150 mm wafer shipping and handling products...6 150 w shpp h ps transport wafer carriers — 194/196...

MICROCONTAMINATION CONTROL | CATALOG

150 mm Wafer Shipping and Handling ProductsThe widest selection of 150 mm wafer shipping and handling products available

150 MM WAFER SHIPPING AND HANDLING PRODUCTS

TABLE OF CONTENTS—Advanced Wafer Transport ............................................. 1

Multiple Wafer Shipping Boxes ..................................... 2

Ultrapak® Series .............................................................. 2

Single Wafer Shipping Boxes and Trays ...................... 3

H93 Series Shipping Box ..................................... 3

Solopak® Series Shipping Box .............................. 4

H22 Series Shipping Box ...................................... 5

H20 Series Tray ................................................... 5

Transport Wafer Carriers ................................................ 6

194/196 Series ................................................................ 6

182 Series ......................................................................... 6

Process Wafer Carriers ................................................... 8

194 Series ......................................................................... 8

190 Series ........................................................................ 8

182 Series ......................................................................... 9

Storage Boxes ................................................................. 10

E160 Series .................................................................... 10

E124 Series .................................................................... 10

E90 Series ...................................................................... 10

E206 Series .................................................................... 10

H3150 Series .................................................................. 11

Options and Accessories .............................................. 12

Wafer Carrier Handles ................................................ 12

Storage Box Accessories ........................................... 13

Identification Options ................................................. 13

Material Information ..................................................... 14

Other Products ............................................................... 15

Limited Warranty ............................................................ 16

For More Information ................................................... 16

Terms and Conditions of Sale ..................................... 16


1

ADVANCED WAFER TRANSPORT —Trends in wafer processing technology have

mandated advancements in wafer carrier

tech nology to support today’s advanced semi-

conductor processing facilities. Wafer carriers

designed for advanced wafer transport offer

dramatic performance benefits over traditional

low- and mid-range wafer carriers, including:

• Precise wafer access – the wafer is in a precise and

predictable location

• Reliable equipment operation – on process tools

and automated materials handling systems

• Secure wafer protection – from contamination

and damage

–

F

ab T

echn

olog

y Tr

ends

+

– Wafer Carrier Material Characteristics +

Next Generation Advanced Wafer Transport with STAT-PRO 9000

Advanced Wafer Transport with STAT-PRO®

3000

PPAPBT

Poly-propylene

1960s

to

1970s

1980s

to

1980s

2000

s

to

2010s

• High-efficiency devices

• Compound semiconductormaterials

• Tool uptime

• Copper processes

• Automation levels

• Toolthroughput

• Design rules

• Additionalmask layers

• Processtemperatures

• Outgassing athigh temperatures

• Thermal capabilities

• Electrostatic discharge

• Dimensionalstability

• Particulation

• Value

2


MULTIPLE WAFER SHIPPING BOXES—

ULTRAPAK® SERIES

• Individual horizontal cantilever springs limit wafer

rotation to reduce particle contamination and also

secure the wafers in the cassette to safeguard

against breakage

• Ultrapure polypropylene materials provide a clean

shipping environment and assure low levels of

condensable inorganics

• Horizontal and vertical robotic pickup flanges

on the cassette allow convenient handling

• Center notch track alignment and “H" bar

ensure accurate equipment interoperability

both vertically and horizontally

• Three design options to accommodate varying

wafer thickness

Ordering Information

Part number Description Wafer thickness range Material

H9150-0042 Thin wafer shipper, uncleaned 150 – 675 µ High-purity polypropylene

H9150-0043 Thin wafer shipper, cleaned 150 – 675 µ High-purity polypropylene

H9150-0037 Standard wafer shipper, uncleaned 400 – 800 µ High-purity polypropylene

H9150-0038 Standard wafer shipper, cleaned 400 – 800 µ High-purity polypropylene

H9150-0044PA Thick wafer shipper, uncleaned 500 – 1500 µ High-purity polypropylene

