¥ t È!¡mÇ ïeôg¥ 2 82ô&c g¥ 2 82ô&c 6 au2ç0 1 ;u5 ;ùuv+g,Ã. +e) )Å,×>...

& UV LCD

UV UV

“ ”

& UV

10

LCD

UV

UV

LCD

UV

UV

UV UV

UV

: (82)032-681-2117 : (82)032-681-2118 : (82) 10-5555-8605 [email protected]

: (86)0755-36815080 : (86)0755-36815100 : (86) 1392-842-3211 [email protected]

周小姐

254nm, 303nm, 405nm, 436nm UV 365nm

60W/cm, 80W/cm, 120W/cm, 160W/cm

(Courts

UV

UV (mm) (mm) (mm)

(W)

(V)

(A)

60W/cm

MT-HHL-4500/B-FS 826 700 24.5 4500 780 6.8

MT-HHL-6600/B-FS 1226 1100 24.5 6600 1140 6.8

MT-HHL-9000/B-FS 1526 1400 24.5 9000 1560 6.8

MT-HHL-9600/B-FS 1726 1600 24.5 9600 1660 6.8

80W/cm

MT-HHL-5600/C-FS 826 700 24.5 5600 950 7.2

MT-HHL-8800/C-FS 1226 1100 24.5 8800 1430 7.2

MT-HHL-11.2K/C-FS 1526 1400 24.5 11200 1830 7.2

MT-HHL-12.8K/C-FS 1726 1600 24.5 12800 2090 7.2

100W/cm

MT-HHM-7000/D-FS 826 700 24.5 7000 950 8.7

MT-HHM-8000/D-FS 926 800 24.5 8000 1080 8.7

MT-HHM-11.0K/D-FS 1226 1100 24.5 11000 1485 8.7

MT-HHM-14.0K/D-FS 1526 1400 24.5 14000 1900 8.7

MT-HHM-16.0K/D-FS 1726 1600 24.5 16000 2160 8.7

120W/cm

MT-HHM-8400/E-FS 826 700 27.5 8400 950 10.4

MT-HHM-9600/E-FS 926 800 27.5 9600 1080 10.4

MT-HHM-13.2K/E-FS 1226 1100 27.5 13200 1485 10.4

MT-HHM-16.8K/E-FS 1526 1400 27.5 16800 1900 10.4

MT-HHM-19.2K/E-FS 1726 1600 27.5 19200 2160 10.4

160W/cm

MT-HHM-4000/G-FS 400 250 27.5 4000 360 12.2

MT-HHM-6400/G-FS 550 400 27.5 6400 580 12.2

MT-HHM-8000/G-FS 650 520 27.5 8000 750 11.8

MT-HHM-10.0K/G-FS 775 620 27.5 10000 940 11.8

MT-HHM-11.2K/G-FS 850 700 27.5 11200 1050 11.8

UV 265nm-420nm UV

LCD PDP

1. - - 100~2000W 598nm (535nm) (435nm) 2. - 100~ 2000W 3. - 50~3500W 4.

5. UV

200 300 400 500 600 700 800 (nm)

0

4000

3000

2000

1000

(counts)

UV

UV (mm) (mm) (mm)

(W) (V) (A)

