advanced motion systems for defense, aerospace, and ... · advanced motion systems for defense,...

60
Advanced Motion Systems for Defense, Aerospace, and National Security Dedicated to the Science of Motion www.aerotech.com Motion Simulators Advanced System Controls Test Systems Vacuum Systems Prototype Development Systems

Upload: others

Post on 24-Jan-2020

12 views

Category:

Documents


0 download

TRANSCRIPT

Advanced Motion Systemsfor Defense, Aerospace, and National Security

Dedicated to theScience of Motion

www.aerotech.com

Motion Simulators

Advanced SystemControls

Test Systems

Vacuum SystemsPrototype DevelopmentSystems

2 www.aerotech.com

Test Your Ideas in the LabHigh-Precision Rotary and Linear Motion Components and Systems

Aerotech offers the most diverse line of direct-drive rotary andlinear systems utilizing air or mechanical bearings:

• Rotary stages

• Linear stages

• Goniometric cradles

• Optical mounts and gimbal systems

• Single- and multi-axis motion simulators

Many of these systems are offered with sub-arc-second andnanometer accuracy, and system bandwidths of up to 200 Hz.

Make Your Products in the FactoryAdvanced Motion Simulators and Electro-Optic Motion Systems

Aerotech produces many single-axis rotary systems, multi-axismotion simulators, and multi-axis gimbal systems for opticaltesting, gyro testing, inertial navigation testing and calibration,and target tracking.

Aerotech controls can synchronize up to 32 axes to handlethe most complex NDT scanning systems, laser processingmachines, or today’s Ground Support Equipment applications.

For over 40 years Aerotech has manufacturedthousands of precision positioning and motion systemsfor businesses and organizations that require cutting-edge technologies and innovative systems. Defensecontractors depend on Aerotech for single- and multi-axis motion simulators, precise 2-axisazimuth/elevation gimbals, pedestals, vacuum-ratedmotion systems, and general purpose linear and rotarysystems.

Today Aerotech offers a complete line of commercialoff-the-shelf (COTS) motion control components andsystems for the defense and aerospace industries. Oursolutions reduce overall program development timeand minimize development cost. We provide custom-engineered solutions based on our extensive systemengineering knowledge and core motion technologies.

All Aerotech products are designed and manufacturedat our Pittsburgh, PA headquarters.

AerotechWhat We Offer

Our products are used in the lab, on the production floor, and in thefield. We offer many products for high-vacuum operation.

Reach the StarsVacuum-Compatible Motion Systems and Celestial and Satellite Tracking Mounts

Aerotech has provided thousands of axes for highvacuum (up to 10-7 torr) and cleanroom (up to ISOClass 1) environments.

Aerotech specializes in configuring our positionerswith low outgassing materials to provide automationin space-rated environments.

Prove Your Equipment in the FieldPrecision Pointing Systems and IP66-Rated Gimbals and Pedestals

Range tracking, electro-optical beam steering, and surveillanceapplications regularly use Aerotech rotary systems.

Many of our systems can be qualified for operation from -20°C to 70°C.

Our direct-drive gimbals provide highly accurate pointing andtracking systems. Customers use our systems to field-qualify theirsensors, lasers, and antenna systems.

Our talented and dedicated engineering staff hasexpertise in all core motion technology areas:

• Precision machine design

• Vibration and controls

• System modeling and characterization

• Magnetic circuit design

• Power electronics design

• Servo systems

• Software development

Our linear and rotary air- and mechanical-bearingstages can be assembled into multi-axis systems forpayload positioning to sub-arc-second accuracy.Typical linear systems range in travel from 25 mm to1.5 meters. Load capabilities of linear and rotarysystems are up to 2200 lb (1000 kg). Our facilitiesinclude temperature testing capabilities and largesystem ISO 14644-1 Class 6 (Federal Standard 209EClass 1000) and cell specific ISO Class 5 (Class 100)cleanroom facilities.

Aerotech is committed to continuing the development ofnew motion technology and products to better servethe defense, aerospace, and national security markets.

3

4 www.aerotech.com

WORLD HEADQUARTERSAerotech, Inc.101 Zeta DrivePittsburgh, PA 15238Ph: 412-963-7470Fax: 412-963-7459Email: [email protected]

Aerotech, Ltd.Jupiter House, Calleva ParkAldermaston, Berkshire RG7 8NN, UKPh: +44-118-9409400Fax: +44-118-9409401Email: [email protected]

Aerotech GmbHSüdwestpark 9090449 Nürnberg, GermanyPh: +49-911-9679370Fax: +49-911-96793720Email: [email protected]

Aerotech KK17-25 1-chomeKitahoncho Funabashi-shiChiba-ken, 273-0864, JapanPh: +81-47-489-1741Email: [email protected]

Aerotech ChinaUnit 3328, 33/F,China Merchants Tower,168 - 200 Connaught Road Central,Hong KongPh: +852-3793-3488Email: [email protected]

Copyright © 2010, Aerotech, Inc.Information in this brochure issubject to change without notice.

ContentsAerotech: What We Offer 2

Motion Simulators

Advanced Motion Simulators 6

Single Axis 7

Two Axis 9

Three Axis 11

Motion Simulator GUI 12

Advanced System Controls

Motion Simulator Controller 15

Advanced System Controls 16

LabVIEW® 18

Linear Amplifiers 19

PWM Amplifiers 20

Test Systems

Electro-Optics (Optronics) 22

Rotary and Linear Sensor Testing 26

High Load-Capacity Stages 27

Vacuum Systems

Vacuum Systems 29

Linear and Rotary Testing 30

High Load Capacity 31

Prototype Development Systems

Prototype Laser and Microwave Beam Steering Systems 33

Solar Tracking and Telescope Systems 34

Beam Director 35

Sensor Pointing 36

High-Performance Rotary Stages, Linear Stages, Gantries and Nanopositioning

High-Performance Rotary Stages, Linear Stages, Gantries, and Nanopositioners 40

Custom Engineered Systems 52

About Aerotech

Aerotech at a Glance 54

Capabilities in Other Markets 56

Awards and Recognition 58

Worldwide Training and Support 59

MotionSimulators

6 www.aerotech.com

Advanced Motion SimulatorsAerotech Motion Simulators providesingle- and multi-axis position, rate,and acceleration profiles for testingof gyroscopes, accelerometers,inertial measurement units (IMU),inertial navigation systems (INS),attitude heading reference systems(AHRS), and fiber-optic gyros (FOG).

• High accuracy, direct-drivemotion simulators

• No cogging

• High torque

• Mechanical or air bearings

• Real-time data collection

• Position, rate, and oscillation modes

• Easy user-profile importing

• Windows®-based programming

• Slip-rings or twist cables feed UUTsignals/power

• Solutions range from economical single-axissystems to high-performance three-axis systems

7

Testing and CalibrationSystems for Accelerometersand Inertial Components andSystems

Aerotech rotary motion simulators aredesigned to induce angular rates,accelerations, and positions for testingof inertial navigation systems (INS),accelerometers, gyroscopes, avionics,inertial measurement units (IMU),attitude heading reference systems(AHRS), fiber optic gyros (FOG), andstabilized systems.

Precision Direct-Drive RotaryPosition and Rate Tables

• High capacity angular contactbearings or air bearings

• Highly accurate closed-loop control

• Brushless, slotless motor for smoothmotion with no cogging

• Large selection of integrated, low-noise slip rings for customer signalsand power

• Multiple motor types for high speed or high-torqueconfigurations

• Excellent error motion performance

• Dual liquid or gas ports

• Low maintenance design

• Position resolution to 0.000006° (0.1 μrad)(0.02 arc sec)

Motion SimulatorsSingle Axis

ARMS-260

Aerotech products are capable of testing today’s top inertial navigation systems.

