mems1
Post on 17-Sep-2015
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Single Crystal Silicon for MEMS
Single Crystal Silicon for MEMS
Mechanical Material SILICON?
Stiff => Thinning is required for appreciable strainSingle Crystal Silicon for MEMS
Single Crystal Silicon for MEMS
Structure of Single Crystal Silicon
Miller Indices for Single Crystal Silicon
Miller Indices for Single Crystal Silicon
SCS has anisotropic properties:Electrical, Thermal, Mechanical, ChemicalETCHING for BULK MICROMACHINING(Isotropic/Anisotropic)
ETCHING for BULK MICROMACHINING(Isotropic/Anisotropic)
ETCHING for BULK MICROMACHINING(Cavity/Cantilever Anisotropic)
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