H9150-0045PA Thick wafer shipper, cleaned 500 – 1500 µ High-purity polypropylene

Ultrapak wafer shipping box


3

SINGLE WAFER SHIPPING BOXES AND TRAYS—

H93 SERIES SHIPPING BOX

• For shipping and storage applications

• Holds one wafer face down contacting

only the wafer’s edges

• Replaceable cushions securely retain the

wafer to minimize particle generation

• Single latch provides secure closure and

easy opening

• Tweezer slots conveniently located for

easy wafer handling

• Large top surface provides a convenient

space for labeling

• Stackable shipping boxes allow efficient

use of storage space

• Pin-in-socket hinges allow the shipper to

be opened horizontally, providing stability

for wafer handling

• Clear polycarbonate material allows visual

inspection without opening

• Optional STAT-PRO® 500 black conductive

polycarbonate material provides static

protection

• Overall size: 175 mm × 160 mm × 20 mm

(6.9" × 6.3" × 0.8")


Part number Description Material

H93-60-101-1116 Assembly Clear polycarbonate

H93-60-101-66C02 Assembly, ESD STAT-PRO 150

H93 single wafer shipper

4


SOLOPAK® SERIES SHIPPING BOX


• Holds one wafer face down or face up in a conical

pocket contacting only the wafer’s edges

• Flat or notch locators prevent wafer rotation to

minimize particle generation

• Dual latch provides secure closure and

easy opening

• Tweezer slots conveniently located for

easy wafer handling

• Large top surface provides a convenient space

for labeling

• Stackable shipping boxes allow efficient use

of storage space

• Pin-in-socket hinges allow the shipper to

be opened horizontally, providing stability

for wafer handling

• Clear polycarbonate material allows visual

inspection without opening

• Overall size: 173 mm × 162 mm × 16 mm

(6.8" × 6.4" × 0.6")



Z150-0101 Shipping box for flat wafer Clear polycarbonate

Solopak single wafer shipper


5

H22 SERIES SHIPPING BOX


• Holds one wafer face down in a conical pocket

contacting only the wafer’s edges

• Spring securely retains the wafer to minimize

particle generation

• Screw on cover provides secure closure and

easy opening

• Large top surface provides a convenient space

for labeling

• Stackable shipping boxes allow efficient use

of storage space



H22-60-0615 H22-60-62C02

Tray Natural polypropylene STAT-PRO 150

H22-601-0615 H22-601-62C02

Cover Natural polypropylene STAT-PRO 150

H22-602-0615 H22-602-62C02

Spring Natural polypropylene STAT-PRO 150

H20 SERIES TRAY

• For internal handling and storage applications

• Holds one wafer face down in a conical pocket

contacting only the wafer’s edges

• Tweezer slots conveniently located for easy

wafer handling

• Stackable tray on tray for efficient use of

storage space

• Overall size:

— H20-5000: 163 mm × 163 mm × 5 mm

(6.4" × 6.4" × 0.2")

— H20-5001: 163 mm × 163 mm × 10 mm

(6.4" × 6.4" × 0.4")



H20-5000-01-1415* Tray, pocket depth 1.5 mm (0.06") Natural ABS

H20-5001-01-1415* Tray, pocket depth 1.3 mm (0.05") Natural ABS

*Extended lead times and minimum order quantities apply.

H22 single wafer shipping box

• Natural polypropylene or STAT-PRO 150 black

conductive polypropylene material for static

protection

• Overall size: 164 mm dia. × 20 mm

(6.5" dia. × 0.8")

H20 single wafer trays

6


TRANSPORT WAFER CARRIERS—

194/196 SERIES

SUPERIOR AUTOMATION PERFORMANCE

• High rigidity and dimensional stability

• Four-point contact on the “H" bar and track

for improved wafer positioning

• Open sidewall style

• High profile design for maximum wafer

protection

• Locating track notches for the center

of the thirteenth pocket

• “H" bar equipment interface

• Pins and holes on the top rail

• Wafer capacity: 25

• D1 dimension: 14.5 mm (0.57")

• Pocket spacing: 4.8 mm (0.19")

• Pocket flat: 1.5 mm (0.06")

K196-60MLB-97C02

182 SERIES

THE INDUSTRY STANDARD 150 MM WAFER CARRIER

• High rigidity and dimensional stability


for improved wafer positioning (unless noted)

• Open sidewall style


protection

• Locating track notches for the center

of the thirteenth pocket (unless noted)




• D1 dimension: 14.5 mm (0.57")



K182-60MB-97C02


7

Next generation advanced wafer transport carriers shown in bold blue.

