a hv-maps pixel tracker for the mu3e experiment · 02/03/16 hv-maps heiko augustin 13 / 26. the...
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A HV-MAPS Pixel Trackerfor the Mu3e Experiment
Heiko Augustin
Physikalisches Institut Heidelberg
DPG Spring MeetingT72.1
02. March 2016
HighRR
The Mu3e Experiment The MuPix Testbeam Results Summary & Outlook
Mu3eThe Physics Goal
µ+ → e+e−e+ suppressed to a BR below10−54 in the Standard ModelAny observed signal is a sign for newphysicsCurrent limit BR < 10−12 (SINDRUM)Aiming for sensitivity of 1 in 1016 decays
SINDRUM: "Search for the decay muto3e" Nucl. Phys.,B299 1, 1988
02/03/16 HV-MAPS Heiko Augustin 2 / 26
The Mu3e Experiment The MuPix Testbeam Results Summary & Outlook
Mu3eThe Physics Goal
µ+ → e+e−e+ suppressed to a BR below10−54 in the Standard ModelAny observed signal is a sign for newphysicsCurrent limit BR < 10−12 (SINDRUM)Aiming for sensitivity of 1 in 1016 decays
SINDRUM: "Search for the decay muto3e" Nucl. Phys.,B299 1, 1988
02/03/16 HV-MAPS Heiko Augustin 2 / 26
The Mu3e Experiment The MuPix Testbeam Results Summary & Outlook
Mu3eThe Physics Goal
µ+ → e+e−e+ suppressed to a BR below10−54 in the Standard ModelAny observed signal is a sign for newphysicsCurrent limit BR < 10−12 (SINDRUM)Aiming for sensitivity of 1 in 1016 decays
SINDRUM: "Search for the decay muto3e" Nucl. Phys.,B299 1, 1988
02/03/16 HV-MAPS Heiko Augustin 2 / 26
The Mu3e Experiment The MuPix Testbeam Results Summary & Outlook
The Signal Decay
Muons decay at rest: Σ~p = 0Common vertex and coincident in timeMaximal momentum 53MeV/cReconstruct invariant mass fromcharged particle tracks (Etot = mµ)
02/03/16 HV-MAPS Heiko Augustin 3 / 26
The Mu3e Experiment The MuPix Testbeam Results Summary & Outlook
The BackgroundAccidental & Combinatorial
e+
e+
e-
109 decays per secondGives rise to accidental &combinatorial backgroundGood time and vertex resolutionneeded
02/03/16 HV-MAPS Heiko Augustin 4 / 26
The Mu3e Experiment The MuPix Testbeam Results Summary & Outlook
The BackgroundAccidental & Combinatorial
e+
e+
e-
109 decays per secondGives rise to accidental &combinatorial backgroundGood time and vertex resolutionneeded
02/03/16 HV-MAPS Heiko Augustin 4 / 26
The Mu3e Experiment The MuPix Testbeam Results Summary & Outlook
The BackgroundIrreducible
Bra
nch
ing
Ra
tio
mμ - E
tot (MeV)
0 1 2 3 4 5 6
10-12
10-16
10-18
10-13
10-17
10-15
10-14
10-19
μ3e
R.M.Djilkibaev and R.V.Konoplich,Phys.Rev.,
D79 073004, 2009
Irreducible background from radiativedecays with internal conversion:µ+ → e+e−e+ν̄µνe
Good momentum resolution needed tosuppress SM backgroundMomentum resolution is dominated bymultiple scattering ∝
√x/p
02/03/16 HV-MAPS Heiko Augustin 5 / 26
The Mu3e Experiment The MuPix Testbeam Results Summary & Outlook
The Detector
1T magnetic field
Targetμ Beam
02/03/16 HV-MAPS Heiko Augustin 6 / 26
The Mu3e Experiment The MuPix Testbeam Results Summary & Outlook
The Detector
1T magnetic field
Targetμ Beam
02/03/16 HV-MAPS Heiko Augustin 6 / 26
The Mu3e Experiment The MuPix Testbeam Results Summary & Outlook
The Detector
1T magnetic field
Target
Inner pixel layers
μ Beam
02/03/16 HV-MAPS Heiko Augustin 6 / 26
The Mu3e Experiment The MuPix Testbeam Results Summary & Outlook
The Detector
1T magnetic field
Target
Inner pixel layers
Outer pixel layers
μ Beam
02/03/16 HV-MAPS Heiko Augustin 6 / 26
The Mu3e Experiment The MuPix Testbeam Results Summary & Outlook
The Detector
1T magnetic field
Target
Inner pixel layers
Scintillating �bres
Outer pixel layers
μ Beam
02/03/16 HV-MAPS Heiko Augustin 6 / 26
The Mu3e Experiment The MuPix Testbeam Results Summary & Outlook
The Detector
1T magnetic field
Target
Inner pixel layers
Scintillating �bres
Outer pixel layers
Recurl pixel layers
Scintillator tiles
μ Beam
02/03/16 HV-MAPS Heiko Augustin 6 / 26
The Mu3e Experiment The MuPix Testbeam Results Summary & Outlook
The Requirements for the Silicon Pixel Tracker
Target
Inner pixel layers
Scintillating �bres
Outer pixel layers
Recurl pixel layers
Scintillator tiles
μ Beam
Good vertex resolutionGood time resolution & low dead time→ fast signal generation & shapingGood momentum resolution → low material budget
02/03/16 HV-MAPS Heiko Augustin 7 / 26
The Mu3e Experiment The MuPix Testbeam Results Summary & Outlook
The Requirements for the Silicon Pixel Tracker
Pixel Sensor RequirementsPixel Size Time Resolution Material Budget Efficiency80×80 µm2 < 20 ns < 1h X0/layer > 99%
Good vertex resolutionGood time resolution & low dead time→ fast signal generation & shapingGood momentum resolution → low material budget
02/03/16 HV-MAPS Heiko Augustin 7 / 26
The Mu3e Experiment The MuPix Testbeam Results Summary & Outlook
The Pixel Tracker
Readout & Powering viaFlexprints: T42.7Cooling in Heliumatmosphere: T75.2
02/03/16 HV-MAPS Heiko Augustin 8 / 26
The Mu3e Experiment The MuPix Testbeam Results Summary & Outlook
The Pixel Tracker1
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Mu3
e V
erte
x F
lex
v1
A1 U1 U2 U3A1
A1x1
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0A
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x12
A1
x1
3
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A1x78 U1
U1x1 U1x2 U1x3 U1x4
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U1x37 U1x38 U1x39 U1x40
U2
U2x1 U2x2 U2x3 U2x4
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U2x37 U2x38 U2x39 U2x40
U3
U3x1 U3x2 U3x3 U3x4
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U3x6
U3x7
U3x8
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U3x10
U3x11
U3x12
U3x13
U3x14
U3x15
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U3x30
