2008 solar annual review meetingevaporation •layer 3: rf sputtering for “window” layers (cds,...
TRANSCRIPT
![Page 1: 2008 Solar Annual Review Meetingevaporation •layer 3: RF sputtering for “window” layers (CdS, ZnS, others) •layer 4 : RF sputtering for TCO’s •metallization or top contacts](https://reader033.vdocuments.mx/reader033/viewer/2022060510/5f2649719addb23836715c6e/html5/thumbnails/1.jpg)
2008 Solar Annual Review Meeting
Session: PDIL/CIGS platform Company or Organization: NRELFunding Opportunity: EE&RE
Miguel Contreras
1617 Colde Blvd., MS 3219Golden, CO 80401Phone: 303 384 6478Fax 303 384 [email protected]
Design Team
Miguel Contreras (leader), Rommel Noufi,
Brent Nelson, Steve Robbins
Glenn Teeter, Tim Gessert
Input/support from:
Dean Levi, Brian Keyes, Sally Asher, Craig Perkins, Aaron Ptak,
Kannan Ramanathan, David Young, Fallah Hasoon, Jehad Abushama, Ingrid Repins
NREL/PR-520-43202Presented at the Solar Energy Technologies Program (SETP) Annual Program Review Meeting held April 22-24, 2008 in Austin, Texas
![Page 2: 2008 Solar Annual Review Meetingevaporation •layer 3: RF sputtering for “window” layers (CdS, ZnS, others) •layer 4 : RF sputtering for TCO’s •metallization or top contacts](https://reader033.vdocuments.mx/reader033/viewer/2022060510/5f2649719addb23836715c6e/html5/thumbnails/2.jpg)
1
The CIGS cell and its processing
ZnO, ITO2500 Å
CdS700 Å
Mo0.5-1 µm
Glass,Metal Foil,
Plastics
CIGS1-2.5 µm
CIGS
• layer 1: DC sputtering for back contacts
• layer 2: UHV CIGS evaporation
• layer 3: RF sputtering for “window” layers (CdS, ZnS, others)
• layer 4 : RF sputtering for TCO’s
• metallization or top contacts + AR coatings
![Page 3: 2008 Solar Annual Review Meetingevaporation •layer 3: RF sputtering for “window” layers (CdS, ZnS, others) •layer 4 : RF sputtering for TCO’s •metallization or top contacts](https://reader033.vdocuments.mx/reader033/viewer/2022060510/5f2649719addb23836715c6e/html5/thumbnails/3.jpg)
2
The CIGS Cluster Tool 1
Back Contacts by DC sputtering
3 targets
(Mo, Cr, Na precursors, other)
![Page 4: 2008 Solar Annual Review Meetingevaporation •layer 3: RF sputtering for “window” layers (CdS, ZnS, others) •layer 4 : RF sputtering for TCO’s •metallization or top contacts](https://reader033.vdocuments.mx/reader033/viewer/2022060510/5f2649719addb23836715c6e/html5/thumbnails/4.jpg)
3
The CIGS Cluster Tool 2
CIGS (and other) compounds
UHV evaporation
![Page 5: 2008 Solar Annual Review Meetingevaporation •layer 3: RF sputtering for “window” layers (CdS, ZnS, others) •layer 4 : RF sputtering for TCO’s •metallization or top contacts](https://reader033.vdocuments.mx/reader033/viewer/2022060510/5f2649719addb23836715c6e/html5/thumbnails/5.jpg)
4
The CIGS Cluster Tool 3
*CdS and other “window” materials (ZnS, InS, others) *RF sputtering (3 targets)
![Page 6: 2008 Solar Annual Review Meetingevaporation •layer 3: RF sputtering for “window” layers (CdS, ZnS, others) •layer 4 : RF sputtering for TCO’s •metallization or top contacts](https://reader033.vdocuments.mx/reader033/viewer/2022060510/5f2649719addb23836715c6e/html5/thumbnails/6.jpg)
5
The CIGS Cluster Tool 4
• TCO’s (i-ZnO; n-ZnO; ITO, others)
• RF sputtering (3 targets)
![Page 7: 2008 Solar Annual Review Meetingevaporation •layer 3: RF sputtering for “window” layers (CdS, ZnS, others) •layer 4 : RF sputtering for TCO’s •metallization or top contacts](https://reader033.vdocuments.mx/reader033/viewer/2022060510/5f2649719addb23836715c6e/html5/thumbnails/7.jpg)
6
The CIGS Cluster Tool 5
• Analytical Tool
• AES and others
![Page 8: 2008 Solar Annual Review Meetingevaporation •layer 3: RF sputtering for “window” layers (CdS, ZnS, others) •layer 4 : RF sputtering for TCO’s •metallization or top contacts](https://reader033.vdocuments.mx/reader033/viewer/2022060510/5f2649719addb23836715c6e/html5/thumbnails/8.jpg)
7
The CIGS Cluster Tool 6
• Load-lock w/10 platten cassette
• Optional port for pod
![Page 9: 2008 Solar Annual Review Meetingevaporation •layer 3: RF sputtering for “window” layers (CdS, ZnS, others) •layer 4 : RF sputtering for TCO’s •metallization or top contacts](https://reader033.vdocuments.mx/reader033/viewer/2022060510/5f2649719addb23836715c6e/html5/thumbnails/9.jpg)
8
The CIGS Cluster Tool 7
• Expansion ports (2) for industry support and/or wet station for CdS? Pod? Bridge to second robot?
