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Flexible and Stretchable Electronics
and Applications for Biomedical Devices
School of Chemical and Biological Engineering
Seoul National University
Dae-Hyeong Kim
Suffering Patients Doctors
How to bridge?
Bio-Integrated
Electronics ?
Our Goals
* Connect medical doctors and suffering patients By
Using Bio-Integrated Electronic Devices/Systems.
* Develop high performance flexible and stretchable
electronic and optoelectronic devices using high
quality single crystal inorganic materials.
* Apply flexible and stretchable technologies to bio-
integrated electronic devices for the health monitor
and therapy systems.
High Performance Flexible Devices
Polymer Amor. Si Poly. Si Single Si SC III-V
~0.1 ~1 ~100 ~500 ~1000 Electron Mobility (cm2/Vs)
R. Reuss et al. Proc. IEEE (2005)
1 10 100 1000
100KHz
1MHz
100MHz
1GHz
TFT Capability (mobility, cm2/Vs)
Sy
ste
m A
pp
lic
ati
on
s
Organic Semiconductors
α Si
Poly Si
Single Crystal Si
LCD
OLED
RFID
Computer
High Performance
Market Applications
Low Performance
Market Applications
S. Mack et al. Appl.
Phys. Lett. (2006)
Ultrathin Flexible Silicons
300nm thick silicon ribbons
Transfer Printing
Printed surface can be flexible
Area Expansion
Can increase spacing between structures
Flexible Transistors Using Silicon Nanomembranes
100m
IEEE Electron Device Letters 29, 73 (2008)
500m
Transfer Curve
Vg (V)-7 -6 -5 -4 -3 -2 -1 0
- I d
(m
A)
0.0
0.3
0.6
0.9
1.2
1.5
1.8
2m
4m
9m14m19m24m
Vg (V)
-6 -4 -2 0 2
Id (
A)
10-2
10-5
10-8
10-11
Vg(V)
- I d
(A)
-6 -4 -2 0 2
10-2
10-5
10-8
10-11
Typical IV Curve
Vd (V)-3.0 -2.5 -2.0 -1.5 -1.0 -0.5 0.0
- I d
(m
A)
0.0
0.3
0.6
0.9
1.2
1.5
1.8- 6V
- 5V
- 4V
- 3V
nMOS pMOS
nMOS
pMOS
Flexible Si CMOS Circuits
0.3mm
Vin
VDD Vout
Vin (V)0 1 2 3 4 5
Vo
ut
(V)
0
1
2
3
4
5
6
Gain
0
40
80
120
160
Time (s)-2 -1 0 1 2
Vo
ut
(V)
-6.0
-3.0
0.0
3.0
6.0
0.5mm
VDD Vout
Vin
100m
Metal
Interconnect
NMOS
PMOS
BCB Polyimide
SiO2
Vin
VDD Vout
nMOS
pMOS
CMOS inverter
3 stage CMOS
Ring Oscillator
IEEE Electron Device Letters 29, 73 (2008).
Bending, Folding and Stretching
http://www.nokia.com
stretching Folding (extreme bending)
bending
Robot skin
Smart surgical glove
Wearable computer
Extreme Bendability – ‘Foldability’ – In Ultrathin Circuits
cover slip
etch holeSiO2
metal
PI
Si (p) Si (n)
<1.7m
Science 320, 507 (2008).
thickness
bending radius Strain ~
Conformal Contact to Curvilinear Surfaces
unwrapped
wrapped
unwrapped
unwrapped
‘Wavy’ Silicon Nanoribbons are Stretchable
10 m
Materials
Mechanics
‘Accordion’ Physics
Science 311, 208 (2006).
PNAS 104, 15607 (2007).
Advanced Wavy CMOS ICs
0.5 mm
Science 320, 507 (2008).
Stretching CMOS
Science 320, 507 (2008).
stretching
0% 2.5% 5.0%
releasing
300 m
0% 4.0% 8.8% 0%
0%
stretching releasing
y
x
y
x
300m
Non-Coplanar Serpentine Interconnects
PNAS 105, 18675 (2008).
Stretchable iLED
Nature Materials 9, 929 (2010).
Stretch
Release
0 10 20 30 40 50
0.0
0.2
0.4
0.6
0.8
1.0 Initial X stretch: 60.1 % Diagonal: 57.7 %
Release
Curr
ent (m
A)
Voltage (V)
1 10 100 1000 0
25
30
35
40
Cycle
V a
t I=
20 ㎂
(V
)
200 um 200 um
X-stretch: strain = 30.1 % Initial: Pre-strain = 20.0 %
Island
Pop-up
2 mm
X-direction initial
Diagonal direction initial
Strain = 33.3 %
X-direction stretched
Strain = 45.5 %
Diagonal direction stretched
Stretch
Release
3D Deformations
Nature Materials 9, 929 (2010).