U3x31
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U3x34
U3x35
U3x36
U3x37 U3x38 U3x39 U3x40
A1
A1x1
A1x2
A1x3
A1x4
A1x5
A1x6
A1x7
A1x8
A1x9
A1x1
0A
1x1
1A1
x12
A1
x1
3
A1x14
A1x15
A1x16
A1x17
A1x18
A1x19
A1x20
A1x21
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A1x78 U1
U1x1 U1x2 U1x3 U1x4
U1x5
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U1x30
U1x31
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U1x33
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U1x35
U1x36
U1x37 U1x38 U1x39 U1x40
U2
U2x1 U2x2 U2x3 U2x4
U2x5
U2x6
U2x7
U2x8
U2x9
U2x10
U2x11
U2x12
U2x13
U2x14
U2x15
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U2x21
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U2x25
U2x26
U2x27
U2x28
U2x29
U2x30
U2x31
U2x32
U2x33
U2x34
U2x35
U2x36
U2x37 U2x38 U2x39 U2x40
U3
U3x1 U3x2 U3x3 U3x4
U3x5
U3x6
U3x7
U3x8
U3x9
U3x10
U3x11
U3x12
U3x13
U3x14
U3x15
U3x16
U3x17
U3x18
U3x19
U3x20
U3x21
U3x22
U3x23
U3x24
U3x25
U3x26
U3x27
U3x28
U3x29
U3x30
U3x31
U3x32
U3x33
U3x34
U3x35
U3x36
U3x37 U3x38 U3x39 U3x40
A1
A1x1
A1x2
A1x3
A1x4
A1x5
A1x6
A1x7
A1x8
A1x9
A1x1
0A
1x1
1A1
x12
A1
x1
3
A1x14
A1x15
A1x16
A1x17
A1x18
A1x19
A1x20
A1x21
A1x22
A1x23
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A1x69
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A1x72
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A1x78 U1
U1x1 U1x2 U1x3 U1x4
U1x5
U1x6
U1x7
U1x8
U1x9
U1x10
U1x11
U1x12
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U1x30
U1x31
U1x32
U1x33
U1x34
U1x35
U1x36
U1x37 U1x38 U1x39 U1x40
U2
U2x1 U2x2 U2x3 U2x4
U2x5
U2x6
U2x7
U2x8
U2x9
U2x10
U2x11
U2x12
U2x13
U2x14
U2x15
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U2x17
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U2x27
U2x28
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U2x30
U2x31
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U2x33
U2x34
U2x35
U2x36
U2x37 U2x38 U2x39 U2x40
U3
U3x1 U3x2 U3x3 U3x4
U3x5
U3x6
U3x7
U3x8
U3x9
U3x10
U3x11
U3x12
U3x13
U3x14
U3x15
U3x16
U3x17
U3x18
U3x19
U3x20
U3x21
U3x22
U3x23
U3x24
U3x25
U3x26
U3x27
U3x28
U3x29
U3x30
U3x31
U3x32
U3x33
U3x34
U3x35
U3x36
U3x37 U3x38 U3x39 U3x40
A1
A1x1
A1x2
A1x3
A1x4
A1x5
A1x6
A1x7
A1x8
A1x9
A1x1
0A
1x1
1A1
x12
A1
x1
3
A1x14
A1x15
A1x16
A1x17
A1x18
A1x19
A1x20
A1x21
A1x22
A1x23
A1x24
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A1x28
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A1x78 U1
U1x1 U1x2 U1x3 U1x4
U1x5
U1x6
U1x7
U1x8
U1x9
U1x10
U1x11
U1x12
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U1x30
U1x31
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U1x33
U1x34
U1x35
U1x36
U1x37 U1x38 U1x39 U1x40
U2
U2x1 U2x2 U2x3 U2x4
U2x5
U2x6
U2x7
U2x8
U2x9
U2x10
U2x11
U2x12
U2x13
U2x14
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U2x30
U2x31
U2x32
U2x33
U2x34
U2x35
U2x36
U2x37 U2x38 U2x39 U2x40
U3
U3x1 U3x2 U3x3 U3x4
U3x5
U3x6
U3x7
U3x8
U3x9
U3x10
U3x11
U3x12
U3x13
U3x14
U3x15
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U3x17
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U3x30
U3x31
U3x32
U3x33
U3x34
U3x35
U3x36
U3x37 U3x38 U3x39 U3x40
A1
A1x1
A1x2
A1x3
A1x4
A1x5
A1x6
A1x7
A1x8
A1x9
A1x1
0A
1x1
1A1
x12
A1
x1
3
A1x14
A1x15
A1x16
A1x17
A1x18
A1x19
A1x20
A1x21
A1x22
A1x23
A1x24
A1x25
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A1x29
A1x30
A1x31
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A1x33
A1x34
A1x35
A1x36
A1x37
A1x38
A1x39
A1x40
A1x41
A1x42
A1x43
A1x44
A1x45
A1x46
A1x47
A1x48
A1x49
A1x50
A1x51
A1x52
A1x53
A1x54
A1x55
A1x56
A1x57
A1x58
A1x59
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A1x61
A1x62
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A1x68
A1x69
A1x70
A1x71
A1x72
A1x73
A1x74
A1x75
A1x76
A1x77
A1x78 U1
U1x1 U1x2 U1x3 U1x4
U1x5
U1x6
U1x7
U1x8
U1x9
U1x10
U1x11
U1x12
U1x13
U1x14
U1x15
U1x16
U1x17
U1x18
U1x19
U1x20
U1x21
U1x22
U1x23
U1x24
U1x25
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U1x27
U1x28
U1x29
U1x30
U1x31
U1x32
U1x33
U1x34
U1x35
U1x36
U1x37 U1x38 U1x39 U1x40
U2
U2x1 U2x2 U2x3 U2x4
U2x5
U2x6
U2x7
U2x8
U2x9
U2x10
U2x11
U2x12
U2x13
U2x14
U2x15
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U2x17
U2x18
U2x19
U2x20
U2x21
U2x22
U2x23
U2x24
U2x25
U2x26
U2x27
U2x28
U2x29
U2x30
U2x31
U2x32
U2x33
U2x34
U2x35
U2x36
U2x37 U2x38 U2x39 U2x40
U3
U3x1 U3x2 U3x3 U3x4
U3x5
U3x6
U3x7
U3x8
U3x9
U3x10
U3x11
U3x12
U3x13
U3x14
U3x15
U3x16
U3x17
U3x18
U3x19
U3x20
U3x21
U3x22
U3x23
U3x24
U3x25
U3x26
U3x27
U3x28
U3x29
U3x30
U3x31
U3x32
U3x33
U3x34
U3x35
U3x36
U3x37 U3x38 U3x39 U3x40
A1
A1x1
A1x2
A1x3
A1x4
A1x5
A1x6
A1x7
A1x8
A1x9
A1x1
0A
1x1
1A1
x12
A1
x1
3
A1x14
A1x15
A1x16
A1x17
A1x18
A1x19
A1x20
A1x21
A1x22
A1x23
A1x24
A1x25
A1x26
A1x27
A1x28
A1x29
A1x30
A1x31
A1x32
A1x33
A1x34
A1x35
A1x36
A1x37
A1x38
A1x39
A1x40
A1x41
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A1x50
A1x51
A1x52
A1x53
A1x54
A1x55
A1x56
A1x57
A1x58
A1x59
A1x60
A1x61
A1x62
A1x63
A1x64
A1x65
A1x66
A1x67
A1x68
A1x69
A1x70
A1x71
A1x72
A1x73
A1x74
A1x75
A1x76
A1x77
A1x78 U1
U1x1 U1x2 U1x3 U1x4
U1x5
U1x6
U1x7
U1x8
U1x9
U1x10
U1x11
U1x12
U1x13
U1x14
U1x15
U1x16
U1x17
U1x18
U1x19
U1x20
U1x21
U1x22
U1x23
U1x24
U1x25
U1x26
U1x27
U1x28
U1x29
U1x30
U1x31
U1x32
U1x33
U1x34
U1x35
U1x36
U1x37 U1x38 U1x39 U1x40
U2
U2x1 U2x2 U2x3 U2x4
U2x5
U2x6
U2x7
U2x8
U2x9
U2x10
U2x11
U2x12
U2x13
U2x14
U2x15
U2x16
U2x17
U2x18
U2x19
U2x20
U2x21
U2x22
U2x23
U2x24
U2x25
U2x26
U2x27
U2x28
U2x29
U2x30
U2x31
U2x32
U2x33
U2x34
U2x35
U2x36
U2x37 U2x38 U2x39 U2x40
U3
U3x1 U3x2 U3x3 U3x4
U3x5
U3x6
U3x7
U3x8
U3x9
U3x10
U3x11
U3x12
U3x13
U3x14
U3x15
U3x16
U3x17
U3x18