ARMS-200

ARMS-150

8 www.aerotech.com

Single-Axis ARMS Series Rate Tables

• Single-axis configurations include optional free standing, high stiffness post with leveling feet

• Reconfigurable for continuous or limited travel

• Custom slip-ring options available

• Vertical or horizontal orientation options

• Different tabletop size options

PC and Npaq or HLe rack-mountcontrol operation via AerotechMotion Simulation package

TiltMotion

UUT power and signalsroute through slip rings

Mount multiple UUTson our large tabletopsfor simultaneous testing

ARMS-260

• 500 lb (227 kg) payload capacity

• Unloaded acceleration >20,000°/s2

• Minimum rate 0.001°/s

High Accuracy Single-AxisRate Table with Tilt Table

• Allows rate table performance atmultiple inclination angles

• Mounted to a gear-drive rotary fortilt motion

High speedrotation oroscillation

Motion SimulatorsSingle Axis

9

Motion SimulatorsTwo Axis

Two-axis motion simulators are usefulfor simultaneous axis testing of position,rate, and acceleration sensors.

Two-Axis Rate Table withIntegrated Electronics

• Continuous rotation of both axes

• Smooth motion from non-coggingbrushless, slotless motors

• Power and signalslip rings

• Two rotating gas/liquid ports

• Machine base includes motion controller, linear digital amps, and ESTOP safety controls

Accuracy plotshowing better than±1 arc-sec accuracy(±4.85 μrad)

Continuous Yaw

ContinuousRoll

ESTOPremote forflexible safetylocations

Linear amplifiers andESTOP control integratedinto rolling rack-mountshelf to minimize floorspace requirement

Remote or integratedPC options

Gyro and inertialnavigation testing

10 www.aerotech.com

Two-Axis Direct-Drive MotionSimulator

• Azimuth over elevationconfiguration

• 200 lb (91 kg) load capacity

• Optional slip-rings

• ±5-10 μrad positioning accuracy

• 0.001 μrad resolution for highvelocity stability and low jitter

• 100 mm - 325 mm aperture option

• Limited or continuous travel

Accuracy plot showing better than ±1 arc-sec accuracy (±4.85 μrad)

Continuous Yaw

ContinuousYaw

ContinuousPitch

Largepayloadcapacity

Adjustablecounter balance

ContinuousPitch

This motion simulator configuration centerspayload at the intersection of the rotary axesfor true rotation with no linear translation.

Motion SimulatorsTwo Axis

11

Motion SimulatorsThree Axis

Three-axis motion simulators provideroll, pitch, and yaw simultaneousmotion for real-world angular velocity profiles.

• Smaller than traditional three-axissimulators to accommodate today’sminiature MEMS gyros in a muchsmaller footprint

• Modular design based on theARMS rate tables

• Continuous or limited travel options

• Pedestal options

• High torque three-axissystem for testing INUand autopilot packages

• Continuous or limitedtravel options

• Base weldment optionsfor free-standingconfiguration

Each motionsimulator is testedfor accuracy andtilt errors. Typical tiltis below10 μrad.Typical accuracy is±5-10 μrad.

Continuous Roll,Pitch, and Yaw

12 www.aerotech.com

Motion SimulatorsMotion Simulator GUI

Aerotech’s Motion Simulator software is an easy-to-use Windows®-based program for creating simpleand advanced motion stimuli for testing andcalibrating customer inertial sensors and systems.The Aerotech Motion Simulator software includes allcontrols for manually or automatically running 1-3axes motion simulations. The GUI provides a userinterface and programming environment thatrequires no third-party development software. Ifcustomers prefer, our motion controllers do haveLabVIEW®, Microsoft .NET, or C drivers along withsample code for easy programming in familiardevelopment environments.

Key Features:

• User-friendly Windows®-based graphical userinterface

• Operate 1,2,3 axis motion simulators

• Graphical motion profile PVAT (Position, Velocity,Acceleration, Time) importing

• PVAT GUI profile generation and editing

• Position Synchronized Output for real-time eventtriggering

• Trajectory tracking from Ethernet, analog, orWindows® program inputs

• Frequency response mode allows input sinesweep and UUT performance tests on customerdevice

• Iterative Learning minimizes position error

• GUI remote client-server mode allows parallelprocessing capabilities and control via Ethernetnetwork

• Harmonic Cancellation optimizes motion positionerrors generated by sinusoidal motion

• No dependence on third-party motion controller,amplifier, or software suppliers

Main screen provides manual control

Program screen provides user programming environment

Track screen allows external signal selection for tracking

13

Aerotech Motion Simulator – The Integrated,Easy to Use, Graphical Trajectory Generation,Data Analysis, and Enhanced MachinePerformance Toolkit

Features and Benefits

• Learning algorithms designed to reduceposition error between runs let the systemimprove the move and settle results.

• Profile Mode allows users to import anexisting trajectory from MATLAB® or otherprograms consisting of position, velocity,and/or acceleration state vectors from anexternal file to simplify profile input.

• Plot trajectories and use analysis tools in thetime or frequency domain to give detailedmotion evaluation.

• Create and modify multi-axis trajectoriesusing predefined building blocks to providerapid motion prototyping.

• Overlap multiple runs of a trajectory toeasily see how program changes modify themotion.

• Create and export a trajectory to anAeroBasic™ program for optimized motionfunction. These saved functions can becombined to run complex motion simulations.

• Perform data analysis such as FFT, max, min,average, rms, and standard deviation froman existing trajectory for diagnosing systemperformance.

• Data input file formats include Excel, CSV, orMATLAB®. If only partial trajectoryinformation is known, such as position versustime or acceleration versus time, MotionSimulator can calculate the other requiredstate variables.

Profile screen provides import or generation of motion profiles

Frequency response screen allows UUT frequency responsetesting

I/O screen provides I/O monitoring and control

AdvancedSystemControls

15

Advanced System ControlsMotion Simulator Controller

Hardware Features

• Rack-mount controllers

• Tall and short rack options

• Emergency stop safety relays to remove power and stop motion

• Optional discrete drives allow modular controller integration into existingcustomer equipment

• 115 VAC, 200 VAC, 208 VAC, or 230 VAC single-phase input

Motion Controller

• Single PC operation handles all interfaces

• User easily switches between manual and program control

• Digital controller closes PID loops at 8 kHz

• Servo-loop transmission and autotuning are standard features

• Programmable digital filters to eliminate system resonances and improvebandwidth

• Motion controller can be expanded to operate up to 32 axes so additionalmotion requirements can be handled in one program and one integratedhardware solution

Digital Drives

• Aerotech advanced controls provide 65536x analog encoder multiplication

• Digital amplifiers simplify electrical connections and minimize unwantedelectrical noise in critical signals

• Easily retrofit to run motion simulators with brush/brushless motors, andinductosyns, optical analog or digital encoders, or resolver feedback

• Linear or PWM amplifiers

• Real-time digital I/O, 16-bit analog inputs, 18-bit analog outputs

• High-speed position latching for 50 ns angle capture

• 1D, 2D, 3D Position Synchronized Output provides high-speed vector-basedevent triggering based on actual simulator position

• Ethernet, USB, RS-232 serial bus

Advanced System ControlsSoftware

Use the libraries and example code todevelop your own front-end andapplications with .NET, C#, C, andLabVIEW®.

