amec company introduction - skku
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© 2017 AMEC All rights reserved. Confidential.
AMEC Company Introduction 2017.4.10
© 2017 AMEC All rights reserved. Confidential.
© 2017 AMEC All rights reserved. Confidential.
AMEC Headquarter in Shanghai
Established in 2004, AMEC occupies 28,000 m2 , including a 1,000 m2 Etch Lab, 4,500 m2 manufacturing clean room and 6,500 m2 warehouse. AMEC now has 580 employees with 10 nationalities and 18 VPs with 6 nationalities.
AMEC Video
© 2017 AMEC All rights reserved. Confidential.
Class 100
AMEC Building 1- Plasma Etch Lab (1000m2)
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AMEC Bldg-2 Phase 1 Manufacturing Clean Room (3000m2)
Sub assembly line Chamber assembly bays
Bldg-2 Phase 2 Additional MF Clean Room 1500m2 will be ready in 2017
3
Final assembly & Test Bay
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AMEC Building-2- Storage Area (6500m2)
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Taiwan Chunan
AMEC MF Center
Started in 2011
Korea Osan
Application Center
Started in 2013
AMEC MF Center in Taiwan and App Center in Korea
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AMEC Investors (Dec/2015)
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AMEC Cayman LP
AMEC 中微国际 International
Japan Region
SEA Region
Korea Region
In Singapore
中微(上海)
AMEC
AMEC is Being Restructured to Set Up Shanghai Holding
8
Taiwan Region
China Mainland
AMEC Wisetron
Sino IC SHSVC Walden Qualcomm XC PE CICC
US Region
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SEMI Distinguished Veterans Support AMEC
Koichi Suzuki Advisor Former Member of the Board of Toshiba and President of Toshiba Semiconductor Group
Albert Yu, Advisor Former Senior VP of Intel
Lip-Bu Tan Board Director Chairman of Walden International and CEO of Cadence
Joe Bronson Advisor Former Member of President Office and CFO of Applied Materials
Larry Yoshida Board Director Former President of Tokyo Electron
Susan Overstreet Advisor Former VP of Applied Materials
Dariush Rafinejad Advisor Former VP of Applied Materials
Dave Crivelli Advisor Former HR VP Novellus
Jane Evans Ryan Advisor Principal of Genuity, Advisor
© 2017 AMEC All rights reserved. Confidential.
AMEC Market Development Strategy
Semi
Other Micro-Fab
AMEC serves high end etch/CVD
equipment market
Semi Front End $5B
PK, LED MEMS Will be >$1B
LED Power Device Will be >$1B
Other Micro Fabrication
MOCVD
TSV
CCP Etch ICP Etch
More Etch & CVD
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AMEC Etch and MOCVD Become WW Top Tier Products
CCP Etcher
> 380 Stations
Run >40M wfs
Qualified for 10nm
Selected for 7nm
ICP Etcher MOCVD
New Product with
adv. design
Start Beta eval at
China leading
foundry
1st Gen qualified at 8 China LED fabs
Processed 700K wfs 2nd Gen (28”)
qualified with volume order
TSV/MEMS
>90 stations for
CIS/MEMS etching
Production at Europe
leading MEMS Fabs
VOC
• Qualified at China leading LCD fab
• Will get volume order
AMEC is focusing on high end critical products in the fields of etch and thin film.
© 2017 AMEC All rights reserved. Confidential.
2004 ~2007 2008 2009 2010 2011 2012 2013 2014
成立
AMEC Customer Portfolio – 30 Customers at 39 Fabs
2015 2016
© 2017 AMEC All rights reserved. Confidential.
AMEC Etch and MOCVD Install Base Growth Momentum
AMEC’s D-Etch, TSV/MEMS Etcher and MOCVD products, including 753 chambers and stations, are estimated
to be shipped to 39 FABs worldwide. They produced 40M wafers with stable device yield and high uptime.