Advanced wafer transport carriers shown in bold.


Part numberEnd wall configuration

“H" bar end flanges

Compatible boxes Material Notes

K196-60MLB-97C02 Flanges Yes E90, E124, E160, E206, H3150

STAT-PRO 9000 —

K196-60ML-97C02 Flanges No E90, E124, E160, E206, H3150

STAT-PRO 9000 —

A196-60MLB-47C02 Flanges Yes E90, E124, E160, E206, H3150

STAT-PRO 3000 Allows migration to K196-60MLB-97C02

A196-60ML-47C02 Flanges No E90, E124, E160, E206, H3150

STAT-PRO 3000 Allows migration to K196-60ML-97C02

A196-60MLX-47C02 Flanges, handle

Yes — STAT-PRO 3000 —

FA196B-60MLB-7902 Flanges Yes E90, E124, E160, E206, H3150

FluoroSentry Allows migration to A196-60MLB-47C02 or K196-60MLB-97C02

PA194-60MB-0603 Flanges Yes E90, E124, E160, E206, H3150

Blue polypropylene

Red, green, yellow, orange, and natural colors available

PA194-60MB-61C02 Flanges Yes E90, E124, E160, E206, H3150

STAT-PRO 100

K182-60MB-97C02 Flanges No E90, E124, E160, E206, H3150

STAT-PRO 9000 No track notches (version with notches available – contact Entegris)

KA182-60MB-47C02 Flanges No E90, E124, E160, E206, H3150

STAT-PRO 3000 No track notches (version with notches available – contact Entegris)

Allows migration to K182-60MB-97C02

FA182-60MB-7902 Flanges No E90, E124, E160, E206, H3150

FluoroSentry Allows migration to KA182-60MB-47C02 or K182-60MB-97C02

PA182-60MB-0603 Flanges No E90, E124, E160, E206, H3150


No four-point contact No track notches

Allows migration to KA182-60MB-47C02 or K182-60MB-97C02Red, green, yellow, orange, and natural colors available

PA182-60MB-61C02 Flanges No E90, E124, E160, E206, H3150

STAT-PRO 100 No four-point contact No track notches

Allows migration to FA182-60MB-7902, KA182-60MB-47C02 or K182-60MB-97C02

PA182-60MC-61C02 Flanges, inspection window

No E90, E124, E160, E206, H3150

STAT-PRO 100 No four-point contactNo track notches

PA182-60MBN-61C02 Flanges No E90, E124, E160, E206, H3150

STAT-PRO 100 No four-point contact

Allows migration to KA182-60MB-47C02 or K182-60MB-97C02

8


PROCESS WAFER CARRIERS—

194 SERIES

SUPERIOR PROCESS CARRIER AUTOMATION PERFORMANCE

• Improved process carrier rigidity and

dimen sional stability


for improved wafer positioning

• Open sidewall design to minimize liquid traps and

promote even solution coverage and drainage


protection

• Locating track notches for the center of the

thirteenth pocket



• Chemical resistant natural PFA material


• D1 dimension: 14.5 mm (0.57")



A194-60MB-0215

190 SERIES

LOW PROFILE FOR OPTIMUM PERFORMANCE IN CENTRIFUGAL APPLICATIONS

• Low contour for improved spray penetration

to the wafers

• Open sidewall design to minimize liquid traps and

promote even solution coverage and drainage





• D1 dimension: 14.5 mm (0.57")



A190-60M-0215


9

182 SERIES

THE INDUSTRY STANDARD 150 MM PROCESS WAFER CARRIER

• Four-point contact on the “H" bar for improved

wafer positioning

• Open sidewall design to minimize liquid traps

and promote even solution coverage and drainage

• High profile design for maximum wafer protection





• D1 dimension: 14.5 mm (0.57")