• Easy setup with calculators andautotune routine

• Use state-of-the-art IDE fordeveloping your motion program

• Second-to-none diagnostics toolkit

• Conditional 2D error plotting

• Up to 32 tasks

• PC-based

• RS-274 G-code

• Advanced features for demandingapplications

• Up to 4 tasks

• Stand-alone 1- to 10-axis controller

• Versatile, cost-effective, coordinated motion

• PWM or linear drives (10-150 A peak)

Programming Interface

GSE: Ground SupportEquipment• Save time and money with

reconfigurable ground supportequipment

• Windows®-based motion controllersprovide simple, user-friendlysoftware in LabVIEW®, .NET, C, C#,AeroBasic™

• Position Synchronized Outputtrigger for laser, eddy current, orultrasonic sensor control

• Easily configured for brushless,brush, and stepper motors

• Reads resolver, inductosyn,incremental, and absolute encodersignals

• Capture all motion performanceduring testing for quality control

• Loop transmission frequencyresponse testing built-in

Autotune

• 1 to 32 axes of coordinated motion

• Scanner control for marking

• Tightly integrated laser functionality

• Retrofit package

• Analog and digital I/O

16 www.aerotech.com

Automation 3200

Integrated Development Environment

Ensemble

Linear and Rotary Servoand Torque Motors

Loop Transmission

Interfaces

• Ethernet/IP™

• Modbus®/TCP

• DeviceNET

• Ethernet TCP/IP

• USB

• RS-232

• GPIB

• Elegant, economical, single-axiscontroller

• Stand-alone

• PWM or linear drives(10-150 A peak)

Parameter Editor

Accessories

• Linear amps

• ESTOP

• Rack-mount configuration

• Rack-mount PCs

• Brushless, brush, or stepper motors

• Desktop or panel mount

• .NET, C++, or LabVIEW®

• GPIB, Ethernet, USB

• .NET, C#, LabVIEW®

• Ethernet, USB

17

Soloist

18 www.aerotech.com

Advanced System ControlsVirtual Instruments for theLabVIEW® Environment

All Aerotech motion controllers haveintegrated LabVIEW® VIs and LabVIEW®

example code for powerful motioncapabilities in the Windows® LabVIEW®

environment. The LabVIEW® multi-axisHMI front panel easily integrates into yourapplication. Our user-friendly VI libraryincludes tools and examples for initializingthe controller, executing simple or complexmove functions, status checking, errorchecking, and fault handling. NowLabVIEW® programmers have a toolboxof advanced motion VIs for rapidprototype work.

These VIs can be used as building blocksor as stand-alone VIs to perform varioustasks such as initialization, motion, andstatus/position updates.

The VIs are organized into the followingcategories:

• Initialization Functions• Analog and Digital I/O Functions• Motion Functions• Error Handling Functions• Parameter Functions• Status and Position Functions• Global Data Functions• Run Program Functions• Utility Functions• Get and Set Variable Functions

Aerotech’s VIs conform to NationalInstruments’ LabVIEW® programmingstandards. Each VI is simple and intuitiveto use.

LabVIEW® multi-axis HMI front panel

HMI diagram

LabVIEW® simple 2-axis VI

Vector linear move diagram

19

Advanced System ControlsLinear Servo Amps Now Feature Resolver or Inductosyn Interfaces for High Accuracy and Ultra-Low Jitter Operation

The HLe and Npaq linear servoamplifiers are for motion controlapplications that require highaccuracy drives with no PWMswitching noise and zero deadband.Because the HLe and Npaq linearservo amplifiers have no PWMswitching noise, they do not induceelectrical noise into sensitive electricalmeasurement devices. Our linearamplifiers have no dead band, andprovide smooth current throughmotion direction reversals.

Resolver or InductosynInterface Provides HighAccuracy and Ultra-Low JitterOperation for Direct-DriveAZ/EL and Rotary Positioners

Aerotech’s linear digital amplifiers arenow available with an optional one-or two-channel resolver or inductosyninterface to read position fromabsolute encoders. The Npaq withlinear amplifiers can have sixchannels of resolver, inductosyn, oroptical encoder feedback. These newfeatures, when combined with thesmooth current inherent in a linearamplifier, make the Aerotech motioncontrollers ideal for high accuracyposition or velocity tracking withdirect-drive rotary positioners that useresolver or inductosyn feedback.These features let customers trackobjects with high accuracy and lowjitter — critical performance concernsin applications such as laser steering,target tracking, and star tracking.

Linear Amplifier Advantages

• No switching noise

• Zero dead-band

• ±40 V, ±60 V, and ±80 V outputvoltage

• Peak output current up to 20 amps

• Continuous output current up to 10 amps

• Software selectable power amplifierbandwidth

Ensemble HLe

Ndrive HLe

Soloist HLe

Npaq

20 www.aerotech.com

Advanced System ControlsPWM Amplifiers, 10 A - 150 A Output

Aerotech PWM digital servo amplifiers arecapable of controlling brushless, DC brush,and stepper motors over a wide range ofoperating voltages and currents. Based on acommon architecture, these amplifiers performboth current- and position-loop closuresdigitally.

The use of high-performance double-precisionprocessors allows these drives to generateultra-smooth motion profiles. Servo systemresponse is optimized with the use of up toeight second-order loop-shaping filters, precisetime-aligned feed-forward and otherproprietary techniques with loop closure ratesup to 20 kHz.

The PWM family is offered in a number ofhighly efficient versions. The MP is a lowpower, small footprint PWM drive ideal forspace-sensitive applications. The CP is amedium-power PWM drive capable of runningdirectly from AC mains voltage and isoptimized for cost-sensitive applications. TheHPe is the highest performance PWM driveproviding a host of features not available onthe other PWM drives, and is available inoutput current ranges from 10 A to 150 Apeak.

Options for Aerotech PWM amplifiers includeintegral encoder interpolation, one- to three-axis Position Synchronized Output (PSO),automatic brake control, digital and analogI/O expansion, absolute encoder interface,and one- or two-channel resolver interfaces.An optional dedicated Ethernet port isavailable on the HPe drives for connection tothird-party I/O expansion devices.

Ensemble MP

Soloist CP

Ndrive HPe

Test Systems

Test SystemsElectro-Optics (Optronics)

Direct Drive, Two-AxisAzimuth/Elevation Positioner

• Limited or continuous azimuth andelevation travel

• ±10 μrad accuracy; 10 μradorthogonality; 0.05 μrad resolution

• Optional axis brakes andcounterbalances

• High speed/high torque for rapidmotion capability

• One-sided elevation axis for easypayload loading

These high-accuracy motion systemsare designed for superior multi-axisangular testing and calibration ofelectro-optic sensors, missile seekergimbals, satellite sensors, inertialnavigation guidance units, as well asbeing used as target-tracking gimbalmounts. With our advanced controlsand software, customers can rapidlyintegrate and test their products withthese systems. Beam-directorconfigurations are possible with100 mm to 325 mm clear aperture forhigh-energy beam pointing and testing.

