Fundamentals of Microfabrication and Nanotechnology

Third Edition, Three-Volume SetMarc J. Madou University of California, Irvine, USA

Expanded to meet the requests and requirements of professors, students, and professionals in this rapidly evolving field

Originally composed as a single-volume textbook, the third edi-tion of this work has been broken up into three separate vol-umes. This new format allows for increased flexibility of use,comprehensiveness of coverage, and detailing of specializedmaterial.

Pedagogical Features• PowerPoint lecure slides available for download

• Review problems for each chapter

• Worked out problems within the text

• Extensive references for further reading

• Comprehensive glossary of terms

• Solutions manual available with qualifying course adoptions

• All three volumes are cross-referenced

Order the complete set and save!Fundamentals of Microfabrication and Nanotechnology, Third Edition

Three-Volume SetCatalog no. 3180, September 2009, c. 2640 pp.ISBN: 978-0-8493-3180-0, $249.95 / £159.00

Individual volumesSolid-State Physics, Fluidics, and AnalyticalTechniques in Micro- and Nanotechnology

Catalog no. 55119, September 2009, c. 1008 pp.ISBN: 978-1-4200-5511-5, $99.95 / £63.99

Manufacturing Techniques for Microfabrication and NanotechnologyCatalog no. 55194, September 2009, c. 976 pp.

ISBN: 978-1-4200-5519-1, $99.95 / £63.99

From MEMS to Bio-MEMS and Bio-NEMS:Manufacturing Techniques and Applications

Catalog no. 5516X, September 2009, c. 952 pp.ISBN: 978-1-4200-5516-0, $99.95 / £63.99

Adds the Latest Advances in Nanotechnology and Key Material on Scaling

The first two editions of Fundamentals of Microfabrication, known to industry insiders as the Bible ofMicromachining, helped pave the way for the tremendous manufacturing advances made in the last few years. Andwhile the fundamentals provided in the previous editions remain the same, dramatic growth in the field, includingadvances that the author and other pioneers have introduced and refined, requires a teaching tool specifically definedto educate the newest generation of innovators.

Save on the Complete Three-Volume Set:Catalog no. 3180, September 2009, c. 2640 pp.

ISBN: 978-0-8493-3180-0, $249.95 / £159.00

Illustratedin Color

Availableas a set orindividualvolumes

Inside: Review the contents and pricinginformation for individual volumes

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Offers a wealth of pedagogical features including solution manuals for all three volumes

A Comprehensive and flexible educational presentation

About the authorA bestselling author and proven instructor with anunparalleled track record of commercial manufacturinginnovation and excellence, Marc Madou, PhD is uniquelyqualified to produce the most complete single-authorvolume integrating the theoretical and practical aspectsMEMS and NEMS. While his innovative approaches haveimpacted all areas of micromanufacturing, ProfessorMadou specializes in the application of miniaturizationtechnology to chemical and biological problems (Bio-MEMS). In addition to holding many distinguishedacademic positions, he has founded several microma-chining companies and served on the board of manyothers.

• Chancellor’s Professor of Mechanical and AerospaceEngineering, Biomedical Engineering, and ChemicalEngineering and Materials Science at UC Irvine

• Founder, SRI International’s Microsensor Department

• Founder and president, Teknekron SensorDevelopment Corporation (TSDC)

• Visiting Miller Professor , University of California,Berkeley,

• Holder of endowed chair at The Ohio State University(chemistry, materials science. and engineering)

• Distinguished Honorary Professor, IIT Kanpur, India,

• Honorary Visiting Professor, IIT Kharagpur, India

• Visiting Professor, UNIST, South Korea (World ClassUniversity Scholar, WCU)

• Former Vice President of Advanced Technology,Nanogen, San Diego, California

Volume 1: Solid-State Physics, Fluidics, and AnalyticalTechniques in Micro- and Nanotechnology

Introduces science and engineering students to nano-technology while helping them build a qualitative and

quantitative theoretical understanding of MEMS and NEMS

An introductory nanotechnology text for advanced undergraduate and graduatescience and engineering students, this volume can be used for courses/modulesthat focus on any or all of these areas: Solid-State Physics; Micro And Nanofluidics,Photonics, Bio-MEMS/NEMS, Crystallography, and Silicon-Based Devices.