80W/cm

MT-MM-3000/C-FS 475 375 24.5 3000 325 10.3

MT-ML-4000/C-FS 600 500 24.5 4000 650 6.8

MT-MM-5000/C-FS 700 600 24.5 5000 650 8.5

MT-MM-6000/C-FS 850 750 24.5 6000 650 10.3

MT-ML-8000/C-FS 1100 1100 24.5 8000 1300 6.8

MT-MM-10.0K/C-FS 1350 1250 24.5 10000 1300 8.5

MT-MM-11.0K/C-FS 1500 1400 24.5 11000 1300 9.4

MT-MM-12.0K/C-FS 1600 1500 24.5 12000 1300 10.3

MT-MM-13.0K/C-FS 1700 1600 24.5 13000 1300 11.1

MT-MM-15.0K/C-FS 1950 1850 24.5 15000 1300 12.8

MT-MM-16.0K/C-FS 2100 2000 24.5 16000 1625 10.9

MT-MM-18.0K/C-FS 2350 2250 24.5 18000 1625 12.3

120W/cm

MT-MM-3000/E-FS 376 250 24.5 3000 380 9.3

MT-MM-4500/E-FS 475 375 24.5 4500 650 7.7

MT-MM-6000/E-FS 626 500 24.5 6000 760 9.3

MT-MM-8400/E-FS 826 700 24.5 8400 1070 9.8

MT-MM-9600/E-FS 926 800 24.5 9600 1220 9.3

MT-MM-11.0K/E-FS 1000 900 24.5 11000 1300 9.4

MT-MM-12.0K/E-FS 1100 1000 24.5 12000 1300 10.3

MT-MM-13.0K/E-FS 1200 1100 24.5 13000 1300 11.1

MT-MM-15.0K/E-FS 1350 1250 24.5 15000 1300 12.8

MT-MM-16.0K/E-FS 1500 1400 24.5 17000 1625 11.6

MT-MM-17.0K/E-FS 1600 1500 24.5 18000 1625 12.3

MT-MM-20.0K/E-FS 1700 1600 24.5 20000 1950 11.4

** 160W/cm UV **

UV E-UV

E-UV

UV

E-UV Excimer ” excited dimer

Xe + Xe* = Xe2* (Excimer)

UV UV

120nm 380nm UV UV

UV

E-UV

172nm 185nm

1~5mm 1~100mm

1/10 1

( )

1.

2. LCD TFT cell C/F

3.

4.

E-UV

1. 2. 3. 4. 5. 6.

E-UV

UV

MOUMTECH USHIO GENERATION MT-VEX440V 3G

MT-VEX460V 3G

MT-VEX542U UEM110L 3G


MT-VEX802U UEM800K 3G


MT-VEX840U UEM840S 3G




MT-VEX1400U UEM1400J 5G

MT-VEX1600U UEM1600T 6G

UEM2030N 7G

UV 10nm-400nm

UV

1. 10 ~ 60nm ( )

60 ~ 120nm liman ray

120 ~ 200nm :

200 ~ 280nm : UV-C

280 ~ 320nm : UV-B

320 ~ 400nm : UV-A

2.

� (184.9nm) UV 184.9nm “O2”

“O3”

� (253.7nm)

� (297nm) UV

� (365nm)

UV4.

�

PH

�

�

UV

UV (UV/O3 )

253.7nm 184.nm

184.9nm UV

UV UV

(1)

(2)

UV

UV

UV

UV

UV

UV

50-1000W

UV

1.

PCB LCD

UV

300 350 400 450 500 550 600 650 700 750nm

150W

250W

2KW

UV2.

UV

Pin Pin

480W ~ 2.1KW

RTP

220V 480W RTP

Pin Pin

220V, 2.1KW

RTP

220V, 500W RTP

U Pin

220V, 1.2KW

X

220V, 1KW ~ 6KW RTP

I I

220V, 2KW

RTP

220V, 3KW RTP

220V, 2KW ~ 6KW

220V, 2KW

220V, 3KW

220V, 6KW

I L

220V, 3KW

220V 2KW

U U

220V 1KW~ 5KW

PDP LCD

220V 1KW PDP LCD

30~1000W

(V) (W) (mm) (mm) (lm) ( K) ( )

HK280-C 80 280 348 6 5880 3000 200,000

HK405-C 80 405 346 8 8400 3000 200,000

HK450-C 80 450 302 8 9450 3000 200,000

HK250-C 85 250 302 6 5250 3000 200,000

* F : Ferrule contact S : Screw terminal

115V 120V

(V) (W) (° K) Base Feature

FGM 120 1000 3200 F.S Day light spot

FGN 120 1000 3200 F.S Day light uniflood

FFN 120 1000 3200 F.S Spot light

FFR 120 1000 3200 F.S Uniflood light

FGE 120 650 3200 F.S Day light spot

FBE 120 650 3200 F.S Day light uniflood

FBO 120 650 3200 F.S Spot light

FAY,DWE 120 650 3200 F.S Uniflood light

line voltage 50 Hour lamp 25 Hour lamp 15 Hour lamp 10 Hour lamp

115-120V 38-65hrs 19-32hrs 12-18hrs 7-13hrs

121-125V 23-39 11~20 7~12 4~7

126-130V 14-23 5~12 3~7 0~4

UV

1. PCB

PCB

2. LCD

LCD

3. UV

4. UV

1.5KW( )UV U UV

UV

General specification

Outer size mm(L) × mm(W) × mm(H)