0 degree: Flat
360 degrees
720 degrees
1 mm
0 10 20 30 40 50 60 70 80 90
0.0
0.2
0.4
0.6
0.8
1.0
Flat
360 Degrees 720 Degrees Back to Flat
Curr
ent
(mA
)
Voltage (V)
0 degree: Flat
360 degrees
720 degrees
1 mm Flat Inflated: 29.0 %
Pencil tip
1 mm
Balloon
Inflate
Deflate
Inflate
Deflate
Stretchable Photovoltaic Array
Unpublished
patterning, doping, etching
p+
n+
PDMS
anchors
Si ribbon
Fabricate stretchable -cell
Transfer print silicon solar m-cells Transfer mesh array to biaxially
stretched PDMS substrate
L + ΔL
p+ n+
Stretchable Energy Harvesting Device
Unpublished
x stretching
rele
asin
g
y stretching
rele
asin
g
0% 200m
30%
y
12.5 % Pre-strain
30%
0%
x
30 % stretching
0.0 0.1 0.2 0.3 0.4 0.5
0.0
2.0x10-5
4.0x10-5
6.0x10-5
8.0x10-5
1.0x10-4
1.2x10-4
Cu
rre
nt
(A)
Voltage (V)
0%
y-dir 30%
x-dir 30%
Electronics on Various Substrates
bending
unfolding fo
ldin
g
1cm
1mm
Paper
1 mm
1 mm
Paper
1 mm
1 mm
Al foil
Adv Mater 21, 3703 (2009).
Nature Materials 9, 929 (2010).
Cycle0 250 500 7501000
Gain
0
50
100
150
200
VM
0
2
4
6
stretching
releasing
5mm
1mm
Stretched
5mm
vinyl glove
leather glove
Stretched
3 mm
Fabric
1 mm
Bio-Integrated Electronics
Electrophysiology & Soft, Curvilinear
Tissues – High Performance
Flexible/Stretchable Electronics
Current Technology for Epicardial Mapping
Conventional devices
- Single electrode mapping
- Iterative measurement for 2D map
(Long time EP procedures)
- High risk due to mapping delay
- Low resolution
(cannot pinpoint abnormal tissue)
Device Requirements
- High Resolution 2D Array
- Fast Mapping
- Large Area Coverage
Cardiac Electrophysiology (EP)
- aid diagnosis / guide therapy
for cardiac arrest or other
structural heart disease
Flexible Electronics for Mapping
250 m
1.5 mm
Device Characteristics
- 1618, 800m spacing
- High Speed Silicon TRs
- ~15mm ~13mm
Flexible Electronics
- Conformal contact with
curvilinear, soft cardiac
tissues.
Science Translational Medicine 2, 24ra22 (2010)
In-vivo Experiment with Swine Model
t = ~ 200 ms
1 cm
5 mm
5 mm
80-90 lb male Yorkshire pig
Expose epicardial surface through
sternotomy and pericardiotomy
Science Translational Medicine 2, 24ra22 (2010)
High Resolution, Real-Time Mapping
10 m
V
400 ms
0.3
mV
20 ms
2D Graph 3
X Data
2100 2150 2200
Y D
ata
-0.4-0.20.00.20.40.60.81.0
Col 1
SNR ~ 50
Sci Transl Med 2, 24ra22 (2010)
(s)
0 200 400 600 800 1000 1200 1400 1600 1800-0.01
-0.005
0
0.005
0.01
2 4 6 8 10 12
2
4
6
8
10
12
14
16
0 200 400 600 800 1000 1200 1400 1600 1800-0.01
-0.005
0
0.005
0.01
2 4 6 8 10 12
2
4
6
8
10
12
14
16
0 200 400 600 800 1000 1200 1400 1600 1800-0.01
-0.005
0
0.005
0.01
2 4 6 8 10 12
2
4
6
8
10
12
14
16
0 200 400 600 800 1000 1200 1400 1600 1800-0.01
-0.005
0
0.005
0.01
2 4 6 8 10 12
2
4
6
8
10
12
14
16
-2 mV
+6 mV
-10 mV
800 m
t = 0 ms t = 11.2 ms
t = 14.4 ms t = 24 ms time
Raw data
Neural Interface Application
Clinical mapping application for epileptic
seizure patients
• Diagnose and/or guide epilepsy surgery
• Pinpoint the location of onset of
epilepsy for patients whose epilepsy
location cannot be found with external
imaging techniques, such as MRI or CT
• Mapping brain functions before surgery
BCI neuroprosthetic application for paralyzed
patients with sensory or motor dysfunction
• Mapping and Decoding AP and LFP from
sensory and motor cortex
• Visual cortex/retina implantation
brings light back for blind people
• Cochlear prostheses restore hearing
• Face motor cortex implantation generates
machine languages
• Motor cortex implantation moves computer
cursors (below)
L. R. Hochberg et al., Nature (2006) 2 cm
High Resolution over Large Area: EA with Multiplexers
IEEE Int. Symp. on Circuits and Systems, p 3115 (2007)
How to make a conformal contact??
