.. 1

2100 /() 100 2,418

( 10 )( 3 )

+

( ) () ( .. ) (Si-V, N-V) ( , , , )

: (MCD: 500 ) (NCD: 100 )

- . - () /!

: ( )

(CVD)

CVD 30

** h , ;n , -2;d , . 1 108 -2.

100 1010 -2. CVD- 1-2 107 -2

:- - - :Smolin, A.A., Ralchenko, V.G., Pimenov, S.M., Kononenko, T.V. and Loubnin, E.N. (1993) Optical monitoring of nucleation and growth of diamond films, Appl. Phys. Lett. 62, 34493451.

CVD 7.9 . . . . !

2

, , 250-310 , 1

, ; , -.

: [A. Zakhidov et al. Science 282 (1998) 897; M.W. Perpall et al. Langmuir 19(2003)7153] [A. Lan et al. APL 91(2002) 433] [A. Zakhidov et al. Science 282 (1998) 897].

A.A. Zakhidov et al. Science 282 (1998) 897

n = 2,38 (n (SiO2) = 1,45) ( ) / ; ; (Si-V, N-V); 225 ; A. Zakhidov et al. Science 282 (1998) 897

(L = 1 ) . SiO2 . ( 300 ) : (150) CVD

-- ( ~600 ) (

3

J. Riedrich-Mller et al. Nature Nanotechnology 7 (2012), 69.. , .. . 38 (2012), 49

. , . . .. .. ( ) 90- .5 .N = 1011 -2. HF : HNO : CHCOOH (1:1:1)

- MCD: R = 264 , Rrms = 343 .NCD: R = 40 , Rrms = 59 . MCDNCD :MCD - 1,2 NCD - 1

C (1332 -1) MCD

NCD

( ) :MCD - 1,2 () NCD - 1 ()NCDMCD -

, ( ) , 250 .( )

in-situ . . , Si .

() , Mo ( ) ( ). !

, Si , , .

M3 (a) Hy Bayn, I. et al. Processing of photonic crystal nanocavity for quantum information in diamond. Diamond Relat. Mater. 20, 937943 (2011). M1 (a) Hy Kreuzer, C., Riedrich-Mller et al.. Design of photonic crystal microcavities in diamond films. Opt. Express 16, 1632(2008). M7 J. Riedrich-Mller et al. // Nature Nanotechnology 7, 69 (2012).

() - Quanta 3D FEG () : ( ) Ga+: 30 10 100 1 10 2

300 :(1) ; (2) ; (3) 1; (4) 3; (5) 7.

M1, M3 7 (300 ) NCD . 57 2 . 10 .

; , , , (Si-V, N-V .); . , CVD .. . .

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