U3x19
U3x20
U3x21
U3x22
U3x23
U3x24
U3x25
U3x26
U3x27
U3x28
U3x29
U3x30
U3x31
U3x32
U3x33
U3x34
U3x35
U3x36
U3x37 U3x38 U3x39 U3x40
A1
A1x1
A1x2
A1x3
A1x4
A1x5
A1x6
A1x7
A1x8
A1x9
A1x1
0A
1x1
1A1
x12
A1
x1
3
A1x14
A1x15
A1x16
A1x17
A1x18
A1x19
A1x20
A1x21
A1x22
A1x23
A1x24
A1x25
A1x26
A1x27
A1x28
A1x29
A1x30
A1x31
A1x32
A1x33
A1x34
A1x35
A1x36
A1x37
A1x38
A1x39
A1x40
A1x41
A1x42
A1x43
A1x44
A1x45
A1x46
A1x47
A1x48
A1x49
A1x50
A1x51
A1x52
A1x53
A1x54
A1x55
A1x56
A1x57
A1x58
A1x59
A1x60
A1x61
A1x62
A1x63
A1x64
A1x65
A1x66
A1x67
A1x68
A1x69
A1x70
A1x71
A1x72
A1x73
A1x74
A1x75
A1x76
A1x77
A1x78 U1
U1x1 U1x2 U1x3 U1x4
U1x5
U1x6
U1x7
U1x8
U1x9
U1x10
U1x11
U1x12
U1x13
U1x14
U1x15
U1x16
U1x17
U1x18
U1x19
U1x20
U1x21
U1x22
U1x23
U1x24
U1x25
U1x26
U1x27
U1x28
U1x29
U1x30
U1x31
U1x32
U1x33
U1x34
U1x35
U1x36
U1x37 U1x38 U1x39 U1x40
U2
U2x1 U2x2 U2x3 U2x4
U2x5
U2x6
U2x7
U2x8
U2x9
U2x10
U2x11
U2x12
U2x13
U2x14
U2x15
U2x16
U2x17
U2x18
U2x19
U2x20
U2x21
U2x22
U2x23
U2x24
U2x25
U2x26
U2x27
U2x28
U2x29
U2x30
U2x31
U2x32
U2x33
U2x34
U2x35
U2x36
U2x37 U2x38 U2x39 U2x40
U3
U3x1 U3x2 U3x3 U3x4
U3x5
U3x6
U3x7
U3x8
U3x9
U3x10
U3x11
U3x12
U3x13
U3x14
U3x15
U3x16
U3x17
U3x18
U3x19
U3x20
U3x21
U3x22
U3x23
U3x24
U3x25
U3x26
U3x27
U3x28
U3x29
U3x30
U3x31
U3x32
U3x33
U3x34
U3x35
U3x36
U3x37 U3x38 U3x39 U3x40
A1
A1x1
A1x2
A1x3
A1x4
A1x5
A1x6
A1x7
A1x8
A1x9
A1x1
0A
1x1
1A1
x12
A1
x1
3
A1x14
A1x15
A1x16
A1x17
A1x18
A1x19
A1x20
A1x21
A1x22
A1x23
A1x24
A1x25
A1x26
A1x27
A1x28
A1x29
A1x30
A1x31
A1x32
A1x33
A1x34
A1x35
A1x36
A1x37
A1x38
A1x39
A1x40
A1x41
A1x42
A1x43
A1x44
A1x45
A1x46
A1x47
A1x48
A1x49
A1x50
A1x51
A1x52
A1x53
A1x54
A1x55
A1x56
A1x57
A1x58
A1x59
A1x60
A1x61
A1x62
A1x63
A1x64
A1x65
A1x66
A1x67
A1x68
A1x69
A1x70
A1x71
A1x72
A1x73
A1x74
A1x75
A1x76
A1x77
A1x78 U1
U1x1 U1x2 U1x3 U1x4
U1x5
U1x6
U1x7
U1x8
U1x9
U1x10
U1x11
U1x12
U1x13
U1x14
U1x15
U1x16
U1x17
U1x18
U1x19
U1x20
U1x21
U1x22
U1x23
U1x24
U1x25
U1x26
U1x27
U1x28
U1x29
U1x30
U1x31
U1x32
U1x33
U1x34
U1x35
U1x36
U1x37 U1x38 U1x39 U1x40
U2
U2x1 U2x2 U2x3 U2x4
U2x5
U2x6
U2x7
U2x8
U2x9
U2x10
U2x11
U2x12
U2x13
U2x14
U2x15
U2x16
U2x17
U2x18
U2x19
U2x20
U2x21
U2x22
U2x23
U2x24
U2x25
U2x26
U2x27
U2x28
U2x29
U2x30
U2x31
U2x32
U2x33
U2x34
U2x35
U2x36
U2x37 U2x38 U2x39 U2x40
U3
U3x1 U3x2 U3x3 U3x4
U3x5
U3x6
U3x7
U3x8
U3x9
U3x10
U3x11
U3x12
U3x13
U3x14
U3x15
U3x16
U3x17
U3x18
U3x19
U3x20
U3x21
U3x22
U3x23
U3x24
U3x25
U3x26
U3x27
U3x28
U3x29
U3x30
U3x31
U3x32
U3x33
U3x34
U3x35
U3x36
U3x37 U3x38 U3x39 U3x40
A1
A1x1
A1x2
A1x3
A1x4
A1x5
A1x6
A1x7
A1x8
A1x9
A1x1
0A
1x1
1A1
x12
A1
x1
3
A1x14
A1x15
A1x16
A1x17
A1x18
A1x19
A1x20
A1x21
A1x22
A1x23
A1x24
A1x25
A1x26
A1x27
A1x28
A1x29
A1x30
A1x31
A1x32
A1x33
A1x34
A1x35
A1x36
A1x37
A1x38
A1x39
A1x40
A1x41
A1x42
A1x43
A1x44
A1x45
A1x46
A1x47
A1x48
A1x49
A1x50
A1x51
A1x52
A1x53
A1x54
A1x55
A1x56
A1x57
A1x58
A1x59
A1x60
A1x61
A1x62
A1x63
A1x64
A1x65
A1x66
A1x67
A1x68
A1x69
A1x70
A1x71
A1x72
A1x73
A1x74
A1x75
A1x76
A1x77
A1x78 U1
U1x1 U1x2 U1x3 U1x4
U1x5
U1x6
U1x7
U1x8
U1x9
U1x10
U1x11
U1x12
U1x13
U1x14
U1x15
U1x16
U1x17
U1x18
U1x19
U1x20
U1x21
U1x22
U1x23
U1x24
U1x25
U1x26
U1x27
U1x28
U1x29
U1x30
U1x31
U1x32
U1x33
U1x34
U1x35
U1x36
U1x37 U1x38 U1x39 U1x40
U2
U2x1 U2x2 U2x3 U2x4
U2x5
U2x6
U2x7
U2x8
U2x9
U2x10
U2x11
U2x12
U2x13
U2x14
U2x15
U2x16
U2x17
U2x18
U2x19
U2x20
U2x21
U2x22
U2x23
U2x24
U2x25
U2x26
U2x27
U2x28
U2x29
U2x30
U2x31
U2x32
U2x33
U2x34
U2x35
U2x36
U2x37 U2x38 U2x39 U2x40
U3
U3x1 U3x2 U3x3 U3x4
U3x5
U3x6
U3x7
U3x8
U3x9
U3x10
U3x11
U3x12
U3x13
U3x14
U3x15
U3x16
U3x17
U3x18
U3x19
U3x20
U3x21
U3x22
U3x23
U3x24
U3x25
U3x26
U3x27
U3x28
U3x29
U3x30
U3x31
U3x32
U3x33
U3x34
U3x35
U3x36
U3x37 U3x38 U3x39 U3x40
A1
A1x1
A1x2
A1x3
A1x4
A1x5
A1x6
A1x7
A1x8
A1x9
A1x1
0A
1x1
1A1
x12
A1
x1
3
A1x14
A1x15
A1x16
A1x17
A1x18
A1x19
A1x20
A1x21
A1x22
A1x23
A1x24
A1x25
A1x26
A1x27
A1x28
A1x29
A1x30
A1x31
A1x32
A1x33
A1x34
A1x35
A1x36
A1x37
A1x38
A1x39
A1x40
A1x41
A1x42
A1x43
A1x44
A1x45
A1x46
A1x47
A1x48
A1x49
A1x50
A1x51
A1x52
A1x53
A1x54
A1x55
A1x56
A1x57
A1x58
A1x59
A1x60
A1x61
A1x62
A1x63
A1x64
A1x65
A1x66
A1x67
A1x68
A1x69
A1x70
A1x71
A1x72
A1x73
A1x74
A1x75
A1x76
A1x77
A1x78 U1
U1x1 U1x2 U1x3 U1x4
U1x5
U1x6
U1x7
U1x8
U1x9
U1x10
U1x11
U1x12
U1x13
U1x14
U1x15
U1x16
U1x17
U1x18
U1x19
U1x20
U1x21
U1x22
U1x23
U1x24
U1x25
U1x26
U1x27
U1x28
U1x29
U1x30
U1x31
U1x32
U1x33
U1x34
U1x35
U1x36
U1x37 U1x38 U1x39 U1x40
U2
U2x1 U2x2 U2x3 U2x4
U2x5
U2x6
U2x7
U2x8
U2x9
U2x10
U2x11
U2x12
U2x13
U2x14
U2x15
U2x16
U2x17
U2x18
U2x19
U2x20
U2x21
U2x22
U2x23
U2x24
U2x25
U2x26
U2x27
U2x28
U2x29
U2x30
U2x31
U2x32
U2x33
U2x34
U2x35
U2x36
U2x37 U2x38 U2x39 U2x40
U3
U3x1 U3x2 U3x3 U3x4
U3x5
U3x6
U3x7
U3x8
U3x9
U3x10
U3x11
U3x12
U3x13
U3x14
U3x15
U3x16
U3x17
U3x18
U3x19
U3x20
U3x21
U3x22
U3x23
U3x24
U3x25
U3x26
U3x27
U3x28
U3x29
U3x30
U3x31
U3x32
U3x33
U3x34
U3x35
U3x36
U3x37 U3x38 U3x39 U3x40
A1
A1x1
A1x2
A1x3
A1x4
A1x5
A1x6
A1x7
A1x8
A1x9
A1x1
0A
1x1
1A1
x12
A1
x1
3
A1x14
A1x15
A1x16
A1x17
A1x18
A1x19
A1x20
A1x21
A1x22
A1x23
A1x24
A1x25
A1x26
A1x27
A1x28
A1x29
A1x30
A1x31
A1x32
A1x33
A1x34
A1x35
A1x36
A1x37
A1x38
A1x39
A1x40
A1x41
A1x42
A1x43
A1x44
A1x45
A1x46
A1x47
A1x48
A1x49
A1x50
A1x51
A1x52
A1x53
A1x54
A1x55
A1x56
A1x57
A1x58
A1x59
A1x60
A1x61
A1x62
A1x63
A1x64
A1x65
A1x66
A1x67
A1x68
A1x69
A1x70
A1x71
A1x72
A1x73
A1x74
A1x75
A1x76
A1x77
A1x78 U1
U1x1 U1x2 U1x3 U1x4
U1x5
U1x6
U1x7
U1x8
U1x9
U1x10
U1x11
U1x12
U1x13
U1x14
U1x15
U1x16
U1x17
U1x18
U1x19
U1x20
U1x21
U1x22
U1x23
U1x24
U1x25
U1x26
U1x27
U1x28
U1x29
U1x30
U1x31
U1x32
U1x33
U1x34
U1x35
U1x36
U1x37 U1x38 U1x39 U1x40
U2
U2x1 U2x2 U2x3 U2x4
U2x5
U2x6
U2x7
U2x8
U2x9
U2x10
U2x11
U2x12
U2x13
U2x14
U2x15
U2x16