Loading type Roll or Conveyor

Drying speed 0 ~ 10 m/min

Drying width mm ~ mm(Customer option) Customer option according to product

Conveyor belt Mesh or SUS Carbon coating belt or anti-electrostatic

removal belt

System control Manual or sequence

Exhaust type Fan

UV lamp

lamp Mercury or metal lamp etc Customer option according to product

Quantity 1 ~ Customer option according to product

Overall length 100mm ~ several hundred mm according to product

Arc length According to product

Power intensity mm ~ mm According to product

wavelength 250 ~ 420nm

(main wavelength: 365nm)

Cooling type Forced air cooling

Power 220V or 380V, 1P or 3P, 50Hz or 60 Hz Customer option

Color Standard Ivory or customer option Customer option

1.

2.

3.

4. UV UV

5. PC

6.

MOUM UV-R515 UV

UV

MODEL MOUM UV-R515

SIZE 1160(L) x 910(W) x 1650(H)

WEIGHT 700 KG

COLOR IVORY & BLUE

Application WAFER & PCB (the industrial area of sing Dicing Tape)

Application way Full Auto – cassette loading by the worker

Irradiation way Rotary shutter

UV lamp Cooling Blower type - �80, �100 AL DUCT

Machine Control PC

Irradiation size 6”, 8” ,12”

Conveyor Gripper & Guide Rail

Lamp High pressure mercury lamp or Metal halide lamp

Lamp Quantity 1ea

Voltage 620V 7A 4.2 KW (can make it under customer option)

Wave length 365 nm (UVA)

Lamp Overall 450 mm (can make it under customer option)

Arc length 350 mm (can make it under customer option)

UV intensity 70~120 mw/cm2 (can make it under customer option)

Deviation ±20%

Electricity AC 220V, 50A, 50/60HZ, 1P

UVUV

MODEL MOUMUV-F525

SIZE 1160(L) x 910(W) x 1650(H)

WEIGHT 700 KG

COLOR IVORY & BLUE


Application way Full Auto In-Line – AGV Cassette loading

Full Auto – cassette loading by the worker



Machine Control PC

Irradiation size 6”, 8” ,12”


lamp High pressure mercury lamp or Metal halide lamp

Lamp Quantity 1ea






Deviation ±20%


UVUV

MOUM – Auto UV S535 Scan Irradiator (Scan Type)

MOUMUV-S535 UV

UV

1. UV

2. 8”, 12”

3.

4.

5. UV UV

6. PC

7.

MODEL MOUMUV-S535

SIZE 1160(L) x 910(W) x 1650(H)

WEIGHT 1000 KG

COLOR IVORY & BLUE


Application way Full Auto – cassette loading by the worker

Irradiation way Rotary shutter – Scanning type


Machine Control PC

Irradiation size 8” ,12”



Lamp Quantity 1ea






Deviation ±20%

Electricity AC 220V, 50A, 50/60HZ, 1P, UPS Equipped

UVUV

MOUM UV S535

MOUM – INLINE FLOW UV IN545 Irradiator

MOUMUV-IN545 UV

UV

1.

2.

3.

4.

5. UV UV

6. PC

7.

MODEL MOUMUV-IN 545

SIZE 1580(L) x 850(W) x 1600(H)

WEIGHT 700 KG

COLOR IVORY & BLUE


Application way Full Auto in line conveyor system – cassette loading by the worker



Machine Control PC




Lamp Quantity 1ea






Deviation ±20%

Electricity AC 220V, 50A, 50/60HZ, 1P, UPS Equipped

UVUV

MOUM – Semi Auto Manual UV Irradiator

MOUMUV-M555 UV

UV

1.

2.

3. UV

4.

