8/11/2019 56121674 Soft Lithography for Dummies

1/15

"#$%&&'( )*%+( &,

-,.& $%&/,0123/#"#

$%&'() *#"&+ ,-%&.#/01-230(2)4560'.780'& 9'0:4#)0;???@?A@>>

98B%;4B C< D4;4# E)C4#&= >??F@?F@GH

mailto:magkr@ifm.liu.semailto:magkr@ifm.liu.sehttp://www.ifm.liu.se/applphys/ConjPolym/index.htmlhttp://www.ifm.liu.se/applphys/ConjPolym/index.htmlmailto:magkr@ifm.liu.semailto:magkr@ifm.liu.se

8/11/2019 56121674 Soft Lithography for Dummies

2/15

!""#$$%& '(#)& $* +*,$ "#$-*./01-2 3*/ +*,$ "#$-*./01-2 ,*/ 4(55#&67 "#89:1#8. ;8#? 1621,*,;6 4/*6.,/+1 @,*$(3* 76-./7,2- *$6 06.)(.4/2:6

=(11,5,+,*" *( 0/**6.2 2(2A>? .6/:*,2- 4/*6.,/+1 7,.6:*+"=(11,5,+,*" *( 0/**6.2 2(2A0+/2/. 13.)/:61

=(11,5,+,*" *( 0/**6.2 +/.-6 /.6/1

=(11,5,+,*" *( :(2*.(+ *$6 :$64,1*." 73.,2- *$6 0/**6.2,2- ,2 / 56**6. @/"

=(11,5,+,*" *( -626./*6 BC 1*.3:*3.61

D76/++" 7(61 2(* $/;6 /2" 7,))./:*,(2 +,4,*

'$(.* *,46 56*@662 ,76/ /27 0.(*(*"06

=(11,5,+,*" *( :+6/2 .((4 ).66 (06./*,(2

E(@ :(1*

F*:9

G++ *$6 1()* +,*$(-./0$" 46*$(71 @,++ 2(* 56 6H0+/,267 ,2 76*/,+ $6.6I 1,2:6 (*$6.1 $/;6 /+.6/7"

7(26 *$/* 43:$ 56**6. *$/2 D :(3+7 6;6. 7(9 D 13--61* "(3 .6/7 J,/ /27 #$,*61,761 1()* +,*$(-./0$".6;,6@9 KL9 !9 #$,*61,7616* /+I =+*,$ "#$-*./01-2>I G2-6@/27*6 M$64,6 D2*9 F79I !""#I ;(+9 BNI

09 OOPAONOQ R$6 )3++ .6;,6@ /27 / :(40.61167 (26 :/2 56 7(@2+(/767 /1 / 07)A),+61 /* *$616 >SE1A_ .61,1* *$6 @/)6. 26671 *( 56 :+6/29

M+6/2,2- ,1 7(26 5" / RE^ @/1$I @$,:$ 46/21 *$/* *$6 ', @/)6. ,1 5(,+67 ,2 / 4,H*3.6 () Y kWIYkWk/27 lYBKO? +/40I 1,2:6 ,* */861 h^O 4,2 )(. *$64 *( $6/* 309

3($+$% $*+-

'>A_ 0$(*(.61,1* ,1 4/23)/:*3.67 ,2 7,))6.62* -./761I 76*6.4,267 5" *$6 /4(32* () 1(+,71 @,*$

.6106:* *( *$6 1(+;62*9 G 23456. 56$,27 *$6 n'>A_c ,27,:/*61 @$/* -./76 / :6.*/,2 '>A_ $/1I 69-9'>A_KkQI '>A_KOQI '>A_K^PQU k $/1 *$6 +(@61* ;,1:(1,*" /27 OPP] *$6 $,-$61*9 ',2:6 *$6 ;,1:(1,*"

7,))6.1I *$6 10,2 10667 $/1 *( 56 /7o31*67 /::(.7,2-+"9 !,:.(M$64 M(.09 K@@@94,:.(:$649:(4Q

$/1 / 53++6*,2 5(/.7 @$6.6 :$/./:*6.,1*,: *$,:82611 /* 7,))6.62* 10,2 106671 K6H/40+6 56+(@Q /27

1(46 (*$6. ,2)(.4/*,(2 /5(3* '>A_ :/2 56 )(3279 R$,:82611 ).(4 +611 *$/2 ^ 4 K/18 R(5,/1

l"56.-I *(52"p,)49+,3916Q *( 16;6./+ $327.67 4 :/2 56 /:$,6;679 G1 / .3+6 () *$345I 316 /5(3* ^

4+ () '>A_ 06. ,2:$ 7,/46*6. () *$6 @/)6.9

R$6 ;(+346 () *$6 7,106216 @,++ 6))6:* *$6

),+4 *$,:82611 1(46@$/*9 R$6 .61,1* ,17,1062167 /* *$6 :62*6. () *$6 @/)6. /27

10.6/7 /* OPP .04 )(. h^O 19 D) *$,:86.-./761 /.6 3167 ,* ,1 26:611/." *( 10.6/7 *$6

),+4 +(2-6.9 G)*6. 10.6/7,2- :(461 *$6

/:*3/+ 10,2 @,*$ 10,2 10667 /::(.7,2- *( /

*/53+/*67 ;/+369 KB 4+ '>A_K^PQI OPP.04e^O

1 ] kPPP .04e^O1 hkP 4Q9 G18 (*$6.