U2x17
U2x18
U2x19
U2x20
U2x21
U2x22
U2x23
U2x24
U2x25
U2x26
U2x27
U2x28
U2x29
U2x30
U2x31
U2x32
U2x33
U2x34
U2x35
U2x36
U2x37 U2x38 U2x39 U2x40
U3
U3x1 U3x2 U3x3 U3x4
U3x5
U3x6
U3x7
U3x8
U3x9
U3x10
U3x11
U3x12
U3x13
U3x14
U3x15
U3x16
U3x17
U3x18
U3x19
U3x20
U3x21
U3x22
U3x23
U3x24
U3x25
U3x26
U3x27
U3x28
U3x29
U3x30
U3x31
U3x32
U3x33
U3x34
U3x35
U3x36
U3x37 U3x38 U3x39 U3x40
A1
A1x1
A1x2
A1x3
A1x4
A1x5
A1x6
A1x7
A1x8
A1x9
A1x1
0A
1x1
1A1
x12
A1
x1
3
A1x14
A1x15
A1x16
A1x17
A1x18
A1x19
A1x20
A1x21
A1x22
A1x23
A1x24
A1x25
A1x26
A1x27
A1x28
A1x29
A1x30
A1x31
A1x32
A1x33
A1x34
A1x35
A1x36
A1x37
A1x38
A1x39
A1x40
A1x41
A1x42
A1x43
A1x44
A1x45
A1x46
A1x47
A1x48
A1x49
A1x50
A1x51
A1x52
A1x53
A1x54
A1x55
A1x56
A1x57
A1x58
A1x59
A1x60
A1x61
A1x62
A1x63
A1x64
A1x65
A1x66
A1x67
A1x68
A1x69
A1x70
A1x71
A1x72
A1x73
A1x74
A1x75
A1x76
A1x77
A1x78 U1
U1x1 U1x2 U1x3 U1x4
U1x5
U1x6
U1x7
U1x8
U1x9
U1x10
U1x11
U1x12
U1x13
U1x14
U1x15
U1x16
U1x17
U1x18
U1x19
U1x20
U1x21
U1x22
U1x23
U1x24
U1x25
U1x26
U1x27
U1x28
U1x29
U1x30
U1x31
U1x32
U1x33
U1x34
U1x35
U1x36
U1x37 U1x38 U1x39 U1x40
U2
U2x1 U2x2 U2x3 U2x4
U2x5
U2x6
U2x7
U2x8
U2x9
U2x10
U2x11
U2x12
U2x13
U2x14
U2x15
U2x16
U2x17
U2x18
U2x19
U2x20
U2x21
U2x22
U2x23
U2x24
U2x25
U2x26
U2x27
U2x28
U2x29
U2x30
U2x31
U2x32
U2x33
U2x34
U2x35
U2x36
U2x37 U2x38 U2x39 U2x40
U3
U3x1 U3x2 U3x3 U3x4
U3x5
U3x6
U3x7
U3x8
U3x9
U3x10
U3x11
U3x12
U3x13
U3x14
U3x15
U3x16
U3x17
U3x18
U3x19
U3x20
U3x21
U3x22
U3x23
U3x24
U3x25
U3x26
U3x27
U3x28
U3x29
U3x30
U3x31
U3x32
U3x33
U3x34
U3x35
U3x36
U3x37 U3x38 U3x39 U3x40
A1
A1x1
A1x2
A1x3
A1x4
A1x5
A1x6
A1x7
A1x8
A1x9
A1x1
0A
1x1
1A1
x12
A1
x1
3
A1x14
A1x15
A1x16
A1x17
A1x18
A1x19
A1x20
A1x21
A1x22
A1x23
A1x24
A1x25
A1x26
A1x27
A1x28
A1x29
A1x30
A1x31
A1x32
A1x33
A1x34
A1x35
A1x36
A1x37
A1x38
A1x39
A1x40
A1x41
A1x42
A1x43
A1x44
A1x45
A1x46
A1x47
A1x48
A1x49
A1x50
A1x51
A1x52
A1x53
A1x54
A1x55
A1x56
A1x57
A1x58
A1x59
A1x60
A1x61
A1x62
A1x63
A1x64
A1x65
A1x66
A1x67
A1x68
A1x69
A1x70
A1x71
A1x72
A1x73
A1x74
A1x75
A1x76
A1x77
A1x78 U1
U1x1 U1x2 U1x3 U1x4
U1x5
U1x6
U1x7
U1x8
U1x9
U1x10
U1x11
U1x12
U1x13
U1x14
U1x15
U1x16
U1x17
U1x18
U1x19
U1x20
U1x21
U1x22
U1x23
U1x24
U1x25
U1x26
U1x27
U1x28
U1x29
U1x30
U1x31
U1x32
U1x33
U1x34
U1x35
U1x36
U1x37 U1x38 U1x39 U1x40
U2
U2x1 U2x2 U2x3 U2x4
U2x5
U2x6
U2x7
U2x8
U2x9
U2x10
U2x11
U2x12
U2x13
U2x14
U2x15
U2x16
U2x17
U2x18
U2x19
U2x20
U2x21
U2x22
U2x23
U2x24
U2x25
U2x26
U2x27
U2x28
U2x29
U2x30
U2x31
U2x32
U2x33
U2x34
U2x35
U2x36
U2x37 U2x38 U2x39 U2x40
U3
U3x1 U3x2 U3x3 U3x4
U3x5
U3x6
U3x7
U3x8
U3x9
U3x10
U3x11
U3x12
U3x13
U3x14
U3x15
U3x16
U3x17
U3x18
U3x19
U3x20
U3x21
U3x22
U3x23
U3x24
U3x25
U3x26
U3x27
U3x28
U3x29
U3x30
U3x31
U3x32
U3x33
U3x34
U3x35
U3x36
U3x37 U3x38 U3x39 U3x40
A1
A1x1
A1x2
A1x3
A1x4
A1x5
A1x6
A1x7
A1x8
A1x9
A1x1
0A
1x1
1A1
x12
A1
x1
3
A1x14
A1x15
A1x16
A1x17
A1x18
A1x19
A1x20
A1x21
A1x22
A1x23
A1x24
A1x25
A1x26
A1x27
A1x28
A1x29
A1x30
A1x31
A1x32
A1x33
A1x34
A1x35
A1x36
A1x37
A1x38
A1x39
A1x40
A1x41
A1x42
A1x43
A1x44
A1x45
A1x46
A1x47
A1x48
A1x49
A1x50
A1x51
A1x52
A1x53
A1x54
A1x55
A1x56
A1x57
A1x58
A1x59
A1x60
A1x61
A1x62
A1x63
A1x64
A1x65
A1x66
A1x67
A1x68
A1x69
A1x70
A1x71
A1x72
A1x73
A1x74
A1x75
A1x76
A1x77
A1x78 U1
U1x1 U1x2 U1x3 U1x4
U1x5
U1x6
U1x7
U1x8
U1x9
U1x10
U1x11
U1x12
U1x13
U1x14
U1x15
U1x16
U1x17
U1x18
U1x19
U1x20
U1x21
U1x22
U1x23
U1x24
U1x25
U1x26
U1x27
U1x28
U1x29
U1x30
U1x31
U1x32
U1x33
U1x34
U1x35
U1x36
U1x37 U1x38 U1x39 U1x40
U2
U2x1 U2x2 U2x3 U2x4
U2x5
U2x6
U2x7
U2x8
U2x9
U2x10
U2x11
U2x12
U2x13
U2x14
U2x15
U2x16
U2x17
U2x18
U2x19
U2x20
U2x21
U2x22
U2x23
U2x24
U2x25
U2x26
U2x27
U2x28
U2x29
U2x30
U2x31
U2x32
U2x33
U2x34
U2x35
U2x36
U2x37 U2x38 U2x39 U2x40
U3
U3x1 U3x2 U3x3 U3x4
U3x5
U3x6
U3x7
U3x8
U3x9
U3x10
U3x11
U3x12
U3x13
U3x14
U3x15
U3x16
U3x17
U3x18
U3x19
U3x20
U3x21
U3x22
U3x23
U3x24
U3x25
U3x26
U3x27
U3x28
U3x29
U3x30
U3x31
U3x32
U3x33
U3x34
U3x35
U3x36
U3x37 U3x38 U3x39 U3x40
A1
A1x1
A1x2
A1x3
A1x4
A1x5
A1x6
A1x7
A1x8
A1x9
A1x1
0A
1x1
1A1
x12
A1
x1
3
A1x14
A1x15
A1x16
A1x17
A1x18
A1x19
A1x20
A1x21
A1x22
A1x23
A1x24
A1x25
A1x26
A1x27
A1x28
A1x29
A1x30
A1x31
A1x32
A1x33
A1x34
A1x35
A1x36
A1x37
A1x38
A1x39
A1x40
A1x41
A1x42
A1x43
A1x44
A1x45
A1x46
A1x47
A1x48
A1x49
A1x50
A1x51
A1x52
A1x53
A1x54
A1x55
A1x56
A1x57
A1x58
A1x59
A1x60
A1x61
A1x62
A1x63
A1x64
A1x65
A1x66
A1x67
A1x68
A1x69
A1x70
A1x71
A1x72
A1x73
A1x74
A1x75
A1x76
A1x77
A1x78 U1
U1x1 U1x2 U1x3 U1x4
U1x5
U1x6
U1x7
U1x8
U1x9
U1x10
U1x11
U1x12
U1x13
U1x14
U1x15
U1x16
U1x17
U1x18
U1x19
U1x20
U1x21
U1x22
U1x23
U1x24
U1x25
U1x26
U1x27
U1x28
U1x29
U1x30
U1x31
U1x32
U1x33
U1x34
U1x35
U1x36
U1x37 U1x38 U1x39 U1x40
U2
U2x1 U2x2 U2x3 U2x4
U2x5
U2x6
U2x7
U2x8
U2x9
U2x10
U2x11
U2x12
U2x13
U2x14
U2x15
U2x16
U2x17
U2x18
U2x19
U2x20
U2x21
U2x22
U2x23
U2x24
U2x25
U2x26
U2x27
U2x28
U2x29
U2x30
U2x31
U2x32
U2x33
U2x34
U2x35
U2x36
U2x37 U2x38 U2x39 U2x40
U3
U3x1 U3x2 U3x3 U3x4
U3x5
U3x6
U3x7
U3x8
U3x9
U3x10
U3x11
U3x12
U3x13
U3x14
U3x15
U3x16
U3x17
U3x18
U3x19
U3x20
U3x21
U3x22
U3x23
U3x24
U3x25
U3x26
U3x27
U3x28
U3x29
U3x30
U3x31
U3x32
U3x33
U3x34
U3x35
U3x36
U3x37 U3x38 U3x39 U3x40
A1
A1x1
A1x2
A1x3
A1x4
A1x5
A1x6
A1x7
A1x8
A1x9
A1x1
0A
1x1
1A1
x12
A1
x1
3
A1x14
A1x15
A1x16
A1x17
A1x18
A1x19
A1x20
A1x21
A1x22
A1x23
A1x24
A1x25
A1x26
A1x27
A1x28
A1x29
A1x30
A1x31
A1x32
A1x33
A1x34
A1x35
A1x36
A1x37
A1x38
A1x39
A1x40
A1x41
A1x42
A1x43
A1x44
A1x45
A1x46
A1x47
A1x48
A1x49
A1x50
A1x51
A1x52
A1x53
A1x54
A1x55
A1x56
A1x57
A1x58
A1x59
A1x60
A1x61
A1x62
A1x63
A1x64
A1x65
A1x66
A1x67
A1x68
A1x69
A1x70
A1x71
A1x72
A1x73
A1x74
A1x75
A1x76
A1x77
A1x78 U1
U1x1 U1x2 U1x3 U1x4
U1x5
U1x6
U1x7
U1x8
U1x9
U1x10
U1x11
U1x12
U1x13