22 66 104 131
182 260
350
465
565
6 12 24 60 80 88 100 114 4 11 13 17 74
22 72
116 155
246
351
451
582
753
0
100
200
300
400
500
600
700
800
0
100
200
300
400
500
600
2009 2010 2011 2012 2013 2014 2015 2016 F'2017
AMEC Install Base by Product (Process Stations) 2009 thru 2016
D-Etch
TSV/ICP
MOCVD
Total
59%
43%
34%
29%
28%
29%
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AMEC Etchers and MOCVD Installed Base ( by 12/ 2016 )
Taiwan Fabs = 10 Stations = 290
Singapore Fabs = 2 Stations = 18
China Fabs = 22 Stations = 226
D-
Etch,
12
TSV,
6
Korea Fabs = 2 Stations = 40 D-Etch,
40
Europe Fabs = 2 Stations = 4
D-
Etch,
145
TSV /
ICP,
64
MO,
17
D-Etch,
264
TSV, 26
Russia Fabs = 1 Stations = 4 D-Etch, 4
TSV,
4
39 Production Fabs
Product D-ETCH TSV / ICP MOCVD TOTAL
Stations 465 100 17 582
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AMEC Dielectric CCP Etch Products
Primo D-RIE® Provide innovative solutions for semiconductor device fabrication at 65/28nm nodes
Primo AD-RIE® Provide innovative solutions for semiconductor device fabrication at 28/15nm nodes
Primo SSC AD-RIETM
Provide innovative solutions for semiconductor device fabrication at 20/10nm nodes
Primo iDEATM
Provide innovative integrated solutions for etch and photo-resist removal
Dielectric etch tools have processed over 40 million wafers with consistently stable yield
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Primo SSC-ICP Platform- High T-put, Small Footprint
Platform Foot Print
T-put: >180WPH Mechanical T-put for 6PMs Foot print: >40% Smaller than Competitors
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Adv. Gate & STI
Primo nanovaTM Target Applications
Target Applications: Gate, STI, DPT/QPT, Metal HM, FinFET, Vertical NAND
FinFET
DPT / QPT
DD Metal HM
Vertical NAND
As printed Post QPT
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AMEC 200mm & 300mm Primo TSV Etcher
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AMEC Prismo D-Blue® MOCVD for LED and GaN Power Devices
1st Gen: 19 inch
2nd Gen: 28 inch
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AMEC Has More Than 350 Suppliers Globally
Swagelok Brooks Rohm & Haas Durex FTS GreeneTweed Thermofusion Yarde BOC Valex Persimmon MKS UCT Ferrotec-US KLA CAS Morgan Ceramic
US
SKC Solmics Worldex KSM CoorsTek KoMiCo Moreco Robotstar Ilsenneo
Osaka Shinko Rorze Techno SMC Sanwa Pearl NGK Mitsui YDK MPC Horiba Fujikin Mirapro Nikkoshi TOTO NDK NHK TDK Kyocera HITACHI
Foxsemicon MIC Ares Green Chenfull SIC SCH Kova Calitech Forcera Zhongxing
越南
Global CyberSoft Rorze
Watlow Eratech ETL Cellergy CEI Professional Plastic
Japan
South Korea
Taiwan
Singapore
Vietnam
Beiyu Swagelok ENI (MKS) Injet Foxsemicon Ferrotec Techno Winway Xinya Highlight UCT TT KoMiCo Tocalo GUHE Mitsui Antai Sprint Tech Mirapro Dongda Fiesta Shijia Tianfu Dihui Bei Optic
Alcatel VAT Comet Xycarb
China
Europe > 90 Major Suppliers
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AMEC Has Filed Over 1,000 Patents with 433 Granted
Gold Award 2013 by WIPO (World
Intellectual Property Office) and SIPO
(State Intellectual Property Office of
the People’s Republic of China)
The 1st Prize - Invention Patent
Award by Shanghai Municipal
Human Resources and Social
Security Bureau and SIPO
Excellent Patent Award 2014
by WIPO and SIPO
Plasma Etch (In Process + Granted) MOCVD (In Process + Granted)
China 338 + 144 38 + 55
Taiwan 131 + 133 22 + 44
JP 7 + 7 0 + 7
KR 5 + 13 5 +10
US 16 + 15 15 + 5
PCT filing 0 2 + 0
Sub-total 497 + 312 82 + 121
Total 579 + 433 = 1012
© 2017 AMEC All rights reserved. Confidential.
THANKS