-.(30 46456.1 )(. 1*/.* 0/./46*6.19

?

G?

>?

F?

T?

U?

V?

H?

W?

A?

G??

F??

T??

U??

V??

H??

W??

A??

G???

GG??

G>??

GF??

GT??

GU??

K9@WXG?Y

J+0Z.'4))

K80' )844B [#8-\

4&(5(6*,$"&( #'2( . $,7% #'2(

R$6 @/)6. @,*$ *$6 '>A_ ),+4 26671 *( 56 5/867 0.,(. *( *$6 6H0(13.69 R$,1 ,1 7(26 *( .64(;6 /2".64/,2,2- 1(+;62* /27 1*/5,+,m6 *$6 ),+49 R$6 0.6A6H0(13.6 5/86 /+1( 4/861 *$6 13.)/:6 2(2A

1*,:8,2-I @$,:$ 0.6;62*1 ,* ).(4 +6/;,2- .64/,21 (2 *$6 M. 4/189 R$6 0.6A6H0(13.6 5/86 ,1 7(26 (2

/ $(* 0+/*6 /* ^PPM )(. q *( r 4,2 06. 4,:.(46*6. () ),+4 *$,:826119 Z(. .6/++" *$,:8 ),+41 *$,1

:/2 */86 16;6./+ $(3.19 G)*6. *$6 5/86 *$6 .61,1* 26671 *( :((+ ()) 56)(.6 6H0(13.69 !,2,434

:((+,2- *,46 ,1 hO 4,2 K^PABP 4 ),+4 *$,:82611Q9 Z.(4 *$,1 0(,2* /27 )(.@/.7s /;(,7 31,2-

*@66m6.1 /27 1$/.0 (5o6:*1I 1,2:6 *$6" 4/" 1:./*:$ *$6 ),+49

G

mailto:mcc@microchem.comhttp://www.microchem.com/mailto:tobny@ifm.liu.semailto:tobny@ifm.liu.semailto:tobny@ifm.liu.semailto:tobny@ifm.liu.sehttp://www.microchem.com/mailto:mcc@microchem.com

8/11/2019 56121674 Soft Lithography for Dummies

7/15

!""#$$%& '(#)& $* +*,$ "#$-*./01-2 3*/ +*,$ "#$-*./01-2 ,*/ 4(55#&67 "#89:1#8. ;8#A_

76;6+(06. K6*$"+626 -+":(+ 4(2(46*$"+ 6*$6. /:6*/*6Q 5/*$ )(. / )6@ 4,23*619 g(3 @,++ 166 @$62*$6 0/**6.2 /006/.1 K,* ,1 $/.7 *( (;6.A76;6+(0Q9 R$6 *640+/*6 ,1 *$62 .,2167 ,2 76;6+(06. /27 5+(@A

7.,679 l(*6< *$6 76;6+(06. ,1 $,-$+" *(H,: K@@@92,@+916e/$e^dddA^B907)Q /27 1$(3+7 56 860* ,2 /

@6++A;62*,+/*67 /.6/ /* /++ *,4619 Z,2/++" :$6:8 )(. .64/,21 ,2 / 4,:.(1:(06 /27 46/13.6 *$6*$,:826119 D* ,1 0(11,5+6 *( .64(;6 14/++ .64/,21 ,2 / 761:34 0.(:673.6 /27 *$6 ),+4 :/2 /+1( 56

4/76 4(.6 1(+;62* .61,1*/2* 5" / ),2/+ $/.7 5/86I $(@6;6. '>A_ ,1 ,2 -626./+ ;6." 1(+;62*.61,1*/2*9

=";%+ ;'1(& $%&">%"&(

D* ,1 0(11,5+6 *( 1*/:8 16;6./+ '>A_ +/"6.1 (2 *(0 () 6/:$ (*$6.9 ',40+" 1*(0 /)*6. *$6 6H0(13.6 /27

10,2 *$6 26H* +/"6. (2 *(09

!+;'-+$'%+,-

M4:43"8-4';

M0)84')4K80'

D#4@4]8")(#4C%.4

D");@4]8")(#4C%.4O]8")(#4

=C!' K0(+"7,46*$"+1,+(H/26Q @,++ 1*,:8 *( '>A_ 32+611 *$6 *640+/*6 ,1 1,+/2,1679 R$6 1,+/2,1/*,(25(6$56 7(26 ,2 *$6 761,-2/*67 .((4 /27 6T3,0462* (*$6.@,16 ,* :(3+7 :(2*/4,2/*6 +/.-6 /.6/1 ()