U1x14
U1x15
U1x16
U1x17
U1x18
U1x19
U1x20
U1x21
U1x22
U1x23
U1x24
U1x25
U1x26
U1x27
U1x28
U1x29
U1x30
U1x31
U1x32
U1x33
U1x34
U1x35
U1x36
U1x37 U1x38 U1x39 U1x40
U2
U2x1 U2x2 U2x3 U2x4
U2x5
U2x6
U2x7
U2x8
U2x9
U2x10
U2x11
U2x12
U2x13
U2x14
U2x15
U2x16
U2x17
U2x18
U2x19
U2x20
U2x21
U2x22
U2x23
U2x24
U2x25
U2x26
U2x27
U2x28
U2x29
U2x30
U2x31
U2x32
U2x33
U2x34
U2x35
U2x36
U2x37 U2x38 U2x39 U2x40
U3
U3x1 U3x2 U3x3 U3x4
U3x5
U3x6
U3x7
U3x8
U3x9
U3x10
U3x11
U3x12
U3x13
U3x14
U3x15
U3x16
U3x17
U3x18
U3x19
U3x20
U3x21
U3x22
U3x23
U3x24
U3x25
U3x26
U3x27
U3x28
U3x29
U3x30
U3x31
U3x32
U3x33
U3x34
U3x35
U3x36
U3x37 U3x38 U3x39 U3x40
A1
A1x1
A1x2
A1x3
A1x4
A1x5
A1x6
A1x7
A1x8
A1x9
A1x1
0A
1x1
1A1
x12
A1
x1
3
A1x14
A1x15
A1x16
A1x17
A1x18
A1x19
A1x20
A1x21
A1x22
A1x23
A1x24
A1x25
A1x26
A1x27
A1x28
A1x29
A1x30
A1x31
A1x32
A1x33
A1x34
A1x35
A1x36
A1x37
A1x38
A1x39
A1x40
A1x41
A1x42
A1x43
A1x44
A1x45
A1x46
A1x47
A1x48
A1x49
A1x50
A1x51
A1x52
A1x53
A1x54
A1x55
A1x56
A1x57
A1x58
A1x59
A1x60
A1x61
A1x62
A1x63
A1x64
A1x65
A1x66
A1x67
A1x68
A1x69
A1x70
A1x71
A1x72
A1x73
A1x74
A1x75
A1x76
A1x77
A1x78 U1
U1x1 U1x2 U1x3 U1x4
U1x5
U1x6
U1x7
U1x8
U1x9
U1x10
U1x11
U1x12
U1x13
U1x14
U1x15
U1x16
U1x17
U1x18
U1x19
U1x20
U1x21
U1x22
U1x23
U1x24
U1x25
U1x26
U1x27
U1x28
U1x29
U1x30
U1x31
U1x32
U1x33
U1x34
U1x35
U1x36
U1x37 U1x38 U1x39 U1x40
U2
U2x1 U2x2 U2x3 U2x4
U2x5
U2x6
U2x7
U2x8
U2x9
U2x10
U2x11
U2x12
U2x13
U2x14
U2x15
U2x16
U2x17
U2x18
U2x19
U2x20
U2x21
U2x22
U2x23
U2x24
U2x25
U2x26
U2x27
U2x28
U2x29
U2x30
U2x31
U2x32
U2x33
U2x34
U2x35
U2x36
U2x37 U2x38 U2x39 U2x40
U3
U3x1 U3x2 U3x3 U3x4
U3x5
U3x6
U3x7
U3x8
U3x9
U3x10
U3x11
U3x12
U3x13
U3x14
U3x15
U3x16
U3x17
U3x18
U3x19
U3x20
U3x21
U3x22
U3x23
U3x24
U3x25
U3x26
U3x27
U3x28
U3x29
U3x30
U3x31
U3x32
U3x33
U3x34
U3x35
U3x36
U3x37 U3x38 U3x39 U3x40
A1
A1x1
A1x2
A1x3
A1x4
A1x5
A1x6
A1x7
A1x8
A1x9
A1x1
0A
1x1
1A1
x12
A1
x1
3
A1x14
A1x15
A1x16
A1x17
A1x18
A1x19
A1x20
A1x21
A1x22
A1x23
A1x24
A1x25
A1x26
A1x27
A1x28
A1x29
A1x30
A1x31
A1x32
A1x33
A1x34
A1x35
A1x36
A1x37
A1x38
A1x39
A1x40
A1x41
A1x42
A1x43
A1x44
A1x45
A1x46
A1x47
A1x48
A1x49
A1x50
A1x51
A1x52
A1x53
A1x54
A1x55
A1x56
A1x57
A1x58
A1x59
A1x60
A1x61
A1x62
A1x63
A1x64
A1x65
A1x66
A1x67
A1x68
A1x69
A1x70
A1x71
A1x72
A1x73
A1x74
A1x75
A1x76
A1x77
A1x78 U1
U1x1 U1x2 U1x3 U1x4
U1x5
U1x6
U1x7
U1x8
U1x9
U1x10
U1x11
U1x12
U1x13
U1x14
U1x15
U1x16
U1x17
U1x18
U1x19
U1x20
U1x21
U1x22
U1x23
U1x24
U1x25
U1x26
U1x27
U1x28
U1x29
U1x30
U1x31
U1x32
U1x33
U1x34
U1x35
U1x36
U1x37 U1x38 U1x39 U1x40
U2
U2x1 U2x2 U2x3 U2x4
U2x5
U2x6
U2x7
U2x8
U2x9
U2x10
U2x11
U2x12
U2x13
U2x14
U2x15
U2x16
U2x17
U2x18
U2x19
U2x20
U2x21
U2x22
U2x23
U2x24
U2x25
U2x26
U2x27
U2x28
U2x29
U2x30
U2x31
U2x32
U2x33
U2x34
U2x35
U2x36
U2x37 U2x38 U2x39 U2x40
U3
U3x1 U3x2 U3x3 U3x4
U3x5
U3x6
U3x7
U3x8
U3x9
U3x10
U3x11
U3x12
U3x13
U3x14
U3x15
U3x16
U3x17
U3x18
U3x19
U3x20
U3x21
U3x22
U3x23
U3x24
U3x25
U3x26
U3x27
U3x28
U3x29
U3x30
U3x31
U3x32
U3x33
U3x34
U3x35
U3x36
U3x37 U3x38 U3x39 U3x40
A1
A1x1
A1x2
A1x3
A1x4
A1x5
A1x6
A1x7
A1x8
A1x9
A1x1
0A
1x1
1A1
x12
A1
x1
3
A1x14
A1x15
A1x16
A1x17
A1x18
A1x19
A1x20
A1x21
A1x22
A1x23
A1x24
A1x25
A1x26
A1x27
A1x28
A1x29
A1x30
A1x31
A1x32
A1x33
A1x34
A1x35
A1x36
A1x37
A1x38
A1x39
A1x40
A1x41
A1x42
A1x43
A1x44
A1x45
A1x46
A1x47
A1x48
A1x49
A1x50
A1x51
A1x52
A1x53
A1x54
A1x55
A1x56
A1x57
A1x58
A1x59
A1x60
A1x61
A1x62
A1x63
A1x64
A1x65
A1x66
A1x67
A1x68
A1x69
A1x70
A1x71
A1x72
A1x73
A1x74
A1x75
A1x76
A1x77
A1x78 U1
U1x1 U1x2 U1x3 U1x4
U1x5
U1x6
U1x7
U1x8
U1x9
U1x10
U1x11
U1x12
U1x13
U1x14
U1x15
U1x16
U1x17
U1x18
U1x19
U1x20
U1x21
U1x22
U1x23
U1x24
U1x25
U1x26
U1x27
U1x28
U1x29
U1x30
U1x31
U1x32
U1x33
U1x34
U1x35
U1x36
U1x37 U1x38 U1x39 U1x40
U2
U2x1 U2x2 U2x3 U2x4
U2x5
U2x6
U2x7
U2x8
U2x9
U2x10
U2x11
U2x12
U2x13
U2x14
U2x15
U2x16
U2x17
U2x18
U2x19
U2x20
U2x21
U2x22
U2x23
U2x24
U2x25
U2x26
U2x27
U2x28
U2x29
U2x30
U2x31
U2x32
U2x33
U2x34
U2x35
U2x36
U2x37 U2x38 U2x39 U2x40
U3
U3x1 U3x2 U3x3 U3x4
U3x5
U3x6
U3x7
U3x8
U3x9
U3x10
U3x11
U3x12
U3x13
U3x14
U3x15
U3x16
U3x17
U3x18
U3x19
U3x20
U3x21
U3x22
U3x23
U3x24
U3x25
U3x26
U3x27
U3x28
U3x29
U3x30
U3x31
U3x32
U3x33
U3x34
U3x35
U3x36
U3x37 U3x38 U3x39 U3x40
A1
A1x1
A1x2
A1x3
A1x4
A1x5
A1x6
A1x7
A1x8
A1x9
A1x1
0A
1x1
1A1
x12
A1
x1
3
A1x14
A1x15
A1x16
A1x17
A1x18
A1x19
A1x20
A1x21
A1x22
A1x23
A1x24
A1x25
A1x26
A1x27
A1x28
A1x29
A1x30
A1x31
A1x32
A1x33
A1x34
A1x35
A1x36
A1x37
A1x38
A1x39
A1x40
A1x41
A1x42
A1x43
A1x44
A1x45
A1x46
A1x47
A1x48
A1x49
A1x50
A1x51
A1x52
A1x53
A1x54
A1x55
A1x56
A1x57
A1x58
A1x59
A1x60
A1x61
A1x62
A1x63
A1x64
A1x65
A1x66
A1x67
A1x68
A1x69
A1x70
A1x71
A1x72
A1x73
A1x74
A1x75
A1x76
A1x77
A1x78 U1
U1x1 U1x2 U1x3 U1x4
U1x5
U1x6
U1x7
U1x8
U1x9
U1x10
U1x11
U1x12
U1x13
U1x14
U1x15
U1x16
U1x17
U1x18
U1x19
U1x20
U1x21
U1x22
U1x23
U1x24
U1x25
U1x26
U1x27
U1x28
U1x29
U1x30
U1x31
U1x32
U1x33
U1x34
U1x35
U1x36
U1x37 U1x38 U1x39 U1x40
U2
U2x1 U2x2 U2x3 U2x4
U2x5
U2x6
U2x7
U2x8
U2x9
U2x10
U2x11
U2x12
U2x13
U2x14
U2x15
U2x16
U2x17
U2x18
U2x19
U2x20
U2x21
U2x22
U2x23
U2x24
U2x25
U2x26
U2x27
U2x28
U2x29
U2x30
U2x31
U2x32
U2x33
U2x34
U2x35
U2x36
U2x37 U2x38 U2x39 U2x40
U3
U3x1 U3x2 U3x3 U3x4
U3x5
U3x6
U3x7
U3x8
U3x9
U3x10
U3x11
U3x12
U3x13
U3x14
U3x15
U3x16
U3x17
U3x18
U3x19
U3x20
U3x21
U3x22
U3x23
U3x24
U3x25
U3x26
U3x27
U3x28
U3x29
U3x30
U3x31
U3x32
U3x33
U3x34
U3x35
U3x36
U3x37 U3x38 U3x39 U3x40
A1
A1x1
A1x2
A1x3
A1x4
A1x5
A1x6
A1x7
A1x8
A1x9
A1x1
0A
1x1
1A1
x12
A1
x1
3
A1x14
A1x15
A1x16
A1x17
A1x18
A1x19
A1x20
A1x21
A1x22
A1x23
A1x24
A1x25
A1x26
A1x27
A1x28
A1x29
A1x30
A1x31
A1x32
A1x33
A1x34
A1x35
A1x36
A1x37
A1x38
A1x39
A1x40
A1x41
A1x42
A1x43
A1x44
A1x45
A1x46
A1x47
A1x48
A1x49