MODEL MOUMUV-M 555

SIZE 750(L) x 700(W) x 1300(H)

WEIGHT 250 KG

COLOR IVORY & BLUE


Application way Semi Auto loading by the worker



Machine Control PLC


Conveyor Cabinet feeder


Lamp Quantity 1ea






Deviation ±20%


UVUV

UV

PCB FPCB 5KW

- 1300 mm X 2870 mm X 2250mm- Rigid / FPCB- 550mm X 650mm- Thickness 3.2mm- Manual type- 5kW Mercury Short Arc Lamp

Size (W*D*H) 1300 mm X 2870 mm X 2250mm

Application Rigid / FPCB

Working Size ~ 550mm X 650mm

Thickness Thickness 3.2mm

Lamp 5 kW Mercury Short Arc lamp, 1 EA

Intensity 25 mW ( 90% Uniformity)

Collimation Angle Within ± 1.5°

Declination Angle Within ± 1.5°

Contact Hard Contact / Soft Contact

Power 220V, 50 ~60 HZ, 3� 10kW

Monitor LCD Monitor

Option Chiller

UV Size (W*D*H) 1390mm X 3020mm X 2154mm

Application Rigid PCB Inner Layer

Working Size 250mm X 300mm ~ 550mm X 650mm


Lamp 5 kW Mercury Short Arc lamp, 1pc




Contact Hard Contact

Align Method 2 Camera

Align Accuracy 10um(soft contact), 15um(hard contact)

Power 220V, 50 ~60 HZ, 3� 10kW

Monitor 15“ Touch screen LCD Monitor

Option Chiller

UV

PCB

- 2650mm X 1730mm X 2320mm- PCB Inner Layer (Dry Film)- 250mm X 300mm ~ 550mm X 650mm- Thickness 3.2mm- 8kW Metal halide Lamp- 2650mm X 1730mm X 2320mm

PCB 8KW


Application Rigid PCB Inner Layer (Dry Film)



Tact time 1 shot / 18 SEC (45mJ)

Lamp 8 kW Metal halide Lamp, 2 EA





Power 220V, 50 ~60 HZ, 3� 25kW


Option Chiller











Power 220V, 50 ~60 HZ, 3� 25kW


Option Chiller

PCB

- 2650mm X 2000mm X 2320mm- PCB Inner Layer (Dry Film)- 250mm X 300mm ~ 550mm X 650mm- Thickness 3.2mm- 5kW Mercury Short Arc, 2pcs- 2650mm X 2000mm X 2320mm

UVUV

PCB

PCB

- 4500mm X 2250mm X 2400mm- Rigid PCB Solder Mask- 250mm X 300mm ~ 550mm X 650mm- Thickness 3.2mm- 8kW Mercury Short Arc lamp- 4500mm X 2250mm X 2400mm

Size (W*D*H) 4500mm X 2250mm X 2400mm

Application Rigid PCB Solder Mask




Lamp 8 kW Metal halide Lamp, 2pc





Align Method 2 or 4 Camera


Power 220V, 50 ~60 HZ, 3� 20kW


Option Chiller

Cleaner(Input side)

PCB

- 3200mm X 1810mm X 2400mm- Rigid PCB Out Layer(Dry Film)- 250mm X 300mm ~ 550mm X 650mm- Thickness 3.2mm- 3200mm X 1810mm X 2400mm- Rigid PCB Out Layer(Dry Film)











Power 220V, 50 ~60 HZ, 3� 25kW


Option Chiller

Cleaner

UVUV

PCB

- 2400mm X 1700mm X 2000mm- Roll type Flexible PCB, Out Layer- Width: 250mm, Area: 410mm X 260mm- Under 0.3mm- 2400mm X 1700mm X 2000mm- Roll type Flexible PCB, Out Layer


Application Roll type Flexible PCB, Inner Layer

Working Size Width: 250mm, Area: 410mm X 260mm

Thickness Under 0.3mm


Lamp 5kW Mercury Short Arc lamp, 1pc





Align Method 2 CCD Camera

Align Accuracy Under 50um

Power 220V, 50 ~60 HZ, 3� 10kW

Monitor 12.1“ Touch screen LCD Monitor

Option Chiller

- 2400mm X 1700mm X 2000mm- Roll type Flexible PCB, Inner Layer- Width: 250mm, Area: 410mm X 260mm- Under 0.3mm- 2400mm X 1700mm X 2000mm- Roll type Flexible PCB, Inner Layer


Application Roll type Flexible PCB, Out Layer

Working Size Width: 250mm, Area: 410mm X 260mm

Thickness Under 0.3mm


Lamp 5 kW Mercury Short Arc lamp, 1pc

Intensity 35mW ( 90% Uniformity)





