1 titel van de presentatie rein boshuisen, pme analysis and performance of a lightweight...
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![Page 1: 1 Titel van de presentatie Rein Boshuisen, PME Analysis and Performance of a lightweight over-actuated 450mm wafer chuck R. Boshuisen, PME 09-06-2010](https://reader036.vdocuments.mx/reader036/viewer/2022070307/551a694f5503463e778b5d40/html5/thumbnails/1.jpg)
1Titel van de presentatie
Rein Boshuisen, PME
Analysis and Performance of a lightweight over-actuated 450mm wafer chuck
R. Boshuisen, PME09-06-2010
![Page 2: 1 Titel van de presentatie Rein Boshuisen, PME Analysis and Performance of a lightweight over-actuated 450mm wafer chuck R. Boshuisen, PME 09-06-2010](https://reader036.vdocuments.mx/reader036/viewer/2022070307/551a694f5503463e778b5d40/html5/thumbnails/2.jpg)
2Titel van de presentatie
Contents
• Introduction
• Problem Description
• Principle of Over-actuation
• Test Setup and Analysis
• Improvements on the Current Setup
• Conclusions
Over-actuation of a wafer chuck
![Page 3: 1 Titel van de presentatie Rein Boshuisen, PME Analysis and Performance of a lightweight over-actuated 450mm wafer chuck R. Boshuisen, PME 09-06-2010](https://reader036.vdocuments.mx/reader036/viewer/2022070307/551a694f5503463e778b5d40/html5/thumbnails/3.jpg)
3Titel van de presentatie
Problem description
Typically wafer chucks are actuated as rigid bodies. Larger wafers leads to heavier wafer stages:
200 mm Wafer
m kg
300 mm Wafer
> 3 x m kg
450 mm Wafer
> 11 x m kg
Z
Y
X
Width: 1.5
Depth 1.5
Thickn: 1.5
Width: 1.5
Depth 1.5
Thickn: 1.5
Modal analysisModal analysisOver-actuation of a wafer chuck
![Page 4: 1 Titel van de presentatie Rein Boshuisen, PME Analysis and Performance of a lightweight over-actuated 450mm wafer chuck R. Boshuisen, PME 09-06-2010](https://reader036.vdocuments.mx/reader036/viewer/2022070307/551a694f5503463e778b5d40/html5/thumbnails/4.jpg)
4Titel van de presentatie
Drawbacks of large wafers and chucks:• Larger actuation forces and deformation• Larger power dissipation and thermal load • Internal modes still critical to performance
Z
Y
X
Problem description
Desire to have a LARGE chuck with LOW Mass and HIGH internal modes
Modal analysisModal analysisOver-actuation of a wafer chuck
![Page 5: 1 Titel van de presentatie Rein Boshuisen, PME Analysis and Performance of a lightweight over-actuated 450mm wafer chuck R. Boshuisen, PME 09-06-2010](https://reader036.vdocuments.mx/reader036/viewer/2022070307/551a694f5503463e778b5d40/html5/thumbnails/5.jpg)
5Titel van de presentatie
zF
z
ALTERNATIVE means of ACTUATOR placement
Actuation in nodes
zFzFSymmetrical actuation
zF zF zF
Challenge deal with infinitely many modes, without adding as many actuators and control complexity
Alternative: Over-Actuation
Over-actuation of a wafer chuck
![Page 6: 1 Titel van de presentatie Rein Boshuisen, PME Analysis and Performance of a lightweight over-actuated 450mm wafer chuck R. Boshuisen, PME 09-06-2010](https://reader036.vdocuments.mx/reader036/viewer/2022070307/551a694f5503463e778b5d40/html5/thumbnails/6.jpg)
6Titel van de presentatieModal analysisModal analysis
Eigenmodes of a chuck
Over-actuation of a wafer chuck