Features and Benefits

• High accuracy

• Repeatability

• Direct drive

• Smooth motion

• High speed

• Non-cogging

Large Aperture, Two-AxisAzimuth/Roll Positioner

• Direct drive

• ±10 μrad accuracy

• 0.03 μrad resolution

• 100-325 mm apertures available

• Azimuth slip ring; limited orunlimited travel available

Unlimited or±200 deg travel

Yaw

RollLarge roll apertureallows payload to bemounted inside roll axis

Brake

Yaw

Pitch

22 www.aerotech.com

High-Load Capacity SensorTesting Positioner

• ±14.5 urad accuracy per axis

• Air or vacuum versions available

• Up to 400 lb (182 kg) load capacity

• Limited travel AZ; continuous orlimited travel EL

• 0.005 μrad resolution allows super-fine stepping and excellent repeatability

Electro-Optic SensorCalibration Gimbal

• 2-axis direct drive

• 300 mm FSR mirror

• 0.025 μrad resolution

• ±10 μrad accuracy

High Accuracy, Direct-Drive,Two-Axis Positioner

• Two-axis positioner

• AZ ±170° travel

• EL ±170° travel

• ±7 μrad accuracy

• ±2.5 μrad repeatability

Yaw

Pitch

Pitch

Yaw

Mirrorface atcenter ofrotation

Foot allows electronics orcounterbalance mounting

Base plate allowsbreadboard mounting

Missile accuracydepends onseeker andnavigationsystems. Ourgimbals are usedto measure andcalibrate thosesystems.

We supplyfullsystems...

...or rack-mountdrives tooperate ourpositioners

Our gimbals are used to test andverify missile guidance systems.

Large apertures of 100 to 325 mmfor cables, optical paths, sliprings, or payload mounting

23

Phot

o: C

ourte

sy o

f DO

D

Photo: Courtesy of D

OD

We test and calibrate mission critical technology. Engineers worldwide depend on Aerotech test and calibrationsystems for motion accuracy and reliability in verifying critical hardware readiness, such as systems used on UAVs.

High Accuracy, Two-Axis, Direct-Drive Gimbal Mount

• Continuous 360° rotation of both axes

• High axis-positioning accuracy and repeatability using inductosyn feedback

• ±5 μrad accuracy; 0.26 μrad resolution

• Low error motion and axis orthogonality

• Direct drive, brushless, slotless servomotors

• Cog-free design for outstanding velocity stability

• Thermal stability better than 0.4 μrad/°C

• Accommodates loads up to 500 mm diameter

• Vacuum-compatible versions

Ultimate Bearing Precision, Two-Axis, Air-Bearing Motion Simulator/Positioner

• Direct drive, brushless, slotless motors

• ±10 μrad accuracy

• Cleanroom compatible

• <3 μrad tilt error per axis

• 5 μrad repeatability

• 300 mm aperture

• 120 nm axial error motion per axis

• 170 nm radial error motion per axis

AOM360D

Test SystemsElectro-Optics (Optronics)

24 www.aerotech.com

AntennasInertial Navigation Systems

Electro-Optic Sights

Nose Cameras

Position Sensors

Photo: Courtesy of D

OD

Front Surface Reflecting Mirror Gimbal

• Mirror face is at the AZ/EL center ofrotation for minimal optical path error

• AOM gimbal EL axis with ALAR-100/-150AZ axis

Direct-Drive, Two-Axis Gimbals

• Continuous 360° rotation ofazimuth and elevation includingbuilt-in slip ring

• High-accuracy angular position andrate capability

• High axis stiffness for precisepointing

• Direct drive, brushless servomotorsresult in zero backlash

Worm-Gear Drive AZ/EL with Counterbalance

• Direct encoder for ±12 μradrepeatability

• ±50 μrad accuracy with directencoder

• Economical solution with goodperformance

• 10 to 250 lb (4.5 to 114 kg)load capacity Mechanical-Bearing,

Worm-Driven Rotary Stage

• Continuous 360º rotary positioning

• Precision worm-gear-drive foroutstanding accuracy andrepeatability

• Includes brushless servomotor

• ±73 μrad accuracy unidirectional

• ±15 μrad repeatability unidirectional

• 130 lb (59 kg) load capacity

Low profile AMG LPfor loads up to 200 mm in diameter

Heavy duty AMG forloads up to 600 mmin diameter

25

Ultra-Precise, High Accuracy,Heavy Load, Direct-Drive, Air-Bearing on Isolation System

• ABRT-400 air-bearing

• Used for testing rotary stages,motors, resolvers, encoders,bearings

• ±2.5 μrad accuracy

• 1.5 μrad tilt error

• 300 lb (136 kg) load capacity

• Passive air-isolation base

• 70 nm axial/radial error motion

Resolver/Encoder Tester

Rotary Stage Tester

Bearing Tester

High Accuracy AZ/ROLL forAngular Feedback DeviceTesting

• Roll axis has ±200° limited travelfor full 360° testing

• AZ axis has continuous or limitedtravel

• 100 lb (45 kg) load capacity

• Less than ±10 μrad accuracy peak-to-peak over full travel range

• Aerotech’s high-accuracy rotarystages can be used in single- ormulti-axis configurations.

Test SystemsRotary and Linear Sensor Testing

Ultimate accuracy with minimumtilt error: ±2.5 μrad accuracyand 1.5 μrad tilt error

Large aperture allows manypayload configurations

• UUT in aperture

• Cables through aperture

• Optical path throughput

26 www.aerotech.com

Test SystemsHigh Load-Capacity Stages

High-LoadVertical Stage

• Vertical stage

• 1000 lb (455 kg)load capacity

• No back-driving

• Adjustableelectrical limits

ATS0500 Heavy-Duty XYZ

• Good for large payloads

• 250 lb (114 kg) load capacity

• Up to 1 meter of travel in all directions

• Bellows provide dirt shield

• Cleanroom or Vac 10-6 torr compatible

Large Capacity, Heavy Duty, XYZSystem

• 500 lb (227 kg) load

• 200 nm stepping capability

• Large capacity

• 4 nm resolution directencoders

• Cleanroom compatible

High Load, Ball Screw, XY Linear Stages

• Payloads up to 1500 lb (682 kg)

• Optional linear encoders for high accuracy andrepeatability

• Cleanroom or Vac 10-6 torr compatible

Five Axis, XYZ,Pitch and Roll

• Integrated cablemanagement

• Direct-drive,high accuracy

• Pneumatic verticalcounterbalance

High Load X/Theta

• 350 mm travel

• Continuous rotation

• 1500 lb (682 kg) load

• ±10 μrad rotary accuracy

• Cleanroom or Vac 10-6 torr compatible

27

VacuumSystems

29

Vacuum SystemsAerotech’s vast applicationexperience, unmatched productscope, and extensive engineeringcapabilities make us the partner ofchoice for vacuum-compatible motionsystems. Since our inception, Aerotechhas designed and manufactured thehighest-performance motion controland positioning systems available,and our vacuum-compatible platformsare no exception. Aerotech’s precisionmotion control products provide thecritical performance for today’sdemanding vacuum applications inmarkets such as semiconductormanufacturing and inspection, opticsfabrication, and military/aerospace.

Always guiding our vacuum systemdevelopment effort is Aerotech’smotto: “Dedicated to the Science ofMotion.” This means that Aerotech isconstantly developing motion controlproducts and services that provide:

• The lowest cost of ownership

• Highest throughput

• Highest accuracy

• Best return on investment

A wide variety of standard Aerotechmotion products are available invacuum-prepared versions. In additionto standard platforms, Aerotechroutinely manufactures custom systemsdesigned to meet application-specificneeds. All of Aerotech’s vacuum-compatible motion platforms minimizepump downtime, chambercontamination, and thermal issues. Inaddition, these systems canincorporate key applicationconsiderations like reduction ofmagnetic fields.

