advised to use these facilities.
General Information Registration
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Travel to Garmisch-Partenkirchen How to reach Garmisch-Partenkirchen by train: from Munich or Augsburg, average travel time: from Munich central station about 80 min (approx. hourly schedule) from Augsburg central station about 100 min (change at Weilheim/Obb.) by car: via Autobahn A 95/E 4, 110 km from Munich by air:
via Munich (Flughafen München) direct railway transfer to Munich central station by public transport (S-Bahn) available
PSE 2004 Registration
PSE 2004
Registration Form (please type or print clearly)
Name First (Name)s Title Institute/Company Street Zip code City Country Phone Fax e-mail Accompanied by: I wish to register for the Ninth International Conference on Plasma Surface Engineering. Please pick in the boxes. 01 Full registration 450 €* / 480 € (* reduced fee for registration before July 15, 2004) 02 Two-day Ticket (excluding Proceedings) 295 €
03 Reduced fee for students 180 € To make sure to participate at a reduced fee a copy of your student card together with your registration is urgently requested.
04 Fee for accompanying persons 50 € number
05 Tutorial 150 €** /300 €
(** reduced fee for students, a copy of your student card together with your registration is urgently requested)
I will attend Welcome Reception Combined Industrial/Bavarian Evening
Payment: credit card (AMEXO, VISA, Eurocard, Mastercard)
No.: expire date: (mm/yy)
I hereby authorize the organisers of the PSE to collect the conference fee from my credit card.
bank transfer (only participants from EU-countries) on receipt of invoice.
Authors have to fill in the registration form, too. Place and Date Signature
Ninth International Conference on Plasma Surface Engineering Conference and Exhibition Garmisch-Partenkirchen (Germany) September 13 – 17, 2004
PSE 2004 Registration
PSE 2004
Please return this Registration Form to the conference office or use the online registration form at www.akplasma.org/pse2004.php3:
VDI Technologiezentrum GmbH Marion Böckmann Graf-Recke-Str. 84 40239 Düsseldorf GERMANY
Announcement 10th Conference on Plasma Surface Engineering (PSE 2006) 11.09.2006 - 15.09.2006 Garmisch Partenkirchen (Germany)
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