![Page 7: 1 Titel van de presentatie Rein Boshuisen, PME Analysis and Performance of a lightweight over-actuated 450mm wafer chuck R. Boshuisen, PME 09-06-2010](https://reader036.vdocuments.mx/reader036/viewer/2022070307/551a694f5503463e778b5d40/html5/thumbnails/7.jpg)
7Titel van de presentatieOver-actuation of a wafer chuck
First eigenmode - Example
![Page 8: 1 Titel van de presentatie Rein Boshuisen, PME Analysis and Performance of a lightweight over-actuated 450mm wafer chuck R. Boshuisen, PME 09-06-2010](https://reader036.vdocuments.mx/reader036/viewer/2022070307/551a694f5503463e778b5d40/html5/thumbnails/8.jpg)
8Titel van de presentatieModal analysisModal analysis
Eigenmodes of a chuck
Over-actuation of a wafer chuck
![Page 9: 1 Titel van de presentatie Rein Boshuisen, PME Analysis and Performance of a lightweight over-actuated 450mm wafer chuck R. Boshuisen, PME 09-06-2010](https://reader036.vdocuments.mx/reader036/viewer/2022070307/551a694f5503463e778b5d40/html5/thumbnails/9.jpg)
9Titel van de presentatie
• Actuators on nodeline?
• Change nodelines?
Modal analysisModal analysis
Eigenmodes of a chuck
Over-actuation of a wafer chuck
![Page 10: 1 Titel van de presentatie Rein Boshuisen, PME Analysis and Performance of a lightweight over-actuated 450mm wafer chuck R. Boshuisen, PME 09-06-2010](https://reader036.vdocuments.mx/reader036/viewer/2022070307/551a694f5503463e778b5d40/html5/thumbnails/10.jpg)
10Titel van de presentatie
1Langelaar TU Delft
y
x
Topology optimization1 of chuck
Over-actuation of a wafer chuck
![Page 11: 1 Titel van de presentatie Rein Boshuisen, PME Analysis and Performance of a lightweight over-actuated 450mm wafer chuck R. Boshuisen, PME 09-06-2010](https://reader036.vdocuments.mx/reader036/viewer/2022070307/551a694f5503463e778b5d40/html5/thumbnails/11.jpg)
11Titel van de presentatie
5
1
25
1
25
1
2min
f RyTff Rx
Tff z
Tf BBB
Z Rx Ry
00
01
0
001
2
2
kms
ms
Mechanics
T CB
Modal Coordinates
Physical Coordinates
Minimize the contribution by varying actuator position and cavity diameter :
a d
Optimization Strategy
Over-actuation of a wafer chuck
![Page 12: 1 Titel van de presentatie Rein Boshuisen, PME Analysis and Performance of a lightweight over-actuated 450mm wafer chuck R. Boshuisen, PME 09-06-2010](https://reader036.vdocuments.mx/reader036/viewer/2022070307/551a694f5503463e778b5d40/html5/thumbnails/12.jpg)
12Titel van de presentatieModal analysisModal analysisOver-actuation of a wafer chuck
Optimization result I
![Page 13: 1 Titel van de presentatie Rein Boshuisen, PME Analysis and Performance of a lightweight over-actuated 450mm wafer chuck R. Boshuisen, PME 09-06-2010](https://reader036.vdocuments.mx/reader036/viewer/2022070307/551a694f5503463e778b5d40/html5/thumbnails/13.jpg)
13Titel van de presentatie
184 Hz 270 Hz 270 Hz
349 Hz 521 Hz
Actuator location
Green zero displacement
Eigenmodes of a chuck
Over-actuation of a wafer chuck
![Page 14: 1 Titel van de presentatie Rein Boshuisen, PME Analysis and Performance of a lightweight over-actuated 450mm wafer chuck R. Boshuisen, PME 09-06-2010](https://reader036.vdocuments.mx/reader036/viewer/2022070307/551a694f5503463e778b5d40/html5/thumbnails/14.jpg)
14Titel van de presentatieModal analysisModal analysisOver-actuation of a wafer chuck