Part numberEnd wall configuration

“H" bar end flanges

Compatible boxes

Compatible boxes Material

A194-60MB-0215 Flanges Yes E90, E124, E160, E206, H3150

A72-60-03, A040-103, A049, A72-60-04, A055

Natural PFA

A190-60M-0215 Flanges No E124, E160, H3150 A72-60-03, A055 Natural PFA

A190-60MH-0215 Flanges, handle

No H3150 A72-60-03 Natural PFA

A182-60M-0215 — No E90, E124, E160, E206, H3150

A72-60-03, A040-103, A049, A72-60-04

Natural PFA

A182-60MB-0215 Flanges No E90, E124, E160, E206, H3150

A72-60-03, A040-103, A049, A72-60-04, A055

Natural PFA

A182-60MBH-0215 Handle, flanges

No — A72-60-03, A040-103, A049, A72-60-04

Natural PFA

A182-60MC-0215 Flanges, inspection window

No E90, E124, E160, E206, H3150

A72-60-03, A040-103, A049, A72-60-04, A055

Natural PFA

A182-60MU-0215 end wall

Flanges, “U"

Yes E90, E124, E160, E206, H3150

A72-60-03, A040-103, A049, A72-60-04

Natural PFA

A182-60MB-0215

10


STORAGE BOXES—

E160 SERIES

OPTIMUM PERFORMANCE AND REDUCED PARTICLE GENERATION

• Five degree wafer tilt

from wafers vertical

allows wafers to rest on

their backsides, reducing

movement and particle

generation

• Smooth surfaces for

easy cleaning and

low particle generation

• Pin and socket hinges

with retainers for

improved durability

• Stackable

• Single carrier capacity

• Compatible carriers: All 25-capacity

without handles

• Overall dimensions:

195 mm × 203 mm × 211 mm

(7.7" × 8.0" × 8.3")

E124 SERIES

THE INDUSTRY STANDARD 150 MM STORAGE BOX

• Automation compatible

• Smooth surfaces for easy

cleaning and low

particle generation

• Drop front allows easy

access by robotic

end effectors

• Robotic compatible

slide latch

• Rotating pin and socket

hinges prevent box from

tipping when open

• Stackable



without handles


213 mm × 213 mm × 190 mm

(8.4" × 8.4" × 7.5")

E90 SERIES

MAXIMUM STACKING DENSITY FOR SPACE LIMITED STOCKERS AND WIP RACKS

• Smooth bottom

• Pin and socket hinges

• Stackable


• Compatible carriers:

182 series and 194 /196

series 25-capacity

without handles


208 mm × 193 mm × 188 mm

(8.2" × 7.6" × 7.4")

E206 SERIES

REDUCED PARTICLE GENERATION AND ENHANCED ROBOTIC INTERFACE

• Automation compatible

• Twenty degree wafer tilt

from wafers horizontal

allows wafers to rest on

their backsides, reducing

movement and particle

generation

• Smooth surfaces for

easy cleaning and low

particle generation

• Keyed pin and socket hinges are free rotating

and easy to assemble and disassemble

• Stackable



without handles except A190 series

low profile process carriers


439 mm × 274 mm × 216 mm

(17.3" × 10.8" × 8.5")

E90-102-61C02 box with K182-60MB-97C02 carrier

E160-60-103-69F02 box with K182-60MB-97C02 carrier




11

H3150 SERIES

Optimum Performance and High Storage Density

• Five degree wafer tilt from wafers vertical (unless

noted) allows wafers to rest on their backsides,

reducing movement and particle generation

• Smooth surfaces for easy cleaning and low

particle generation

• Low profile base allows easy access to wafer

carrier end wall flanges

• Rotating pin and socket hinges prevent box

from tipping when open

• Stackable (unless noted)

• Two carrier capacity

• Compatible carriers: All 25-capacity without handles

• Overall dimensions: 211 mm × 405 mm × 189 mm

(8.3" × 16.0" × 7.43")