Long Term Gliosis of Penetrating Electrodes
PNAS 2003, 100, 11041
Advantage
~ High resolution (50~150 m size, 2~10 mm length, ~500 m spacing), Good SNR
Disadvantage
~ Penetration causes mechanical tissue damage → activate immune functions of
brain → cause deposition of astrocytic/inflammatory tissues on electrodes (after
3~6 months)→ poor SNR → difficult long time mapping
Neurosci. Lett. 2006, 406, 81
normal
reactive astrocytic
components of the
scar
Gliosis is a proliferation of astrocytes in damaged areas of the central nervous system (CNS)
High Density Neural Mapping Array
~ 20X18 HDN Sensor Array
~ 300X300µm, 500µm spacing
1 mm
300 m
Kapton (PI) 14.0 m
3.0 m
10.0 m SU8
multiple misaligned via
Si PI
NMP
pt
Pt Contact
Electrodes
Multilayer
Misaligned
Via Structure
Horizontal
/ Vertical
Interconnect
Doped Si
Ribbons on
Polyimide
Pt
Via
1st MT 2nd MT
Si
0.2 mm
Load TR Multiplexer
Output +V Row Slt.
Elect -rode
Vd (V)
0 1 2 3 4
I d (
mA
)
0.0
0.4
0.8
1.2
1.6
Vg (V)
-2 0 2 4 6
I d (
A)
1e-7
1e-6
1e-5
1e-4
Y A
xis
2
0
40
60
I d (
µA
)
20
Nature Neuroscience 14, 1599
(2011).
Seizure Measurement with HDN In-Vivo
Seizure induced (picrotoxin) 2 mm
HDN array on
visual cortex
1 mm
Nature Neuroscience 14, 1599 (2011).
Seizure Mapping : Spiral/Plane Waves
Dela
y in m
s
0
20
40
60
80
100
120
140
160
Counterclockwise spiral delay map
0 ms
165 ms
110 ms
55 ms
Dela
y in m
s
0
10
20
30
40
50
60
70
80
90
Clockwise spiral delay map
0 ms
90 ms
60 ms
30 ms
II IV
I II IV V III III
500 ms
2 m
V
iEEG
Nature Neuroscience 14, 1599 (2011).
Bioresorbable Implantable System
Science 337, 1640 (2012).
c
2 mm
0 min 10 min 5 min
1 cm
top view
Mg electrode
MgO
dielectric
doped Si
silk substrate
Mg
electrode
tilted view
MgO
dielectric
Transient Silicon Electronics
Science 337, 1640 (2012).
3 mm 5 mm
Voltage (V)
Cu
rre
nt
(mA
)
-1.0 -0.5 0.0 0.5 1.0
0.0
0.1
0.2
0.3
0.4
0.5
Diode Resistor 1
Resistor 2
Resistor 3
0 1 2 3 4 50
5
10
15
20
Vd (V) I d
(m
A)
5V
3V
1V
0 1 2 3-40
-20
0
Frequency (GHz)
S2
1 (
dB
)
Inductor
LC oscillator
Capacitor
3 mm S D
G
VDD
VOUT
VIN
VGND
VGND
VDD VIN
VOUT
Mg dep. (shadow mask)
1 mm
1 2 30
1
2
3
0
2
4
6
8
Vin (V)
Vo
ut (V
)
Ga
in
NOR to NAND Time
V (
V)
0
2
4
VB
VA
(0,0)1
(0,1)0 (1,0)0 (1,1)0 0
2
4
Time
V (
V)
(0,0)1 (0,1)1 (1,0)1
(1,1)0
VB
VA VDD VA
VB
VOUT
2 mm
In-vivo Experiment of Transience
Science 337, 1640 (2012).