A1x50
A1x51
A1x52
A1x53
A1x54
A1x55
A1x56
A1x57
A1x58
A1x59
A1x60
A1x61
A1x62
A1x63
A1x64
A1x65
A1x66
A1x67
A1x68
A1x69
A1x70
A1x71
A1x72
A1x73
A1x74
A1x75
A1x76
A1x77
A1x78 U1
U1x1 U1x2 U1x3 U1x4
U1x5
U1x6
U1x7
U1x8
U1x9
U1x10
U1x11
U1x12
U1x13
U1x14
U1x15
U1x16
U1x17
U1x18
U1x19
U1x20
U1x21
U1x22
U1x23
U1x24
U1x25
U1x26
U1x27
U1x28
U1x29
U1x30
U1x31
U1x32
U1x33
U1x34
U1x35
U1x36
U1x37 U1x38 U1x39 U1x40
U2
U2x1 U2x2 U2x3 U2x4
U2x5
U2x6
U2x7
U2x8
U2x9
U2x10
U2x11
U2x12
U2x13
U2x14
U2x15
U2x16
U2x17
U2x18
U2x19
U2x20
U2x21
U2x22
U2x23
U2x24
U2x25
U2x26
U2x27
U2x28
U2x29
U2x30
U2x31
U2x32
U2x33
U2x34
U2x35
U2x36
U2x37 U2x38 U2x39 U2x40
U3
U3x1 U3x2 U3x3 U3x4
U3x5
U3x6
U3x7
U3x8
U3x9
U3x10
U3x11
U3x12
U3x13
U3x14
U3x15
U3x16
U3x17
U3x18
U3x19
U3x20
U3x21
U3x22
U3x23
U3x24
U3x25
U3x26
U3x27
U3x28
U3x29
U3x30
U3x31
U3x32
U3x33
U3x34
U3x35
U3x36
U3x37 U3x38 U3x39 U3x40
A1
A1x1
A1x2
A1x3
A1x4
A1x5
A1x6
A1x7
A1x8
A1x9
A1x1
0A
1x1
1A1
x12
A1
x1
3
A1x14
A1x15
A1x16
A1x17
A1x18
A1x19
A1x20
A1x21
A1x22
A1x23
A1x24
A1x25
A1x26
A1x27
A1x28
A1x29
A1x30
A1x31
A1x32
A1x33
A1x34
A1x35
A1x36
A1x37
A1x38
A1x39
A1x40
A1x41
A1x42
A1x43
A1x44
A1x45
A1x46
A1x47
A1x48
A1x49
A1x50
A1x51
A1x52
A1x53
A1x54
A1x55
A1x56
A1x57
A1x58
A1x59
A1x60
A1x61
A1x62
A1x63
A1x64
A1x65
A1x66
A1x67
A1x68
A1x69
A1x70
A1x71
A1x72
A1x73
A1x74
A1x75
A1x76
A1x77
A1x78 U1
U1x1 U1x2 U1x3 U1x4
U1x5
U1x6
U1x7
U1x8
U1x9
U1x10
U1x11
U1x12
U1x13
U1x14
U1x15
U1x16
U1x17
U1x18
U1x19
U1x20
U1x21
U1x22
U1x23
U1x24
U1x25
U1x26
U1x27
U1x28
U1x29
U1x30
U1x31
U1x32
U1x33
U1x34
U1x35
U1x36
U1x37 U1x38 U1x39 U1x40
U2
U2x1 U2x2 U2x3 U2x4
U2x5
U2x6
U2x7
U2x8
U2x9
U2x10
U2x11
U2x12
U2x13
U2x14
U2x15
U2x16
U2x17
U2x18
U2x19
U2x20
U2x21
U2x22
U2x23
U2x24
U2x25
U2x26
U2x27
U2x28
U2x29
U2x30
U2x31
U2x32
U2x33
U2x34
U2x35
U2x36
U2x37 U2x38 U2x39 U2x40
U3
U3x1 U3x2 U3x3 U3x4
U3x5
U3x6
U3x7
U3x8
U3x9
U3x10
U3x11
U3x12
U3x13
U3x14
U3x15
U3x16
U3x17
U3x18
U3x19
U3x20
U3x21
U3x22
U3x23
U3x24
U3x25
U3x26
U3x27
U3x28
U3x29
U3x30
U3x31
U3x32
U3x33
U3x34
U3x35
U3x36
U3x37 U3x38 U3x39 U3x40
A1
A1x1
A1x2
A1x3
A1x4
A1x5
A1x6
A1x7
A1x8
A1x9
A1x1
0A
1x1
1A1
x12
A1
x1
3
A1x14
A1x15
A1x16
A1x17
A1x18
A1x19
A1x20
A1x21
A1x22
A1x23
A1x24
A1x25
A1x26
A1x27
A1x28
A1x29
A1x30
A1x31
A1x32
A1x33
A1x34
A1x35
A1x36
A1x37
A1x38
A1x39
A1x40
A1x41
A1x42
A1x43
A1x44
A1x45
A1x46
A1x47
A1x48
A1x49
A1x50
A1x51
A1x52
A1x53
A1x54
A1x55
A1x56
A1x57
A1x58
A1x59
A1x60
A1x61
A1x62
A1x63
A1x64
A1x65
A1x66
A1x67
A1x68
A1x69
A1x70
A1x71
A1x72
A1x73
A1x74
A1x75
A1x76
A1x77
A1x78 U1
U1x1 U1x2 U1x3 U1x4
U1x5
U1x6
U1x7
U1x8
U1x9
U1x10
U1x11
U1x12
U1x13
U1x14
U1x15
U1x16
U1x17
U1x18
U1x19
U1x20
U1x21
U1x22
U1x23
U1x24
U1x25
U1x26
U1x27
U1x28
U1x29
U1x30
U1x31
U1x32
U1x33
U1x34
U1x35
U1x36
U1x37 U1x38 U1x39 U1x40
U2
U2x1 U2x2 U2x3 U2x4
U2x5
U2x6
U2x7
U2x8
U2x9
U2x10
U2x11
U2x12
U2x13
U2x14
U2x15
U2x16
U2x17
U2x18
U2x19
U2x20
U2x21
U2x22
U2x23
U2x24
U2x25
U2x26
U2x27
U2x28
U2x29
U2x30
U2x31
U2x32
U2x33
U2x34
U2x35
U2x36
U2x37 U2x38 U2x39 U2x40
U3
U3x1 U3x2 U3x3 U3x4
U3x5
U3x6
U3x7
U3x8
U3x9
U3x10
U3x11
U3x12
U3x13
U3x14
U3x15
U3x16
U3x17
U3x18
U3x19
U3x20
U3x21
U3x22
U3x23
U3x24
U3x25
U3x26
U3x27
U3x28
U3x29
U3x30
U3x31
U3x32
U3x33
U3x34
U3x35
U3x36
U3x37 U3x38 U3x39 U3x40
A1
A1x1
A1x2
A1x3
A1x4
A1x5
A1x6
A1x7
A1x8
A1x9
A1x1
0A
1x1
1A1
x12
A1
x1
3
A1x14
A1x15
A1x16
A1x17
A1x18
A1x19
A1x20
A1x21
A1x22
A1x23
A1x24
A1x25
A1x26
A1x27
A1x28
A1x29
A1x30
A1x31
A1x32
A1x33
A1x34
A1x35
A1x36
A1x37
A1x38
A1x39
A1x40
A1x41
A1x42
A1x43
A1x44
A1x45
A1x46
A1x47
A1x48
A1x49
A1x50
A1x51
A1x52
A1x53
A1x54
A1x55
A1x56
A1x57
A1x58
A1x59
A1x60
A1x61
A1x62
A1x63
A1x64
A1x65
A1x66
A1x67
A1x68
A1x69
A1x70
A1x71
A1x72
A1x73
A1x74
A1x75
A1x76
A1x77
A1x78 U1
U1x1 U1x2 U1x3 U1x4
U1x5
U1x6
U1x7
U1x8
U1x9
U1x10
U1x11
U1x12
U1x13
U1x14
U1x15
U1x16
U1x17
U1x18
U1x19
U1x20
U1x21
U1x22
U1x23
U1x24
U1x25
U1x26
U1x27
U1x28
U1x29
U1x30
U1x31
U1x32
U1x33
U1x34
U1x35
U1x36
U1x37 U1x38 U1x39 U1x40
U2
U2x1 U2x2 U2x3 U2x4
U2x5
U2x6
U2x7
U2x8
U2x9
U2x10
U2x11
U2x12
U2x13
U2x14
U2x15
U2x16
U2x17
U2x18
U2x19
U2x20
U2x21
U2x22
U2x23
U2x24
U2x25
U2x26
U2x27
U2x28
U2x29
U2x30
U2x31
U2x32
U2x33
U2x34
U2x35
U2x36
U2x37 U2x38 U2x39 U2x40
U3
U3x1 U3x2 U3x3 U3x4
U3x5
U3x6
U3x7
U3x8
U3x9
U3x10
U3x11
U3x12
U3x13
U3x14
U3x15
U3x16
U3x17
U3x18
U3x19
U3x20
U3x21
U3x22
U3x23
U3x24
U3x25
U3x26
U3x27
U3x28
U3x29
U3x30
U3x31
U3x32
U3x33
U3x34
U3x35
U3x36
U3x37 U3x38 U3x39 U3x40
A1
A1x1
A1x2
A1x3
A1x4
A1x5
A1x6
A1x7
A1x8
A1x9
A1x1
0A
1x1
1A1
x12
A1
x1
3
A1x14
A1x15
A1x16
A1x17
A1x18
A1x19
A1x20
A1x21
A1x22
A1x23
A1x24
A1x25
A1x26
A1x27
A1x28
A1x29
A1x30
A1x31
A1x32
A1x33
A1x34
A1x35
A1x36
A1x37
A1x38
A1x39
A1x40
A1x41
A1x42
A1x43
A1x44
A1x45
A1x46
A1x47
A1x48
A1x49
A1x50
A1x51
A1x52
A1x53
A1x54
A1x55
A1x56
A1x57
A1x58
A1x59
A1x60
A1x61
A1x62
A1x63
A1x64
A1x65
A1x66
A1x67
A1x68
A1x69
A1x70
A1x71
A1x72
A1x73
A1x74
A1x75
A1x76
A1x77
A1x78 U1
U1x1 U1x2 U1x3 U1x4
U1x5
U1x6
U1x7
U1x8
U1x9
U1x10
U1x11
U1x12
U1x13
U1x14
U1x15
U1x16
U1x17
U1x18
U1x19
U1x20
U1x21
U1x22
U1x23
U1x24
U1x25
U1x26
U1x27
U1x28
U1x29
U1x30
U1x31
U1x32
U1x33
U1x34
U1x35
U1x36
U1x37 U1x38 U1x39 U1x40
U2
U2x1 U2x2 U2x3 U2x4
U2x5
U2x6
U2x7
U2x8
U2x9
U2x10
U2x11
U2x12
U2x13
U2x14
U2x15
U2x16
U2x17
U2x18
U2x19
U2x20
U2x21
U2x22
U2x23
U2x24
U2x25
U2x26
U2x27
U2x28
U2x29
U2x30
U2x31
U2x32
U2x33
U2x34
U2x35
U2x36
U2x37 U2x38 U2x39 U2x40
U3
U3x1 U3x2 U3x3 U3x4
U3x5
U3x6
U3x7
U3x8
U3x9
U3x10
U3x11
U3x12
U3x13
U3x14
U3x15
U3x16
U3x17
U3x18
U3x19
U3x20
U3x21
U3x22
U3x23
U3x24
U3x25
U3x26
U3x27
U3x28
U3x29
U3x30
U3x31
U3x32
U3x33
U3x34
U3x35
U3x36
U3x37 U3x38 U3x39 U3x40
A1
A1x1
A1x2
A1x3
A1x4
A1x5
A1x6
A1x7
A1x8