H3150-0001 box with two K182-60MB-97C02 carriers


Part numberLatch style

Compatible envelope

Optional cushion Material Notes

E160-60-103-69F02 Flip — — STAT-PRO 175 Molded in cardholder

E160-60-103S-69F02 Flip E96-21-1613 — STAT-PRO 175 Molded in cardholder

E160-60-103-69F16 Flip — — Cover: clear polycarbonate

Bottom: STAT-PRO 175

Molded in cardholder

Red, blue and green polycarbonate covers available

E124-60-101-0603 Slide E96-3P-21A15 E95-6-0815 Blue polypropylene


Red, green, yellow, orange and natural colors available

E124-60-101-61C02 Slide E96-3P-21A15 E95-6-0815 STAT-PRO 100 Molded in cardholder

E124-60-101-69F02 Slide E96-3P-21A15 E95-6-0815 STAT-PRO 175 Molded in cardholder

E124-60-103-69F16 Slide E96-3P-21A15 E95-6-0815 Cover: clear polycarbonate

Bottom: STAT-PRO 175


Red, blue and green polycarbonate covers available

E90-101-0603 Snap E96-3P-21A15 E95-2-0815 Blue polypropylene


E90-101-61C02 Snap E96-3P-21A15 E95-2-0815 STAT-PRO 100 —

E90-102-0603 Swing pin E96-3P-21A15 E95-2-0815 Blue polypropylene


E90-102-61C02 Swing pin E96-3P-21A15 E95-2-0815 STAT-PRO 100 —

E206-60-101-0603 Quarter turn E96-4P-21A15 — Blue polypropylene


E206-60-101-61C02 Quarter turn E96-4P-21A15 — STAT-PRO 100 —

E206-60-101-69F02 Quarter turn E96-4P-21A15 — STAT-PRO 175 —

H3150-0001 Flip — — STAT-PRO 100 Two molded in cardholdersStackable – no wafer tilt

H3150-0015 Flip — — EmstatAR Two molded in cardholdersStackable – no wafer tilt

12


OPTIONS AND ACCESSORIES—

WAFER CARRIER HANDLES

Entegris offers a variety of wafer carrier handles to meet your specific application requirements.


Part numberHandle style Description

Compatible wafer carriers Overall size Material

A72-60-03-0215 PA72-60-03-0603

Squeeze Attaches to the notches on both end walls of carrier

All “M" style 163 mm × 140 mm × 183 mm (6.4" × 5.5" × 7.2")

Natural PFA


A040-103-0215 Squeeze with lock bar

Attaches to the notches on both end walls of carrier

All 182 series and 194 series

165 mm × 152 mm × 165 mm (6.5" × 6.0" × 6.5")

Natural PFA

A049-0215 Squeeze with support bar

Attaches to the notches on both end walls of carrier


165 mm × 163 mm × 203 mm (6.5" × 6.3" × 80")

Natural PFA

A72-60-04-0215 PA72-60-04-0603

Slingshot Slides onto the top flanges of the carrier


15 mm × 192 mm × 237 mm (0.6" × 7.5" × 9.3")

Natural PFA


A055-0215 End- load Attaches to the flanges on the end wall of the carrier, allowing handling of carrier from end rather than over the top

All carriers with robotic flanges except those with end wall handles or "U" end walls

208 mm × 173 mm × 46 mm (8.2" × 6.8" × 1.8")

Natural PFA

Squeeze style Squeeze style with lock bar Squeeze style with lock bar

Slingshot style End-load style


13

STORAGE BOX ACCESSORIES

TRAVELER ENVELOPES

• Flexible envelopes snap onto covers

• Compatible with most 150 mm storage boxes


Part number Compatible Material

E96-3P-21A15 E90 series and E124 series

Antistatic PVC

E96-4P-21A15 E206 series Antistatic PVC

E96-21-1613 Select E160 series Transparent PVC

CUSHIONS

• Snap inside box covers to provide added wafer

security

• Compatible with E90 series and E124 series

storage boxes


Part numberCompatible storage boxes Material

E95-2-0815 E90 series Low-density polyethylene

E95-6-0815 E124 series Low-density polyethylene

IDENTIFICATION OPTIONS

Entegris offers various identification options including:

• Laser marking

• Hot stamping

• Bar code labels

• Radio frequency tags

• Cardholders

• Booklet holders

• Run card slip

• Colored ID tags

Contact Entegris to determine a suitable identification

method for your application.