Align Accuracy Under 10um

Power 220V, 50 ~60 HZ, 3� 10kW


Option Chiller

UVUV

- 2340 mm X 1840 mm X 2000mm- PCB/GLASS Inner Layer (Dry Film)- 250mm X 300mm ~420mm X 520mm- Thickness 3.2mm


Application PCB/GLASS Inner Layer (Dry Film)

Working Size 250mm X 300mm ~420mm X 520mm



Lamp 5 kW Mercury Short Arc lamp, 2 EA







Power 220V, 50 ~60 HZ, 3� 18kW


Option Chiller

Cleaner

UVUV

- 1000mm X 1000mm X 1600mm- Mask Aligner, LAB- ~150mm X 150mm


Application Mask Aligner, LAB

Working Size ~150mm X 150mm


Lamp 210W Mercury Short Arc lamp, 1pc




Contact Hard Contact / Soft Contact / Proximity


Align Accuracy Eye To Monitor

Power 220V, 50 ~60 HZ, 1� 1.5kW

Monitor 2 CRT Monitor

Option Optic Band Filter

UVUV

TFT-LCD

&

UV

INNO CURE 100N

UV

UV

Description Specification UV Lamp 100 W High pressure mercury lamp Control Microprocessor control Lamp Life time 2,500 - 3,000 Hr. UV Intensity Approx. 2,000 mW/Cm2 @ 365 nm (peak) Total UV Output Energy Approx. 3,000 mW/Cm2 (250 nm ~ 450 nm)

Light Guide

5 mm (f) x 1 m (L) liquid light guide 1 Branch Standard 5 mm (f) x 2 m (L) liquid light guide 1 Branch

Option 3 mm (f) x 1 m (L) liquid light guide 1 Branch 3 mm (f) x 1 m (L) liquid light guide 2 Branch 3 mm (f) x 1 m (L) liquid light guide 3 Branch 3 mm (f) x 1 m (L) liquid light guide 4 Branch Custom specification are also available.

Warming up time 2 minute

Mode Adjustment Auto Mode a Manual Mode a Pulse Mode a Operation Time a Turn On Times, Timer Set Mode

Operation Modes

Auto Mode Shutter control by memorized time

Standard Manual Mode Shutter control by manual

Pulse Mode Periodic Shutter control by memorized time interval

Power Supply Stabilized power supply by microprocessor control. Support of constant light output

Lamp On/Off switch The lamp are activated as On and Off separately with main power Foot Switch Foot switch for Shutter On/Off Remote Remote (External) control and monitoring by PLC or Automation system (5 ~ 24V contact)

control interface

Control Signal (External

unit)

1) Remote On/Off System power on/off by external command

Standard

2) Lamp On Lamp On command 3) Lamp Off Lamp Off command 4) Shutter Open Shutter open command 5) Shutter Close Shutter close command

Status Signal (External

unit)

1) Stand By signal After Warming up 2) Lamp lit on signal Lamp On status 3) Lamp ignition fail signal Lamp Igniting status 4) Shutter error Shutter Open / Close status 5) Door open error Door open / close status 6) Over temperature error System temperature status

Serial Interface RS-232C Serial communication Dimension 160(H) x 250(W) x 250(D) mm Weight 5 kgs Power Input Free voltage 100 - 230 Volts, 1P3W, 50 / 60Hz Power Consumption 100 Watt Safety Automatic power off feature when cover opened or overheated during system operation

UV

INNO-CURE 850~1500N

Description Specification

UV Lamp 100 W High pressure mercury lamp

Control Microprocessor control

Lamp Life time 2,500 - 3,000 Hr.

UV Intensity Approx. 2,000 mW/Cm2 @ 365 nm (peak)

Total UV Output Energy Approx. 3,000 mW/Cm2 (250 nm ~ 450 nm)

Light Guide

5 mm (f) x 1 m (L) liquid light guide 1 Branch Standard

5 mm (f) x 2 m (L) liquid light guide 1 Branch

Option





Custom specification are also available.