A1x9
A1x1
0A
1x1
1A1
x12
A1
x1
3
A1x14
A1x15
A1x16
A1x17
A1x18
A1x19
A1x20
A1x21
A1x22
A1x23
A1x24
A1x25
A1x26
A1x27
A1x28
A1x29
A1x30
A1x31
A1x32
A1x33
A1x34
A1x35
A1x36
A1x37
A1x38
A1x39
A1x40
A1x41
A1x42
A1x43
A1x44
A1x45
A1x46
A1x47
A1x48
A1x49
A1x50
A1x51
A1x52
A1x53
A1x54
A1x55
A1x56
A1x57
A1x58
A1x59
A1x60
A1x61
A1x62
A1x63
A1x64
A1x65
A1x66
A1x67
A1x68
A1x69
A1x70
A1x71
A1x72
A1x73
A1x74
A1x75
A1x76
A1x77
A1x78 U1
U1x1 U1x2 U1x3 U1x4
U1x5
U1x6
U1x7
U1x8
U1x9
U1x10
U1x11
U1x12
U1x13
U1x14
U1x15
U1x16
U1x17
U1x18
U1x19
U1x20
U1x21
U1x22
U1x23
U1x24
U1x25
U1x26
U1x27
U1x28
U1x29
U1x30
U1x31
U1x32
U1x33
U1x34
U1x35
U1x36
U1x37 U1x38 U1x39 U1x40
U2
U2x1 U2x2 U2x3 U2x4
U2x5
U2x6
U2x7
U2x8
U2x9
U2x10
U2x11
U2x12
U2x13
U2x14
U2x15
U2x16
U2x17
U2x18
U2x19
U2x20
U2x21
U2x22
U2x23
U2x24
U2x25
U2x26
U2x27
U2x28
U2x29
U2x30
U2x31
U2x32
U2x33
U2x34
U2x35
U2x36
U2x37 U2x38 U2x39 U2x40
U3
U3x1 U3x2 U3x3 U3x4
U3x5
U3x6
U3x7
U3x8
U3x9
U3x10
U3x11
U3x12
U3x13
U3x14
U3x15
U3x16
U3x17
U3x18
U3x19
U3x20
U3x21
U3x22
U3x23
U3x24
U3x25
U3x26
U3x27
U3x28
U3x29
U3x30
U3x31
U3x32
U3x33
U3x34
U3x35
U3x36
U3x37 U3x38 U3x39 U3x40
A1
A1x1
A1x2
A1x3
A1x4
A1x5
A1x6
A1x7
A1x8
A1x9
A1x1
0A
1x1
1A1
x12
A1
x1
3
A1x14
A1x15
A1x16
A1x17
A1x18
A1x19
A1x20
A1x21
A1x22
A1x23
A1x24
A1x25
A1x26
A1x27
A1x28
A1x29
A1x30
A1x31
A1x32
A1x33
A1x34
A1x35
A1x36
A1x37
A1x38
A1x39
A1x40
A1x41
A1x42
A1x43
A1x44
A1x45
A1x46
A1x47
A1x48
A1x49
A1x50
A1x51
A1x52
A1x53
A1x54
A1x55
A1x56
A1x57
A1x58
A1x59
A1x60
A1x61
A1x62
A1x63
A1x64
A1x65
A1x66
A1x67
A1x68
A1x69
A1x70
A1x71
A1x72
A1x73
A1x74
A1x75
A1x76
A1x77
A1x78 U1
U1x1 U1x2 U1x3 U1x4
U1x5
U1x6
U1x7
U1x8
U1x9
U1x10
U1x11
U1x12
U1x13
U1x14
U1x15
U1x16
U1x17
U1x18
U1x19
U1x20
U1x21
U1x22
U1x23
U1x24
U1x25
U1x26
U1x27
U1x28
U1x29
U1x30
U1x31
U1x32
U1x33
U1x34
U1x35
U1x36
U1x37 U1x38 U1x39 U1x40
U2
U2x1 U2x2 U2x3 U2x4
U2x5
U2x6
U2x7
U2x8
U2x9
U2x10
U2x11
U2x12
U2x13
U2x14
U2x15
U2x16
U2x17
U2x18
U2x19
U2x20
U2x21
U2x22
U2x23
U2x24
U2x25
U2x26
U2x27
U2x28
U2x29
U2x30
U2x31
U2x32
U2x33
U2x34
U2x35
U2x36
U2x37 U2x38 U2x39 U2x40
U3
U3x1 U3x2 U3x3 U3x4
U3x5
U3x6
U3x7
U3x8
U3x9
U3x10
U3x11
U3x12
U3x13
U3x14
U3x15
U3x16
U3x17
U3x18
U3x19
U3x20
U3x21
U3x22
U3x23
U3x24
U3x25
U3x26
U3x27
U3x28
U3x29
U3x30
U3x31
U3x32
U3x33
U3x34
U3x35
U3x36
U3x37 U3x38 U3x39 U3x40
A1
A1x1
A1x2
A1x3
A1x4
A1x5
A1x6
A1x7
A1x8
A1x9
A1x1
0A
1x1
1A1
x12
A1
x1
3
A1x14
A1x15
A1x16
A1x17
A1x18
A1x19
A1x20
A1x21
A1x22
A1x23
A1x24
A1x25
A1x26
A1x27
A1x28
A1x29
A1x30
A1x31
A1x32
A1x33
A1x34
A1x35
A1x36
A1x37
A1x38
A1x39
A1x40
A1x41
A1x42
A1x43
A1x44
A1x45
A1x46
A1x47
A1x48
A1x49
A1x50
A1x51
A1x52
A1x53
A1x54
A1x55
A1x56
A1x57
A1x58
A1x59
A1x60
A1x61
A1x62
A1x63
A1x64
A1x65
A1x66
A1x67
A1x68
A1x69
A1x70
A1x71
A1x72
A1x73
A1x74
A1x75
A1x76
A1x77
A1x78 U1
U1x1 U1x2 U1x3 U1x4
U1x5
U1x6
U1x7
U1x8
U1x9
U1x10
U1x11
U1x12
U1x13
U1x14
U1x15
U1x16
U1x17
U1x18
U1x19
U1x20
U1x21
U1x22
U1x23
U1x24
U1x25
U1x26
U1x27
U1x28
U1x29
U1x30
U1x31
U1x32
U1x33
U1x34
U1x35
U1x36
U1x37 U1x38 U1x39 U1x40
U2
U2x1 U2x2 U2x3 U2x4
U2x5
U2x6
U2x7
U2x8
U2x9
U2x10
U2x11
U2x12
U2x13
U2x14
U2x15
U2x16
U2x17
U2x18
U2x19
U2x20
U2x21
U2x22
U2x23
U2x24
U2x25
U2x26
U2x27
U2x28
U2x29
U2x30
U2x31
U2x32
U2x33
U2x34
U2x35
U2x36
U2x37 U2x38 U2x39 U2x40
U3
U3x1 U3x2 U3x3 U3x4
U3x5
U3x6
U3x7
U3x8
U3x9
U3x10
U3x11
U3x12
U3x13
U3x14
U3x15
U3x16
U3x17
U3x18
U3x19
U3x20
U3x21
U3x22
U3x23
U3x24
U3x25
U3x26
U3x27
U3x28
U3x29
U3x30
U3x31
U3x32
U3x33
U3x34
U3x35
U3x36
U3x37 U3x38 U3x39 U3x40
Readout & Powering viaFlexprints: T42.7Cooling in Heliumatmosphere: T75.2
02/03/16 HV-MAPS Heiko Augustin 8 / 26
The Mu3e Experiment The MuPix Testbeam Results Summary & Outlook
The Pixel TrackerReadout
1056 Pixel Sensors
up to 36 1.25 Gbit/s links
FPGA FPGA FPGA
...
34 FPGAs
SwitchingBoards
1 6 Gbit/slink each
GPUPC
GPUPC
GPUPC12 PCs
...
12 10 Gbit/slinks per
Switching Board
2 Inputseach
DataCollection
Server
MassStorage
Gbit Ethernet
Front-end(inside m
agnet) Untriggered readout1 Tbit/s raw data rateGPU based onlinereconstructionSessions:T42.5, T42.6, T22.5, T22.4,T98.1, T98.5
02/03/16 HV-MAPS Heiko Augustin 9 / 26
The Mu3e Experiment The MuPix Testbeam Results Summary & Outlook
High Voltage Monolithic Active Pixel Sensors
P-substrate
N-well
Particle
E �eld
I.Peric, P. Fischer et al., NIM A 582 (2007) 87
Deep n-well in p-doped substrateDepleted area is the active detector volume ≈ 15 µmFast charge collection via driftSensor can be thinned to < 50 µm
02/03/16 HV-MAPS Heiko Augustin 10 / 26
The Mu3e Experiment The MuPix Testbeam Results Summary & Outlook
The MuPix7 Prototype
Commercial 180 nm HV-CMOSprocessThinned to 50 µm
02/03/16 HV-MAPS Heiko Augustin 11 / 26
The Mu3e Experiment The MuPix Testbeam Results Summary & Outlook
The MuPix7 Prototype
02/03/16 HV-MAPS Heiko Augustin 11 / 26
The Mu3e Experiment The MuPix Testbeam Results Summary & Outlook
The MuPix7 Prototype
Pixel Periphery State Machine
readoutstatemachine
VCO&
PLL
8b/10bencoder
serializer LVDS
...
oth
er
pix
els
sensor CSA
comparatortuneDAC
threshold
baseline
sourcefollower
test-pulseinjection
readout
2nd amplifier
integratecharge
amplification
line driver
digital outputAC couplingvia CR filter
per pixel thresholdadjustment
02/03/16 HV-MAPS Heiko Augustin 11 / 26
The Mu3e Experiment The MuPix Testbeam Results Summary & Outlook
The Pixel
3.2× 3.2mm2 active area32× 40 pixels3× 3 diode structureIn-pixel amplifier
103 µm
80
µm
02/03/16 HV-MAPS Heiko Augustin 12 / 26
The Mu3e Experiment The MuPix Testbeam Results Summary & Outlook
The Pixel
Pixel Periphery State Machine
readoutstatemachine
VCO&
PLL
8b/10bencoder
serializer LVDS
...