Aerotech has specific experience with vacuum-compatible motion platforms

• Material selection

• Surface preparation

• Hardware venting and elimination of trapped volumes

• Lubricant selection

• Thermal management

• Magnetic field control

• Cleaning

• Bake-out

• Handling and packaging

XY linear motor driven motion system showing several keydesign elements that allow stage operation in high vacuum.

30 www.aerotech.com

Vacuum SystemsLinear and Rotary Testing

Vertical Stage with Free-Standing Base

• 250 lb (114 kg) load capacity

• Linear encoder

• High precision ball-screw

• Can be easily configured as an XYZsystem

XYZ Ball-Screw Positioner

• 80 lb (36 kg) load capacity

• Linear encoders

• High accuracy

• Excellent repeatability

XYZ Roll Yaw

• 5 axis

• 15 lb (7 kg) load capacity

• -20°C to +50°C operation

Five-Axis, Large-Travel System

• Direct-drive provides ultimatescanning system for calibratingsatellite instruments

• High accuracy

• High resolution

• Excellent straightness and flatness

Aerotech specializes in configuringour positioners with low outgassingmaterials to provide automation inspace-rated environments. We havedelivered thousands of vacuum-ratedaxes and work with all majorgovernment labs, aerospacecompanies, and research facilities tomeet their demanding vacuumrequirements. Our vacuum systemshave special considerations:

• 10-6 torr typical environment

• Low outgassing materials andlubrication are used

• Special material finishes orunfinished metal are used

• Vacuum-rated paint on castings

• Teflon cables (M27500)

• Stainless-steel vented hardware

• Special vacuum epoxies

• Special cleaning, handling, andpackaging

We offer vacuum systems including allrequired cables, connectors, andbulkhead feed-through connectors.We also can install customer providedconnectors.

Large Capacity Tilt/Rotary Positioner ALAG-1200/ALAR-325-SP

• 1500 lb (682 kg) load capacity

• Rotation point is 1200 mm above tilt stage

• ±2 μrad repeatability

• ±5 μrad accuracy

• Vac 10-6 torr

• AZ direct drive

• 0.025 μrad machine resolution

• Goniometer includes direct tabletopfeedback

• ±3° travel

Large Capacity Tilt/Rotary/Linear PositionerALAG-330/ALAR-325-SP/ATS5000WB VAC6 1500 lb (682 kg)

• 600 mm linear shown; up to 1.2 mavailable

• AZ direct drive: ±2.5 μradrepeatability and ±5 μrad accuracy

• Pitch goniometer 330 mm rotationpoint

• Goniometer includes direct encoderfeedback

• ±5° travel

Vacuum SystemsHigh Load Capacity

ALAG-1200Tilt

Yaw

ALAR-325-SP

ALAG TiltALAR Yaw

ALAG-330

LinearMotion

ALAR-325-SP

ATS5000WB

1500 lb (682 kg) loadshown with ALAG tilt at 5°

31

PrototypeDevelopmentSystems

33

Prototype Development SystemsPrototype Laser and Microwave Beam Steering Systems

Two-Axis, Direct-DrivePositioner

• Continuous 360° rotation ofazimuth and elevation includingbuilt-in slip ring

• High accuracy angular position andrate capability

• Direct-drive brushless servomotorsresult in zero backlash

• Cog-free design for outstandingvelocity stability

• Box cell provides multiple mountinglocations for user flexibility

• Low maintenance and highreliability provide the lowest cost ofownership

Two-Axis, Direct-DriveAzimuth/Elevation Pedestal Mount

• High resolution (0.05 μrad) and accuracy(±15 μrad)

• Azimuth slip ring; limited or unlimitedtravel available

• Rapid, precise pointing

• No gear backlash

• Many motor options to tailor gimbalmotion to customer requirements

AZ

EL

AZ

EL

Adjustable box cellfor easy sensorreconfiguration

Payloads can bemounted in variouslocations

Breadboardmounting plate formaximum mountingflexibility

Prototype development systems are used to prove our customers’ products in real-world environments.Our systems provide precise pointing of customer payloads with easy-to-use controls and software.This allows customers to focus on field qualification of their devices and relieves them fromengineering the pointing system. Our experience includes engineering electrical hookups, slip rings,mechanical mounting interfaces, distributed control, power requirements, safety electronics, and post-processing of motion events.

Two-Axis, Direct-DriveMirror Mounts

• Smooth motion for accurate targettracking

• Vac 10-6 version available

• ±5 μrad accuracy

• ±2.9 μrad repeatability

• 660 mm ID mirror cell

Two Axis, Direct-DriveGimbal

• AZ ±170° travel

• EL ±170° travel

• ±10 μrad accuracy

• ±2.5 μrad repeatability

• 200 to 400 mm mirror cells

Gear-Drive Gimbals

• Heavy payload capacity

• Gear drives do not back-drivewith unbalanced loads

• Manual adjust knobs

• Box cell provides easy sensormounting with multiple boltpatterns

150 lb (68 kg)load capability

Prototype Development SystemsSolar Tracking and Telescope Systems

Front surface reflectingmirror for true opticalpath steering

Standard desktop or rackmount, stand-alonecontroller with LabVIEW®,.NET, or C interfaces

Rack mount Console

Multiple Control Options

34 www.aerotech.com

35

Prototype Development SystemsBeam Director

Two-Axis Beam Director

• 100 mm to 325 mm opticalapertures available

• Used for star tracking or laser beampointing

• Active or passive applications

Aerotech large aperture stages provide customers with high resolution rotary stages that can be configured into two-axisgimbals with a coudé path to direct laser energy through the stages and out through a telescope. This system shows acustom beam-director built with our ALAR rotary stages.

ALAR-100-SP

Beam pathenters baseActivates

mirror

ALAR-100-SP apertures and their high accuracyare what make this system work

Aperture

Activatessecond mirror

Beam enters optic, activates third mirror,and is expanded through the telescope

IR or Day Camera Pointing

• Direct drive gives rapid motion in asmall package

• ±24 μrad accuracy

• ±2.5 μrad repeatability

• Can be vertically or horizontallymounted

• Rectangular mirror cell

• Limited travel in AZ and EL

• Also useful as antenna steeringgimbal

Video Tracker Testing

• T configuration EL over AZ

• Mounting for sensor or laser onboth sides of the EL axis

• Limited or unlimited travel

• 80 lb (36 kg) load capability

• Larger size options are available

Sensor mountingon both sides

Prototype Development SystemsSensor Pointing

36 www.aerotech.com

AZ

EL

Prototype Development SystemsIP66 Sealed Systems

37

Direct-Drive Outdoor Camera or Antenna Mount, IP66-Sealed Pan and Tilt

• Payloads up to 50 lb (23 kg)

• Slip-ring options

• Low maintenance

• Sealed connectors

• Continuous or limited travel

Direct-Drive Outdoor Sensor-PointingMount, IP66-Sealed

• Environmentally hardened for fieldtesting

• Provides easy mounting points

• Continuous or limited travel

• Slip-ring options

• Payloads up to 100 lb (45 kg)

• Sealed connectors

EL

AZ

High Performance, Three-Axis, Large Aperture, Direct-Drive, Guidance Test System

• 100 to 325 mm roll aperture

• Used for testing or calibration

• Continuous or limited travel versions

• Slip rings for customer signals and power

• High resolution

• ±10 μrad accuracy

• 0.03 μrad resolution

• Precision angular contact bearings result in low axis error motions

• No backlash or gear wear

With our extensive line of positioners, we can readily configure a system for unique payloads.