UVModel INNO-CURE 850 P INNO-CURE 850 R INNO-CURE 1500 P INNO-CURE 1500 R

UV Irradiation Direction Perpendicular type Reflection type Perpendicular type Reflection type Controller & Lamp Housing One body One body Separate body Separate body

Lamp High pressure mercury UV lamp(LTZ 85002 MA) High pressure mercury UV lamp (LTZ 85000 FUA)

Lamp Lifetime 1500 Hr

UV Intensity 10,000 mW/cm2 at 365nm

UV Intensity with Rod unit

Hexag-onal 135nm

365nm 160mW/cm2 @380mm 130mW/cm2 @260mm 220mW/cm2 @ 260mm 175mW/cm2 @ 260mm


Quadr-angular 70nm



Quadr-angular 50nm



adjustment 63 Step

System Control Microprocessor control

Shutter control Auto mode/ Manual mode (Stepping motor control)

Timer : 0.1 Sec ~ 999.9 Sec ( 0.1 Sec interval)

Cooling Forced air cooling

Remote control and monitoring by PLC or Automation system (5 ~ 24V contact by photo-coupler)

External Interface

Input signal

Lamp On/Off

Manual/Remote selection

Shutter Open/Close

Intensity control

Timer reset

Output signal

Lamp On/Off status

Lamp stabilization status

lamp lifetime status

Shutter Open/Close status

Ignition fail error

Door open error

Temperature error

Shutter error

Shutter orientation fail error

Iris orientation fail errorAnd, various errors

Operation Modes Manual Mode System control by manual

Remote Mode System control by peripheral equipments such as PLC, Industrial PC, etc.

Warming up time 5 minute

UV

Power Supply Stabilized power supply by microprocessor control.

Support of constant light output

Safety

Door interlock

Thermal fuse

Air filter

Dimension 250(W) x 350(D) x 550(H)

Operation condition Temperature : 5 ~ 35 C, Humidity : less than 70%

Power Input AC110 / 220V ±10%, 50/60HZ

Weight Approx. 25 kg Approx. 30 kg

Rod lens type Wavelength INNO-CURE 850 P Height INNO-CURE 850 R Height

Hexagon 135nm 365 nm 160 mW/cm2 380 mm 130 mW/cm2 260 mm

405 nm 280 mW/cm2 380 mm 220 mW/cm2 260 mm

Quadrangular 70nm 365 nm 380 mW/cm2 90 mm 300 mW/cm2 90 mm

405 nm 600 mW/cm2 90 mm 480 mW/cm2 90 mm


405 nm 900 mW/cm2 90 mm 720 mW/cm2 90 mm

* Above specification can be changed without notification for our quality improvement.

UVRod lens type Wavelength INNO-CURE 850 P Height INNO-CURE 850 R Height

Hexagon 135nm 365 nm 160 mW/cm2 380 mm 130 mW/cm2 260 mm

405 nm 280 mW/cm2 380 mm 220 mW/cm2 260 mm


405 nm 600 mW/cm2 90 mm 480 mW/cm2 90 mm


405 nm 900 mW/cm2 90 mm 720 mW/cm2 90 mm

FPD

DVD UV

UV ( , )

UV

UV Models Accessory Main Application

INNO CURE 100 N Liquid Light Guide, Foot Switch, RS-232, Remote I/O Various UV Bonding, Adhesive applications

INNO CURE 150 Liquid Light Guide, Foot Switch Various UV Bonding, Adhesive applications

INNO CURE 300 Liquid Light Guide, RS-232, Remote I/O Various UV Bonding, Adhesive applications

INNO CURE 850 P Rod Lens, Liquid Light Guide, Remote I/O Wafer exposure, DVD bonding, FPD edge exposure, UV Cure

INNO CURE 850 R Rod Lens, Liquid Light Guide, Remote I/O Wafer exposure, DVD bonding, FPD edge exposure, UV Cure

INNO CURE 1500 P Rod Lens, Liquid Light Guide, Remote I/O Wafer exposure, DVD bonding, FPD edge exposure, UV Cure

INNO CURE 1500 R Rod Lens, Liquid Light Guide, Remote I/O Wafer exposure, DVD bonding, FPD edge exposure, UV Cure

¥ t È!¡mÇ ïeôg¥ 2 82ô&c g¥ 2 82ô&c 6 au2ç0 1 ;u5 ;ùuv+g,Ã. +e) )Å,×>...

Documents