oth
er
pix
els
sensor CSA
comparatortuneDAC
threshold
baseline
sourcefollower
test-pulseinjection
readout
2nd amplifier
integratecharge
amplification
line driver
digital outputAC couplingvia CR filter
per pixel thresholdadjustment
In-pixel amplifierPoint-to-point connection to periphery
02/03/16 HV-MAPS Heiko Augustin 12 / 26
The Mu3e Experiment The MuPix Testbeam Results Summary & Outlook
The Periphery
Additional amplification stageSignal digitisation8-bit time stampsZero-suppressed readout
51 µm7 µm
02/03/16 HV-MAPS Heiko Augustin 13 / 26
The Mu3e Experiment The MuPix Testbeam Results Summary & Outlook
The Periphery
Pixel Periphery State Machine
readoutstatemachine
VCO&
PLL
8b/10bencoder
serializer LVDS
...
oth
er
pix
els
sensor CSA
comparatortuneDAC
threshold
baseline
sourcefollower
test-pulseinjection
readout
2nd amplifier
integratecharge
amplification
line driver
digital outputAC couplingvia CR filter
per pixel thresholdadjustment
Individual pixel tuningCharacterise analogue behaviour
→ T72.2 & 3
02/03/16 HV-MAPS Heiko Augustin 13 / 26
The Mu3e Experiment The MuPix Testbeam Results Summary & Outlook
The Analogue Behaviour
Test of general functionalityHV-dependenceAnalogue performancePulse shape reconstructionSNR determination
More Details: T72.2, T72.3
02/03/16 HV-MAPS Heiko Augustin 14 / 26
The Mu3e Experiment The MuPix Testbeam Results Summary & Outlook
The Analogue Behaviour
DataBinomial Error Function Fit
0.58 0.60 0.62 0.64 0.66 0.68
0.0
0.2
0.4
0.6
0.8
1.0
rela
tive
num
ber o
f trig
gers
Threshold [V]
SNR=15@ 1600 e-
Test of general functionalityHV-dependenceAnalogue performancePulse shape reconstructionSNR determination
More Details: T72.2, T72.3
02/03/16 HV-MAPS Heiko Augustin 14 / 26
The Mu3e Experiment The MuPix Testbeam Results Summary & Outlook
The MuPix State Machine
02/03/16 HV-MAPS Heiko Augustin 15 / 26
The Mu3e Experiment The MuPix Testbeam Results Summary & Outlook
The MuPix State Machine
Pixel Periphery State Machine
readoutstatemachine
VCO&
PLL
8b/10bencoder
serializer LVDS
...
oth
er
pix
els
sensor CSA
comparatortuneDAC
threshold
baseline
sourcefollower
test-pulseinjection
readout
2nd amplifier
integratecharge
amplification
line driver
digital outputAC couplingvia CR filter
per pixel thresholdadjustment
On-chip readout state machineVCO & PLLLVDS Gbit data link
02/03/16 HV-MAPS Heiko Augustin 15 / 26
The Mu3e Experiment The MuPix Testbeam Results Summary & Outlook
Voltage Controlled Oscillator & Phase Locked Loop
Stable working pointChip as line driverJitter <100 ps (→ T72.2)1.25 Gbit/s 8b10b encodeddataUp to 30 MHits/s possible
02/03/16 HV-MAPS Heiko Augustin 16 / 26
The Mu3e Experiment The MuPix Testbeam Results Summary & Outlook
Power Consumption
Upper limit of 400mWcm−2
Temperature gradient of 50K (→ T75.7)Investigation of temperature dependence (→ T72.2)
02/03/16 HV-MAPS Heiko Augustin 17 / 26
The Mu3e Experiment The MuPix Testbeam Results Summary & Outlook
Testbeam Measurements
02/03/16 HV-MAPS Heiko Augustin 18 / 26
The Mu3e Experiment The MuPix Testbeam Results Summary & Outlook
Time Resolution
Sandwich scintillator setupTime resolution measured to <11 nsTime walk observed for pixel analogue behaviour
02/03/16 HV-MAPS Heiko Augustin 19 / 26
The Mu3e Experiment The MuPix Testbeam Results Summary & Outlook
Time Resolution
V
BL
MuPix7Threshold
Range
time
V
input
pu
lse
Com
para
tor
Resp
onse
ToT
Latency
MuPix7 Pulse
Threshold
smallmediumlargeEnergy-depostition
Sandwich scintillator setupTime resolution measured to <11 nsTime walk observed for pixel analogue behaviour
02/03/16 HV-MAPS Heiko Augustin 19 / 26
The Mu3e Experiment The MuPix Testbeam Results Summary & Outlook
Time Resolution
30 40 50 60 70 800
2000
4000
6000
8000
10000
12000
Trigger TimeStamp Difference Distribution for Single Events
time difference / 16 ns
Events
σ < 11 ns
Sandwich scintillator setupTime resolution measured to <11 ns
Time walk observed for pixel analogue behaviour
02/03/16 HV-MAPS Heiko Augustin 19 / 26
The Mu3e Experiment The MuPix Testbeam Results Summary & Outlook
Time Resolution
0 20 40 60 80 100 1200
50
100
150
200
250
0
10
20
30
40
50
60
70
80
90
ToTtime Trigger Difference versus ToT
Latency [2,5ns]
ToT [
10ns]
Sandwich scintillator setupTime resolution measured to <11 nsTime walk observed for pixel analogue behaviour
02/03/16 HV-MAPS Heiko Augustin 19 / 26
The Mu3e Experiment The MuPix Testbeam Results Summary & Outlook
The MuPix Telescope (T99.5)
m] µResidual of matched hit [300− 200− 100− 0 100 200 300
Ent
ries
[1/r
un]
0
50
100
150
200
250
310×mµ 19.8+-0.2 σX Residual
mµ 18.3+-0.2 σY Residual
4 layers MuPix7Use one as DUTTime sorted data (T22.4)Resolution <30 µmPosition resolved analysis
02/03/16 HV-MAPS Heiko Augustin 20 / 26
The Mu3e Experiment The MuPix Testbeam Results Summary & Outlook
Efficiency Measurements
Threshold [V]0.68 0.7 0.72 0.74 0.76 0.78
Eff
icie
ncy
0.9
0.92
0.94
0.96
0.98
199 %
Noise Rate
Efficiency
Threshold [V]
Noi
sera
te p
er p
ixel
[1/s
]
0
500
1000
1500
2000
2500
3000
3500
4000
Use telescope setup220MeV mixed pion beam provided by PSI
02/03/16 HV-MAPS Heiko Augustin 21 / 26
The Mu3e Experiment The MuPix Testbeam Results Summary & Outlook
Efficiency Measurements
Threshold [V]0.68 0.7 0.72 0.74 0.76 0.78
Eff
icie
ncy
0.9
0.92
0.94
0.96
0.98
199 %
Noise Rate
Efficiency
Threshold [V]
Noi
sera
te p
er p
ixel
[1/s
]
0
500
1000
1500
2000
2500
3000
3500
4000
Efficiencies above 99 % observedTuning results in sharp noise edgePower consumption: ≈ 300mWcm−2
02/03/16 HV-MAPS Heiko Augustin 21 / 26
The Mu3e Experiment The MuPix Testbeam Results Summary & Outlook
Crosstalk
Pixel Matrix
Digital CellsSignal lines
02/03/16 HV-MAPS Heiko Augustin 22 / 26
The Mu3e Experiment The MuPix Testbeam Results Summary & Outlook
Crosstalk
Row Address0 5 10 15 20 25 30 35
Cro
ssta
lk P
roba
bilit
y
4−10
3−10
2−10
02/03/16 HV-MAPS Heiko Augustin 22 / 26
The Mu3e Experiment The MuPix Testbeam Results Summary & Outlook
Crosstalk
Row Address0 5 10 15 20 25 30 35
Cro
ssta
lk P
roba
bilit
y
4−10
3−10
2−10
02/03/16 HV-MAPS Heiko Augustin 22 / 26
The Mu3e Experiment The MuPix Testbeam Results Summary & Outlook
Crosstalk
Row Address0 5 10 15 20 25 30 35
Cro
ssta
lk P
roba
bilit
y
4−10
3−10
2−10
Crosstalk observedMatches signal routing
02/03/16 HV-MAPS Heiko Augustin 22 / 26
The Mu3e Experiment The MuPix Testbeam Results Summary & Outlook
MuPix8 Prototype
MuP
ix8
23
mm
13mm
Submission planned for June 2016First big chip 2.3× 1.3 cm2
Pixel size 80× 80 µm2
Higher resistivity substrateFirst module prototypes
02/03/16 HV-MAPS Heiko Augustin 23 / 26
The Mu3e Experiment The MuPix Testbeam Results Summary & Outlook
Summary
Reliable characterisation setup & frame workVery well performing chip technologyFirst HV-MAPS prototype with integrated readoutMany design goals already satisfied
02/03/16 HV-MAPS Heiko Augustin 24 / 26
The Mu3e Experiment The MuPix Testbeam Results Summary & Outlook
Acknowledgments
The efficiency measurements for several power settings have beenperformed at the Test beam Facility at DESY Hamburg (Germany),a member of the Helmholtz Association (HGF).
We would like to thank the PSI for providing high rate test beamsunder excellent conditions.
We owe our SPS test beam time to the SPS team and our LHCbcolleagues, especially Heinrich, Kazu and Martin.
We thank the Institut für Kernphysik at the JGU Mainz for givingus the opportunity to take data at MAMI.
02/03/16 HV-MAPS Heiko Augustin 25 / 26
The Mu3e Experiment The MuPix Testbeam Results Summary & Outlook
Mu3e Talks
Front-End Board: T22.4Switching Board: T22.5GPU-Online Reconstruction: T42.5GPU-Telescope Reconstruction: T42.6Flexprints: T42.7MuPix T-Dependence: T72.2MuPix Tuning: T72.3Mechanic & Cooling: T75.7Track reconstruction: T98.1Detector alignment: T98.5MuPix7 Telescope: T99.5
02/03/16 HV-MAPS Heiko Augustin 26 / 26