Optimization result II
![Page 15: 1 Titel van de presentatie Rein Boshuisen, PME Analysis and Performance of a lightweight over-actuated 450mm wafer chuck R. Boshuisen, PME 09-06-2010](https://reader036.vdocuments.mx/reader036/viewer/2022070307/551a694f5503463e778b5d40/html5/thumbnails/15.jpg)
15Titel van de presentatieModal analysisModal analysisOver-actuation of a wafer chuck
Optimization result II
![Page 16: 1 Titel van de presentatie Rein Boshuisen, PME Analysis and Performance of a lightweight over-actuated 450mm wafer chuck R. Boshuisen, PME 09-06-2010](https://reader036.vdocuments.mx/reader036/viewer/2022070307/551a694f5503463e778b5d40/html5/thumbnails/16.jpg)
16Titel van de presentatie
Wafer chuck demonstrator motions in Z, Rx, and Ry
Z
Y
X
Three linear encoders
Folded Flexures (3x),
Fixing Rz, X and Y Actuator assembly (5x)
Frame
Modal analysisModal analysis
Realized Test Setup
Over-actuation of a wafer chuck
![Page 17: 1 Titel van de presentatie Rein Boshuisen, PME Analysis and Performance of a lightweight over-actuated 450mm wafer chuck R. Boshuisen, PME 09-06-2010](https://reader036.vdocuments.mx/reader036/viewer/2022070307/551a694f5503463e778b5d40/html5/thumbnails/17.jpg)
17Titel van de presentatie
Conventional actuation around COG
Over-actuation around COG
Realized Test Setup
Over-actuation of a wafer chuck
![Page 18: 1 Titel van de presentatie Rein Boshuisen, PME Analysis and Performance of a lightweight over-actuated 450mm wafer chuck R. Boshuisen, PME 09-06-2010](https://reader036.vdocuments.mx/reader036/viewer/2022070307/551a694f5503463e778b5d40/html5/thumbnails/18.jpg)
18Titel van de presentatieModal analysisModal analysisOver-actuation of a wafer chuck
Measured Result I
![Page 19: 1 Titel van de presentatie Rein Boshuisen, PME Analysis and Performance of a lightweight over-actuated 450mm wafer chuck R. Boshuisen, PME 09-06-2010](https://reader036.vdocuments.mx/reader036/viewer/2022070307/551a694f5503463e778b5d40/html5/thumbnails/19.jpg)
19Titel van de presentatieModal analysisModal analysisOver-actuation of a wafer chuck
Measured Result II
![Page 20: 1 Titel van de presentatie Rein Boshuisen, PME Analysis and Performance of a lightweight over-actuated 450mm wafer chuck R. Boshuisen, PME 09-06-2010](https://reader036.vdocuments.mx/reader036/viewer/2022070307/551a694f5503463e778b5d40/html5/thumbnails/20.jpg)
20Titel van de presentatie
Control of the chuck
ChuckDynamics
Loc ->CoGActuation matrix
3 PID controllers
3 Sensors
Z
RX
RY
Control with standard industrial controller Bosch-RexRoth NYCe 4000
Over-actuation of a wafer chuck
![Page 21: 1 Titel van de presentatie Rein Boshuisen, PME Analysis and Performance of a lightweight over-actuated 450mm wafer chuck R. Boshuisen, PME 09-06-2010](https://reader036.vdocuments.mx/reader036/viewer/2022070307/551a694f5503463e778b5d40/html5/thumbnails/21.jpg)
21Titel van de presentatie
Performance of the setup
Conventional Over-ActuatedBandwidths:
ZRXRY
50 Hz60 Hz50 Hz
102 Hz100 Hz100 Hz
Standstill Performance RMS
ZRXRY
30 nm 150 nrad135 nrad
7 nm35 nrad30 nrad
Factor 2 in bandwidth, 4 in stiffness
Factor 5 improvement
Over-Actuation shows clear benefits compared to conventional actuation!