Electro-optic sensor is at thecenter of all three rotation axes.

Roll

AZ

EL

38 www.aerotech.com

Prototype Development SystemsSensor Pointing

High-PerformanceRotary Stages, Linear Stages, Gantries, andNanopositioners

Ground-BreakingPerformance

Aerotech large aperture rotary stagesare revolutionary direct-drive stages.Now customers have the combinedfeatures of large apertures, direct-drive motors, extremely high resolutionand accuracy, low tilt errors, and highbearing load capabilities. Thesefeatures give customers newcapabilities to make systems with highload capacity, ultra precise rotarypositioning, and large axis through-holes to pass cables, hoses, payloads,slip rings, or optical paths. The ALARscan also be configured for 10-6 torrvacuum environments. Customers canget these large-aperture, zerobacklash stages to test their space-rated instruments and imagers.

ALAR-SP SeriesALAR-LP Series

Direct-Drive Advantage

Direct-drive ALAR rotary stages haveno gear wear or gear vibration.Another benefit is that direct driveprovides very high speeds, so testingcan be completed in less time. Inproduction settings this equates tofaster testing, lower costmanufacturing, and higher profits.From the standpoint of systemaccuracy and repeatability, the stagewill maintain its performance overtime with no need for maintenancebecause there is no gear wear. Withhigh accuracy and no backlash,customers can produce more accurateproducts because their test system isnow more accurate.

• 100 mm, 150 mm, 200 mm, 250 mm, and 325 mm apertures

• Axial load capacity of 300-1500 lb(136-682 kg)

• Excellent accuracy and repeatability

• Cog-free motor provides smoothmotion

• No gear backlash

Our ALAR-LP is designed to bemounted with the vertical axiscoincident with gravity. The LP is lowerprofile than the SP for applicationsthat have less space available.

Our ALAR-SP is designed to bemounted in any configuration –vertical or horizontal.

In-position stability of ±0.05 μrad High resolution gives small step capability

• No accuracy change over time fromgear wear

• 45-300 rpm continuous rotationspeed

• Vac 10-6 torr compatible versions

• High resolution gives excellentstepping and in-position stability

Large Aperture, Direct-Drive Rotary Stages

40 www.aerotech.com

High-Performance Rotary Stages, Linear Stages, Gantries, and Nanopositioners

• Enhanced speed and load capacity

• Large aperture addresses a widerange of applications

• Useful for heavy and unbalancedloads

• Innovative precision worm-gearassembly (patent pending) providesoutstanding accuracy andrepeatability over a long lifetime

• Non-back-driving gear

• Vacuum rated to 10-6 torr

AGR series motorized rotary stagesprovide significant improvements inspeed, load capacity, and long-termpositioning performance over

previous generations of worm-gear-drive stages. AGR series stagesaddress a wide range of applicationsfor general purpose positioning inlaboratory and industrial uses.

For customers who do not need thespeed of direct-drive rotary stages, butdo have heavy or unbalanced loadsand large aperture requirements, wedeveloped the AGR gear-drive rotarystage family.

A unique preloading scheme avoidschanging wear characteristics,allowing an order of magnitudeincrease in stage life without anydegradation in stage performance,and allows stage operation over awide temperature range.

The addition of a larger clearaperture is a key enhancement overprevious generations of worm-gear-driven stages. This feature allows theAGR series to address applicationsrequiring a through-hole oraccommodations to mount an optic,including articulation of beampolarizing lenses, through-holes forcabling, air lines, or visionapplications.

Each stage incorporates dual largediameter pre-loaded angular contactbearings optimally separated toprovide excellent error motionspecifications, as well as best possibleload handling capability.

Options include flexible motorselections as well as a direct encodermounted concentric to the axis ofrotation for outstanding repeatability,and to virtually eliminate hysteresisand backlash. Vacuum-compatibleversions are also available.

AGR Series

Large Aperture, Gear-Drive Rotary Stage

41

Ultra-Precise, Low Profile,Direct-Drive Rotary Air-Bearings

• Excellent radial, axial, and tilt errormotions

• Direct coupled, high-accuracyrotary encoder

• Low profile, planar design

• 20 to 220 lb (9 to 100 kg)payload capacity

• Magnetic preload

Ultra-Precise, High Accuracy, Direct-Drive Rotary Air-Bearings

• High torque output, direct-driveslotless, brushless servomotor

• Zero-cogging motor for outstandingvelocity stability

• Excellent radial, axial, and tilt errormotions

• Direct coupled, high-accuracyrotary encoder

• Large diameter clear aperture

• No mechanical contact

• Fully constrained air-bearing can berun upside down or on its side

• 44 to 150 lb (20 to 68 kg)payload capacity

ABRS Series

ABRT Series

42 www.aerotech.com

High-Performance Rotary Stages, Linear Stages, Gantries, and Nanopositioners

Aerotech’s rotary stages are used innon-destructive testing of many typesof precision engine components.

Direct-Drive Sealed RotaryStages

• IP66 environmental protection

• Optical or magnetic positionfeedback

• -20 to +70°C operation

• Open aperture orsolid tabletop

• Up to 400 lb (182 kg) capacity

• Optional slip-ring

ASRT Series

High Torque Output, Direct-Drive Rotary Stages

• Cog-free brushless servomotordesign for outstanding velocitystability

• Large diameter clear aperture

• High load capacity and high speed

• ±15 to ±50 μrad accuracy

Low Profile, Direct-DriveRotary Stages

• High torque output, direct-drivebrushless servomotor

• Cog free, slotless motor design forsuperior velocity stability

• Direct coupled, high-accuracyrotary encoder

• Ultra-low-profile minimizes workingheight

ADRT Series

ADRS Series

43

AGC SeriesDirect-Drive Goniometer

• Noncontact direct drive

• High speed and high resolution

• No maintenance

• 20 degrees of travel

• ±30 μrad accuracy

• 3.3 to 11 lb (1.5 to 5 kg) loadcapacity

• Stackable for pitch/roll

Gear-Drive Goniometer

• ±60 μrad accuracy

• ±45° rotary positioning withunobstructed 360° view ofcustomer load

• Precision worm-gear-drive foroutstanding accuracy andrepeatability

• Direct encoder options available

• Horizontal or vertical mountingorientation

• 44 to 110 lb (20 to 50 kg) load

ANT-20G Series

ALAGANT-20G

Large Capacity Goniometer

• 1500 lb (682 kg) load capacity

• Rotation point is 330 mm or 1200 mm above tilt stage

• ±2 μrad repeatability

• ±5 μrad accuracy

• Vac 10-6 torr

• AZ direct drive

• 0.025 μrad machine resolution

• Goniometer includes direct tabletopfeedback

• ±3° to ±5° travel

44 www.aerotech.com

High-Performance Rotary Stages, Linear Stages, Gantries, and Nanopositioners

AOM130M Two-Axis, Motorized-DriveOptical Mount

• ± 4° motorized travel

• 360° rotation in azimuth and elevation coarsetravel

• Excellent thermal stability and vibration stability

• Standard models accept 152.4 mm through 609.6 mm optic diameters

Tangent Arm Gimbal

• Direct encoder provides ±38 μrad accuracy;vacuum compatible

• ±2.5 μrad repeatability

• 4 to 24 inch mirror cells

Two-Axis, Manual-Drive Optical Mount

• ±4° fine adjustment travel

• 360° rotation in azimuth and elevation coarse travel

• Excellent thermal and vibration stability

High Precision, Large Angular Range, Azimuth and Elevation Manual Optical Mount

• Patented drive provides sub-arc-second resolution

• Excellent thermal stability

• Non-marring set screws and rotating clips

AOM300 Compact, Two-Axis, Gear Drive,Azimuth and Elevation Optical Mount

• Continuous 360° elevation range; ±180° azimuth range

• Choice of high-resolution microstepping orservomotors

• Rectangular and circular cell models

AOM130M

AOM130M

AOM110

AOM300

AOM130

45

ALS Series

• Direct-drive linear motor stages

• Hardcover and side-seal design for years of maintenance-freeoperation

• High accuracy linear encoder option for applications that requireexcellent velocity regulation

