applied microstructures corporate overviewen.ultrapro.com.tw/userfiles/files/amst ultrapro mems...

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Applied M ic ros truc tures , Inc .

Copyright © 2010 Applied Microstructures, Inc.

宇燦股份有限公司宇燦股份有限公司ULTRA–PROINTERNATIONAL

Nano-scale Surface Engineering with

Molecular Vapor Deposition (MVD®)

5.28.2010 中国上海

报告人 :　赵先忠john@ultrapro.com.tw

2Copyright © 2010 Applied Microstructures, Inc.

宇灿股份有限公司

• 成立于 1997 年 7 月 .

• 总公司位于台北 , 分公司位于新竹 , 台南 .

• 中国公司总部位于上海 .

• 代理数家欧美半导体设备制造商 .

• 主要的产品为厂务及微机电制造设备 .

• 客户群含盖海峡两岸 , 计有

– 晶圆代工制造商

– 半导体整合元件 (DRAM &CPU) 製造商

– 微机电麦克风 , 微光机电系统 (MOEMS) 製造商等

– 学术研究单位

•

3Copyright © 2010 Applied Microstructures, Inc.

AMST Overview• Applied Microstructures (AMST) provides enabling coating

technology to the high growth markets of MEMS, biomedical microfluidics, inkjet print heads, semiconductor, and nano imprint lithography (NIL)

• AMST develops capital equipment and process services to help our customers achieve their technical objectives

• Molecular Vapor Deposition (MVD®) enables low temperature vapor deposition for anti-stiction, hydrophobic, hydrophilic, biocompatible, protective, or reactive coatings

• AMST currently supports a worldwide installed base of more than 60 MVD® tools including some of the world’s leading MEMS production companies as well as leading Nanotechnology research institutes

4Copyright © 2010 Applied Microstructures, Inc.

Corporate Background• Founded 2003

– Funded by Sierra Ventures, Horizon Venture Partners, Compass Technology Partners

– $13.5M raised

• 2003-2008 R&D and early market development• 2008 – company focus on production customers, volume

manufacturing applications, and new markets

5Copyright © 2010 Applied Microstructures, Inc.

Enabling Products

6Copyright © 2010 Applied Microstructures, Inc.

MEMS Reaching Production Maturity

ExcessPrecursorRemoval(Iso-Octane)

ExcessPrecursorRemoval(Iso-Octane)

WaterRemoval(Iso-Octane)

WaterRemoval(Iso-Octane)

MonolayerDeposit

MonolayerDeposit

Rinse(IPA)

Rinse(IPA)

Surfactant(Ketone)

Surfactant(Ketone)

SurfaceOxidation

(H2O2, etc)

SurfaceOxidation

(H2O2, etc)

FinalRinseMethanol

FinalRinseMethanol

Wet Processing

Glassware Ovens AMST MVD®

7Copyright © 2010 Applied Microstructures, Inc.

•The MVD process creates a controlled chemical deposition within the system chamber

•Conformal films as thin as a single mono-layer are deposited with very low consumption of precursor chemicals

•This system allows the generation of single-layer, multi-layer, and laminate coatings on a variety of substrates

Molecular Vapor Deposition (MVD®)

Precursor ChemicalsDeposition Chamber

AdvantagesExtremely low chemical usage, low cost, low waste (green)Extremely conformal coating down to nanometer scaleLow Temperatures for sensitive materials (<150 C)Precise chemical delivery and layer thickness controlScalable from small to large substrate areasClean room compatible design

8Copyright © 2010 Applied Microstructures, Inc.

The Leader in MEMS Anti-Stiction Coatings• AMST provides anti-stiction and hydrophobic

coating solutions to improve both the manufacturing yield and performance reliability of many MEMS devices

• As MEMS designs become both more complex, and more widely adopted, anti-stiction problems will become more of an issue

• More than 1 Billion MEMS microphones coated by the MVD® process

Stiction is the fundamental property that causes small movable devices to stick to each

other when placed in close proximity -

9Copyright © 2010 Applied Microstructures, Inc.

Other Applications

Inkjet PrinterFace Plate

Nano Imprint Lithography

Inkjet Printer Passivation

Using MVD® Release Film

No Release Film

Hydrophobic Surface

Inkjet PrinterCross Section

Hydrophilic in channels

Ink Droplets

Using MVD® CoatingNo Coating

Cross-section cut for evaluation of MVD® penetration

Microfluidics

AMST coated effectively and uniformly coated entire .66m

long buried channel

Magnified

250 micron cross section

~50 micron nozzle diameter

10Copyright © 2010 Applied Microstructures, Inc.

Product Roadmap2010 2011 2012

R&D

HVM 200mm Wafer

HVM 300mm Wafer

HVM large substrates

MVD100EMVDPathfinder (300mm single wafer)

MVD150

MVD200 – market specific configurations

MVD300

G4000*

* Under market evaluation

11Copyright © 2010 Applied Microstructures, Inc.

Worldwide Locations & Regional Installs

Headquarters

36

# # of MVD® in region

5

9 41

25

Sales Representatives

Demo Lab

12Copyright © 2010 Applied Microstructures, Inc.

Worldwide Installed Base & Support

AMST currently supports a worldwide (Asia, Europe, Middle East, and North America) installed base of more than 60 MVD® tools including some of the world’s leading MEMS production companies

13Copyright © 2010 Applied Microstructures, Inc.

Process Services and Applications• Expertise ranges from new process development to

outsourced productionProcess Services Lab•Demonstration of AMST coating performance on actual customer parts•Tuning of customer recipes (new applications, process transfer, process evolution)•Pilot production support•Production overflow•Capable to process wafers in both U.S. and in Japan

AMST/SVTC’s partnership for Anti-Stiction Process Services

14Copyright © 2010 Applied Microstructures, Inc.

Sampling of Customers• MEMS• Packaging• Nanoimprint Lithography• BioMedical• Microfluidics• Inkjet• R&D/Universities

Due to issues of confidentiality, AMST does not disclose the names of ourindustrial customers

15Copyright © 2010 Applied Microstructures, Inc.

Summary• Molecular Vapor Deposition (MVD®) enables low

temperature vapor deposition for anti-stiction, hydrophobic, hydrophilic, biocompatible, protective, or reactive coatings

• Applied Microstructures (AMST) provides enabling coating technology to the high growth markets of MEMS, biomedical microfluidics, inkjet print heads, semiconductor, and nano imprint lithography (NIL)

• AMST currently supports a worldwide installed base of more than 60 MVD® tools

w w w .appliedms t.c om

17Copyright © 2010 Applied Microstructures, Inc.

连络我们

• 宇灿股份有限公司 Ultra-Pro International Co., Ltd.

台湾台北县汐止市新台五路一段 79 号 13 楼之 10

联络人 : 胡卉君

电子邮箱 : teresa@ultrapro.com.tw

电话 :886-2-86983338 x 825; 传真 :886-2-86983339

• 上海宇灿国际贸易有限公司

上海市浦东新区东方路 1359 号 4B

联络人 : 黄柏斐

电子邮箱 : kevin@ultrapro.com.cn

电话 : 86-21-61524960-2; 传真 : 86-21-61524955