Over-actuation of a wafer chuck
![Page 22: 1 Titel van de presentatie Rein Boshuisen, PME Analysis and Performance of a lightweight over-actuated 450mm wafer chuck R. Boshuisen, PME 09-06-2010](https://reader036.vdocuments.mx/reader036/viewer/2022070307/551a694f5503463e778b5d40/html5/thumbnails/22.jpg)
22Titel van de presentatieModal analysisModal analysisOver-actuation of a wafer chuck
Why still excitation of the modes??
![Page 23: 1 Titel van de presentatie Rein Boshuisen, PME Analysis and Performance of a lightweight over-actuated 450mm wafer chuck R. Boshuisen, PME 09-06-2010](https://reader036.vdocuments.mx/reader036/viewer/2022070307/551a694f5503463e778b5d40/html5/thumbnails/23.jpg)
23Titel van de presentatie
• Improved model
• No Symmetry – Possible causes• Actuator 5• Gravity Compensators• Plate springs• Chuck
The analysis only partially explains the mode excitations
Over-actuation of a wafer chuck
Mode excitation analysis
![Page 24: 1 Titel van de presentatie Rein Boshuisen, PME Analysis and Performance of a lightweight over-actuated 450mm wafer chuck R. Boshuisen, PME 09-06-2010](https://reader036.vdocuments.mx/reader036/viewer/2022070307/551a694f5503463e778b5d40/html5/thumbnails/24.jpg)
24Titel van de presentatie
• Sensor-placement / Over-Sensing
Over-actuation of a wafer chuck
Improvements of the current setup
![Page 25: 1 Titel van de presentatie Rein Boshuisen, PME Analysis and Performance of a lightweight over-actuated 450mm wafer chuck R. Boshuisen, PME 09-06-2010](https://reader036.vdocuments.mx/reader036/viewer/2022070307/551a694f5503463e778b5d40/html5/thumbnails/25.jpg)
25Titel van de presentatie
Control of the chuck
ChuckDynamics
Loc ->CoGActuation matrix
3 PID controllers
3 Sensors
Z
RX
RY
Control with: Matlab/Simulink, using xPc Target software
Over-actuation of a wafer chuck
![Page 26: 1 Titel van de presentatie Rein Boshuisen, PME Analysis and Performance of a lightweight over-actuated 450mm wafer chuck R. Boshuisen, PME 09-06-2010](https://reader036.vdocuments.mx/reader036/viewer/2022070307/551a694f5503463e778b5d40/html5/thumbnails/26.jpg)
26Titel van de presentatie
Adjust Sensorposition such, that the excitation of the modes is not converted to CoG movement
• Place sensor in a node
• Symmetric sensor placement
Over-actuation of a wafer chuck
Over-Sensing
![Page 27: 1 Titel van de presentatie Rein Boshuisen, PME Analysis and Performance of a lightweight over-actuated 450mm wafer chuck R. Boshuisen, PME 09-06-2010](https://reader036.vdocuments.mx/reader036/viewer/2022070307/551a694f5503463e778b5d40/html5/thumbnails/27.jpg)
27Titel van de presentatieOver-actuation of a wafer chuck
Over-Sensing
![Page 28: 1 Titel van de presentatie Rein Boshuisen, PME Analysis and Performance of a lightweight over-actuated 450mm wafer chuck R. Boshuisen, PME 09-06-2010](https://reader036.vdocuments.mx/reader036/viewer/2022070307/551a694f5503463e778b5d40/html5/thumbnails/28.jpg)
28Titel van de presentatie
• This sensor placement can distinguish the first and second eigenmode from the rigid body movement
• Active damping of first eigenmode!