*$6 53,+7,2-9 R$6 1,+/2,1/*,(2 ,1 7(26 +,86 *$,1A_< @@@9.616/.:$9,549:(4eo(3.2/+e.7eb^^e1$/@9$*4+L626./+ ,2)( (2 '>A_< /;6:+/)/3H9).6616.;6.19:(4e'>A_9$*4+

=(11,5,+,*,61 () '>A_< @@@94/H+/59+3916e56/4+,261e5+7_^^e.613+*19$*4+!67,:/+ 1/)6*" 7/*/ 1$66* (2 '>A_ 76;6+(06.< :/479+139673e4171eHeH0i13_i76;6+(06.9$*4

I

http://www.niwl.se/ah/1999-13.pdfhttp://www.research.ibm.com/journal/rd/411/shaw.htmlhttp://aveclafaux.freeservers.com/SU-8.htmlhttp://www.maxlab.lu.se/beamlines/bld811/results.htmlhttp://camd.lsu.edu/msds/x/xp_su8_developer.htmhttp://camd.lsu.edu/msds/x/xp_su8_developer.htmhttp://www.maxlab.lu.se/beamlines/bld811/results.htmlhttp://aveclafaux.freeservers.com/SU-8.htmlhttp://www.research.ibm.com/journal/rd/411/shaw.htmlhttp://www.niwl.se/ah/1999-13.pdf

8/11/2019 56121674 Soft Lithography for Dummies

8/15

!""#$$%& '(#)& $* +*,$ "#$-*./01-2 3*/ +*,$ "#$-*./01-2 ,*/ 4(55#&67 "#89:1#8. ;8#

8/11/2019 56121674 Soft Lithography for Dummies

9/15

!""#$$%& '(#)& $* +*,$ "#$-*./01-2 3*/ +*,$ "#$-*./01-2 ,*/ 4(55#&67 "#89:1#8. ;8#

8/11/2019 56121674 Soft Lithography for Dummies

10/15

!""#$$%& '(#)& $* +*,$ "#$-*./01-2 3*/ +*,$ "#$-*./01-2 ,*/ 4(55#&67 "#89:1#8. ;8#

8/11/2019 56121674 Soft Lithography for Dummies

11/15

!""#$$%& '(#)& $* +*,$ "#$-*./01-2 3*/ +*,$ "#$-*./01-2 ,*/ 4(55#&67 "#89:1#8. ;8#A_ /27 *$6" 4/86 +/.-6

62(3-$ $(+61 ,2 *$6 1*/40 *( 316 /1 1300+" :$/226+19

!D!DM 1*.3:*3.61 :/2 56 3167 /1 :/*$(76 160/./*(.1 ,2

76;,:61 +,86 7,(76 /../"19 #$62 *$6 :/*$(76 46*/+ ,16;/0(./*67 (2 *(0 ,* @,++ 56 5.(862 ,2*( 160/./*6+"/77.611/5+6 +,2619 R$6 6;/0(./*,(2 ,*16+) 0.(73:61 1(46

$6/*I @$,:$ 4/861 *$6 !D!DM 1*.3:*3.61 6H0/27 1+,-$*+"9

G1 / .613+* / 1*.,8,2- 0/**6.2 ,1 )(.467 (2 *(0 () *$6

1*.3:*3.619 D* +((81 / 5,* +,86 *$,:8 7.,67 0/,2*9 l(*6 *$/* *$60/**6.2 ,1 /+@/"1 (.*$(-(2/+ :+(16 *( 67-619 D) *$6 1*.3:*3.61

/.6 2/..(@ 62(3-$ Kt^P 4Q *$6 0/**6.2 @,++ (;6.+/0 /27 56:(2*,23(31 ).(4 (26 1,76 *( *$6 (*$6.9

KK

http://www.norlandprod.com/adhesives/noa83h.htmlhttp://www.norlandprod.com/adhesives/noa83h.html

8/11/2019 56121674 Soft Lithography for Dummies

12/15

!""#$$%& '(#)& $* +*,$ "#$-*./01-2 3*/ +*,$ "#$-*./01-2 ,*/ 4(55#&67 "#89:1#8. ;8#2,;6.1,*"I ^dddQ /27 =T8 #8

8/11/2019 56121674 Soft Lithography for Dummies

13/15

!""#$$%& '(#)& $* +*,$ "#$-*./01-2 3*/ +*,$ "#$-*./01-2 ,*/ 4(55#&67 "#89:1#8. ;8#

8/11/2019 56121674 Soft Lithography for Dummies

14/15

!""#$$%& '(#)& $* +*,$ "#$-*./01-2 3*/ +*,$ "#$-*./01-2 ,*/ 4(55#&67 "#89:1#8. ;8#

8/11/2019 56121674 Soft Lithography for Dummies

15/15

!""#$$%& '(#)& $* +*,$ "#$-*./01-2 3*/ +*,$ "#$-*./01-2 ,*/ 4(55#&67 "#89:1#8. ;8#2,;6.1,*" 31,2- 1()* 645(11,2-9