E160-60-103S-69F02 box with E96-21-1613 attached

14


MATERIAL INFORMATION—General material information is provided for your reference. Contact Entegris for additional information.

Material Application DescriptionSurface resistivity (ohms/sq)

Continuous use temperature limit

Wafer insertion temperature limit

Blue polypropylene Standard storage box material

Natural polypropylene with a blue colorant

— 55°C —

EmstatAR High-performance storage

A static dissipative blend of polypro-pylene box material and carbon fiber

10⁵ – 10⁹ 55°C —

FluoroSentry Intermediate-performance wafer transport carrier material

An advanced, static protective blend of butyl terephthalate (PBT) and carbon fiber

10⁴ – 10¹⁰ 55°C 55°C

High-purity polypropylene

Multiple wafer shipping box material

Ultrapure natural polypropylene

— 55°C —

Natural ABS Tray material Opaque acrylonitrile butadiene styrene (ABS)

— 70°C —

Natural PFA Process wafer carrier material

Translucent perfluoroalkoxy

— 180°C 290°C

Polycarbonate Transparent storage box cover material

Colorable, transparent material

— 55°C —

STAT-PRO 100 Wafer transport carrier and storage box material

A static dissipative blend polypropylene, and pure inert carbon powder

10³ – 10⁸ 55°C 55°C

STAT-PRO 150 Single wafer shipping box material

A conductive blend of polypropylene, glass bead, and carbon powder

10¹ – 10⁵ 55°C —

STAT-PRO 175 High-performance storage box material

A static dissipative blend of polypropylene and carbon fiber

10⁵ – 10⁹ 55°C —

STAT-PRO 500 Single wafer shipping box material

A conductive blend of polycarbonate and carbon fiber

10³ – 10⁶ 55°C —

STAT-PRO 3000 High-performance wafer transport carrier material

An advanced, static dissipative blend of polyetheretherketone and carbon fiber

10⁴ – 10⁹ 120°C 340°C

STAT-PRO 9000 Next generation, high-performance wafer transport carrier material

An advanced, static dissipative blend of carbon nanotube (CNT) enhanced polyetherether-ketone (PEEK™ polymer) carbon compound

10⁴ – 10⁶ 120°C 340°C


15

OTHER PRODUCTS—Additional products and services to support your

150 mm wafer processing needs include:

• Mask and reticle packages

• Finished wafer shipping products

• Bare die and packaged IC shipping and

handling products

129 Concord RoadBillerica, MA 01821 USA

Tel +1 952 556 4181Fax +1 952 556 8022Toll Free 800 394 4083

Corporate Headquarters Customer Service

LIMITED WARRANTY

Entegris' products are subject to the Entegris, Inc. General Limited Warranty. To view and print this information, visit entegris.com and select the Legal & Trademark Notices link in the footer. Entegris does not warrant any failure in the case of customers using unapproved foreign components.

FOR MORE INFORMATION

Please call your Regional Customer Service Center today to learn what Entegris can do for you. Visit entegris.com and select the Contact Us link to find the customer service center nearest you.

TERMS AND CONDITIONS OF SALE

All purchases are subject to Entegris’ Terms and Conditions of Sale. To view and print this information, visit entegris.com and select the Terms & Conditions link in the footer.

www.entegris.com

Entegris®, the Entegris Rings Design®, and other product names are trademarks of Entegris, Inc. as listed on entegris.com/trademarks. All third-party product names, logos, and company names are trademarks or registered trademarks of their respective owners. Use of them does not imply any affiliation, sponsorship, or endorsement by the trademark owner.

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150 mm wafer shipping and handling products...6 150 w shpp h ps transport wafer carriers — 194/196...

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