Over-actuation of a wafer chuck
Over-Sensing
![Page 29: 1 Titel van de presentatie Rein Boshuisen, PME Analysis and Performance of a lightweight over-actuated 450mm wafer chuck R. Boshuisen, PME 09-06-2010](https://reader036.vdocuments.mx/reader036/viewer/2022070307/551a694f5503463e778b5d40/html5/thumbnails/29.jpg)
29Titel van de presentatie
Conventional Over-Actuated + first mode active damping
Bandwidths:ZRXRY
100 Hz100 Hz100 Hz
200 Hz150 Hz150 Hz
Standstill Performance RMS
Sensor 1Sensor 2Sensor 3Sensor 4
4.0 nm5.8 nm4.6 nm4.6 nm
1.8 nm1.9 nm1.9 nm1.9 nm
Over-actuation of a wafer chuck
Over-Sensing - Performance
![Page 30: 1 Titel van de presentatie Rein Boshuisen, PME Analysis and Performance of a lightweight over-actuated 450mm wafer chuck R. Boshuisen, PME 09-06-2010](https://reader036.vdocuments.mx/reader036/viewer/2022070307/551a694f5503463e778b5d40/html5/thumbnails/30.jpg)
30Titel van de presentatie
• Over-actuation is succesfully implemented on a wafer chuck with an increased performance as result.
• Symmetry is critical for the positions of the nodelines on the diagonals
• Include sensor position optimization in the design phase
• Use four sensors to be able to actively damp the first eigenmode
Over-actuation of a wafer chuck
Conclusion
![Page 31: 1 Titel van de presentatie Rein Boshuisen, PME Analysis and Performance of a lightweight over-actuated 450mm wafer chuck R. Boshuisen, PME 09-06-2010](https://reader036.vdocuments.mx/reader036/viewer/2022070307/551a694f5503463e778b5d40/html5/thumbnails/31.jpg)
31Titel van de presentatie
Rein Boshuisen, PME
Analysis and Performance of a lightweight over-actuated 450mm wafer chuck
R. Boshuisen, PME09-06-2010
![Page 32: 1 Titel van de presentatie Rein Boshuisen, PME Analysis and Performance of a lightweight over-actuated 450mm wafer chuck R. Boshuisen, PME 09-06-2010](https://reader036.vdocuments.mx/reader036/viewer/2022070307/551a694f5503463e778b5d40/html5/thumbnails/32.jpg)
32Titel van de presentatieOver-actuation of a wafer chuck
![Page 33: 1 Titel van de presentatie Rein Boshuisen, PME Analysis and Performance of a lightweight over-actuated 450mm wafer chuck R. Boshuisen, PME 09-06-2010](https://reader036.vdocuments.mx/reader036/viewer/2022070307/551a694f5503463e778b5d40/html5/thumbnails/33.jpg)
33Titel van de presentatie
Dynamic Analysis – effect of rotated chuck
Over-actuation of a wafer chuck
![Page 34: 1 Titel van de presentatie Rein Boshuisen, PME Analysis and Performance of a lightweight over-actuated 450mm wafer chuck R. Boshuisen, PME 09-06-2010](https://reader036.vdocuments.mx/reader036/viewer/2022070307/551a694f5503463e778b5d40/html5/thumbnails/34.jpg)
34Titel van de presentatie
Dynamic Analysis – effect of Gravity Compensator
Over-actuation of a wafer chuck
![Page 35: 1 Titel van de presentatie Rein Boshuisen, PME Analysis and Performance of a lightweight over-actuated 450mm wafer chuck R. Boshuisen, PME 09-06-2010](https://reader036.vdocuments.mx/reader036/viewer/2022070307/551a694f5503463e778b5d40/html5/thumbnails/35.jpg)
35Titel van de presentatie
Damping
• Chuck is very lightly damped, increasing damping, reduces maximum peak-hight, leading to less sensitivity of the actuator placement
Over-actuation of a wafer chuck