![Page 10: 2008 Solar Annual Review Meetingevaporation •layer 3: RF sputtering for “window” layers (CdS, ZnS, others) •layer 4 : RF sputtering for TCO’s •metallization or top contacts](https://reader033.vdocuments.mx/reader033/viewer/2022060510/5f2649719addb23836715c6e/html5/thumbnails/10.jpg)
9
Design Concepts
#1 Allows for state-of-the-art CIGS solar cell fabrication in an integrated fashion and enables new fundamental studies
#2 Allows all process steps to manufacture a CIGS coupon of 6” x 6” (PDIL std) adding new capabilities aimed at addressing relevant issues to industrial processes. Tool must also interface with other tools
#3 Supports commercialization efforts by US industry working in CIGS PV technology by addressing highly specific industrial issues
#4 Allows for future expansion (new processes, new compound semiconductor materials, etc.)
![Page 11: 2008 Solar Annual Review Meetingevaporation •layer 3: RF sputtering for “window” layers (CdS, ZnS, others) •layer 4 : RF sputtering for TCO’s •metallization or top contacts](https://reader033.vdocuments.mx/reader033/viewer/2022060510/5f2649719addb23836715c6e/html5/thumbnails/11.jpg)
10
Cluster Tool costs/ordering
PO # 187426
1.64 M$ Jan 08
PO # 185120
715 k$
Dec 06 PO# 186893493 k$ Oct 07
![Page 12: 2008 Solar Annual Review Meetingevaporation •layer 3: RF sputtering for “window” layers (CdS, ZnS, others) •layer 4 : RF sputtering for TCO’s •metallization or top contacts](https://reader033.vdocuments.mx/reader033/viewer/2022060510/5f2649719addb23836715c6e/html5/thumbnails/12.jpg)
11
The CIGS chamber
![Page 13: 2008 Solar Annual Review Meetingevaporation •layer 3: RF sputtering for “window” layers (CdS, ZnS, others) •layer 4 : RF sputtering for TCO’s •metallization or top contacts](https://reader033.vdocuments.mx/reader033/viewer/2022060510/5f2649719addb23836715c6e/html5/thumbnails/13.jpg)
12
The CIGS Cluster Tool Timetable
Dec 06 Jul 07 Dec 07 Jul 08 Dec 08 Jul 09 Dec 09
![Page 14: 2008 Solar Annual Review Meetingevaporation •layer 3: RF sputtering for “window” layers (CdS, ZnS, others) •layer 4 : RF sputtering for TCO’s •metallization or top contacts](https://reader033.vdocuments.mx/reader033/viewer/2022060510/5f2649719addb23836715c6e/html5/thumbnails/14.jpg)
13
Obstacle Discussion
Barriers encountered or anticipated that may inhibit success of programs
The standard size of substrates (6”x6”) will require the use of larger amounts of materials than we currently use: increase of operational costs to run the tool (true for all conversion technologies tools) => need for increased funding/supportThe demand for steel (including that used in the fabrication of vacuum chambers) continues to increase to record levels worldwide. There is a possibility the construction of the sputtering modules (last items purchased to build the CIGS tool) may be delayed due to this current market situation in the steel industry.
![Page 15: 2008 Solar Annual Review Meetingevaporation •layer 3: RF sputtering for “window” layers (CdS, ZnS, others) •layer 4 : RF sputtering for TCO’s •metallization or top contacts](https://reader033.vdocuments.mx/reader033/viewer/2022060510/5f2649719addb23836715c6e/html5/thumbnails/15.jpg)
14
CdTe Platform
Tim Gessert
PlatformThin Si
Wafer Rep.
CIGS
CdTe
Atm. Proc.
M&C Ind.
M&C Cluster
PV Technology Road Maps
Waf
er S
i
Film
Si
CPV
CdT
e
CIG
S
OPV
DSP
V