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Page 1: A 3-Axis Force Balanced Accelerometer Using a Single Proof ... · modes. Resonant frequencies along the x-, y-, and z- axes are chosen to be approximately equal for comparable performance
Page 2: A 3-Axis Force Balanced Accelerometer Using a Single Proof ... · modes. Resonant frequencies along the x-, y-, and z- axes are chosen to be approximately equal for comparable performance
Page 3: A 3-Axis Force Balanced Accelerometer Using a Single Proof ... · modes. Resonant frequencies along the x-, y-, and z- axes are chosen to be approximately equal for comparable performance
Page 4: A 3-Axis Force Balanced Accelerometer Using a Single Proof ... · modes. Resonant frequencies along the x-, y-, and z- axes are chosen to be approximately equal for comparable performance

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