• Multiple frame sizes and travel lengths provide systemconfiguration flexibility

• Integrated cable management for XY, XYZ configurations andcustomer interfaces

AGS Series

• Optimized design for precise contouring

• Velocity to 3 m/s and acceleration to 5 g

• High power brushless linear servomotors forsmooth motion

• Travels up to 1.3 m X 1.3 m available

• Customizable Z and θ axes for flexibleconfigurations

• Noncontact linear encoders

• Configurable cable management system allows forintegration of fiber lasers, cameras, air lines, etc.for multiple applications

ABL Series

• Exceptional geometric air-bearing performance

• Travel to 1.2 meter x 1.2 meter

• Linear encoder or laser interferometer feedback

• Submicron accuracy

• Integrated XY and XYZ systems

• Non-cogging direct-drive motors

46 www.aerotech.com

High-Performance Rotary Stages, Linear Stages, Gantries, and Nanopositioners

PRO Series

• Precision ground ball-screw drive

• Rugged construction

• Long-life linear motion bearing

• Side-seal design with hard coverprotects from debris better than top-seal design

• Low cost, high performance

• 50 to 1500 mm travel

• Fast delivery

PRO LM Series

• Direct-drive linear motor for ultra-precise motion

• Long-life linear motion guidebearing system

• Travels from 100 mm to 1500 mm

• Low-cost, high-performance stage

• Fast delivery

ATS Series

• Precision ground ball-screw drive

• Rugged construction

• High accuracy, noncontact linear encoder

• Long-life linear motion guide bearing system

• Travels from 100 mm to 1500 mm

• Heavy load options available

• 10-6 torr vacuum compatible

• Hard-coated tabletop and cover

• Low-bearing errors for excellent geometric performance47

48 www.aerotech.com

Nanopositioners

ANT95-L Single-Axis Linear Stage

• Noncontact, non-cogging,frictionless direct-drive – zerobacklash or hysteresis

• High resolution (1 nm), repeatability(50 nm), and accuracy (250 nm)

• In-position stability of <1 nm

• Anti-creep crossed-roller bearings

• High dynamic performance

• Available in X, XY, XYZ, and manyother combinations

ANT95-XY Dual-Axis Linear Stage

• Integrated low profile XY linearmotor stage

• Noncontact, non-cogging,frictionless direct-drive – zerobacklash or hysteresis

• High resolution (1 nm), repeatability(50 nm), and accuracy (250 nm)

• In-position stability of <1 nm

• Anti-creep crossed-roller bearings

• High dynamic performance

ANT95-50-L-PLUS 1 nm step plot

The ANT95-L series offers25 or 50 mm travel.

ANT95-XY PLUS 2D accuracy

The ANT95-XY series offers25 x 25 mm or 50 x 50 mm travel.

49

ANT130-L Single-Axis Linear Stage

• Noncontact, non-cogging,frictionless direct-drive – zerobacklash or hysteresis

• High resolution (1 nm), repeatability(50 nm), and accuracy (250 nm)

• In-position stability of 3 nm

• Anti-creep crossed-roller bearings

• High dynamic performance

• Large selection – 4 different traveloptions

ANT130-060-L-PLUS 1 nm step plot

ANT130-XY PLUS 2D accuracy

The ANT130-L seriesoffers 35, 60, 110, or160 mm travel.

ANT130-XY Dual-Axis Linear Stage

• Integrated low profile XY linearmotor stage

• Noncontact, non-cogging,frictionless direct-drive – zerobacklash or hysteresis

• High resolution (1 nm), repeatability(50 nm), and accuracy (250 nm)

• In-position stability of 3 nm

• Anti-creep crossed-roller bearings

• High dynamic performance

The ANT130-XY series offers 60 x 60,110 x 110, or 160 x 160 mm travel.

50 www.aerotech.com

Nanopositioners

0 5 10 15 20 250.05

0

0.05

0.1

0.15

0.19

0.24

0.29

0.34

0.39

0.44

0.48

0.53

Po

siti

on

(μra

d)

Time (sec)0 5 10 15 20 25

0.01

0

0.01

0.02

0.03

0.04

0.05

0.06

0.07

0.08

0.09

0.1

0.11

Po

siti

on

(ar

c se

c)ANT95-R and ANT130-RRotary Stages

• High resolution (0.01 arc sec)

• High performance in large travels

• Outstanding error motionspecifications

• 0.005 arc sec in-position stability

• 5 arc-sec accuracy

• 1.5 arc sec bi-directionalrepeatability

• Multi-axis configurations

ANT-20G Goniometers

• Noncontact, non-cogging,frictionless direct-drive for zerobacklash or hysteresis

• High speed (150°/s)

• High resolution (0.05 arc second)

• Excellent in-position stability

• Large angular range; 20° of travel

• Orthogonal mounting of twocradles provides rotation about thesame point

• No maintenance

• Compact design

ANT95-R 0.01 arc-sec step plot

ANT-20G-90 0.05 arc-sec step plot

51

ANT95-L-Z and ANT130-L-Z

• Nanometer performance in a largetravel format

• High resolution (2 nm), repeatability(75 nm), and accuracy (300 nm)

• In-position stability of 5 nm

• Anti-creep crossed-roller bearings

• High dynamic performance

ANT130-5-V

• Nanometer performance in a largetravel format

• In-position stability of 1 nm

• 5 mm travel

• 200 nm accuracy

• Direct mount to ANT130 serieslinear stages

0 5 10 15 20 25 302

0

2

4

6

8

10

12

14

16

18

20

22

Time (s)

Po

siti

on

(n

m)

ANT130-5-V 2 nm step plot

ANT95-50-L-Z-PLUS 1 nm step plot

Two-Axis ADRS-200/-150 AZOver EL Direct-Drive

AOM240 Direct-Drive Gimbal Vac6 XY with Roll and YawATS5000WB/ALAR-325-SP 4-Axis

High Accuracy AZ/EL Positioner withOne Meter Linear Translation

Custom Motion Simulator AOM500 APT Continuous Travel AZ/EL

ALS5000/1000XY, Tilt, Yaw, ATS2000 Vertical

Vac6 Custom Square Cell AOM300 Gimbal

ALS1000 XYZ Theta, ATS1000, ADRS-150, 10-3 torr

Custom Engineered Systems

52 www.aerotech.com

ADRT-260/ADRT-200 Direct-Drive Gimbal

ADRT Direct-Drive AZ/EL AOM160 Direct-Drive Gimbal

ADR/ANT Direct-Drive Yaw/Pitch High Accuracy AZ/EL Positioner ALAR-100/ANT-20G with Mirror Cell