Topics include:

Catalog no. 55119, September 2009, c. 1008 pp., ISBN: 978-1-4200-5511-5, $99.95 / £63.99

• Crystallography and the crystalline materialsused in many semiconductor devices

• Quantum mechanics, the band theory ofsolids, and the relevance of quantummechanics in the context of ICs and NEMS

• Single crystal SI properties that conspire tomake SI so important

• Photonics and the optical properties of bulk3D metals, insulators, and semiconductors

• How evanescent fields on metal surfacesenable the guiding of light below the diffraction limit in plasmonics

• Effects of electron and photon confinementin lower dimensional structures

• Metamaterials and how their potential tomake perfect lenses could impact the photonic field

• A full review of the evolution of Macro-,Micro- and Nano-Fluidics

• Fluidic propulsion mechanisms and theinfluence of miniaturization on fluid behavior

• Electromechanical and optical analyticalprocesses in miniaturized components and systems

Volume 2:Manufacturing Techniques for

Microfabrication and Nanotechnology

Provides chemistry and material science students with cutting edge and comprehensive information on emerging

trends and traditional manufacturing methods

Closest in content to the second edition, this volume is designed for seniorundergraduate and graduate courses such as Micro/Nanolithography;Microfabrication/Nanofabrication Intro to MEMS/NEMS; and Micro/Nano-Manufacturing.

Topics include:

Catalog no. 55194, September 2009, c. 976 pp., ISBN: 978-1-4200-5519-1, $99.95 / £63.99

• Alternative next-generation lithographies(NGEs), including extreme ultraviolet (EUV),x-ray, and charged particle lithographies

• Lithography techniques in the early researchand development stage, such as very thinresist layers and block copolymers, zone platearray lithography, quantum lithography,and proximal probe-based techniques

• Wet chemical etching, wet bulk microma-chining, thermal removing techniques, andtraditional and nontraditional mechanicalremoving techniques

• Pattern transfer with subtractive techniques

• Gas and vapor dry etching processesincluding chemical, physical, and chemical-physical

• Recent developments in miniaturizedmechanical manufacturing equipment(desktop factories)

• Additive (forming) processes, physical vapor deposition processes, chemical vapor deposition micromachining, thin film properties, and surface micromachining

• Additive chemical, photochemical, and electrochemical processes geared towardsBio-MEMS applications; thermal energybased forming and plastic molding techniques

Volume 3:From MEMS to Bio-MEMS and Bio-NEMS:

Manufacturing Techniques and Applications

Details the scientific essentials and manufacturing techniques for the development and efficient manufacture

of market-sensitive bionanotechnology products

An unparalleled reference for manufacturing professionals, this volume meetsthe advanced needs of senior undergraduate and graduate course/ modulesin MEMS/NEMS and BIO-MEMS/NEMS. It also provides a key secondary reference for students studying scaling laws and actuators.

Topics include:

Catalog no. 5516X, September 2009, c. 952 pp., ISBN: 978-1-4200-5516-0, $99.95 / £63.99

• Both lithography-based and non-lithographymanufacturing techniques

• Biomemetics: using nature as an engineering guide

• Compares top-down and bottom-upapproaches

• Packaging, assembly, and self-assemblyfrom ICs to DNA and biological cells

• Selected new MEMS and NEMS processesand materials, metrology techniques, andmodeling

• Scaling laws, actuators, power generation,and the implementation of brains in miniaturizes devices

• Strategies for making micromachines smarter

• Transition from the laboratory to the marketplace

ExpandedInformationon Scaling

Complete professionalresource for

emerging methods and applications

Access new and improved instructionaltools: PowerPoint Slides,Worked out solutions,Review Problems