1

:

:

MEMS . IC . IC . Pico Kg Part per Billion . g/ml

. .

- - -

( PSD ) .

Stoney PSDPSD

: Optical

: Piezoresistive : Piezoelectric

- - : Pt Al . : Optical

- : ZFM5

: Piezoresistive 65 ppb

Alkane Thiol - : Au : Optical- 65 ppb

Hg - : hexanedithiol : Piezoelectric- 20 ppb

pH DNA-RNA Glucose Proteins

.

. () ( 10000) . ppb . ppm . . . [1]- Nanomechanical Cantilever Array Sensors, Hans Peter Lang, Martin Hegner, Christoph Gerber,2[2]- On the Stoney Formula for a Thin Film/Substrate System With Nonuniform Substrate Thickness, X. Feng ,Y. Huang, 2007.[3]- Nanomechanical Cantilever-Based Manipulation for Sensing and Imaging, Nader Jalili, 2013.[4]- Cantilever Sensors: Nanomechanical Tools for Diagnostics, Ram Datar, Seonghwan Kim, Sangmin Jeon,Peter Hesketh, Scott Manalis, Anja Boisen, and Thomas Thundat, 2009.[5]- FABRICATION OF SINGLE WALLED CARBON NANOTUBE (SW-CNT) CANTILEVERS FOR CHEMICAL SENSING, Jui-Ching Hsu, 2007.[6]- A HIGH-SENSITIVE ULTRA-THIN MEMS CAPACITIVE PRESSURE SENSOR, Y. Zhang, R. Howver, 2011