AOM130M/ART330 Worm-Drive Gimbal ART320 Worm-Drive AZ/EL ADRT/AGR AZ/EL Gimbal

53

54 www.aerotech.com

Corporate Headquar ters • P i t t sburgh, PA • USA

Aerotech UK

Worldwidestartup serviceand on-sitetraining

Fully equippedon-site trainingfacilities

Aerotech Germany Aerotech Japan Aerotech China

Worldwide Service and SupportHigh Volume Manufacturing

Over 100,000axes installed

worldwide

Aerotech at a Glance

55

Technically Superior Components High Performance Sub-Assemblies

Best-in-Class Subsystems Comprehensive Technical Support Services

Custom softwareapplication support

Advanced analyticaltechniques foroptimization ofsystem geometry

3D models to facilitatefaster and more

accurate system layout

PRO SeriesLinear Stage

Highestperformancebrushlesslinear androtary motors

Award-winning Automation 3200 1-32 axis motion,vision, PLC, robotics, and I/O platform

Highly integrated motionsubsystems with machineframe, display, andpackaged electronics

Custom-engineeredvacuum- and cleanroom-compatible systems

Production-proven,large format air-bearingsystems for flat paneland semiconductorapplications

Ndrive® A3200 Npaq®

LaserTurn® 5 high-speedcylindrical laser cutting system

Highest throughput linear motorCartesian gantry systems

XYAB subsystemfor high dynamicaccuracypositioning inlaser drilling andmicromachiningapplicationsAGR rotary

stage

56 www.aerotech.com

Photovoltaic, Fuel Cell, andAlternative EnergyExtensive application experience and a broad array of motionproducts make Aerotech the perfect partner for your photovoltaic(solar cell), fuel cell, and other alternative energy manufacturingand testing platforms. Our worldwide operation has engineeredand manufactured a multitude of motion platforms for these marketsand we continue to provide innovative solutions.

Control SystemsAerotech motion controllers, motors, and drives are utilized in our ownpositioning systems and by end users and OEMs worldwide. From ourAutomation 3200 software-based motion controller that can control up to 32axes, to the Soloist™ single-axis servo controller, to the Ensemble™ multi-axisstand-alone motion controller, Aerotech provides a variety of options to suityour application.

General AutomationSince 1970 Aerotech has been a manufacturer of top-qualityautomation products. The breadth of the company’s product line,including automated nanopositioners, planar air-bearing systems,high-speed gantries, linear and rotary and lift stages, brushless linearand rotary servomotors and drives, single- and multi-axis motioncontrollers, goniometers, and gimbals/optical mounts, makesAerotech unique among motion control manufacturers. Aerotech isDedicated to the Science of Motion.

Laser ProcessingAerotech has extensive experience in providing motion components andsubsystems for laser processes such as cutting, welding, marking, etching,and micromachining. These processes are the key to advancing technologyin markets such as photovoltaic manufacturing, aerospace and medicaldevice manufacturing.

Capabilities in Other Markets

57

Medical Device Manufacturing and Life SciencesAerotech manufactures high-performance motion systems and components for medicaland life sciences applications including stent cutting, medical laser welding systems forcardiac pacemakers and catheters, IOL and contact lens manufacturing, DNAsequencing, blood sequencing, haptic mills and drills, x-ray machines, magneticresonance scanners, and CAT scanners. We can customize a medical laser weldingsystem for any need.

Test and InspectionAerotech is involved in test and inspection across a wide array ofindustries with applications including CMMs, ultrasonic, eddy current,x-ray, optical, and electronic. All of these applications rely on Aerotechproducts’ unmatched precision, accuracy, and durability. Opticalinspection solutions range from high-end linear-motor-driven modelspackaged with all control elements in an optimized machine base, tomodular systems specifically designed for cost-sensitive applications.

Government and Educational Research and DevelopmentThe breadth of Aerotech’s product line offers solutions for the wide-ranging requirements of academicand government R&D. The fiberoptic line of positioning stages provides the accuracy required not onlyfor photonics experiments, but also for micro- and nano-machining workstations. Aerotech’s multi-axisrotary positioners and gimbals offer the high precision needed for defense, satellite, and space scienceresearch. Unique applications call for unique solutions, and Aerotech can provide custom-engineeredsystems to meet your needs.

Electronics Manufacturing and AssemblySpeed, accuracy, and reliability are the key requirements for pick-and-place machines, stencilcutting machines, printed circuit board assembly, and other electronic manufacturing andassembly equipment. Since 1970 Aerotech has exceeded the most stringent criteria used tojudge electronic manufacturing and assembly equipment, and we continue to raise thestandard with our advanced motion technologies by addressing industry-specific challenges inpick-and-place machines, stencil cutting machines, and printed circuit board assembly systems.

58 www.aerotech.com

Semiconductor International 2007Editors’ Choice Best Product –

WaferMax T™

SemiconductorInternational 2008 Editors’

Choice Best Product –Ensemble™

2008 ControlEngineering Engineers’

Choice Award –LaserTurn® 1

Design News2008 Golden Mousetrap

Finalist Product –Nmark™ SSaM

Design News2009 Golden Mousetrap

Finalist Product – LaserTurn® 1,AGS15000, ANT95-XY

Design News 2010Golden Mousetrap Winner –

ANT-130XY

EuroAsia IC 2006Industry Award –

WaferMax Z™

Lightwave OFC 2001Attendees’ Choice Award –

FiberAlign® 130

Design News 2002 Best Product Nominee –

Automation 3200

Machine Design Excellence inManufacturing Technology –Slides/Ways 1998 and 2000

Aandrijftechniek 2002 Award –

FiberMax®

Product Design andDevelopment

2002 Top 50 Product –Automation 3200

Lightwave NFOEC 2002Attendees’ Choice Award –

FiberMax®

Awards and Recognition

59

Worldwide Trainingand Support

Aerotech offers comprehensive worldwide training andcustomer service either at customer facilities or at one of ourAerotech training centers.

Our Training Program Features:

• Standard and customized courses

• Hands-on training with Aerotech positioning systems

• Interactive training with experienced instructors

• Comfortable, spacious facilities

Installation and Start up (Commissioning)

Aerotech offers startup and commissioning services to minimizestartup times, reduce cost and accelerate time-to-production. Bycombining our product knowledge with your process andapplication expertise, new systems and applications can becompleted faster at a reduced overall cost.

Engineering Support

Aerotech provides complete engineering support for ourproducts, including onsite support and maintenance, andremote support via phone, fax, website, and/or WebEx®

software. As a manufacturer staffed by engineers, weunderstand the unacceptability of downtime.

Training

Aerotech training classes are designed to help our customersrealize the full potential of our products. By demonstrating all ofa product’s features and how to use them, customers have beenable to reduce startup time and quickly optimize theirapplications. Aerotech’s classes have been developed, andcontinually upgraded, using feedback from our customers.

Since 1970, Aerotech has designed motion control andpositioning systems and components with an unsurpassed trackrecord of reliability. When you make the choice to purchasefrom Aerotech, we urge you to learn how to get the most fromyour new Aerotech products. Aerotech provides both onsite(your facility) and/or in-house (our facility) training for ourcustomers’ convenience.

Aerotech Ltd (United Kingdom)

Aerotech GmbH (Germany)

Aerotech Inc (U.S.A.)

★ - Aerotech Headquarters ● - Direct Field Sales Office ▲ - Aerotech Subsidiary ■ - Representative

Dedicated to the Science of Motion

www.aerotech.comCA0510A

Aerotech’s Worldwide Sales and Service Locations