1 cm
suture
Transistor
Implant Sutured 3 weeks 3 weeks
300 µm
A
B
C
4 mm
1-Re for
inner coil
2-Re for
outer coil
23
26
Turn on both coils
IR image
0 5 10 15 200
2
4
6
8
Time (day)
Q f
ac
tor
experiment
modeling
1 2 3
-12
-8
-4
0
in air
in silk
day 0
day 4
day 8
day 15
Re
fle
cti
on
(S
11
) d
B
Frequency (GHz)
5 mm
Current Non-invasive Skin Electrophysiology
* Current procedure needs cleaning with alcohol wipes and
conductive gel, which is significantly UNCOMFORTABLE.
* Skin electrophysiology using gel is in LIMITED TIME USE
only, since conductive gel dries out over several hours.
* Electrodes and amplifying equipments are BULKY.
www.ucc.ie / openeeg.sourceforge.net
Epidermal Electronic System
Science 333, 838 (2011).
antenna LED
wireless power coil RF coil
temp. sensor strain gauge
RF diode ECG/EMG sensor
0.5mm 0.5cm
undeformed state
stretched
boundary
compressed
Serpentine Functional Units: Non-invasive Sensors,
Wireless Power Supply, Wireless Communications 0.5mm
S
D
G
Si res.
S D G
Si R
0.3mm
Pt CPDMS
cap.
ind.
0.5mm
S
D
G
S D
G
0.3mm
RB
RD
CIN COUT
RIN
ROUT
NMOS
VOUT
VIN
VDD
GND Frequency (GHz)0.0 0.5 1.0 1.5 2.0
Ca
pa
cit
or
S2
1 (
dB
)
-60
-40
-20
0
0.7085nF1.5nF2.204nF2.969nF
Frequency (GHz)0.0 0.5 1.0 1.5 2.0
Ind
uc
tor
S2
1 (
dB
)-30
-20
-10
0
Ind
uc
tor
S1
1 (
dB
)
-15
-10
-5
0
Capacitance (nF)0.5 1.0 1.5 2.0 2.5 3.0
Os
cil
. F
req
. (G
Hz)
0.4
0.5
0.6
0.7
0.8
0.9
0.5mm
Frequency (GHz)0.0 0.5 1.0 1.5 2.0
S11 (
dB
)
-40
-30
-20
-10
0
10
S21 (
dB
)
-120
-90
-60
-30
0
30
S11 fwdS11 rvsS21 fwd S21 rvs
1mm
0.3mm
P N
I
high voltage connection
Si
1 mm
LED
photo- detector
1
3
5
7
10-6
J/m3
Frequency (Hz)10-3 10-1 101 103 105
Ga
in
0.0
0.4
0.8
1.2
1.6
CIN=1F
CIN=220pF
CIN=
Science 333, 838 (2011).
ECG and EMG (Leg and Neck) Recordings
Time (sec)0 5 10 15
Am
plitu
de (
V)
-100
0
100
200
up right
left down
Time (sec)0 5 10 15 20
Am
p. (
V)
-100
0
100
Time (sec)0 5 10 15 20
Am
p. (
V)
-100
0
100EES dry conv.
w/ gel
Time (sec)0.0 0.2 0.4
Am
plitu
de (
V)
-100
0
100
200
Q S
R
base
Time (sec) Time (sec) Time (sec) Time (sec)
up down left right
0 1 2 3 0 1 2 3 0 1 2 3 0 1 2 3
10
100
200
Fre
qu
en
cy (
Hz)
250
150
50
20
20
Fre
qu
en
cy (
Hz)
10
200
10
200
0 10 5 15
active
passive
0 10 5 15
walk stand
walk stand
100
100
Fre
qu
en
cy (
Hz)
Time (sec) 103
Science 333, 838 (2011).
EEG (Forehead) Recordings: Alpha Rhythms
Frequency (Hz)5 10 15 20 25 30
DF
T C
oeff
icie
nt
0
10
20
30
eye close
eye open
103
Fre
qu
en
cy (
Hz)
Time (s) 0 4 8 12 16 20
5
10
20
15
0~10s eye close 10~20s eye open
opening blinking alpha
rhythm
1cm
bare skin
0.5 cm
skin patch
- When large ensembles of neurons fire synchronously, a large electric field is
generated and can be measured on scalp, called Electroencephalography (EEG).
- Alpha range neural activity (8~12Hz) reflects the attention to visual environment.
- When subjects gain visual attention focus, amplitude of alpha oscillation decreases,
while amplitude increases by losing visual attention focus (ex. eye close).
Science 333, 838 (2011).
Suffering Patients Doctors
How to bridge?
Bio-Integrated
Electronics ?
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